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Zheng Y, Cheng L, Su J, Chen C, Zhu X, Li H. Electron beam-induced athermal nanowelding of crossing SiOx amorphous nanowires. RSC Adv 2022; 12:6018-6024. [PMID: 35424549 PMCID: PMC8981572 DOI: 10.1039/d1ra08176d] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Track Full Text] [Download PDF] [Figures] [Journal Information] [Subscribe] [Scholar Register] [Received: 11/08/2021] [Accepted: 01/05/2022] [Indexed: 11/21/2022] Open
Abstract
Athermal welding of crossing SiOx nanowires under e-beam irradiation is in situ observed by TEM. A relevant simulation considering nanocurvature effect and athermal activation effect gives the corresponding 3D structural evolution and the velocity field of atom migration.
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Affiliation(s)
- Yuchen Zheng
- Department of Physics, Xiamen University, Xiamen 361005, People's Republic of China
- China–Australia Joint Laboratory for Functional Nanomaterials, Xiamen University, Xiamen 361005, People's Republic of China
| | - Liang Cheng
- Department of Physics, Xiamen University, Xiamen 361005, People's Republic of China
- China–Australia Joint Laboratory for Functional Nanomaterials, Xiamen University, Xiamen 361005, People's Republic of China
| | - Jiangbin Su
- Department of Physics, Xiamen University, Xiamen 361005, People's Republic of China
- China–Australia Joint Laboratory for Functional Nanomaterials, Xiamen University, Xiamen 361005, People's Republic of China
- Experiment Center of Electronic Science and Technology, School of Microelectronics Science and Control Engineering, Changzhou University, Changzhou 213164, People's Republic of China
| | - Chuncai Chen
- Department of Physics, Xiamen University, Xiamen 361005, People's Republic of China
- China–Australia Joint Laboratory for Functional Nanomaterials, Xiamen University, Xiamen 361005, People's Republic of China
- Department of Physics, College of Civil Engineering, MinNan University of Science and Technology, Shishi 362700, People's Republic of China
| | - Xianfang Zhu
- Department of Physics, Xiamen University, Xiamen 361005, People's Republic of China
- China–Australia Joint Laboratory for Functional Nanomaterials, Xiamen University, Xiamen 361005, People's Republic of China
| | - Hang Li
- State Key Lab of Physical Chemistry of Solid Surfaces, Collaborative Innovation Centre of Chemistry for Energy Materials, State-Province Joint Engineering Laboratory of Power Source Technology for New Energy Vehicle, Engineering Research Center of Electrochemical Technology, Ministry of Education, College of Chemistry and Chemical Engineering, Xiamen University, Xiamen, 361005, People's Republic of China
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Li P, Kang Z, Rao F, Lu Y, Zhang Y. Nanowelding in Whole-Lifetime Bottom-Up Manufacturing: From Assembly to Service. SMALL METHODS 2021; 5:e2100654. [PMID: 34927947 DOI: 10.1002/smtd.202100654] [Citation(s) in RCA: 1] [Impact Index Per Article: 0.3] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Received: 06/16/2021] [Revised: 07/23/2021] [Indexed: 06/14/2023]
Abstract
The continuous miniaturization of microelectronics is pushing the transformation of nanomanufacturing modes from top-down to bottom-up. Bottom-up manufacturing is essentially the way of assembling nanostructures from atoms, clusters, quantum dots, etc. The assembly process relies on nanowelding which also existed in the synthesis process of nanostructures, construction and repair of nanonetworks, interconnects, integrated circuits, and nanodevices. First, many kinds of novel nanomaterials and nanostructures from 0D to 1D, and even 2D are synthesized by nanowelding. Second, the connection of nanostructures and interfaces between metal/semiconductor-metal/semiconductor is realized through low-temperature heat-assisted nanowelding, mechanical-assisted nanowelding, or cold welding. Finally, 2D and 3D interconnects, flexible transparent electrodes, integrated circuits, and nanodevices are constructed, functioned, or self-healed by nanowelding. All of the three nanomanufacturing stages follow the rule of "oriented attachment" mechanisms. Thus, the whole-lifetime bottom-up manufacturing process from the synthesis and connection of nanostructures to the construction and service of nanodevices can be organically integrated by nanowelding. The authors hope this review can bring some new perspective in future semiconductor industrialization development in the expansion of multi-material systems, technology pathway for the refined design, controlled synthesis and in situ characterization of complex nanostructures, and the strategies to develop and repair novel nanodevices in service.
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Affiliation(s)
- Peifeng Li
- College of Materials Science and Engineering, Shenzhen University, Shenzhen, 518060, P. R. China
| | - Zhuo Kang
- Beijing Advanced Innovation Center for Materials Genome Engineering, Beijing Key Laboratory for Advanced Energy Materials and Technologies, University of Science and Technology Beijing, Beijing, 100083, P. R. China
- State Key Laboratory for Advanced Metals and Materials, School of Materials Science and Engineering, University of Science and Technology Beijing, Beijing, 100083, P. R. China
| | - Feng Rao
- College of Materials Science and Engineering, Shenzhen University, Shenzhen, 518060, P. R. China
| | - Yang Lu
- Department of Mechanical Engineering, City University of Hong Kong, Kowloon, Hong Kong, 999077, P. R. China
- Nanomanufacturing Laboratory (NML), Shenzhen Research Institute, City University of Hong Kong, Shenzhen, 518057, P. R. China
| | - Yue Zhang
- Beijing Advanced Innovation Center for Materials Genome Engineering, Beijing Key Laboratory for Advanced Energy Materials and Technologies, University of Science and Technology Beijing, Beijing, 100083, P. R. China
- State Key Laboratory for Advanced Metals and Materials, School of Materials Science and Engineering, University of Science and Technology Beijing, Beijing, 100083, P. R. China
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