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For:	Shulga VI. Computer simulation of single-crystal and polycrystal sputtering. II. ACTA ACUST UNITED AC 2006. [DOI: 10.1080/00337578408215770] [Citation(s) in RCA: 38] [Impact Index Per Article: 2.1] [Reference Citation Analysis] [What about the content of this article? (0)] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 10/23/2022]

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Cited by Other Article(s)

Afkir A, Ait El Fqih M, Jadoual L, Shulga V, Kaddouri A. Angular distribution of particles sputtered from a copper target by 5‐keV Kr ions: Experiment and simulation study. SURF INTERFACE ANAL 2021. [DOI: 10.1002/sia.6980] [Citation(s) in RCA: 2] [Impact Index Per Article: 0.7] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/09/2022]

Shulga VI. Computer simulation of single-crystal and polycrystal sputtering—III. ACTA ACUST UNITED AC 2011. [DOI: 10.1080/00337578508218430] [Citation(s) in RCA: 10] [Impact Index Per Article: 0.8] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 10/23/2022]

Betz G, Wien K. Energy and angular distributions of sputtered particles. ACTA ACUST UNITED AC 1994. [DOI: 10.1016/0168-1176(94)04052-4] [Citation(s) in RCA: 135] [Impact Index Per Article: 4.5] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 10/17/2022]

Likonen J, Hautala M. Computer simulations on collision-sequence mechanisms: Bombardment of single-crystalline Cu(100) by Ar ions. PHYSICAL REVIEW. B, CONDENSED MATTER 1990;42:3838-3852. [PMID: 9995905 DOI: 10.1103/physrevb.42.3838] [Citation(s) in RCA: 1] [Impact Index Per Article: 0.0] [Reference Citation Analysis] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 04/12/2023]

Likonen J. Computer simulations on sputtering mechanisms: Bombardment of single-crystalline Cu(100) by Ar ions. PHYSICAL REVIEW. B, CONDENSED MATTER 1990;42:3853-3865. [PMID: 9995906 DOI: 10.1103/physrevb.42.3853] [Citation(s) in RCA: 3] [Impact Index Per Article: 0.1] [Reference Citation Analysis] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 04/12/2023]

Hautala M, Likonen J. Computer simulations on collision-cascade anisotropies: Bombardment of single-crystalline Cu(100) by Ar ions. PHYSICAL REVIEW. B, CONDENSED MATTER 1990;41:1759-1769. [PMID: 9993902 DOI: 10.1103/physrevb.41.1759] [Citation(s) in RCA: 6] [Impact Index Per Article: 0.2] [Reference Citation Analysis] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 04/12/2023]

Experimental and computer study of the spatial distributions of particles sputtered from polycrystals. ACTA ACUST UNITED AC 1989. [DOI: 10.1007/bf00616858] [Citation(s) in RCA: 7] [Impact Index Per Article: 0.2] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 10/26/2022]

Dodonov AI, Fedorovich SD, Krylova EA, Mashkova ES, Molchanov VA. Spatial distribution of sputtered particles from polycrystals under ion bombardment. ACTA ACUST UNITED AC 1988. [DOI: 10.1080/00337578808225716] [Citation(s) in RCA: 7] [Impact Index Per Article: 0.2] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 10/23/2022]

Shulga VI. Surface semichanneling of atomic and molecular ions. ACTA ACUST UNITED AC 1986. [DOI: 10.1080/00337578608208737] [Citation(s) in RCA: 6] [Impact Index Per Article: 0.2] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 10/23/2022]