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Lee SB, Kwon J, Kim HS. Electron-beam induced Mn oxidation in TEM: Insights into the heating effect of Auger excitation. Micron 2025; 190:103763. [PMID: 39637684 DOI: 10.1016/j.micron.2024.103763] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Received: 08/11/2024] [Revised: 11/20/2024] [Accepted: 12/02/2024] [Indexed: 12/07/2024]
Abstract
Electron-beam irradiation of α-Mn triggers dramatic microstructural transformations. Transmission electron microscopy (TEM) reveals localized thinning and MnO formation within the irradiated area. Reduced thermal conductivity due to thinning suggests significant local temperature rise by electron-beam irradiation. Finite element analysis (FEA) identifies Auger excitation as the dominant heating mechanism, surging temperatures to ∼2300 K with ultrafast cooling. Our findings indicate that the oxidation of Mn under electron-beam irradiation is primarily attributed to beam heating via Auger excitation, rather than defect formation through sputtering. This conclusion is supported by the fact that the maximum energy transferable from the incident electron beam in TEM is below the minimum displacement energy for Mn.
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Affiliation(s)
- Sung Bo Lee
- Department of Materials Science and Engineering and Research Institute of Advanced Materials, Seoul National University, Seoul 08826, Republic of Korea.
| | - Jihye Kwon
- Department of Materials Science and Engineering, Pohang University of Science and Technology (POSTECH), Pohang 37673, Republic of Korea
| | - Hyoung Seop Kim
- Department of Materials Science and Engineering, Pohang University of Science and Technology (POSTECH), Pohang 37673, Republic of Korea; Institute for Convergence Research and Education in Advanced Technology, Yonsei University, Seoul 03722, Republic of Korea; Advanced Institute for Materials Research (WPI-AIMR), Tohoku University, Sendai 980-8577, Japan
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2
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Sharma S, Souqui L, Palisaitis J, Hoang DQ, Ivanov IG, Persson POÅ, Högberg H, Pedersen H. On the origin of epitaxial rhombohedral-B 4C growth by CVD on 4H-SiC. Dalton Trans 2024; 53:10730-10736. [PMID: 38872609 DOI: 10.1039/d4dt01157k] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 06/15/2024]
Abstract
Rhombohedral boron carbide, often referred to as r-B4C, is a potential material for applications in optoelectronic and thermoelectric devices. From fundamental thin film growth and characterization, we investigate the film-substrate interface between the r-B4C films grown on 4H-SiC (0001̄) (C-face) and 4H-SiC (0001) (Si-face) during chemical vapor deposition (CVD) to find the origin for epitaxial growth solely observed on the C-face. We used high-resolution (scanning) transmission electron microscopy and electron energy loss spectroscopy to show that there is no surface roughness or additional carbon-based interlayer formation for either substrate. Based on Raman spectroscopy analysis, we also argue that carbon accumulation on the surface hinders the growth of continued epitaxial r-B4C in CVD.
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Affiliation(s)
- Sachin Sharma
- Department of Physics, Chemistry and Biology (IFM), Linköping University, SE-581 83 Linköping, Sweden.
| | - Laurent Souqui
- Department of Physics, Chemistry and Biology (IFM), Linköping University, SE-581 83 Linköping, Sweden.
| | - Justinas Palisaitis
- Department of Physics, Chemistry and Biology (IFM), Linköping University, SE-581 83 Linköping, Sweden.
| | - Duc Quang Hoang
- Department of Physics, Chemistry and Biology (IFM), Linköping University, SE-581 83 Linköping, Sweden.
| | - Ivan G Ivanov
- Department of Physics, Chemistry and Biology (IFM), Linköping University, SE-581 83 Linköping, Sweden.
| | - Per O Å Persson
- Department of Physics, Chemistry and Biology (IFM), Linköping University, SE-581 83 Linköping, Sweden.
| | - Hans Högberg
- Department of Physics, Chemistry and Biology (IFM), Linköping University, SE-581 83 Linköping, Sweden.
| | - Henrik Pedersen
- Department of Physics, Chemistry and Biology (IFM), Linköping University, SE-581 83 Linköping, Sweden.
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3
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Coury FG, Miller C, Field R, Kaufman M. On the origin of diffuse intensities in fcc electron diffraction patterns. Nature 2023; 622:742-747. [PMID: 37880440 DOI: 10.1038/s41586-023-06530-6] [Citation(s) in RCA: 6] [Impact Index Per Article: 3.0] [Reference Citation Analysis] [Abstract] [MESH Headings] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Received: 11/30/2022] [Accepted: 08/10/2023] [Indexed: 10/27/2023]
Abstract
Interpreting diffuse intensities in electron diffraction patterns can be challenging in samples with high atomic-level complexity, as often is the case with multi-principal element alloys. For example, diffuse intensities in electron diffraction patterns from simple face-centred cubic (fcc) and related alloys have been attributed to short-range order1, medium-range order2 or a variety of different {111} planar defects, including thin twins3, thin hexagonal close-packed layers4, relrod spiking5 and incomplete ABC stacking6. Here we demonstrate that many of these diffuse intensities, including [Formula: see text]{422} and [Formula: see text]{311} in ⟨111⟩ and ⟨112⟩ selected area diffraction patterns, respectively, are due to reflections from higher-order Laue zones. We show similar features along many different zone axes in a wide range of simple fcc materials, including CdTe, pure Ni and pure Al. Using electron diffraction theory, we explain these intensities and show that our calculated intensities of projected higher-order Laue zone reflections as a function of deviation from their Bragg conditions match well with the observed intensities, proving that these intensities are universal in these fcc materials. Finally, we provide a framework for determining the nature and location of diffuse intensities that could indicate the presence of short-range order or medium-range order.
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Affiliation(s)
- Francisco Gil Coury
- Materials Engineering Department (DEMa), Universidade Federal de São Carlos, São Carlos, Brazil.
| | - Cody Miller
- SIGMA Division, Los Alamos National Laboratory, Los Alamos, NM, USA
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Walsh F, Zhang M, Ritchie RO, Minor AM, Asta M. Extra electron reflections in concentrated alloys do not necessitate short-range order. NATURE MATERIALS 2023; 22:926-929. [PMID: 37524815 DOI: 10.1038/s41563-023-01570-9] [Citation(s) in RCA: 8] [Impact Index Per Article: 4.0] [Reference Citation Analysis] [Grants] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 08/02/2023]
Affiliation(s)
- Flynn Walsh
- Materials Sciences Division, Lawrence Berkeley National Laboratory, Berkeley, CA, USA
- Graduate Group in Applied Science & Technology, University of California, Berkeley, CA, USA
| | - Mingwei Zhang
- Materials Sciences Division, Lawrence Berkeley National Laboratory, Berkeley, CA, USA
- National Center for Electron Microscopy, Lawrence Berkeley National Laboratory, Berkeley, CA, USA
- Department of Materials Science & Engineering, University of California, Berkeley, CA, USA
| | - Robert O Ritchie
- Materials Sciences Division, Lawrence Berkeley National Laboratory, Berkeley, CA, USA
- Department of Materials Science & Engineering, University of California, Berkeley, CA, USA
| | - Andrew M Minor
- Materials Sciences Division, Lawrence Berkeley National Laboratory, Berkeley, CA, USA
- National Center for Electron Microscopy, Lawrence Berkeley National Laboratory, Berkeley, CA, USA
- Department of Materials Science & Engineering, University of California, Berkeley, CA, USA
| | - Mark Asta
- Materials Sciences Division, Lawrence Berkeley National Laboratory, Berkeley, CA, USA.
- Department of Materials Science & Engineering, University of California, Berkeley, CA, USA.
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Nie A, Liu J, Li Q, Cheng Y, Dong C, Zhou W, Wang P, Wang Q, Yang Y, Zhu Y, Zeng Y, Wang H. Epitaxial TiO2/SnO2 core–shell heterostructure by atomic layer deposition. ACTA ACUST UNITED AC 2012. [DOI: 10.1039/c2jm30690e] [Citation(s) in RCA: 30] [Impact Index Per Article: 2.3] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/21/2022]
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Bell DC, Wu Y, Barrelet CJ, Gradecak S, Xiang J, Timko BP, Lieber CM. Imaging and analysis of nanowires. Microsc Res Tech 2004; 64:373-89. [PMID: 15549698 DOI: 10.1002/jemt.20093] [Citation(s) in RCA: 49] [Impact Index Per Article: 2.3] [Reference Citation Analysis] [Abstract] [MESH Headings] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/10/2022]
Abstract
We used vapor-liquid-solid (VLS) methods to synthesize discrete single-element semiconductor nanowires and multicomposition nanowire heterostructures, and then characterized their structure and composition using high-resolution electron microscopy (HRTEM) and analytical electron microscopy techniques. Imaging nanowires requires the modification of the established HRTEM imaging procedures for bulk material to take into consideration the effects of finite nanowire width and thickness. We show that high-resolution atomic structure images of nanowires less than 6 nm in thickness have lattice "streaking" due to the finite crystal lattice in two dimensions of the nanowire structure. Diffraction pattern analysis of nanowires must also consider the effects of a finite structure producing a large reciprocal space function, and we demonstrate that the classically forbidden 1/3 [422] reflections are present in the [111] zone axis orientation of silicon nanowires due to the finite thickness and lattice plane edge effects that allow incomplete diffracted beam cancellation. If the operating conditions are not carefully considered, we found that HRTEM image delocalization becomes apparent when employing a field emission transmission electron microscope (TEM) to image nanowires and such effects have been shown to produce images of the silicon lattice structure outside of the nanowire itself. We show that pseudo low-dose imaging methods are effective in reducing nanowire structure degradation caused by electron beam irradiation. We also show that scanning TEM (STEM) with energy dispersive X-ray microanalysis (EDS) is critical in the examination of multicomponent nanowire heterostructures.
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Affiliation(s)
- David C Bell
- Center for Imaging and Mesoscale Structures, Harvard University, Cambridge, Massachusetts 02138, USA.
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TEM analysis of epitaxial semiconductor layers with high stacking fault densities considering artifacts induced by the cross-section geometry. Ultramicroscopy 2000; 81:279-88. [PMID: 10782651 DOI: 10.1016/s0304-3991(99)00184-9] [Citation(s) in RCA: 8] [Impact Index Per Article: 0.3] [Reference Citation Analysis] [Abstract] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/22/2022]
Abstract
Epitaxial semiconductor layers, in particular II-VI compound semiconductors with the component Se deposited on III-V semiconductor substrates like GaAs or InAs, can contain high densities of stacking faults. CdxMg(1-x)Se layers with Cd-concentrations x of 93% and 57% on InAs(0 0 1) substrates were investigated as typical representatives of this class of heterostructures. The defect structure of the layers is dominated by a high density of stacking fault (SF) pairs bound by Shockley partial dislocations with Burgers vectors b = 1/6 <1 1 2> and a stair-rod dislocation with b = 1/6 <1 1 0> at the intersection line of the pairs. Plan-view transmission electron microscopy (TEM) is generally applied to obtain information about the type, density and arrangement of the stacking faults in thin epilayers up to moderate SF densities. Cross-section TEM is more frequently carried out for thick layers and at high SF densities. It will be demonstrated by a detailed analysis of cross-section images that a careful interpretation of the observed SF morphologies is necessary due to artifacts induced by the cross-section geometry.
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