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Mahoney EJD, Truscott BS, Mushtaq S, Ashfold MNR, Mankelevich YA. Spatially Resolved Optical Emission and Modeling Studies of Microwave-Activated Hydrogen Plasmas Operating under Conditions Relevant for Diamond Chemical Vapor Deposition. J Phys Chem A 2018; 122:8286-8300. [DOI: 10.1021/acs.jpca.8b07491] [Citation(s) in RCA: 11] [Impact Index Per Article: 1.8] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/30/2022]
Affiliation(s)
- Edward J. D. Mahoney
- School of Chemistry, University of Bristol, Bristol BS8 1TS, United Kingdom
- Centre for Doctoral Training in Diamond Science and Technology, University of Warwick, Gibbet Hill Road, Coventry CV4 7AL, United Kingdom
| | | | - Sohail Mushtaq
- School of Chemistry, University of Bristol, Bristol BS8 1TS, United Kingdom
| | | | - Yuri A. Mankelevich
- Skobel’tsyn Institute of Nuclear Physics, Lomonosov Moscow State University, Leninskie gory, Moscow 119991, Russia
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Nave ASC, Baudrillart B, Hamann S, Bénédic F, Lombardi G, Gicquel A, van Helden JH, Röpcke J. Spectroscopic study of low pressure, low temperature H2–CH4–CO2microwave plasmas used for large area deposition of nanocrystalline diamond films. Part II: on plasma chemical processes. ACTA ACUST UNITED AC 2016. [DOI: 10.1088/0963-0252/25/6/065003] [Citation(s) in RCA: 5] [Impact Index Per Article: 0.6] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/11/2022]
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