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Czelej K, Mansoor M, Sarsil MA, Tas M, Sorkhe YA, Mansoor M, Mansoor M, Derin B, Ergen O, Timur S, Ürgen M. Atomistic Origins of Various Luminescent Centers and n-Type Conductivity in GaN: Exploring the Point Defects Induced by Cr, Mn, and O through an Ab Initio Thermodynamic Approach. CHEMISTRY OF MATERIALS : A PUBLICATION OF THE AMERICAN CHEMICAL SOCIETY 2024; 36:6392-6409. [PMID: 39005534 PMCID: PMC11238542 DOI: 10.1021/acs.chemmater.4c00178] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Grants] [Track Full Text] [Figures] [Subscribe] [Scholar Register] [Received: 01/21/2024] [Revised: 06/10/2024] [Accepted: 06/11/2024] [Indexed: 07/16/2024]
Abstract
GaN is a technologically indispensable material for various optoelectronic properties, mainly due to the dopant-induced or native atomic-scale point defects that can create single photon emitters, a range of luminescence bands, and n- or p-type conductivities. Among the various dopants, chromium and manganese-induced defects have been of particular interest over the past few years, because some of them contribute to our present-day light-emitting diode (LED) and spintronic technologies. However, the nature of such atomistic centers in Cr and Mn-doped GaN is yet to be understood. A comprehensive defect thermodynamic analysis of Cr- and Mn-induced defects is essential for their engineering in GaN crystals because by mapping out the defect stabilities as a function of crystal growth parameters, we can maximize the concentration of the target point defects. We therefore investigate chromium and manganese-induced defects in GaN with ab initio methods using the highly accurate exchange-correlation hybrid functionals, and the phase transformations upon excess incorporation of these dopants using the CALPHAD method. We also investigate the impact of oxygen codoping that can be unintentionally incorporated during crystal growth. Our analysis sheds light on the atomistic cause of the unintentional n-type conductivity in GaN, being ON-related. In the case of Cr doping, the formation of CrGa defects is the most dominant, with an E +/0 charge transition at E VBM + 2.19 eV. Increasing nitrogen partial pressure tends to enhance the concentration of CrGa. However, in the case of doping with Mn, several different Mn-related centers can form depending on the growth conditions, with MnGa being the most dominant. MnGa possesses the E 2+/+, E +/0, and E 0/- charge transitions at 0.56, 1.04, and 2.10 eV above the VBM. The incorporation of oxygen tends to cause the formation of the MnGa-VGa center, which explains a series of prior experimental observations in Mn-doped GaN. We provide a powerful tool for point defect engineering in wide band gap binary semiconductors that can be readily used to design optimal crystal growth protocols.
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Affiliation(s)
- Kamil Czelej
- Faculty
of Chemical and Process Engineering, Warsaw
University of Technology, Waryńskiego 1, 00-645 Warsaw, Poland
- Department
of Complex System Modeling, Institute of Theoretical Physics, Faculty
of Physics, University of Warsaw, Ludwika Pasteura 5, 02-093 Warsaw, Poland
| | - Mubashir Mansoor
- Metallurgical
and Materials Engineering Department, Istanbul
Technical University, 34469 Maslak, Istanbul, Turkey
- Department
of Applied Physics, Istanbul Technical University, 34469 Maslak, Istanbul, Turkey
| | - Mehmet Ali Sarsil
- Department
of Electronics and Communications Engineering, Istanbul Technical University, 34469 Maslak, Istanbul, Turkey
| | - Mert Tas
- Department
of Electronics and Communications Engineering, Istanbul Technical University, 34469 Maslak, Istanbul, Turkey
| | - Yahya A. Sorkhe
- Metallurgical
and Materials Engineering Department, Istanbul
Technical University, 34469 Maslak, Istanbul, Turkey
| | - Mehya Mansoor
- Metallurgical
and Materials Engineering Department, Istanbul
Technical University, 34469 Maslak, Istanbul, Turkey
- Department
of Geological Engineering, Istanbul Technical
University, 34469 Maslak, Istanbul, Turkey
| | - Maryam Mansoor
- Metallurgical
and Materials Engineering Department, Istanbul
Technical University, 34469 Maslak, Istanbul, Turkey
- Nuclear
Engineering Department, Energy Institute, Istanbul Technical University, 34469 Maslak, Istanbul, Turkey
- Department
of Mining Engineering, Istanbul Technical
University, 34469 Maslak, Istanbul, Turkey
| | - Bora Derin
- Metallurgical
and Materials Engineering Department, Istanbul
Technical University, 34469 Maslak, Istanbul, Turkey
| | - Onur Ergen
- Department
of Electronics and Communications Engineering, Istanbul Technical University, 34469 Maslak, Istanbul, Turkey
| | - Servet Timur
- Metallurgical
and Materials Engineering Department, Istanbul
Technical University, 34469 Maslak, Istanbul, Turkey
| | - Mustafa Ürgen
- Metallurgical
and Materials Engineering Department, Istanbul
Technical University, 34469 Maslak, Istanbul, Turkey
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Chiang SE, Chang WH, Chen YT, Li WC, Yuan CT, Shen JL, Chang SH. Dislocation characterization in c-plane GaN epitaxial layers on 6 inch Si wafer with a fast second-harmonic generation intensity mapping technique. NANOTECHNOLOGY 2023; 34:155704. [PMID: 36657161 DOI: 10.1088/1361-6528/acb4a0] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Received: 11/17/2022] [Accepted: 01/19/2023] [Indexed: 06/17/2023]
Abstract
Second harmonic generation (SHG) intensity, Raman scattering stress, photoluminescence and reflected interference pattern are used to determine the distributions of threading dislocations (TDs) and horizontal dislocations (HDs) in thec-plane GaN epitaxial layers on 6 inch Si wafer which is a structure of high electron mobility transistor (HEMT). The Raman scattering spectra show that the TD and HD result in the tensile stress and compressive stress in the GaN epitaxial layers, respectively. Besides, the SHG intensity is confirmed that to be proportional to the stress value of GaN epitaxial layers, which explains the spatial distribution of SHG intensity for the first time. It is noted that the dislocation-mediated SHG intensity mapping image of the GaN epitaxial layers on 6 inch Si wafer can be obtained within 2 h, which can be used in the optimization of high-performance GaN based HEMTs.
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Affiliation(s)
- Shou-En Chiang
- Department of Physics, Chung Yuan Christian University, Taoyuan 320314, Taiwan, ROC
- Research Center for Semiconductor Materials & Advanced Optics, Chung Yuan Christian University, Taoyuan 320314, Taiwan, ROC
| | - Wen-Hsin Chang
- Department of Physics, Chung Yuan Christian University, Taoyuan 320314, Taiwan, ROC
| | - Yu-Ting Chen
- Department of Physics, Chung Yuan Christian University, Taoyuan 320314, Taiwan, ROC
| | - Wen-Chung Li
- Department of Physics, Chung Yuan Christian University, Taoyuan 320314, Taiwan, ROC
- Wafer Works Corporation, Taoyuan 32542, Taiwan, ROC
- LEAP Semiconductor Corporation, Taoyuan 33045, Taiwan, ROC
| | - Chi-Tsu Yuan
- Department of Physics, Chung Yuan Christian University, Taoyuan 320314, Taiwan, ROC
- Research Center for Semiconductor Materials & Advanced Optics, Chung Yuan Christian University, Taoyuan 320314, Taiwan, ROC
| | - Ji-Lin Shen
- Department of Physics, Chung Yuan Christian University, Taoyuan 320314, Taiwan, ROC
- Research Center for Semiconductor Materials & Advanced Optics, Chung Yuan Christian University, Taoyuan 320314, Taiwan, ROC
| | - Sheng Hsiung Chang
- Department of Physics, Chung Yuan Christian University, Taoyuan 320314, Taiwan, ROC
- Research Center for Semiconductor Materials & Advanced Optics, Chung Yuan Christian University, Taoyuan 320314, Taiwan, ROC
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3
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Sheen M, Ko Y, Kim DU, Kim J, Byun JH, Choi Y, Ha J, Yeon KY, Kim D, Jung J, Choi J, Kim R, Yoo J, Kim I, Joo C, Hong N, Lee J, Jeon SH, Oh SH, Lee J, Ahn N, Lee C. Highly efficient blue InGaN nanoscale light-emitting diodes. Nature 2022; 608:56-61. [PMID: 35922503 DOI: 10.1038/s41586-022-04933-5] [Citation(s) in RCA: 3] [Impact Index Per Article: 1.5] [Reference Citation Analysis] [Abstract] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Received: 09/27/2021] [Accepted: 06/06/2022] [Indexed: 11/09/2022]
Abstract
Indium gallium nitride (InGaN)-based micro-LEDs (μLEDs) are suitable for meeting ever-increasing demands for high-performance displays owing to their high efficiency, brightness and stability1-5. However, μLEDs have a large problem in that the external quantum efficiency (EQE) decreases with the size reduction6-9. Here we demonstrate a blue InGaN/GaN multiple quantum well (MQW) nanorod-LED (nLED) with high EQE. To overcome the size-dependent EQE reduction problem8,9, we studied the interaction between the GaN surface and the sidewall passivation layer through various analyses. Minimizing the point defects created during the passivation process is crucial to manufacturing high-performance nLEDs. Notably, the sol-gel method is advantageous for the passivation because SiO2 nanoparticles are adsorbed on the GaN surface, thereby minimizing its atomic interactions. The fabricated nLEDs showed an EQE of 20.2 ± 0.6%, the highest EQE value ever reported for the LED in the nanoscale. This work opens the way for manufacturing self-emissive nLED displays that can become an enabling technology for next-generation displays.
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Affiliation(s)
| | - Yunhyuk Ko
- Samsung Display, Yongin-si, Republic of Korea
| | - Dong-Uk Kim
- Samsung Display, Yongin-si, Republic of Korea
| | - Jongil Kim
- Department of Energy Engineering, KENTECH Institute for Energy Materials and Devices, Korea Institute of Energy Technology (KENTECH), Naju, Republic of Korea
| | - Jin-Ho Byun
- Department of Physics, Pusan National University, Busan, Republic of Korea
| | - YongSeok Choi
- Samsung Electronics LED Business Team, Yongin-si, Republic of Korea
| | - Jonghoon Ha
- Samsung Electronics LED Business Team, Yongin-si, Republic of Korea
| | | | - Dohyung Kim
- Samsung Display, Yongin-si, Republic of Korea
| | | | | | - Ran Kim
- Samsung Display, Yongin-si, Republic of Korea
| | - Jewon Yoo
- Samsung Display, Yongin-si, Republic of Korea
| | - Inpyo Kim
- Samsung Display, Yongin-si, Republic of Korea
| | - Chanwoo Joo
- Samsung Display, Yongin-si, Republic of Korea
| | - Nami Hong
- Samsung Display, Yongin-si, Republic of Korea
| | - Joohee Lee
- Samsung Display, Yongin-si, Republic of Korea
| | | | - Sang Ho Oh
- Department of Energy Engineering, KENTECH Institute for Energy Materials and Devices, Korea Institute of Energy Technology (KENTECH), Naju, Republic of Korea
| | - Jaekwang Lee
- Department of Physics, Pusan National University, Busan, Republic of Korea
| | - Nari Ahn
- Samsung Display, Yongin-si, Republic of Korea
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Wang Q, Ri S, Xia P, Ye J, Toyama N. Point defect detection and strain mapping in Si single crystal by two-dimensional multiplication moiré method. NANOSCALE 2021; 13:16900-16908. [PMID: 34673875 DOI: 10.1039/d1nr04054e] [Citation(s) in RCA: 1] [Impact Index Per Article: 0.3] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/13/2023]
Abstract
Although defect detection is critical for evaluating the manufacturing processes of semiconductor materials and metals, the detection of crystal defects, especially point defects, over a large field of view still faces considerable challenges. Herein, we report on the development of a two-dimensional (2D) multiplication moiré method using digital image processing to simultaneously detect point and line defects in a wide field of view. Defect locations were automatically detected by employing the concept of a hybrid strain, that is, the absolute value of the product of the strain distributions in different principal directions. To demonstrate a typical application of the proposed method, the hybrid strain distribution in a Si single crystal was measured, and point defects were successfully detected by transmission electron microscopy. The effectiveness of the proposed method was experimentally verified based on the enlarged views of atomic structures at several detected defect locations. This method is capable of visualizing defects by magnifying the lattice distortion in situ, which is a good solution to the problem faced by traditional methods in detecting point defects. This study paves the way for the detection of vacancies, interstitial atoms, substitutional atoms, dislocations, slips, and interfaces in various crystal structures and 2D materials.
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Affiliation(s)
- Qinghua Wang
- Research Institute for Measurement and Analytical Instrumentation, National Metrology Institute of Japan (NMIJ), National Institute of Advanced Industrial Science and Technology (AIST), Tsukuba 305-8568, Japan.
| | - Shien Ri
- Research Institute for Measurement and Analytical Instrumentation, National Metrology Institute of Japan (NMIJ), National Institute of Advanced Industrial Science and Technology (AIST), Tsukuba 305-8568, Japan.
| | - Peng Xia
- Research Institute for Measurement and Analytical Instrumentation, National Metrology Institute of Japan (NMIJ), National Institute of Advanced Industrial Science and Technology (AIST), Tsukuba 305-8568, Japan.
| | - Jiaxing Ye
- Research Institute for Measurement and Analytical Instrumentation, National Metrology Institute of Japan (NMIJ), National Institute of Advanced Industrial Science and Technology (AIST), Tsukuba 305-8568, Japan.
| | - Nobuyuki Toyama
- Research Institute for Measurement and Analytical Instrumentation, National Metrology Institute of Japan (NMIJ), National Institute of Advanced Industrial Science and Technology (AIST), Tsukuba 305-8568, Japan.
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Demchenko DO, Vorobiov M, Andrieiev O, Myers TH, Reshchikov MA. Shallow and Deep States of Beryllium Acceptor in GaN: Why Photoluminescence Experiments Do Not Reveal Small Polarons for Defects in Semiconductors. PHYSICAL REVIEW LETTERS 2021; 126:027401. [PMID: 33512232 DOI: 10.1103/physrevlett.126.027401] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Received: 05/26/2020] [Revised: 08/28/2020] [Accepted: 12/10/2020] [Indexed: 06/12/2023]
Abstract
Currently, only one shallow acceptor (Mg) has been discovered in GaN. Here, using photoluminescence (PL) measurements combined with hybrid density functional theory, we demonstrate that a shallow effective-mass state also exists for the Be_{Ga} acceptor. A PL band with a maximum at 3.38 eV reveals a shallow Be_{Ga} acceptor level at 113±5 meV above the valence band, which is the lowest value among any dopants in GaN reported to date. Calculations suggest that the Be_{Ga} is a dual-nature acceptor with the "bright" shallow state responsible for the 3.38 eV PL band, and the "dark," strongly localized small polaronic state with a significantly lower hole capture efficiency.
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Affiliation(s)
- D O Demchenko
- Department of Physics, Virginia Commonwealth University, Richmond, Virginia 23220, USA
| | - M Vorobiov
- Department of Physics, Virginia Commonwealth University, Richmond, Virginia 23220, USA
| | - O Andrieiev
- Department of Physics, Virginia Commonwealth University, Richmond, Virginia 23220, USA
| | - T H Myers
- Materials Science, Engineering, and Commercialization Program, Texas State University, San Marcos, Texas 78666, USA
| | - M A Reshchikov
- Department of Physics, Virginia Commonwealth University, Richmond, Virginia 23220, USA
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Fedorenko V, Viter R, Mrówczyński R, Damberga D, Coy E, Iatsunskyi I. Synthesis and photoluminescence properties of hybrid 1D core-shell structured nanocomposites based on ZnO/polydopamine. RSC Adv 2020; 10:29751-29758. [PMID: 35518237 PMCID: PMC9056168 DOI: 10.1039/d0ra04829a] [Citation(s) in RCA: 20] [Impact Index Per Article: 5.0] [Reference Citation Analysis] [Abstract] [Track Full Text] [Download PDF] [Figures] [Journal Information] [Subscribe] [Scholar Register] [Received: 06/01/2020] [Accepted: 08/04/2020] [Indexed: 01/02/2023] Open
Abstract
In the present work, we report on the modelling of processes at the zinc oxide and polydopamine (ZnO/PDA) interface. The PDA layer was deposited onto ZnO nanorods (NRs) via chemical bath deposition. The defect concentrations in ZnO before and after PDA deposition were calculated and analysed. The ZnONRs/PDA core–shell nanostructures were studied by transmission electron microscopy (TEM), X-ray diffraction (XRD), Raman and Fourier-transform infrared (FTIR) spectroscopy, photoluminescence (PL) measurements, and diffuse reflectance spectroscopy. The TEM and electron energy loss spectroscopy (EELS) measurements confirmed the conformal coating of PDA, while the PL emission from ZnO and ZnONRs/PDA samples showed a reduction of intensity after the PDA deposition. The decrease of defect concentration participating in PL and quantum efficiency explains the PL reduction. Finally, the observed decrease of activation energies and a shift of the PL peaks are attributed to the formation of an additional local electrical field between the PDA and ZnO nanostructures. The results shown in this study provide a unique insight into the optical and electronic processes of the ZnO/PDA interface.![]()
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Affiliation(s)
- Viktoriia Fedorenko
- Institute of Atomic Physics and Spectroscopy, University of Latvia Jelgavas 3 Riga LV-1004 Latvia .,Center for Collective Use of Scientific Equipment, Sumy State University 31, Sanatornaya St. 40018 Sumy Ukraine
| | - Roman Viter
- Institute of Atomic Physics and Spectroscopy, University of Latvia Jelgavas 3 Riga LV-1004 Latvia .,Center for Collective Use of Scientific Equipment, Sumy State University 31, Sanatornaya St. 40018 Sumy Ukraine
| | - Radosław Mrówczyński
- NanoBioMedical Centre, Adam Mickiewicz University in Poznan Wszechnicy Piastowskiej str. 3 61-614 Poznan Poland
| | - Daina Damberga
- Institute of Atomic Physics and Spectroscopy, University of Latvia Jelgavas 3 Riga LV-1004 Latvia
| | - Emerson Coy
- NanoBioMedical Centre, Adam Mickiewicz University in Poznan Wszechnicy Piastowskiej str. 3 61-614 Poznan Poland
| | - Igor Iatsunskyi
- NanoBioMedical Centre, Adam Mickiewicz University in Poznan Wszechnicy Piastowskiej str. 3 61-614 Poznan Poland
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7
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Reshchikov MA, Vorobiov M, Andrieiev O, Ding K, Izyumskaya N, Avrutin V, Usikov A, Helava H, Makarov Y. Determination of the concentration of impurities in GaN from photoluminescence and secondary-ion mass spectrometry. Sci Rep 2020; 10:2223. [PMID: 32041980 PMCID: PMC7010669 DOI: 10.1038/s41598-020-59033-z] [Citation(s) in RCA: 16] [Impact Index Per Article: 4.0] [Reference Citation Analysis] [Abstract] [Track Full Text] [Download PDF] [Figures] [Journal Information] [Subscribe] [Scholar Register] [Received: 09/10/2019] [Accepted: 01/23/2020] [Indexed: 11/09/2022] Open
Abstract
Photoluminescence (PL) was used to estimate the concentration of carbon in GaN grown by hydride vapor phase epitaxy (HVPE). The PL data were compared with profiles of the impurities obtained from secondary ion mass spectrometry (SIMS) measurements. Comparison of PL and SIMS data has revealed that apparently high concentrations of C and O at depths up to 1 µm in SIMS profiles do not represent depth distributions of these species in the GaN matrix but are rather caused by post-growth surface contamination and knocking-in impurity species from the surface. In particular, PL analysis supplemented by reactive ion etching up to the depth of 400 nm indicates that the concentration of carbon in nitrogen sites is below 2-5 × 1015 cm-3 at any depth of GaN samples grown by HVPE. We demonstrate that PL is a very sensitive and reliable tool to determine the concentrations of impurities in the GaN matrix.
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Affiliation(s)
- M A Reshchikov
- Department of Physics, Virginia Commonwealth University, Richmond, VA, 23220, USA.
| | - M Vorobiov
- Department of Physics, Virginia Commonwealth University, Richmond, VA, 23220, USA
| | - O Andrieiev
- Department of Physics, Virginia Commonwealth University, Richmond, VA, 23220, USA
| | - K Ding
- Department of Electrical Engineering and Computer Science, Virginia Commonwealth University, Richmond, VA, 23220, USA
| | - N Izyumskaya
- Department of Electrical Engineering and Computer Science, Virginia Commonwealth University, Richmond, VA, 23220, USA
| | - V Avrutin
- Department of Electrical Engineering and Computer Science, Virginia Commonwealth University, Richmond, VA, 23220, USA
| | - A Usikov
- Saint-Petersburg National Research University of Information Technologies, Mechanics and Optics, 49 Kronverkskiy Ave., 197101, Saint Petersburg, Russia
| | - H Helava
- Nitride Crystals, Inc. 9702 Gayton Road, Ste. 320, Richmond, VA, 23238, USA
| | - Yu Makarov
- Nitride Crystals, Inc. 9702 Gayton Road, Ste. 320, Richmond, VA, 23238, USA
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8
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Abstract
Two yellow luminescence bands related to different defects have been revealed in undoped GaN grown by hydride vapor phase epitaxy (HVPE). One of them, labeled YL1, has the zero-phonon line (ZPL) at 2.57 eV and the band maximum at 2.20 eV at low temperature. This luminescence band is the ubiquitous yellow band observed in GaN grown by metalorganic chemical vapor deposition, either undoped (but containing carbon with high concentration) or doped with Si. Another yellow band, labeled YL3, has the ZPL at 2.36 eV and the band maximum at 2.09 eV. Previously, the ZPL and fine structure of this band were erroneously attributed to the red luminescence band. Both the YL1 and YL3 bands show phonon-related fine structure at the high-energy side, which is caused by strong electron-phonon coupling involving the LO and pseudo-local phonon modes. The shapes of the bands are described with a one-dimensional configuration coordinate model, and the Huang-Rhys factors are found. Possible origins of the defect-related luminescence bands are discussed.
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