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Kanellopulos K, West RG, Schmid S. Nanomechanical Photothermal Near Infrared Spectromicroscopy of Individual Nanorods. ACS PHOTONICS 2023; 10:3730-3739. [PMID: 37869554 PMCID: PMC10588552 DOI: 10.1021/acsphotonics.3c00937] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Figures] [Subscribe] [Scholar Register] [Received: 07/05/2023] [Indexed: 10/24/2023]
Abstract
Understanding light-matter interaction at the nanoscale requires probing the optical properties of matter at the individual nanoabsorber level. To this end, we developed a nanomechanical photothermal sensing platform that can be used as a full spectromicroscopy tool for single molecule and single particle analysis. As a demonstration, the absorption cross-section of individual gold nanorods is resolved from a spectroscopic and polarization standpoint. By exploiting the capabilities of nanomechanical photothermal spectromicroscopy, the longitudinal localized surface plasmon resonance in the NIR range is unraveled and quantitatively characterized. The polarization features of the transversal surface plasmon resonance in the VIS range are also analyzed. The measurements are compared with the finite element method, elucidating the role played by electron surface and bulk scattering in these plasmonic nanostructures, as well as the interaction between the nanoabsorber and the nanoresonator, ultimately resulting in absorption strength modulation. Finally, a comprehensive comparison is conducted, evaluating the signal-to-noise ratio of nanomechanical photothermal spectroscopy against other cutting-edge single molecule and particle spectroscopy techniques. This analysis highlights the remarkable potential of nanomechanical photothermal spectroscopy due to its exceptional sensitivity.
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Affiliation(s)
- Kostas Kanellopulos
- Institute of Sensor and Actuator Systems, TU Wien, Gusshausstrasse 27-29, 1040 Vienna, Austria
| | - Robert G. West
- Institute of Sensor and Actuator Systems, TU Wien, Gusshausstrasse 27-29, 1040 Vienna, Austria
| | - Silvan Schmid
- Institute of Sensor and Actuator Systems, TU Wien, Gusshausstrasse 27-29, 1040 Vienna, Austria
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2
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Adhikari S, Spaeth P, Kar A, Baaske MD, Khatua S, Orrit M. Photothermal Microscopy: Imaging the Optical Absorption of Single Nanoparticles and Single Molecules. ACS NANO 2020; 14:16414-16445. [PMID: 33216527 PMCID: PMC7760091 DOI: 10.1021/acsnano.0c07638] [Citation(s) in RCA: 69] [Impact Index Per Article: 17.3] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 05/16/2023]
Abstract
The photothermal (PT) signal arises from slight changes of the index of refraction in a sample due to absorption of a heating light beam. Refractive index changes are measured with a second probing beam, usually of a different color. In the past two decades, this all-optical detection method has reached the sensitivity of single particles and single molecules, which gave birth to original applications in material science and biology. PT microscopy enables shot-noise-limited detection of individual nanoabsorbers among strong scatterers and circumvents many of the limitations of fluorescence-based detection. This review describes the theoretical basis of PT microscopy, the methodological developments that improved its sensitivity toward single-nanoparticle and single-molecule imaging, and a vast number of applications to single-nanoparticle imaging and tracking in material science and in cellular biology.
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Affiliation(s)
- Subhasis Adhikari
- Huygens−Kamerlingh
Onnes Laboratory, Leiden University, 2300 RA Leiden, The Netherlands
| | - Patrick Spaeth
- Huygens−Kamerlingh
Onnes Laboratory, Leiden University, 2300 RA Leiden, The Netherlands
| | - Ashish Kar
- Chemistry
Discipline, Indian Institute of Technology
Gandhinagar, Palaj, Gujrat 382355, India
| | - Martin Dieter Baaske
- Huygens−Kamerlingh
Onnes Laboratory, Leiden University, 2300 RA Leiden, The Netherlands
| | - Saumyakanti Khatua
- Chemistry
Discipline, Indian Institute of Technology
Gandhinagar, Palaj, Gujrat 382355, India
| | - Michel Orrit
- Huygens−Kamerlingh
Onnes Laboratory, Leiden University, 2300 RA Leiden, The Netherlands
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3
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Chien MH, Steurer J, Sadeghi P, Cazier N, Schmid S. Nanoelectromechanical Position-Sensitive Detector with Picometer Resolution. ACS PHOTONICS 2020; 7:2197-2203. [PMID: 32851117 PMCID: PMC7441496 DOI: 10.1021/acsphotonics.0c00701] [Citation(s) in RCA: 1] [Impact Index Per Article: 0.3] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Received: 04/28/2020] [Indexed: 05/15/2023]
Abstract
Subnanometer displacement detection lays the solid foundation for critical applications in modern metrology. In-plane displacement sensing, however, is mainly dominated by the detection of differential photocurrent signals from photodiodes, with resolution in the nanometer range. Here, we present an integrated nanoelectromechanical in-plane displacement sensor based on a nanoelectromechanical trampoline resonator. With a position resolution of 4 pm/ for a low laser power of 85 μW and a repeatability of 2 nm after five cycles of operation as well as good long-term stability, this new detection principle provides a reliable alternative for overcoming the current position detection limit in a wide variety of research and application fields.
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4
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Rangacharya VP, Wu K, Larsen PE, Thamdrup LHE, Ilchenko O, Hwu ET, Rindzevicius T, Boisen A. Quantifying Optical Absorption of Single Plasmonic Nanoparticles and Nanoparticle Dimers Using Microstring Resonators. ACS Sens 2020; 5:2067-2075. [PMID: 32529825 DOI: 10.1021/acssensors.0c00591] [Citation(s) in RCA: 1] [Impact Index Per Article: 0.3] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 12/29/2022]
Abstract
The wide and ever-increasing applications of thermoplasmonics demand the need for sensitive and reliable tools to probe optical absorptions of individual nanoparticles. However, most of the currently available techniques focus only on measuring the surface temperature of nanostructures in a particular medium and are either invasive or suffer from low sensitivity, lengthy calibration, or the inability to probe single structures with nanogaps. Here, we present for the first time the use of micromechanical SiN string resonators for quantifying optical absorption cross sections of individual plasmonic nanostructures. Monomers and dimers of nanospheres, nanostars, shell-isolated nanoparticles, and nanocubes are probed. A reliable data treatment method is developed to obtain the absorption cross sections as a function of responsivity across a string. The presented method exhibits an excellent sensitivity of ∼89 Hz/K. This allows quantification of optical absorption cross sections of individual plasmonic structures even when their plasmon resonance wavelengths are far from the laser excitation wavelength. The experimentally obtained optical absorption cross sections agree well with the simulations. Influencing factors including polarization, surface morphology, and nanogap size are discussed. The developed method and the obtained optical absorption profiles facilitate future development and optimization of thermoplasmonic applications.
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Affiliation(s)
- Varadarajan Padmanabhan Rangacharya
- Department of Health Technology, DTU Health Tech, Technical University of Denmark, 2800 Kgs. Lyngby, Denmark.,DNRF and Villum Fonden Center for Intelligent Drug Delivery and Sensing Using Microcontainers and Nanomechanics, IDUN, Technical University of Denmark, 2800 Kgs. Lyngby, Denmark
| | - Kaiyu Wu
- Department of Health Technology, DTU Health Tech, Technical University of Denmark, 2800 Kgs. Lyngby, Denmark.,DNRF and Villum Fonden Center for Intelligent Drug Delivery and Sensing Using Microcontainers and Nanomechanics, IDUN, Technical University of Denmark, 2800 Kgs. Lyngby, Denmark
| | - Peter Emil Larsen
- Department of Health Technology, DTU Health Tech, Technical University of Denmark, 2800 Kgs. Lyngby, Denmark.,DNRF and Villum Fonden Center for Intelligent Drug Delivery and Sensing Using Microcontainers and Nanomechanics, IDUN, Technical University of Denmark, 2800 Kgs. Lyngby, Denmark
| | - Lasse Højlund Eklund Thamdrup
- Department of Health Technology, DTU Health Tech, Technical University of Denmark, 2800 Kgs. Lyngby, Denmark.,DNRF and Villum Fonden Center for Intelligent Drug Delivery and Sensing Using Microcontainers and Nanomechanics, IDUN, Technical University of Denmark, 2800 Kgs. Lyngby, Denmark
| | - Oleksii Ilchenko
- Department of Health Technology, DTU Health Tech, Technical University of Denmark, 2800 Kgs. Lyngby, Denmark.,DNRF and Villum Fonden Center for Intelligent Drug Delivery and Sensing Using Microcontainers and Nanomechanics, IDUN, Technical University of Denmark, 2800 Kgs. Lyngby, Denmark
| | - En-Te Hwu
- Department of Health Technology, DTU Health Tech, Technical University of Denmark, 2800 Kgs. Lyngby, Denmark.,DNRF and Villum Fonden Center for Intelligent Drug Delivery and Sensing Using Microcontainers and Nanomechanics, IDUN, Technical University of Denmark, 2800 Kgs. Lyngby, Denmark
| | - Tomas Rindzevicius
- Department of Health Technology, DTU Health Tech, Technical University of Denmark, 2800 Kgs. Lyngby, Denmark.,DNRF and Villum Fonden Center for Intelligent Drug Delivery and Sensing Using Microcontainers and Nanomechanics, IDUN, Technical University of Denmark, 2800 Kgs. Lyngby, Denmark
| | - Anja Boisen
- Department of Health Technology, DTU Health Tech, Technical University of Denmark, 2800 Kgs. Lyngby, Denmark.,DNRF and Villum Fonden Center for Intelligent Drug Delivery and Sensing Using Microcontainers and Nanomechanics, IDUN, Technical University of Denmark, 2800 Kgs. Lyngby, Denmark
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5
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Mehrzad H, Habibimoghaddam F, Mohajerani E, Mohammadimasoudi M. Accurate quantification of photothermal heat originating from a plasmonic metasurface. OPTICS LETTERS 2020; 45:2355-2358. [PMID: 32287232 DOI: 10.1364/ol.387789] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Received: 01/13/2020] [Accepted: 03/12/2020] [Indexed: 06/11/2023]
Abstract
Photothermal effect in plasmonic nanostructures (thermoplasmonic), as a nanoscale heater, has been widely used in biomedical technology and optoelectronic devices. However, the big challenge in this effect is the quantitative characterization of the delivered heat to the surrounding environment. In this work, a plasmonic metasurface (as a nanoheater), and a Fabry-Perot (FP) cavity including liquid crystal (as a thermometer element) are integrated. The metasurface is manufactured through a bottom-up deposition method and has a near perfect absorption that causes an efficient temperature rising in the photothermal experiment under a low intensity of irradiation ($0.25\; {\rm W}/{{\rm cm}^2}$0.25W/cm2). Generated heat from the metasurface dissipates to the liquid crystal (LC) layer and makes a spectral shift of FP modes. More than 50°C temperature elevation with accuracy of 1.3°C are measured based on the consistency of anisotropic thermo-tropic data of the LC and a spectral shift of FP modes. The calculated figure of merit (FoM) of the constructed device, which indicates the temperature sensitivity, is 22. The FoM is four times more than other reported thermometry devices with broad spectral width. The device can be also used as an all-optical device to control the plasmonic resonance spectrum.
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Cazier N, Sadeghi P, Chien MH, Shawrav MM, Schmid S. Spectrally broadband electro-optic modulation with nanoelectromechanical string resonators. OPTICS EXPRESS 2020; 28:12294-12301. [PMID: 32403727 DOI: 10.1364/oe.388324] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Received: 01/27/2020] [Accepted: 03/18/2020] [Indexed: 06/11/2023]
Abstract
In this paper, we present a shutter-based electro-optical modulator made of two parallel nanoelectromechanical silicon nitride string resonators. These strings are covered with electrically connected gold electrodes and actuated either by Lorentz or electrostatic forces. The in-plane string vibrations modulate the width of the gap between the strings. The gold electrodes on both sides of the gap act as a mobile mirror that modulate the laser light that is focused in the middle of this gap. These electro-optical modulators can achieve an optical modulation depth of almost 100% for a driving voltage lower than 1 mV at a frequency of 314 kHz. The frequency range is determined by the string resonance frequency, which can take values of the order of a few hundred kilohertz to several megahertz. The strings are driven in the strongly nonlinear regime, which allows a frequency tuning of several kilohertz without significant effect on the optical modulation depth.
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7
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Wang J, Yang Y, Wang N, Yu K, Hartland GV, Wang GP. Long Lifetime and Coupling of Acoustic Vibrations of Gold Nanoplates on Unsupported Thin Films. J Phys Chem A 2019; 123:10339-10346. [DOI: 10.1021/acs.jpca.9b08733] [Citation(s) in RCA: 10] [Impact Index Per Article: 2.0] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 12/20/2022]
Affiliation(s)
- Junzhong Wang
- Institute of Microscale Optoelectronics, Shenzhen University, Shenzhen 518060, China
| | - Yang Yang
- Institute of Microscale Optoelectronics, Shenzhen University, Shenzhen 518060, China
| | - Neng Wang
- Institute of Microscale Optoelectronics, Shenzhen University, Shenzhen 518060, China
| | - Kuai Yu
- Institute of Microscale Optoelectronics, Shenzhen University, Shenzhen 518060, China
| | - Gregory V. Hartland
- Department of Chemistry and Biochemistry, University of Notre Dame, Notre Dame, Indiana 46556, United States
| | - Guo Ping Wang
- Institute of Microscale Optoelectronics, Shenzhen University, Shenzhen 518060, China
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8
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Ramos D, Malvar O, Davis ZJ, Tamayo J, Calleja M. Nanomechanical Plasmon Spectroscopy of Single Gold Nanoparticles. NANO LETTERS 2018; 18:7165-7170. [PMID: 30339403 DOI: 10.1021/acs.nanolett.8b03236] [Citation(s) in RCA: 11] [Impact Index Per Article: 1.8] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/08/2023]
Abstract
We experimentally demonstrate the effect of the localized surface plasmon resonance (LSPR) of a single gold nanoparticle (AuNP) of 100 nm in diameter on the mechanical resonance frequency of a free-standing silicon nitride membrane by means of optomechanical transduction. We discover that a key effect to explain the coupling in these systems is the extinction cross section enhancement due to the excitation of the LSPR at selected wavelengths. In order to validate this coupling, we have developed a fixed wavelength interferometric readout system with an integrated tunable laser source, which allows us to perform the first experimental demonstration of nanomechanical spectroscopy of deposited AuNPs onto the membrane, discerning in between single particles and dimers by the mechanical frequency shift. We have also introduced three-axis mechanical scanners with nanometer-scale resolution in our experimental setup to selectively study single nanoparticles or small clusters. Whereas the single particles are polarization-insensitive, the gold dimers have a clearly defined polarization angle dependency as expected by theory. Finally, we found an unexpected long-distance (∼200 nm) coupling of the LSPR of separated AuNPs coming out from the guided light by the silicon nitride membrane.
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Affiliation(s)
- Daniel Ramos
- Bionanomechanics Lab , Instituto de Micro y Nanotecnología, IMN-CNM (CSIC) , Isaac Newton 8 (PTM), E-28760 Tres Cantos, Madrid , Spain
| | - Oscar Malvar
- Bionanomechanics Lab , Instituto de Micro y Nanotecnología, IMN-CNM (CSIC) , Isaac Newton 8 (PTM), E-28760 Tres Cantos, Madrid , Spain
| | - Zachary J Davis
- Danish Technological Institute , Gregersensvej 1 , 2630 Taastrup , Denmark
| | - Javier Tamayo
- Bionanomechanics Lab , Instituto de Micro y Nanotecnología, IMN-CNM (CSIC) , Isaac Newton 8 (PTM), E-28760 Tres Cantos, Madrid , Spain
| | - Montserrat Calleja
- Bionanomechanics Lab , Instituto de Micro y Nanotecnología, IMN-CNM (CSIC) , Isaac Newton 8 (PTM), E-28760 Tres Cantos, Madrid , Spain
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9
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Drumming up single-molecule beats. Proc Natl Acad Sci U S A 2018; 115:11115-11117. [PMID: 30337481 DOI: 10.1073/pnas.1815764115] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/18/2022] Open
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10
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Abstract
Absorption microscopy is a promising alternative to fluorescence microscopy for single-molecule imaging. So far, molecular absorption has been probed optically via the attenuation of a probing laser or via photothermal effects. The sensitivity of optical probing is not only restricted by background scattering but it is fundamentally limited by laser shot noise, which minimizes the achievable single-molecule signal-to-noise ratio. Here, we present nanomechanical photothermal microscopy, which overcomes the scattering and shot-noise limit by detecting the photothermal heating of the sample directly with a temperature-sensitive substrate. We use nanomechanical silicon nitride drums, whose resonant frequency detunes with local heating. Individual Au nanoparticles with diameters from 10 to 200 nm and single molecules (Atto 633) are scanned with a heating laser with a peak irradiance of 354 ± 45 µW/µm2 using 50× long-working-distance objective. With a stress-optimized drum we reach a sensitivity of 16 fW/Hz1/2 at room temperature, resulting in a single-molecule signal-to-noise ratio of >70. The high sensitivity combined with the inherent wavelength independence of the nanomechanical sensor presents a competitive alternative to established tools for the analysis and localization of nonfluorescent single molecules and nanoparticles.
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11
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Zolotavin P, Alabastri A, Nordlander P, Natelson D. Plasmonic Heating in Au Nanowires at Low Temperatures: The Role of Thermal Boundary Resistance. ACS NANO 2016; 10:6972-6979. [PMID: 27355238 DOI: 10.1021/acsnano.6b02911] [Citation(s) in RCA: 9] [Impact Index Per Article: 1.1] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/06/2023]
Abstract
Inelastic electron tunneling and surface-enhanced optical spectroscopies at the molecular scale require cryogenic local temperatures even under illumination-conditions that are challenging to achieve with plasmonically resonant metallic nanostructures. We report a detailed study of the laser heating of plasmonically active nanowires at substrate temperatures from 5 to 60 K. The increase of the local temperature of the nanowire is quantified by a bolometric approach and could be as large as 100 K for a substrate temperature of 5 K and typical values of laser intensity. We also demonstrate that a ∼3-fold reduction of the local temperature increase is possible by switching to a sapphire or quartz substrate. Finite element modeling of the heat dissipation reveals that the local temperature increase of the nanowire at temperatures below ∼50 K is determined largely by the thermal boundary resistance of the metal-substrate interface. The model reproduces the striking experimental trend that in this regime the temperature of the nanowire varies nonlinearly with the incident optical power. The thermal boundary resistance is demonstrated to be a major constraint on reaching low temperatures necessary to perform simultaneous inelastic electron tunneling and surface-enhanced Raman spectroscopies.
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Affiliation(s)
- Pavlo Zolotavin
- Department of Physics and Astronomy, ‡Department of Electrical and Computer Engineering, and §Department of Materials Science and NanoEngineering, Rice University , 6100 Main Street, Houston, Texas 77005, United States
| | - Alessandro Alabastri
- Department of Physics and Astronomy, ‡Department of Electrical and Computer Engineering, and §Department of Materials Science and NanoEngineering, Rice University , 6100 Main Street, Houston, Texas 77005, United States
| | - Peter Nordlander
- Department of Physics and Astronomy, ‡Department of Electrical and Computer Engineering, and §Department of Materials Science and NanoEngineering, Rice University , 6100 Main Street, Houston, Texas 77005, United States
| | - Douglas Natelson
- Department of Physics and Astronomy, ‡Department of Electrical and Computer Engineering, and §Department of Materials Science and NanoEngineering, Rice University , 6100 Main Street, Houston, Texas 77005, United States
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12
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Thijssen R, Kippenberg TJ, Polman A, Verhagen E. Plasmomechanical Resonators Based on Dimer Nanoantennas. NANO LETTERS 2015; 15:3971-3976. [PMID: 25938170 DOI: 10.1021/acs.nanolett.5b00858] [Citation(s) in RCA: 12] [Impact Index Per Article: 1.3] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/04/2023]
Abstract
Nanomechanical resonators are highly suitable as sensors of minute forces, displacements, or masses. We realize a single plasmonic dimer antenna of subwavelength size, integrated with silicon nitride nanobeams. The sensitive dependence of the antenna response on the beam displacement creates a plasmomechanical system of deeply subwavelength size in all dimensions. We use it to demonstrate transduction of thermal vibrations to scattered light fields and discuss the noise properties and achievable coupling strengths in these systems.
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Affiliation(s)
- Rutger Thijssen
- †Center for Nanophotonics, FOM Institute AMOLF, Science Park 104, 1098 XG Amsterdam, The Netherlands
| | | | - Albert Polman
- †Center for Nanophotonics, FOM Institute AMOLF, Science Park 104, 1098 XG Amsterdam, The Netherlands
| | - Ewold Verhagen
- †Center for Nanophotonics, FOM Institute AMOLF, Science Park 104, 1098 XG Amsterdam, The Netherlands
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13
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Wu K, Rindzevicius T, Schmidt MS, Mogensen KB, Xiao S, Boisen A. Plasmon resonances of Ag capped Si nanopillars fabricated using mask-less lithography. OPTICS EXPRESS 2015; 23:12965-78. [PMID: 26074549 DOI: 10.1364/oe.23.012965] [Citation(s) in RCA: 14] [Impact Index Per Article: 1.6] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 05/05/2023]
Abstract
Localized surface plasmon resonances (LSPR) and plasmon couplings in Ag capped Si Nanopillar (Ag NP) structures are studied using 3D FEM simulations and dark-field scattering microscopy. Simulations show that a standalone Ag NP supports two LSPR modes, i.e. the particle mode and the cavity mode. The LSPR peak position of the particle mode can be tuned by changing the size of the Ag cap, and can be hybridized by leaning of pillars. The resonance position of the cavity resonance mode can be tuned primarily via the diameter of the Si pillar, and cannot be tuned via leaning of Ag NPs. The presence of a substrate dramatically changes the intensity of these two LSPR modes by introducing constructive and destructive interference patterns with incident and reflected fields. Experimental scattering spectra can be interpreted using theoretical simulations. The Ag NP substrate displays a broad plasmonic resonance band due to the contribution from both the hybridized particle LSPR and the cavity LSPR modes.
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15
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Villanueva LG, Schmid S. Evidence of Surface Loss as Ubiquitous Limiting Damping Mechanism in SiN Micro- and Nanomechanical Resonators. PHYSICAL REVIEW LETTERS 2014; 113:227201. [PMID: 25494083 DOI: 10.1103/physrevlett.113.227201] [Citation(s) in RCA: 23] [Impact Index Per Article: 2.3] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Received: 06/26/2014] [Indexed: 06/04/2023]
Abstract
Silicon nitride (SiN) micro- and nanomechanical resonators have attracted a lot of attention in various research fields due to their exceptionally high quality factors (Qs). Despite their popularity, the origin of the limiting loss mechanisms in these structures has remained controversial. In this Letter we propose an analytical model combining acoustic radiation loss with intrinsic loss. The model accurately predicts the resulting mode-dependent Qs of low-stress silicon-rich and high-stress stoichiometric SiN membranes. The large acoustic mismatch of the low-stress membrane to the substrate seems to minimize radiation loss and Qs of higher modes (n∧m≥3) are limited by intrinsic losses. The study of these intrinsic losses in low-stress membranes reveals a linear dependence with the membrane thickness. This finding was confirmed by comparing the intrinsic dissipation of arbitrary (membranes, strings, and cantilevers) SiN resonators extracted from literature, suggesting surface loss as ubiquitous damping mechanism in thin SiN resonators with Q_{surf}=βh and β=6×10^{10}±4×10^{10} m^{-1}. Based on the intrinsic loss the maximal achievable Qs and Qf products for SiN membranes and strings are outlined.
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Affiliation(s)
- L G Villanueva
- Advanced NEMS Group, École Polytechnique Fédérale de Lausanne (EPFL), CH-1015 Lausanne, Switzerland
| | - S Schmid
- Department of Micro-and Nanotechnology, Technical University of Denmark, DTU Nanotech, DK-2800 Kongens Lyngby, Denmark
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16
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Thijssen R, Kippenberg T, Polman A, Verhagen E. Parallel Transduction of Nanomechanical Motion Using Plasmonic Resonators. ACS PHOTONICS 2014; 1:1181-1188. [PMID: 25642442 PMCID: PMC4307941 DOI: 10.1021/ph500262b] [Citation(s) in RCA: 7] [Impact Index Per Article: 0.7] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Received: 07/21/2014] [Indexed: 05/28/2023]
Abstract
We demonstrate parallel transduction of thermally driven mechanical motion of an array of gold-coated silicon nitride nanomechanical beams, by using near-field confinement in plasmonic metal-insulator-metal resonators supported in the gap between the gold layers. The free-space optical readout, enabled by the plasmonic resonances, allows for addressing multiple mechanical resonators in a single measurement. Light absorbed in the metal layer of the beams modifies their mechanical properties, allowing photothermal tuning of the eigenfrequencies. The appearance of photothermally driven parametric amplification indicates the possibility of plasmonic mechanical actuation.
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Affiliation(s)
- Rutger Thijssen
- Center
for Nanophotonics, FOM Institute AMOLF, Science Park 104, 1098XG Amsterdam, The Netherlands
| | | | - Albert Polman
- Center
for Nanophotonics, FOM Institute AMOLF, Science Park 104, 1098XG Amsterdam, The Netherlands
| | - Ewold Verhagen
- Center
for Nanophotonics, FOM Institute AMOLF, Science Park 104, 1098XG Amsterdam, The Netherlands
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