Optomechanical resonating probe for very high frequency sensing of atomic forces

Simultaneous Optical and Mechanical Sensing Based on Optomechanical Resonators

Optical and mechanical resonators have each been abundantly employed in sensing applications, albeit following separate development. Here we show that bringing together optical and mechanical resonances in a unique sensing device significantly improves the sensor performance. To that purpose, we employ nanoscale optomechanical disk resonators that simultaneously support high quality optical and mechanical modes localized in tiny volumes, which provide extraordinary sensitivities. We perform environmental sensing, but the conclusions of our work extend to other sensing applications. First, we determine optical and mechanical responsivities to temperature and relative humidity changes. Second, by characterizing mechanical and optical frequency stabilities, we determine the corresponding limits of detection. Mechanical modes appear more sensitive to relative humidity changes, while optical modes appear more sensitive to temperature ones, reaching, respectively, 0.05% and 0.6 mK of independent resolution. We then prove that simultaneous optical and mechanical monitoring enables disentangling both effects and demonstrates 0.1% and 1 mK resolution, even considering that both parameters may change at the same time. Finally, we highlight the importance of actively tracking the optical mode when optomechanical sensor devices. Not doing so enforces tedious independent calibration, influences the device sensitivity during the experiment, and shortens the sensing range. The present work hence clarifies the requirements for the optimal operation of optomechanical sensors, which will be of importance for chemical and biological sensing.

Integrated optical-readout of a high-Q mechanical out-of-plane mode

The rapid development of high-Q_M macroscopic mechanical resonators has enabled great advances in optomechanics. Further improvements could allow for quantum-limited or quantum-enhanced applications at ambient temperature. Some of the remaining challenges include the integration of high-Q_M structures on a chip, while simultaneously achieving large coupling strengths through an optical read-out. Here, we present a versatile fabrication method, which allows us to build fully integrated optomechanical structures. We place a photonic crystal cavity directly above a mechanical resonator with high-Q_M fundamental out-of-plane mode, separated by a small gap. The highly confined optical field has a large overlap with the mechanical mode, enabling strong optomechanical interaction strengths. Furthermore, we implement a novel photonic crystal design, which allows for a very large cavity photon number, a highly important feature for optomechanical experiments and sensor applications. Our versatile approach is not limited to our particular design but allows for integrating an out-of-plane optical read-out into almost any device layout. Additionally, it can be scaled to large arrays and paves the way to realizing quantum experiments and applications with mechanical resonators based on high-Q_M out-of-plane modes alike.

Resonant-Opto-Thermomechanical Oscillator (ROTMO): A Low-Power, Large Displacement, High-Frequency Optically Driven Microactuator

A light-driven micromechanical oscillator is presented, which can be operated by a low optical power (in the mW, or even the µW range), can produce large mechanical displacements (>5-100 µm), and can be designed to operate at frequencies from sub-kHz up to more than 200 kHz. The actuation of the oscillator is achieved by an asymmetrically metal-coated optical microwire configured into a silica micromechanical oscillator. The metalized optical microwire confines and absorbs the light strongly over a short distance, which results in a controlled optical power conversion into heat, and, consequently, into mechanical actuation through the temperature rise and the difference in thermal expansions of the silica microwire and the asymmetrically applied metal layer. Mechanical displacements are amplified further by the resonance operation of the oscillator, which is driven by a low-power, harmonic optical excitation signal generated by a current-modulated laser diode. Proper selection of the micromechanical oscillator's geometrical configuration and materials allows for a high-frequency operation at large mechanical displacements of the oscillator, while relying on low excitation optical power. The presented concept of a fully optically driven micromechanical oscillator may, thus, present a basis for realization of new classes of actuated micro-opto-mechanical Systems and similar photonics microdevices.

Real-Time Sensing with Multiplexed Optomechanical Resonators

Nanoelectromechanical resonators have been successfully used for a variety of sensing applications. Their extreme resolution comes from their small size, which strongly limits their capture area. This leads to a long analysis time and the requirement for large sample quantity. Moreover, the efficiency of the electrical transductions commonly used for silicon resonators degrades with increasing frequency, limiting the achievable mechanical bandwidth and throughput. Multiplexing a large number of high-frequency resonators appears to be a solution, but this is complex with electrical transductions. We propose here a route to solve these issues, with a multiplexing scheme for very high-frequency optomechanical resonators. We demonstrate the simultaneous frequency measurement of three silicon microdisks fabricated with a 200 mm wafer large-scale process. The readout architecture is simple and does not degrade the sensing resolutions. This paves the way toward the realization of sensors for multiparametric analysis with an extremely low limit of detection and response time.

Multimode Optomechanical Weighting of a Single Nanoparticle

We demonstrate multimode optomechanical sensing of individual nanoparticles with a radius between 75 and 150 nm. A semiconductor optomechanical disk resonator is optically driven and detected under ambient conditions, as nebulized nanoparticles land on it. Multiple mechanical and optical resonant signals of the disk are tracked simultaneously, providing access to several pieces of physical information about the landing analyte in real time. Thanks to a fast camera registering the time and position of landing, these signals can be employed to weight each nanoparticle with precision. Sources of error and deviation are discussed and modeled, indicating a path to evaluate the elasticity of the nanoparticles on top of their mere mass. The device is optimized for the future investigation of biological particles in the high megadalton range, such as large viruses.

Very-high-frequency probes for atomic force microscopy with silicon optomechanics

Atomic force microscopy (AFM) has been consistently supporting nanosciences and nanotechnologies for over 30 years and is used in many fields from condensed matter physics to biology. It enables the measurement of very weak forces at the nanoscale, thus elucidating the interactions at play in fundamental processes. Here, we leverage the combined benefits of micro/nanoelectromechanical systems and cavity optomechanics to fabricate a sensor for dynamic mode AFM at a frequency above 100 MHz. This frequency is two decades above the fastest commercial AFM probes, suggesting an opportunity for measuring forces at timescales unexplored thus far. The fabrication is achieved using very-large-scale integration technologies derived from photonic silicon circuits. The probe's optomechanical ring cavity is coupled to a 1.55 μm laser light and features a 130 MHz mechanical resonance mode with a quality factor of 900 in air. A limit of detection in the displacement of 3 × 10^-16 m/√Hz is obtained, enabling the detection of the Brownian motion of the probe and paving the way for force sensing experiments in the dynamic mode with a working vibration amplitude in the picometer range. When inserted in a custom AFM instrument embodiment, this optomechanical sensor demonstrates the capacity to perform force-distance measurements and to maintain a constant interaction strength between the tip and sample, an essential requirement for AFM applications. Experiments indeed show a stable closed-loop operation with a setpoint of 4 nN/nm for an unprecedented subpicometer vibration amplitude, where the tip-sample interaction is mediated by a stretched water meniscus.

Demonstration of atomic force microscopy imaging using an integrated opto-electro-mechanical transducer

The low throughput of atomic force microscopy (AFM) is the main drawback in its large-scale deployment in industrial metrology. A promising solution would be based on the parallelization of the scanning probe system, allowing acquisition of the image by an array of probes operating simultaneously. A key step for reaching this goal relies on the miniaturization and integration of the sensing mechanism. Here, we demonstrate AFM imaging employing an on-chip displacement sensor, based on a photonic crystal cavity, combined with an integrated photodetector and coupled to an on-chip waveguide. This fully-integrated sensor allows high-sensitivity and high-resolution in a very small footprint and its readout is compatible with current commercial AFM systems.

Electro-Optomechanical Modulation Instability in a Semiconductor Resonator

In semiconductor nano-optomechanical resonators, several forms of light-matter interaction can enrich the canonical radiation pressure coupling of light and mechanical motion and give rise to new dynamical regimes. Here, we observe an electro-optomechanical modulation instability in a gallium arsenide disk resonator. The regime is evidenced by the concomitant formation of regular and dense combs in the radio-frequency and optical spectrums of the resonator associated with a permanent pulsatory dynamics of the mechanical motion and optical intensity. The mutual coupling between light, mechanical oscillations, carriers, and heat, notably through photothermal interactions, stabilizes an extended mechanical comb in the ultrahigh frequency range that can be controlled optically.

Optomechanical atomic force microscope

In the scanning probe microscope system, the weak signal detection of cantilever vibration is one of the important factors affecting the sensor sensitivity. In our current work, we present a novel design concept for an atomic force microscope (AFM) combined with optomechanics with an ultra-high quality factor and a low thermal noise. The detection system consists of a fixed mirror placed on the cantilever of the AFM and pump-probe beams that is equivalent to a Fabry-Perot cavity. We realize that the AFM combined with an optical cavity can achieve ultra-sensitive detection of force gradients of 10^-12 N m^-1 in the case of high-vacuum and low effective temperature of 1 mK, which may open up new avenues for super-high resolution imaging and super-high precision force spectroscopy.

Biological physics by high-speed atomic force microscopy

While many fields have contributed to biological physics, nanotechnology offers a new scale of observation. High-speed atomic force microscopy (HS-AFM) provides nanometre structural information and dynamics with subsecond resolution of biological systems. Moreover, HS-AFM allows us to measure piconewton forces within microseconds giving access to unexplored, fast biophysical processes. Thus, HS-AFM provides a tool to nourish biological physics through the observation of emergent physical phenomena in biological systems. In this review, we present an overview of the contribution of HS-AFM, both in imaging and force spectroscopy modes, to the field of biological physics. We focus on examples in which HS-AFM observations on membrane remodelling, molecular motors or the unfolding of proteins have stimulated the development of novel theories or the emergence of new concepts. We finally provide expected applications and developments of HS-AFM that we believe will continue contributing to our understanding of nature, by serving to the dialogue between biology and physics. This article is part of a discussion meeting issue 'Dynamic in situ microscopy relating structure and function'.

Optomechanical mass spectrometry

Nanomechanical mass spectrometry has proven to be well suited for the analysis of high mass species such as viruses. Still, the use of one-dimensional devices such as vibrating beams forces a trade-off between analysis time and mass resolution. Complex readout schemes are also required to simultaneously monitor multiple resonance modes, which degrades resolution. These issues restrict nanomechanical MS to specific species. We demonstrate here single-particle mass spectrometry with nano-optomechanical resonators fabricated with a Very Large Scale Integration process. The unique motion sensitivity of optomechanics allows designs that are impervious to particle position, stiffness or shape, opening the way to the analysis of large aspect ratio biological objects of great significance such as viruses with a tail or fibrils. Compared to top-down beam resonators with electrical read-out and state-of-the-art mass resolution, we show a three-fold improvement in capture area with no resolution degradation, despite the use of a single resonance mode.

The use of one dimensional devices in nanomechanical mass spectrometry leads to a trade-off between analysis time and resolution. Here, the authors report single-particle mass spectrometry using integrated optomechanical resonators, impervious to particle position, stiffness or shape.