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Piasecki T, Kwoka K, Gacka E, Kunicki P, Gotszalk T. Electrical, thermal and noise properties of platinum-carbon free-standing nanowires designed as nanoscale resistive thermal devices. NANOTECHNOLOGY 2023; 35:115502. [PMID: 38064743 DOI: 10.1088/1361-6528/ad13c0] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Received: 09/11/2023] [Accepted: 12/08/2023] [Indexed: 12/28/2023]
Abstract
Platinum-carbon (PtC) composite nanowires were fabricated using focused electron beam induced deposition and postprocessed, and their performance as a nanoscale resistive thermal device (RTD) was evaluated. Nanowires were free-standing and deposited on a dedicated substrate to eliminate the influence of the substrate itself and of the halo effect on the results. The PtC free-standing nanowires were postprocessed to lower their electrical resistance using electron beam irradiation and thermal annealing using Joule heat both separately and combined. Postprocessed PtC free-standing nanowires were characterized to evaluate their noise figure (NF) and thermal coefficients at the temperature range from 30 K to 80 °C. The thermal sensitivity of RTD was lowered with the reduced resistance but simultaneously the NF improved, especially with electron-beam irradiation. The temperature measurement resolution achievable with the PtC free-standing nanowires was 0.1 K in 1 kHz bandwidth.
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Affiliation(s)
- Tomasz Piasecki
- Department of Nanometrology, Wroclaw University of Science and Technology, Wroclaw, Poland
| | - Krzysztof Kwoka
- Department of Nanometrology, Wroclaw University of Science and Technology, Wroclaw, Poland
| | - Ewelina Gacka
- Department of Nanometrology, Wroclaw University of Science and Technology, Wroclaw, Poland
| | - Piotr Kunicki
- Department of Nanometrology, Wroclaw University of Science and Technology, Wroclaw, Poland
| | - Teodor Gotszalk
- Department of Nanometrology, Wroclaw University of Science and Technology, Wroclaw, Poland
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Haub M, Guenther T, Bogner M, Zimmermann A. Use of PtC Nanotips for Low-Voltage Quantum Tunneling Applications. MICROMACHINES 2022; 13:mi13071019. [PMID: 35888836 PMCID: PMC9317598 DOI: 10.3390/mi13071019] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Track Full Text] [Download PDF] [Figures] [Subscribe] [Scholar Register] [Received: 05/19/2022] [Revised: 06/21/2022] [Accepted: 06/24/2022] [Indexed: 11/16/2022]
Abstract
The use of focused ion and focused electron beam (FIB/FEB) technology permits the fabrication of micro- and nanometer scale geometries. Therefore, FIB/FEB technology is a favorable technique for preparing TEM lamellae, nanocontacts, or nanowires and repairing electronic circuits. This work investigates FIB/FEB technology as a tool for nanotip fabrication and quantum mechanical tunneling applications at a low tunneling voltage. Using a gas injection system (GIS), the Ga-FIB and FEB technology allows both additive and subtractive fabrication of arbitrary structures. Using energy dispersive X-ray spectroscopy (EDX), resistance measurement (RM), and scanning tunneling microscope (STM)/spectroscopy (STS) methods, the tunneling suitability of the utilized metal–organic material–platinum carbon (PtC) is investigated. Thus, to create electrode tips with radii down to 15 nm, a stable and reproducible process has to be developed. The metal–organic microstructure analysis shows suitable FIB parameters for the tunneling effect at high aperture currents (260 pA, 30 kV). These are required to ensure the suitability of the electrodes for the tunneling effect by an increased platinum content (EDX), a low resistivity (RM), and a small band gap (STM). The STM application allows the imaging of highly oriented pyrolytic graphite (HOPG) layers and demonstrates the tunneling suitability of PtC electrodes based on high FIB aperture currents and a low tunneling voltage.
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Affiliation(s)
- Michael Haub
- Institute for Micro Integration (IFM), University of Stuttgart, Allmandring 9b, 70569 Stuttgart, Germany; (T.G.); (M.B.); (A.Z.)
- Correspondence:
| | - Thomas Guenther
- Institute for Micro Integration (IFM), University of Stuttgart, Allmandring 9b, 70569 Stuttgart, Germany; (T.G.); (M.B.); (A.Z.)
| | - Martin Bogner
- Institute for Micro Integration (IFM), University of Stuttgart, Allmandring 9b, 70569 Stuttgart, Germany; (T.G.); (M.B.); (A.Z.)
| | - André Zimmermann
- Institute for Micro Integration (IFM), University of Stuttgart, Allmandring 9b, 70569 Stuttgart, Germany; (T.G.); (M.B.); (A.Z.)
- Hahn-Schickard, Allmandring 9b, 70569 Stuttgart, Germany
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Investigation of Focused Ion and Electron Beam Platinum Carbon Nano-Tips with Transmission Electron Microscopy for Quantum Tunneling Vacuum Gap Applications. APPLIED SCIENCES-BASEL 2021. [DOI: 10.3390/app112411793] [Citation(s) in RCA: 2] [Impact Index Per Article: 0.7] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 02/03/2023]
Abstract
To realize quantum tunneling applications with movable electrodes, sharp tips with radii down to several tens of nanometers are necessary. The use of a focused ion beam (FIB) and focused electron beam (FEB) with a gas injection system (GIS) allows the integration of geometries in the nanoscale directly into micro and nano systems. However, the implementation of the tunneling effect clearly depends on the material. In this work, a metal-organic precursor is used. The investigation of the prepared tunneling electrodes enables an insight into FIB/FEB parameters for the realization of quantum tunneling applications. For this purpose, a high-resolution transmission electron microscopy (HRTEM) analysis is performed. The results show a dependence of the material nanostructure regarding platinum (Pt) grain size and distribution in an amorphous carbon matrix from the used beam and the FIB currents. The integration of the tips into a polysilicon (PolySi) beam and measuring the current signal by approaching the tips show significant differences in the results. Moreover, the approach of FEB tips shows a non-contact behavior even when the tips are squeezed together. The contact behavior depends on the grain size, proportion of platinum, and the amount of amorphous carbon in the microstructure, especially at the edge area of the tips. This study shows significant differences in the nanostructure between FIB and FEB tips, particularly for the FIB tips: The higher the ion current, the greater the platinum content, the finer the grain size, and the higher the probability of a tunneling current by approaching the tips.
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Atomic force microscopy - Scanning electrochemical microscopy (AFM-SECM) for nanoscale topographical and electrochemical characterization: Principles, applications and perspectives. Electrochim Acta 2020. [DOI: 10.1016/j.electacta.2019.135472] [Citation(s) in RCA: 28] [Impact Index Per Article: 7.0] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 01/18/2023]
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Wu MS, Chen WA. Numerical simulation of differential cyclic voltammetry for amplified and separate detection of redox couples using dual-plate microgap device. J Taiwan Inst Chem Eng 2017. [DOI: 10.1016/j.jtice.2017.08.020] [Citation(s) in RCA: 3] [Impact Index Per Article: 0.4] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/24/2022]
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6
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Focused ion beam-assisted fabrication of soft high-aspect ratio silicon nanowire atomic force microscopy probes. Ultramicroscopy 2017; 179:24-32. [DOI: 10.1016/j.ultramic.2017.03.031] [Citation(s) in RCA: 14] [Impact Index Per Article: 2.0] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Received: 03/30/2016] [Revised: 03/23/2017] [Accepted: 03/27/2017] [Indexed: 11/21/2022]
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Velmurugan J, Agrawal A, An S, Choudhary E, Szalai VA. Fabrication of Scanning Electrochemical Microscopy-Atomic Force Microscopy Probes to Image Surface Topography and Reactivity at the Nanoscale. Anal Chem 2017; 89:2687-2691. [PMID: 28192901 DOI: 10.1021/acs.analchem.7b00210] [Citation(s) in RCA: 20] [Impact Index Per Article: 2.9] [Reference Citation Analysis] [Abstract] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/29/2022]
Abstract
Concurrent mapping of chemical reactivity and morphology of heterogeneous electrocatalysts at the nanoscale allows identification of active areas (protrusions, flat film surface, or cracks) responsible for productive chemistry in these materials. Scanning electrochemical microscopy (SECM) can map surface characteristics, record catalyst activity, and identify chemical products at solid-liquid electrochemical interfaces. It lacks, however, the ability to distinguish topographic features where surface reactivity occurs. Here, we report the design and fabrication of scanning probe tips that combine SECM with atomic force microscopy (AFM) to perform measurements at the nanoscale. Our probes are fabricated by integrating nanoelectrodes with quartz tuning forks (QTFs). Using a calibration standard fabricated in our lab to test our probes, we obtain simultaneous topographic and electrochemical reactivity maps with a lateral resolution of 150 nm.
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Affiliation(s)
- Jeyavel Velmurugan
- Center for Nanoscale Science and Technology, National Institute of Standards and Technology (NIST) , Gaithersburg, Maryland 20899, United States.,Maryland NanoCenter, University of Maryland , College Park, Maryland 20742, United States
| | - Amit Agrawal
- Center for Nanoscale Science and Technology, National Institute of Standards and Technology (NIST) , Gaithersburg, Maryland 20899, United States.,Maryland NanoCenter, University of Maryland , College Park, Maryland 20742, United States
| | - Sangmin An
- Center for Nanoscale Science and Technology, National Institute of Standards and Technology (NIST) , Gaithersburg, Maryland 20899, United States.,Maryland NanoCenter, University of Maryland , College Park, Maryland 20742, United States
| | - Eric Choudhary
- Center for Nanoscale Science and Technology, National Institute of Standards and Technology (NIST) , Gaithersburg, Maryland 20899, United States
| | - Veronika A Szalai
- Center for Nanoscale Science and Technology, National Institute of Standards and Technology (NIST) , Gaithersburg, Maryland 20899, United States
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Eifert A, Mizaikoff B, Kranz C. Advanced fabrication process for combined atomic force-scanning electrochemical microscopy (AFM-SECM) probes. Micron 2015; 68:27-35. [DOI: 10.1016/j.micron.2014.08.008] [Citation(s) in RCA: 22] [Impact Index Per Article: 2.4] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Received: 07/22/2014] [Revised: 08/22/2014] [Accepted: 08/22/2014] [Indexed: 10/24/2022]
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Eifert A, Langenwalter P, Higl J, Lindén M, Nebel CE, Mizaikoff B, Kranz C. Focused ion beam (FIB)-induced changes in the electrochemical behavior of boron-doped diamond (BDD) electrodes. Electrochim Acta 2014. [DOI: 10.1016/j.electacta.2014.03.029] [Citation(s) in RCA: 7] [Impact Index Per Article: 0.7] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/25/2022]
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Knittel P, Higgins MJ, Kranz C. Nanoscopic polypyrrole AFM-SECM probes enabling force measurements under potential control. NANOSCALE 2014; 6:2255-2260. [PMID: 24402187 DOI: 10.1039/c3nr05086f] [Citation(s) in RCA: 13] [Impact Index Per Article: 1.3] [Reference Citation Analysis] [Abstract] [MESH Headings] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/03/2023]
Abstract
Conductive polymers, and in particular polypyrrole, are frequently used as biomimetic interfaces facilitating growth and/or differentiation of cells and tissues. Hence, studying forces and local interactions between such polymer interfaces and cells at the nanoscale is of particular interest. Frequently, such force interactions are not directly accessible with high spatial resolution. Consequently, we have developed nanoscopic polypyrrole electrodes, which are integrated in AFM-SECM probes. Bifunctional AFM-SECM probes were modified via ion beam-induced deposition resulting in pyramidal conductive Pt-C composite electrodes. These nanoscopic electrodes then enabled localized polypyrrole deposition, thus resulting in polymer-modified AFM probes with a well-defined geometry. Furthermore, such probes may be reversibly switched from an insulating to a conductive state. In addition, the hydrophilicity of such polymer tips is dependent on the dopant, and hence, on the oxidation state. Force studies applying different tip potentials were performed at plasma-treated glass surfaces providing localized information on the associated force interactions, which are dependent on the applied potential and the dopant.
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Affiliation(s)
- P Knittel
- University of Ulm, Institute of Analytical and Bioanalytical Chemistry Albert-Einstein-Allee 11, 89081 Ulm, Germany.
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Komkova MA, Holzinger A, Hartmann A, Khokhlov AR, Kranz C, Karyakin AA, Voronin OG. Ultramicrosensors based on transition metal hexacyanoferrates for scanning electrochemical microscopy. BEILSTEIN JOURNAL OF NANOTECHNOLOGY 2013; 4:649-654. [PMID: 24205459 PMCID: PMC3817653 DOI: 10.3762/bjnano.4.72] [Citation(s) in RCA: 3] [Impact Index Per Article: 0.3] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Figures] [Subscribe] [Scholar Register] [Received: 07/17/2013] [Accepted: 09/22/2013] [Indexed: 06/02/2023]
Abstract
We report here a way for improving the stability of ultramicroelectrodes (UME) based on hexacyanoferrate-modified metals for the detection of hydrogen peroxide. The most stable sensors were obtained by electrochemical deposition of six layers of hexacyanoferrates (HCF), more specifically, an alternating pattern of three layers of Prussian Blue and three layers of Ni-HCF. The microelectrodes modified with mixed layers were continuously monitored in 1 mM hydrogen peroxide and proved to be stable for more than 5 h under these conditions. The mixed layer microelectrodes exhibited a stability which is five times as high as the stability of conventional Prussian Blue-modified UMEs. The sensitivity of the mixed layer sensor was 0.32 A·M(-1)·cm(-2), and the detection limit was 10 µM. The mixed layer-based UMEs were used as sensors in scanning electrochemical microscopy (SECM) experiments for imaging of hydrogen peroxide evolution.
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Affiliation(s)
- Maria A Komkova
- Faculty of Chemistry, M.V. Lomonosov Moscow State University, Moscow, Russia
| | - Angelika Holzinger
- Institute of Analytical and Bioanalytical Chemistry, University of Ulm, Ulm, Germany
| | - Andreas Hartmann
- Institute of Analytical and Bioanalytical Chemistry, University of Ulm, Ulm, Germany
| | - Alexei R Khokhlov
- Faculty of Physics, M.V. Lomonosov Moscow State University, Moscow, Russia
| | - Christine Kranz
- Institute of Analytical and Bioanalytical Chemistry, University of Ulm, Ulm, Germany
| | - Arkady A Karyakin
- Faculty of Chemistry, M.V. Lomonosov Moscow State University, Moscow, Russia
| | - Oleg G Voronin
- Faculty of Chemistry, M.V. Lomonosov Moscow State University, Moscow, Russia
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Rauf S, Shiddiky MJA, Trau M, Dimitrov K. "Drill and fill" lithography: fabrication of platinum electrodes and their use in label-free immunosensing. RSC Adv 2013. [DOI: 10.1039/c3ra21900c] [Citation(s) in RCA: 5] [Impact Index Per Article: 0.5] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/21/2022] Open
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13
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Atomic force microscopy probes with integrated boron doped diamond electrodes: Fabrication and application. Electrochem commun 2012. [DOI: 10.1016/j.elecom.2012.09.011] [Citation(s) in RCA: 18] [Impact Index Per Article: 1.5] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/23/2022] Open
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14
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Prussian Blue-modified ultramicroelectrodes for mapping hydrogen peroxide in scanning electrochemical microscopy (SECM). Electrochem commun 2012. [DOI: 10.1016/j.elecom.2012.07.017] [Citation(s) in RCA: 17] [Impact Index Per Article: 1.4] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/18/2022] Open
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15
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Menegazzo N, Kranz C, Mizaikoff B. Investigation of the anion uptake properties of cathodically electropolymerized poly(4-vinylpyridine) membranes. NEW J CHEM 2012. [DOI: 10.1039/c2nj40156h] [Citation(s) in RCA: 1] [Impact Index Per Article: 0.1] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/21/2022]
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16
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Ion beam induced deposition of platinum carbon composite electrodes for combined atomic force microscopy–scanning electrochemical microscopy. Electrochem commun 2010. [DOI: 10.1016/j.elecom.2010.05.008] [Citation(s) in RCA: 8] [Impact Index Per Article: 0.6] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/24/2022] Open
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