Crystallographic Orientation Dependent Reactive Ion Etching in Single Crystal Diamond

Toward Programmable Quantum Processors Based on Spin Qubits with Mechanically Mediated Interactions and Transport

Solid-state spin qubits are promising candidates for quantum information processing, but controlled interactions and entanglement in large, multiqubit systems are currently difficult to achieve. We describe a method for programmable control of multiqubit spin systems, in which individual nitrogen-vacancy (NV) centers in diamond nanopillars are coupled to magnetically functionalized silicon nitride mechanical resonators in a scanning probe configuration. Qubits can be entangled via interactions with nanomechanical resonators while programmable connectivity is realized via mechanical transport of qubits in nanopillars. To demonstrate the feasibility of this approach, we characterize both the mechanical properties and the magnetic field gradients around the micromagnet placed on the nanobeam resonator. We demonstrate coherent manipulation of a spin qubit in the proximity of a transported micromagnet by utilizing nuclear spin memory and use the NV center to detect the time-varying magnetic field from the oscillating micromagnet, extracting a spin-mechanical coupling of 7.7(9) Hz. With realistic improvements, the high-cooperativity regime can be reached, offering a new avenue toward scalable quantum information processing with spin qubits.

Layer-by-layer thinning of two-dimensional materials

Etching technology - one of the representative modern semiconductor device makers - serves as a broad descriptor for the process of removing material from the surfaces of various materials, whether partially or entirely. Meanwhile, thinning technology represents a novel and highly specialized approach within the realm of etching technology. It indicates the importance of achieving an exceptionally sophisticated and precise removal of material, layer-by-layer, at the nanoscale. Notably, thinning technology has gained substantial momentum, particularly in top-down strategies aimed at pushing the frontiers of nano-worlds. This rapid development in thinning technology has generated substantial interest among researchers from diverse backgrounds, including those in the fields of chemistry, physics, and engineering. Precisely and expertly controlling the layer numbers of 2D materials through the thinning procedure has been considered as a crucial step. This is because the thinning processes lead to variations in the electrical and optical characteristics. In this comprehensive review, the strategies for top-down thinning of representative 2D materials (e.g., graphene, black phosphorus, MoS2, h-BN, WS2, MoSe2, and WSe2) based on conventional plasma-assisted thinning, integrated cyclic plasma-assisted thinning, laser-assisted thinning, metal-assisted splitting, and layer-resolved splitting are covered in detail, along with their mechanisms and benefits. Additionally, this review further explores the latest advancements in terms of the potential advantages of semiconductor devices achieved by top-down 2D material thinning procedures.

Determining the Dependence of Single Nitrogen-Vacancy Center Light Extraction in Diamond Nanostructures on Emitter Positions with Finite-Difference Time-Domain Simulations

In this study, we obtained a diamond nanocone structure using the thermal annealing method, which was proposed in our previous work. Using finite-difference time-domain (FDTD) simulations, we demonstrate that the extraction efficiencies of nitrogen-vacancy (NV) center emitters in nanostructures are dependent on the geometries of the nanocone/nanopillar, emitter polarizations and axis depths. Our results show that nanocones and nanopillars have advantages in extraction from emitter dipoles with s- and p-polarizations, respectively. In our simulations, the best results of collection efficiency were achieved from the emitter in a nanocone with s-polarization (57.96%) and the emitter in a nanopillar with p-polarization (38.40%). Compared with the nanopillar, the photon extraction efficiency of the emitters in the nanocone is more sensitive to the depth and polarization angle. The coupling differences between emitters and the nanocone/nanopillar are explained by the evolution of photon propagation modes and the internal reflection effects in diamond nanostructures. Our results could have positive impacts on the design and fabrication of NV center-based micro- and nano-optics in the future.

Multimodal dynamic and unclonable anti-counterfeiting using robust diamond microparticles on heterogeneous substrate

The growing prevalence of counterfeit products worldwide poses serious threats to economic security and human health. Developing advanced anti-counterfeiting materials with physical unclonable functions offers an attractive defense strategy. Here, we report multimodal, dynamic and unclonable anti-counterfeiting labels based on diamond microparticles containing silicon-vacancy centers. These chaotic microparticles are heterogeneously grown on silicon substrate by chemical vapor deposition, facilitating low-cost scalable fabrication. The intrinsically unclonable functions are introduced by the randomized features of each particle. The highly stable signals of photoluminescence from silicon-vacancy centers and light scattering from diamond microparticles can enable high-capacity optical encoding. Moreover, time-dependent encoding is achieved by modulating photoluminescence signals of silicon-vacancy centers via air oxidation. Exploiting the robustness of diamond, the developed labels exhibit ultrahigh stability in extreme application scenarios, including harsh chemical environments, high temperature, mechanical abrasion, and ultraviolet irradiation. Hence, our proposed system can be practically applied immediately as anti-counterfeiting labels in diverse fields.

The development of microfabricated solenoids with magnetic cores for micromagnetic neural stimulation

Electrical stimulation via invasive microelectrodes is commonly used to treat a wide range of neurological and psychiatric conditions. Despite its remarkable success, the stimulation performance is not sustainable since the electrodes become encapsulated by gliosis due to foreign body reactions. Magnetic stimulation overcomes these limitations by eliminating the need for a metal-electrode contact. Here, we demonstrate a novel microfabricated solenoid inductor (80 µm × 40 µm) with a magnetic core that can activate neuronal tissue. The characterization and proof-of-concept of the device raise the possibility that micromagnetic stimulation solenoids that are small enough to be implanted within the brain may prove to be an effective alternative to existing electrode-based stimulation devices for chronic neural interfacing applications.

Simple way to fabricate orderly arranged nanostructure arrays on diamond utilizing metal dewetting effect

We introduce a simple method with thermal annealing round gold disk for agglomeration to fabricate orderly arranged nanostructure arrays on diamond for single photon source applications. In the annealing process, the dependence of gold sphere size on disk thickness and diameter was investigated, showing that gold sphere diameter was decreased with decreasing gold disk thickness or diameter. The condition parameters of ICP etch were adjusted to obtain different nanostructure morphologies on diamond. The collection efficiency of nitrogen-vacancy (NV) center embedded in nanostructure as-fabricated could reach to 53.56% compared with that of 19.10% in planar case with the same simulation method.

A magnon scattering platform

This work describes a general scattering platform that uses magnons to explore the underlying properties of target materials. In this work we show how both phase and amplitude of magnons can be imaged using a nitrogen vacancy center magnetometer and how the scattered pattern of waves can be used to infer geometric and magnetic properties of a target material. To demonstrate this new experimental methodology we use a permalloy disk as our target and show that even with such a simple target unexpected behavior is observed. In addition, we provide a theoretical framework to reconstruct the properties of the target.

Scattering experiments have revolutionized our understanding of nature. Examples include the discovery of the nucleus [R. G. Newton, Scattering Theory of Waves and Particles (1982)], crystallography [U. Pietsch, V. Holý, T. Baumback, High-Resolution X-Ray Scattering (2004)], and the discovery of the double-helix structure of DNA [J. D. Watson, F. H. C. Crick, Nature 171, 737–738]. Scattering techniques differ by the type of particles used, the interaction these particles have with target materials, and the range of wavelengths used. Here, we demonstrate a two-dimensional table-top scattering platform for exploring magnetic properties of materials on mesoscopic length scales. Long-lived, coherent magnonic excitations are generated in a thin film of yttrium iron garnet and scattered off a magnetic target deposited on its surface. The scattered waves are then recorded using a scanning nitrogen vacancy center magnetometer that allows subwavelength imaging and operation under conditions ranging from cryogenic to ambient environment. While most scattering platforms measure only the intensity of the scattered waves, our imaging method allows for spatial determination of both amplitude and phase of the scattered waves, thereby allowing for a systematic reconstruction of the target scattering potential. Our experimental results are consistent with theoretical predictions for such a geometry and reveal several unusual features of the magnetic response of the target, including suppression near the target edges and a gradient in the direction perpendicular to the direction of surface wave propagation. Our results establish magnon scattering experiments as a platform for studying correlated many-body systems.

Recent Advances in Single Crystal Diamond Device Fabrication for Photonics, Sensing and Nanomechanics

In the last two decades, the use of diamond as a material for applications in nanophotonics, optomechanics, quantum information, and sensors tremendously increased due to its outstanding mechanical properties, wide optical transparency, and biocompatibility. This has been possible owing to advances in methods for growth of high-quality single crystal diamond (SCD), nanofabrication methods and controlled incorporation of optically active point defects (e.g., nitrogen vacancy centers) in SCD. This paper reviews the recent advances in SCD nano-structuring methods for realization of micro- and nano-structures. Novel fabrication methods are discussed and the different nano-structures realized for a wide range of applications are summarized. Moreover, the methods for color center incorporation in SCD and surface treatment methods to enhance their properties are described. Challenges in the upscaling of SCD nano-structure fabrication, their commercial applications and future prospects are discussed.

Fabrication and Characterization of Single-Crystal Diamond Membranes for Quantum Photonics with Tunable Microcavities

The development of quantum technologies is one of the big challenges in modern research. A crucial component for many applications is an efficient, coherent spin-photon interface, and coupling single-color centers in thin diamond membranes to a microcavity is a promising approach. To structure such micrometer thin single-crystal diamond (SCD) membranes with a good quality, it is important to minimize defects originating from polishing or etching procedures. Here, we report on the fabrication of SCD membranes, with various diameters, exhibiting a low surface roughness down to 0.4 nm on a small area scale, by etching through a diamond bulk mask with angled holes. A significant reduction in pits induced by micromasking and polishing damages was accomplished by the application of alternating Ar/Cl₂ + O₂ dry etching steps. By a variation of etching parameters regarding the Ar/Cl₂ step, an enhanced planarization of the surface was obtained, in particular, for surfaces with a higher initial surface roughness of several nanometers. Furthermore, we present the successful bonding of an SCD membrane via van der Waals forces on a cavity mirror and perform finesse measurements which yielded values between 500 and 5000, depending on the position and hence on the membrane thickness. Our results are promising for, e.g., an efficient spin-photon interface.

Imaging viscous flow of the Dirac fluid in graphene

The electron-hole plasma in charge-neutral graphene is predicted to realize a quantum critical system in which electrical transport features a universal hydrodynamic description, even at room temperature^1,2. This quantum critical 'Dirac fluid' is expected to have a shear viscosity close to a minimum bound^3,4, with an interparticle scattering rate saturating¹ at the Planckian time, the shortest possible timescale for particles to relax. Although electrical transport measurements at finite carrier density are consistent with hydrodynamic electron flow in graphene^5-8, a clear demonstration of viscous flow at the charge-neutrality point remains elusive. Here we directly image viscous Dirac fluid flow in graphene at room temperature by measuring the associated stray magnetic field. Nanoscale magnetic imaging is performed using quantum spin magnetometers realized with nitrogen vacancy centres in diamond. Scanning single-spin and wide-field magnetometry reveal a parabolic Poiseuille profile for electron flow in a high-mobility graphene channel near the charge-neutrality point, establishing the viscous transport of the Dirac fluid. This measurement is in contrast to the conventional uniform flow profile imaged in a metallic conductor and also in a low-mobility graphene channel. Via combined imaging and transport measurements, we obtain viscosity and scattering rates, and observe that these quantities are comparable to the universal values expected at quantum criticality. This finding establishes a nearly ideal electron fluid in charge-neutral, high-mobility graphene at room temperature⁴. Our results will enable the study of hydrodynamic transport in quantum critical fluids relevant to strongly correlated electrons in high-temperature superconductors⁹. This work also highlights the capability of quantum spin magnetometers to probe correlated electronic phenomena at the nanoscale.

Influence of surface pre-treatment with mechanical polishing, chemical, electrochemical and ion sputter etching on the surface properties, corrosion resistance and MG-63 cell colonization of commercially pure titanium

The impact of four pre-treatment techniques on the surface morphology and chemistry, residual stress, mechanical properties, corrosion resistance in a physiological saline solution and cell colonization of commercially pure titanium is examined in detail. Mechanical polishing, electrochemical etching, chemical etching in Kroll's reagent, and ion sputter etching with argon ions were applied. Surface morphologies reflect the nature of surface layer removal. Significant roughening of the surface and a characteristic microtopology become apparent as a result of the sensitivity of chemical and ion sputter etching to the grain orientation. The hardness in the near surface region was controlled by the amount of residual stress. Etching of the stressed surface layer led to a reduction in residual stress and surface hardness. A compact passivation layer composed of TiO, TiO₂ and Ti₂O₃ native oxides imparted high corrosion resistance to the surface after mechanical polishing, chemical and electrochemical etching. The ion sputter etched surface showed substantially reduced corrosion resistance, where the corrosion process was controlled by electron transfer. The specific topology affected the adhesion of the cell to the surface rather than the cell area coverage. The cell area coverage increased with the corrosion stability of the surface.

Nanocone Structures Enhancing Nitrogen-Vacancy Center Emissions in Diamonds

In this study, nitrogen-vacancy center emissions from nanocone structures fabricated on diamond surfaces by gold film annealing and inductively coupled plasma etching techniques were characterized. First, the diamond substate deposited with gold film was annealed to form a nano-sized dot mask. Second, through inductively coupled plasma etching, nanocone-shaped structures were fabricated using optimized gold dots as masks. Finally, the as-fabricated nanocone and planar structures were investigated with photoluminescence experiments at temperatures ranging from room temperature to 80 K, with the results showing approximately two-fold higher emission values for nitrogen-vacancy centers from nanocones.

Diamond optical vortex generator processed by ultraviolet femtosecond laser

We propose a precise diamond micromachining method based on ultraviolet femtosecond laser direct writing and a mixed acid heating chemical treatment. The chemical composition of the attached clusters generated during laser ablation and their effects on morphologies were investigated in experiments. The averaged roughness of pristine and processed regions reduced to 0.64 nm and 9.4 nm from 20.5 nm and 37.4 nm, respectively. With this method, spiral zone plates (SZPs) were inscribed on a high-pressure high-temperature diamond surface as micro-optical vortex generators. The optical performances of the diamond SZPs were characterized in both experiments and simulations, which were very consistent with each other. This chemical auxiliary processing method will contribute greatly to the wide application of integration and miniaturization of diamond surface optical components.

Reliable Nanofabrication of Single-Crystal Diamond Photonic Nanostructures for Nanoscale Sensing

In this manuscript, we outline a reliable procedure to manufacture photonic nanostructures from single-crystal diamond (SCD). Photonic nanostructures, in our case SCD nanopillars on thin (<1 μm) platforms, are highly relevant for nanoscale sensing. The presented top-down procedure includes electron beam lithography (EBL) as well as reactive ion etching (RIE). Our method introduces a novel type of inter-layer, namely silicon, that significantly enhances the adhesion of hydrogen silsesquioxane (HSQ) electron beam resist to SCD and avoids sample charging during EBL. In contrast to previously used adhesion layers, our silicon layer can be removed using a highly-selective RIE step, which is not damaging HSQ mask structures. We thus refine published nanofabrication processes to ease a higher process reliability especially in the light of the advancing commercialization of SCD sensor devices.

High-quality single crystal diamond diffraction gratings fabricated by crystallographic etching

We demonstrate a novel method for fabricating single crystal diamond diffraction gratings based on crystallographic etching that yields high-quality diffraction gratings from commercially available <100> diamond plates. Both V-groove and rectangular gratings were fabricated and characterised using scanning electron microscopy and atomic force microscopy, revealing angles of 57° and 87° depending on the crystal orientation, with mean roughness below R_a = 5 nm on the sidewalls. The gratings were also optically characterised, showing good agreement with simulated results. The fabrication method demonstrated in this contribution shows the way for manufacturing high-quality diamond diffractive components that surpass existing devices both in quality and manufacturability.