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For: Kim KJ, Kim A, Kim CS, Song SW, Ruh H, Unger WES, Radnik J, Mata-Salazar J, Juarez-Garcia JM, Cortazar-Martinez O, Herrera-Gomez A, Hansen PE, Madesen JS, Senna CA, Archanjo BS, Damasceno JC, Achete CA, Wang H, Wang M, Windover D, Steel E, Kurokawa A, Fujimoto T, Azuma Y, Terauchi S, Zhang L, Jordaan WA, Spencer SJ, Shard AG, Koenders L, Krumrey M, Busch I, Jeynes C. Thickness measurement of nm HfO₂ films. Metrologia 2021;58:10.1088/0026-1394/58/1A/08016. [PMID: 38883307 PMCID: PMC11177853 DOI: 10.1088/0026-1394/58/1a/08016] [Citation(s) in RCA: 2] [Impact Index Per Article: 0.7] [Reference Citation Analysis] [What about the content of this article? (0)] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/18/2024]

For:	Kim KJ, Kim A, Kim CS, Song SW, Ruh H, Unger WES, Radnik J, Mata-Salazar J, Juarez-Garcia JM, Cortazar-Martinez O, Herrera-Gomez A, Hansen PE, Madesen JS, Senna CA, Archanjo BS, Damasceno JC, Achete CA, Wang H, Wang M, Windover D, Steel E, Kurokawa A, Fujimoto T, Azuma Y, Terauchi S, Zhang L, Jordaan WA, Spencer SJ, Shard AG, Koenders L, Krumrey M, Busch I, Jeynes C. Thickness measurement of nm HfO₂ films. Metrologia 2021;58:10.1088/0026-1394/58/1A/08016. [PMID: 38883307 PMCID: PMC11177853 DOI: 10.1088/0026-1394/58/1a/08016] [Citation(s) in RCA: 2] [Impact Index Per Article: 0.7] [Reference Citation Analysis] [What about the content of this article? (0)] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/18/2024]

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Cited by Other Article(s)

Kim KJ. Review on the thickness measurement of ultrathin oxide films by mutual calibration method. SURF INTERFACE ANAL 2021. [DOI: 10.1002/sia.7040] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/06/2022]

Unger WES, Fujimoto T. The Surface Analysis Working Group at the Consultative Committee for Amount of Substance, Metrology in Chemistry and Biology : A successful initiative by Martin Seah. SURF INTERFACE ANAL 2021. [DOI: 10.1002/sia.7033] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/07/2022]