1
|
Wang H, Majhi A, Tan WJ, Singhapong W, Morawe C, Sawhney K. Development of an advanced in-line multilayer deposition system at Diamond Light Source. JOURNAL OF SYNCHROTRON RADIATION 2024; 31:1050-1057. [PMID: 39120915 PMCID: PMC11371021 DOI: 10.1107/s1600577524006854] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Received: 03/14/2024] [Accepted: 07/12/2024] [Indexed: 08/10/2024]
Abstract
A state-of-the-art multilayer deposition system with a 4200 mm-long linear substrate translator housed within an ultra-high vacuum chamber has been developed. This instrument is engineered to produce single and multilayer coatings, accommodating mirrors up to 2000 mm in length through the utilization of eight rectangular cathodes. To ensure the quality and reliability of the coatings, the system incorporates various diagnostic tools for in situ thickness uniformity and stress measurement. Furthermore, the system features an annealing process capable of heating up to 700°C within the load-lock chamber. The entire operation, including pump down, deposition and venting processes, is automated through user-friendly software. In addition, all essential log data, power of sputtering source, working pressure and motion positions are automatically stored for comprehensive data analysis. Preliminary commissioning results demonstrate excellent lateral film thickness uniformity, achieving 0.26% along the translation direction over 1500 mm in dynamic mode. The multilayer deposition system is poised for use in fabricating periodic, lateral-graded and depth-graded multilayers, specifically catering to the beamlines for diverse scientific applications at Diamond Light Source.
Collapse
Affiliation(s)
| | | | | | - Wadwan Singhapong
- Diamond Light SourceDidcotUnited Kingdom
- Department of Mechanical EngineeringUniversity of BathBathUnited Kingdom
| | | | | |
Collapse
|
2
|
Manzanillas L, Ablett JM, Choukroun M, Iguaz FJ, Rueff JP. Development of an x-ray polarimeter at the SOLEIL synchrotron. THE REVIEW OF SCIENTIFIC INSTRUMENTS 2024; 95:053302. [PMID: 38804809 DOI: 10.1063/5.0207370] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Received: 03/07/2024] [Accepted: 05/08/2024] [Indexed: 05/29/2024]
Abstract
Synchrotron radiation facilities provide highly polarized x-ray beams across a wide energy range. However, the exact type and degree of polarization vary according to the beamline and experimental setup. To accurately determine the angle and degree of linear polarization, a portable x-ray polarimeter has been developed. This setup consists of a silicon drift detector that rotates around a target made of high-density polyethylene. The imprint generated in the angular distribution of scattered photons from the target at a 90-degree angle between the incident x-rays and detector has been exploited to determine the beam polarization. Measurements were conducted at the GALAXIES beamline of the SOLEIL synchrotron. The expected angular distribution of the scattered photons for a given beam polarization was obtained through simulations using the Geant4 simulation toolkit. An excellent agreement between simulations and the collected data has been obtained, validating the setup and enabling a precise determination of the beam polarization.
Collapse
Affiliation(s)
- L Manzanillas
- SOLEIL Synchrotron, L'Orme des Merisiers, Départementale 128, 91190 Saint-Aubin, France
| | - J M Ablett
- SOLEIL Synchrotron, L'Orme des Merisiers, Départementale 128, 91190 Saint-Aubin, France
| | - M Choukroun
- SOLEIL Synchrotron, L'Orme des Merisiers, Départementale 128, 91190 Saint-Aubin, France
| | - F J Iguaz
- SOLEIL Synchrotron, L'Orme des Merisiers, Départementale 128, 91190 Saint-Aubin, France
| | - J-P Rueff
- SOLEIL Synchrotron, L'Orme des Merisiers, Départementale 128, 91190 Saint-Aubin, France
| |
Collapse
|
3
|
Zhu J, Zhang J, Li H, Tu Y, Chen J, Wang H, Dhesi SS, Cui M, Zhu J, Jonnard P. Improving the soft X-ray reflectivity of Cr/Ti multilayers by co-deposition of B 4C. JOURNAL OF SYNCHROTRON RADIATION 2020; 27:1614-1617. [PMID: 33147186 DOI: 10.1107/s1600577520011741] [Citation(s) in RCA: 1] [Impact Index Per Article: 0.3] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Received: 01/13/2020] [Accepted: 08/27/2020] [Indexed: 06/11/2023]
Abstract
The `water window', covering 2.4-4.4 nm, is an important wavelength range particularly essential to biology research. Cr/Ti multilayers are one of the promising reflecting elements in this region because the near-normal-incidence reflectivity is theoretically as high as 64% at 2.73 nm. However, due to multilayer imperfections, the reported reflectivity is lower than 3% for near-normal incidence. Here, B and C were intentionally incorporated into ultra-thin Cr/Ti soft X-ray multilayers by co-deposition of B4C at the interfaces. The effect on the multilayer structure and composition has been investigated using X-ray reflectometry, X-ray photoelectron spectroscopy, and cross-section electron microscopy. It is shown that B and C are mainly bonded to Ti sites, forming a nonstoichiometric TiBxCy composition, which hinders the interface diffusion, supresses the crystallization of the Cr/Ti multilayer and dramatically improves the interface quality of Cr/TiBxCy multilayers. As a result, the near-normal-incidence reflectivity of soft X-rays increases from 4.48% to 15.75% at a wavelength of 2.73 nm.
Collapse
Affiliation(s)
- Jingtao Zhu
- MOE Key Laboratory of Advanced Micro-structured Materials, Institute of Precision Optical Engineering, School of Physics Science and Engineering, Tongji University, Shanghai 200092, People's Republic of China
| | - Jiayi Zhang
- MOE Key Laboratory of Advanced Micro-structured Materials, Institute of Precision Optical Engineering, School of Physics Science and Engineering, Tongji University, Shanghai 200092, People's Republic of China
| | - Haochuan Li
- MOE Key Laboratory of Advanced Micro-structured Materials, Institute of Precision Optical Engineering, School of Physics Science and Engineering, Tongji University, Shanghai 200092, People's Republic of China
| | - Yuchun Tu
- MOE Key Laboratory of Advanced Micro-structured Materials, Institute of Precision Optical Engineering, School of Physics Science and Engineering, Tongji University, Shanghai 200092, People's Republic of China
| | - Jinwen Chen
- MOE Key Laboratory of Advanced Micro-structured Materials, Institute of Precision Optical Engineering, School of Physics Science and Engineering, Tongji University, Shanghai 200092, People's Republic of China
| | - Hongchang Wang
- Diamond Light Source, Harwell Science and Innovation Campus, Didcot, Oxfordshire OX11 0DE, United Kingdom
| | - Sarnjeet S Dhesi
- Diamond Light Source, Harwell Science and Innovation Campus, Didcot, Oxfordshire OX11 0DE, United Kingdom
| | - Mingqi Cui
- Beijing Synchrotron Radiation Facility, Institute of High Energy Physics, Chinese Academic of Science, Beijing 200092, People's Republic of China
| | - Jie Zhu
- MOE Key Laboratory of Advanced Micro-structured Materials, Institute of Precision Optical Engineering, School of Physics Science and Engineering, Tongji University, Shanghai 200092, People's Republic of China
| | - Philippe Jonnard
- Sorbonne Université, Faculté des Sciences et Ingénierie, UMR CNRS, Laboratoire de Chimie Physique - Matière et Rayonnemment, 4 Place Jussieu, F-75252 Paris Cedex 05, France
| |
Collapse
|
4
|
|
5
|
Grizolli W, Laksman J, Hennies F, Jensen BN, Nyholm R, Sankari R. Multilayer based soft-x-ray polarimeter at MAX IV Laboratory. THE REVIEW OF SCIENTIFIC INSTRUMENTS 2016; 87:025102. [PMID: 26931886 DOI: 10.1063/1.4941066] [Citation(s) in RCA: 1] [Impact Index Per Article: 0.1] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/05/2023]
Abstract
A high precision five rotation-axes polarimeter using transmission multilayers as polarizers and reflection multilayers as analyzers has been designed and manufactured. To cover the extreme ultraviolet regime, Mo/Si, Cr/C, Sc/Cr, and W/B4C multilayers for transmission and reflection have also been designed and produced. The polarimeter mechanics is supported on a hexapod to simplify the alignment relative to photon beam. The instrument is designed so that it can be easily transferred between different beamlines.
Collapse
Affiliation(s)
| | | | - Franz Hennies
- MAX IV Laboratory, P.O. Box 118, SE-22100 Lund, Sweden
| | | | - Ralf Nyholm
- MAX IV Laboratory, P.O. Box 118, SE-22100 Lund, Sweden
| | - Rami Sankari
- MAX IV Laboratory, P.O. Box 118, SE-22100 Lund, Sweden
| |
Collapse
|
6
|
Hand M, Wang H, Dhesi SS, Sawhney K. Investigation of the polarization state of dual APPLE-II undulators. JOURNAL OF SYNCHROTRON RADIATION 2016; 23:176-181. [PMID: 26698061 PMCID: PMC4733936 DOI: 10.1107/s1600577515021645] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Figures] [Subscribe] [Scholar Register] [Received: 08/28/2015] [Accepted: 11/15/2015] [Indexed: 06/05/2023]
Abstract
The use of an APPLE II undulator is extremely important for providing a high-brilliance X-ray beam with the capability to switch between various photon beam polarization states. A high-precision soft X-ray polarimeter has been used to systematically investigate the polarization characteristics of the two helical APPLE II undulators installed on beamline I06 at Diamond Light Source. A simple data acquisition and processing procedure has been developed to determine the Stokes polarization parameters for light polarized at arbitrary linear angles emitted from a single undulator, and for circularly polarized light emitted from both undulators in conjunction with a single-period undulator phasing unit. The purity of linear polarization is found to deteriorate as the polarization angle moves away from the horizontal and vertical modes. Importantly, a negative correlation between the degree of circular polarization and the photon flux has been found when the phasing unit is used.
Collapse
Affiliation(s)
- Matthew Hand
- Diamond Light Source, Harwell Science and Innovation Campus, Didcot, OX11 0DE, UK
| | - Hongchang Wang
- Diamond Light Source, Harwell Science and Innovation Campus, Didcot, OX11 0DE, UK
| | - Sarnjeet S. Dhesi
- Diamond Light Source, Harwell Science and Innovation Campus, Didcot, OX11 0DE, UK
| | - Kawal Sawhney
- Diamond Light Source, Harwell Science and Innovation Campus, Didcot, OX11 0DE, UK
| |
Collapse
|
7
|
Jiang H, Wang Z, Zhu J. Interface characterization of B4C-based multilayers by X-ray grazing-incidence reflectivity and diffuse scattering. JOURNAL OF SYNCHROTRON RADIATION 2013; 20:449-454. [PMID: 23592624 DOI: 10.1107/s0909049513004329] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [MESH Headings] [Track Full Text] [Subscribe] [Scholar Register] [Received: 10/12/2012] [Accepted: 02/13/2013] [Indexed: 06/02/2023]
Abstract
B4C-based multilayers have important applications for soft to hard X-rays. In this paper, X-ray grazing-incidence reflectivity and diffuse scattering, combining various analysis methods, were used to characterize the structure of B4C-based multilayers including layer thickness, density, interfacial roughness, interdiffusion, correlation length, etc. Quantitative results for W/B4C, Mo/B4C and La/B4C multilayers were compared. W/B4C multilayers show the sharpest interfaces and most stable structures. The roughness replications of La/B4C and Mo/B4C multilayers are not strong, and oxidations and structure expansions are found in the aging process. This work provides guidance for future fabrication and characterization of B4C-based multilayers.
Collapse
Affiliation(s)
- Hui Jiang
- Shanghai Synchrotron Radiation Facility, Shanghai Institute of Applied Physics, Chinese Academy of Sciences, Zhangheng Road 239, Pudong District, Shanghai, People's Republic of China.
| | | | | |
Collapse
|
8
|
Wang H, Bencok P, Steadman P, Longhi E, Zhu J, Wang Z. Complete polarization analysis of an APPLE II undulator using a soft X-ray polarimeter. JOURNAL OF SYNCHROTRON RADIATION 2012; 19:944-948. [PMID: 23093753 DOI: 10.1107/s0909049512034851] [Citation(s) in RCA: 2] [Impact Index Per Article: 0.2] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Received: 06/27/2012] [Accepted: 08/07/2012] [Indexed: 06/01/2023]
Abstract
Two APPLE II undulators installed on the Diamond I10 beamline have all four magnet arrays shiftable and thus can generate linear polarization at any arbitrary angle from 0° to 180°, as well as all other states of elliptical polarization. To characterize the emitted radiation polarization state from one APPLE II undulator, the complete polarization measurement was performed using a multilayer-based soft X-ray polarimeter. The measurement results appear to show that the linear polarization angle offset is about 6° compared with other measurements at 712 eV, equivalent to an undulator jaw phase offset of 1.1 mm. In addition, the polarization states of various ellipticities have also been measured as a function of the undulator row phase.
Collapse
|