Large-area dual-scale metal transfer by adhesive force

Adhesive-Layer-Free and Double-Faced Nanotransfer Lithography for a Flexible Large-Area MetaSurface Hologram

Herein, we develop an adhesive-free double-faced nanotransfer lithography (ADNT) technique based on the surface deformation of flexible substrates under the conditions of temperature and pressure control and thus address the challenge of realizing the mass production of large-area nanodevices in the fields of optics, metasurfaces, and holograms. During ADNT, which is conducted on a flexible polymer substrate above its glass transition temperature in the absence of adhesive materials and chemical bonding agents, nanostructures from the polymer stamp are attached to the deformed polymer substrate. Various silicon masters are employed to prove our method applicable to arbitrary nanopatterns, and diverse Ag and Au nanostructures are deposited on polymer molds to demonstrate the wide scope of useable metals. Finally, ADNT is used to (i) produce a flexible large-area hologram on the defect-free poly(methyl methacrylate) (PMMA) film and (ii) fabricate a metasurface hologram and a color filter on the front and back surfaces of the PMMA film, respectively, to realize dual functionality. Thus, it is concluded that the use of ADNT can decrease the fabrication time and cost of high-density nanodevices and facilitate their commercialization.

Dual nanotransfer printing for complementary plasmonic biosensors

One of the main challenges in the widespread utilization of localized plasmon resonance-based biosensors is the fabrication of large-area and low-cost plasmonic nanostructures. In this work, we fabricated large-area and low-cost complementary plasmonic biosensors such as nanohole and nanodisk arrays using dual nanotransfer printing (NTP) with a single metal deposition and a single reusable mold. The suspended nanohole arrays and the suspended nanodisk arrays were fabricated using the subsequent dry etching process. We confirmed a maximum enhancement in bulk sensitivity in experiments and simulations by controlling the vertical and lateral etching depths of the dielectric layer underneath the gold (Au) nanohole and nanodisk arrays. Furthermore, we show that the surface sensitivity evaluated by atomic layer deposition of aluminum oxide increased because appropriate vertical and lateral etching depths allow the target analyte to access the additional near-field formed at the bottom of the Au nanostructure. The dual NTP method provides a practical solution for the realization of large-area and low-cost label-free plasmonic biosensing systems, with a reduction in complexity and cost of the fabrication process of complementary plasmonic structures and metasurfaces.

Transfer Tiling of Nanostructures for Large-Area Fabrication

The fabrication of nanoscale patterns over a large area has been considered important but difficult, because there are few ways to satisfy both conditions. Previously, visually tolerable tiling (VTT) for fabricating nanopatterns for optical applications has been reported as a candidate for large area fabrication. The essence of VTT is the inevitable stitching of the nanoscale optical component, which is not seen by the naked eye if the boundary is very narrow while the tiles are overlapped. However, it had been difficult to control the shape of the spread of liquid prepolymers in the previous work, and there was room for the development of tiling. Here, we propose a method for transferring various shapes of tiles, which can be defined with a shadow mask. The method of using a transparent shadow mask can provide a wide process window, because it allows the spreading of a liquid prepolymer to be more easily controlled. We optimize the coating condition of a liquid prepolymer and the ultraviolet (UV) exposure time. Using this method, we can attach tiles of various shapes without a significant visible trace in the overlapped region.

Scalable and continuous fabrication of bio-inspired dry adhesives with a thermosetting polymer

Many research groups have developed unique micro/nano-structured dry adhesives by mimicking the foot of the gecko with the use of molding methods. Through these previous works, polydimethylsiloxane (PDMS) has been developed and become the most commonly used material for making artificial dry adhesives. The material properties of PDMS are well suited for making dry adhesives, such as conformal contacts with almost zero preload, low elastic moduli for stickiness, and easy cleaning with low surface energy. From a performance point of view, dry adhesives made with PDMS can be highly advantageous but are limited by its low productivity, as production takes an average of approximately two hours. Given the low productivity of PDMS, some research groups have developed dry adhesives using UV-curable materials, which are capable of continuous roll-to-roll production processes. However, UV-curable materials were too rigid to produce good adhesion. Thus, we established a PDMS continuous-production system to achieve good productivity and adhesion performance. We designed a thermal roll-imprinting lithography (TRL) system for the continuous production of PDMS microstructures by shortening the curing time by controlling the curing temperature (the production speed is up to 150 mm min-1). Dry adhesives composed of PDMS were fabricated continuously via the TRL system.

Scalable Fabrication of Flexible Microstencils by Using Sequentially Induced Dewetting Phenomenon

We present the physics of sequential dewetting phenomenon and continuous fabrication of a polymeric microstencil using dewetting phenomenon with roll-to-roll imprinting equipment. To realize dewetting-assisted residual-free imprinting, mold material, polymer resin, and substrate were selected via interfacial surface energy analysis. In addition, optimal parameters of the continuous process were also studied by experimentally comparing the resultant shape of the microstencil depending on the process speed, aspect ratio of the mold, and applied pressure. As a result, the polymeric microstencil was produced continuously in very high yields, and its maximum resolution reached 20 μm in diameter. For an easy, continuous demolding during the roll-to-roll process, the material chosen for the substrate film was paraffin-coated film, which has the surface energy low enough for dewetting while having a higher adhesion value than polydimethylsiloxane mold. This versatile, high-throughput microstencil fabrication process can be used in many applications requiring flexibility, scalability, and specific material, and high productivity.

High-durable AgNi nanomesh film for a transparent conducting electrode

Uniform metal nanomesh structures are promising candidates that may replace of indium-tin oxide (ITO) in transparent conducting electrodes (TCEs). However, the durability of the uniform metal mesh has not yet been studied. For this reason, a comparative analysis of the durability of TCEs based on pure Ag and AgNi nanomesh, which are fabricated by using simple transfer printing, is performed. The AgNi nanomesh shows high long-term stability to oxidation, heat, and chemicals compared with that of pure Ag nanomesh. This is because of nickel in the AgNi nanomesh. Furthermore, the AgNi nanomesh shows strong adhesion to a transparent substrate and good stability after repeated bending.

Multiscale transfer printing into recessed microwells and on curved surfaces via hierarchical perfluoropolyether stamps

A simple method for the formation of multiscale metal patterns is presented using hierarchical polymeric stamps with perfluoropolyether (PFPE). A dual-scale PFPE structure is made via two-step moulding process under partial photocrosslinking conditions. The hierarchical PFPE stamp enables multiscale transfer printing (MTP) of metal pattern in one step within microwells as well as on curved surfaces.

Wafer-scale pattern transfer of metal nanostructures on polydimethylsiloxane (PDMS) substrates via holographic nanopatterns

In this paper, we report on a cost-effective and simple, nondestructive pattern transfer method that allows the fabrication of metallic nanostructures on a polydimethylsiloxane (PDMS) substrate on a wafer scale. The key idea is to use holographic nanopatterns of a photoresist (PR) layer as template structures, where a metal film is directly deposited in order to replicate the nanopatterns of the PR template layer. Then, the PDMS elastomer is molded onto the metal film and the metal/PDMS composite layer is directly peeled off from the PR surface. Many metallic materials including Ti, Al, and Ag were successfully nanopatterned on PDMS substrates by the pattern transfer process with no use of any adhesion promoter layer or coating. In case of Au that has poor adhesion to PDMS material, a salinization of the metal surface with 3-(aminopropyl)-triethoxysilane (APTES) monolayer promoted the adhesion and led to successful pattern transfer. A series of adhesion tests confirmed the good adhesion of the transferred metal films onto the molded PDMS substrates, including scotch-tape and wet immersion tests. The inexpensive and robust pattern transfer approach of metallic nanostructures onto transparent and flexible PDMS substrates will open the new door for many scientific and engineering applications such as micro-/nanofluidics, optofluidics, nanophotonics, and nanoelectronics.

Transfer printing techniques for materials assembly and micro/nanodevice fabrication

Transfer printing represents a set of techniques for deterministic assembly of micro-and nanomaterials into spatially organized, functional arrangements with two and three-dimensional layouts. Such processes provide versatile routes not only to test structures and vehicles for scientific studies but also to high-performance, heterogeneously integrated functional systems, including those in flexible electronics, three-dimensional and/or curvilinear optoelectronics, and bio-integrated sensing and therapeutic devices. This article summarizes recent advances in a variety of transfer printing techniques, ranging from the mechanics and materials aspects that govern their operation to engineering features of their use in systems with varying levels of complexity. A concluding section presents perspectives on opportunities for basic and applied research, and on emerging use of these methods in high throughput, industrial-scale manufacturing.

Shape-controllable microlens arrays via direct transfer of photocurable polymer droplets

A simple method is presented to form an array of shape-controllable microlenses by partial photocuring of an UV-curable polymer and direct transfer. Using the transferred lens array, nanoscale metal patterns as small as 130-nm gaps are detected under an optical microscope with a distinguishable resolution.

Multi-functional nanopatterned optical films fabricated using capillary force lithography

We demonstrate anisotropic optical films based on liquid crystalline polymer (LCP) using a capillary force lithography (CFL). The fabricated optical films can be used as both an optical component and a self-aligning capability of liquid crystal molecules introduced on the film. Additionally, HA or PA LC can be induced on same material by controlling the water repellency of LCP surface. Moreover, surface anchoring transitions could be controlled by variation of pattern sizes and surface treatment. In this point of view, one thin optical film can act both retarder and alignment layer and then shows good retardation, LC alignment, and transmittance at the same time.

Simple fabrication of asymmetric high-aspect-ratio polymer nanopillars by reusable AAO templates

We present a simple method of utilizing anodized aluminum oxide (AAO) as a reproducible template for fabricating high-aspect-ratio uniformly bent polymeric nanopillars that can be used as a physical adhesive. It is shown how to achieve straight high-aspect-ratio nanopillars with concepts of the work of adhesion and lateral collapse between polymer pillars without serious damage to the master template. With the support of manufacturing polymeric nanopillars from the reusable AAO, a simple route to asymmetric dry adhesive nanopillars bent by residual stresses was demonstrated.