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Lelit M, Słowikowski M, Filipiak M, Juchniewicz M, Stonio B, Michalak B, Pavłov K, Myśliwiec M, Wiśniewski P, Kaźmierczak A, Anders K, Stopiński S, Beck RB, Piramidowicz R. Passive Photonic Integrated Circuits Elements Fabricated on a Silicon Nitride Platform. MATERIALS 2022; 15:ma15041398. [PMID: 35207939 PMCID: PMC8877649 DOI: 10.3390/ma15041398] [Citation(s) in RCA: 1] [Impact Index Per Article: 0.5] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Download PDF] [Figures] [Subscribe] [Scholar Register] [Received: 12/16/2021] [Revised: 01/24/2022] [Accepted: 01/26/2022] [Indexed: 11/25/2022]
Abstract
The fabrication processes for silicon nitride photonic integrated circuits evolved from microelectronics components technology—basic processes have common roots and can be executed using the same type of equipment. In comparison to that of electronics components, passive photonic structures require fewer manufacturing steps and fabricated elements have larger critical dimensions. In this work, we present and discuss our first results on design and development of fundamental building blocks for silicon nitride integrated photonic platform. The scope of the work covers the full design and manufacturing chain, from numerical simulations of optical elements, design, and fabrication of the test structures to optical characterization and analysis the results. In particular, technological processes were developed and evaluated for fabrication of the waveguides (WGs), multimode interferometers (MMIs), and arrayed waveguide gratings (AWGs), which confirmed the potential of the technology and correctness of the proposed approach.
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Affiliation(s)
- Marcin Lelit
- Institute of Microelectronics and Optoelectronics, Warsaw University of Technology, Koszykowa 75, 00-662 Warsaw, Poland; (M.S.); (B.S.); (M.M.); (P.W.); (A.K.); (K.A.); (S.S.); (R.B.B.); (R.P.)
- Centre for Advanced Materials and Technologies CEZAMAT, Warsaw University of Technology, Poleczki 19, 02-822 Warsaw, Poland; (M.F.); (M.J.); (B.M.); (K.P.)
- Correspondence:
| | - Mateusz Słowikowski
- Institute of Microelectronics and Optoelectronics, Warsaw University of Technology, Koszykowa 75, 00-662 Warsaw, Poland; (M.S.); (B.S.); (M.M.); (P.W.); (A.K.); (K.A.); (S.S.); (R.B.B.); (R.P.)
- Centre for Advanced Materials and Technologies CEZAMAT, Warsaw University of Technology, Poleczki 19, 02-822 Warsaw, Poland; (M.F.); (M.J.); (B.M.); (K.P.)
| | - Maciej Filipiak
- Centre for Advanced Materials and Technologies CEZAMAT, Warsaw University of Technology, Poleczki 19, 02-822 Warsaw, Poland; (M.F.); (M.J.); (B.M.); (K.P.)
| | - Marcin Juchniewicz
- Centre for Advanced Materials and Technologies CEZAMAT, Warsaw University of Technology, Poleczki 19, 02-822 Warsaw, Poland; (M.F.); (M.J.); (B.M.); (K.P.)
| | - Bartłomiej Stonio
- Institute of Microelectronics and Optoelectronics, Warsaw University of Technology, Koszykowa 75, 00-662 Warsaw, Poland; (M.S.); (B.S.); (M.M.); (P.W.); (A.K.); (K.A.); (S.S.); (R.B.B.); (R.P.)
- Centre for Advanced Materials and Technologies CEZAMAT, Warsaw University of Technology, Poleczki 19, 02-822 Warsaw, Poland; (M.F.); (M.J.); (B.M.); (K.P.)
| | - Bartosz Michalak
- Centre for Advanced Materials and Technologies CEZAMAT, Warsaw University of Technology, Poleczki 19, 02-822 Warsaw, Poland; (M.F.); (M.J.); (B.M.); (K.P.)
| | - Krystian Pavłov
- Centre for Advanced Materials and Technologies CEZAMAT, Warsaw University of Technology, Poleczki 19, 02-822 Warsaw, Poland; (M.F.); (M.J.); (B.M.); (K.P.)
| | - Marcin Myśliwiec
- Institute of Microelectronics and Optoelectronics, Warsaw University of Technology, Koszykowa 75, 00-662 Warsaw, Poland; (M.S.); (B.S.); (M.M.); (P.W.); (A.K.); (K.A.); (S.S.); (R.B.B.); (R.P.)
- Centre for Advanced Materials and Technologies CEZAMAT, Warsaw University of Technology, Poleczki 19, 02-822 Warsaw, Poland; (M.F.); (M.J.); (B.M.); (K.P.)
| | - Piotr Wiśniewski
- Institute of Microelectronics and Optoelectronics, Warsaw University of Technology, Koszykowa 75, 00-662 Warsaw, Poland; (M.S.); (B.S.); (M.M.); (P.W.); (A.K.); (K.A.); (S.S.); (R.B.B.); (R.P.)
- Centre for Advanced Materials and Technologies CEZAMAT, Warsaw University of Technology, Poleczki 19, 02-822 Warsaw, Poland; (M.F.); (M.J.); (B.M.); (K.P.)
| | - Andrzej Kaźmierczak
- Institute of Microelectronics and Optoelectronics, Warsaw University of Technology, Koszykowa 75, 00-662 Warsaw, Poland; (M.S.); (B.S.); (M.M.); (P.W.); (A.K.); (K.A.); (S.S.); (R.B.B.); (R.P.)
| | - Krzysztof Anders
- Institute of Microelectronics and Optoelectronics, Warsaw University of Technology, Koszykowa 75, 00-662 Warsaw, Poland; (M.S.); (B.S.); (M.M.); (P.W.); (A.K.); (K.A.); (S.S.); (R.B.B.); (R.P.)
| | - Stanisław Stopiński
- Institute of Microelectronics and Optoelectronics, Warsaw University of Technology, Koszykowa 75, 00-662 Warsaw, Poland; (M.S.); (B.S.); (M.M.); (P.W.); (A.K.); (K.A.); (S.S.); (R.B.B.); (R.P.)
| | - Romuald B. Beck
- Institute of Microelectronics and Optoelectronics, Warsaw University of Technology, Koszykowa 75, 00-662 Warsaw, Poland; (M.S.); (B.S.); (M.M.); (P.W.); (A.K.); (K.A.); (S.S.); (R.B.B.); (R.P.)
- Centre for Advanced Materials and Technologies CEZAMAT, Warsaw University of Technology, Poleczki 19, 02-822 Warsaw, Poland; (M.F.); (M.J.); (B.M.); (K.P.)
| | - Ryszard Piramidowicz
- Institute of Microelectronics and Optoelectronics, Warsaw University of Technology, Koszykowa 75, 00-662 Warsaw, Poland; (M.S.); (B.S.); (M.M.); (P.W.); (A.K.); (K.A.); (S.S.); (R.B.B.); (R.P.)
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Dalvand N, Nguyen TG, Tummidi RS, Koch TL, Mitchell A. Thin-ridge Silicon-on-Insulator waveguides with directional control of lateral leakage radiation. OPTICS EXPRESS 2011; 19:5635-5643. [PMID: 21445204 DOI: 10.1364/oe.19.005635] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 05/30/2023]
Abstract
In this paper, we propose a Silicon-On-Insulator waveguide structure which when excited with TM guided light emits controlled TE polarized radiation from one side of the structure only. The validity of the proposed structure is analyzed using eigenmode expansion and supermode techniques. It is shown that care must be taken to select the gap between the radiating elements such that both the phase and the amplitude of the radiating modes are maintained along the propagation direction to achieve the desired directional control of radiation. Steps toward practical demonstration of the proposed structure are identified.
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Affiliation(s)
- Naser Dalvand
- Microplatforms research group, School of Electrical and Computer Engineering, RMIT University GPO Box 2476, Melbourne, VIC 3001, Australia.
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Nguyen TG, Tummidi RS, Koch TL, Mitchell A. Lateral leakage of TM-like mode in thin-ridge Silicon-on-Insulator bent waveguides and ring resonators. OPTICS EXPRESS 2010; 18:7243-7252. [PMID: 20389745 DOI: 10.1364/oe.18.007243] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 05/29/2023]
Abstract
We present the first prediction of lateral leakage behavior of the TM-like mode in thin-ridge SOI curved waveguides and ring resonators. A simple phenomenological model is first presented which predicts that the lateral leakage in these structures is significantly impacted by both the ring radius and waveguide width. This prediction is verified using full vectorial mode matching and finite element methods. We show that specific combinations of waveguide width and ring radius can lead to very low-loss propagation in the TM-like mode. This finding is critical for the design of high-Q resonators on such waveguide platforms and will have major impact on the field of silicon lasers and sensing applications.
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Affiliation(s)
- Thach G Nguyen
- School of Electrical and Computer Engineering, RMIT University GPO Box 2476, Melbourne, VIC 3001, Australia.
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Blad J, Sudbø AS. Evanescent modes in out-of-plane band structure for two-dimensional photonic crystals. OPTICS EXPRESS 2009; 17:7170-7185. [PMID: 19399093 DOI: 10.1364/oe.17.007170] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [MESH Headings] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 05/27/2023]
Abstract
Reflection, diffraction and transmission of optical waves at the interface between a photonic crystal and the surrounding air can be described by propagating and evanescent Bloch modes. We have found such modes for one of the canonical two-dimensional photonic crystals, identical circular cylinders in a square pattern. We present computed out-of-plane band diagrams for propagating as well as evanescent modes, obtained with a numerical method based on Fourier-Bessel expansions. For a given frequency, all the modes are evanescent, except for a few low-order propagating modes. We find that most of the evanescent modes have a purely imaginary z-component of the Bloch wave vector, but many of the modes have a complex z-component.
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Affiliation(s)
- Jakob Blad
- University Graduate Center (UNIK), Kjeller, Norway.
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Chang HW, Wu TL, Sheng MH. Vectorial modal analysis of dielectric waveguides based on a coupled transverse-mode integral equation. I. Mathematical formulation. JOURNAL OF THE OPTICAL SOCIETY OF AMERICA. A, OPTICS, IMAGE SCIENCE, AND VISION 2006; 23:1468-77. [PMID: 16715166 DOI: 10.1364/josaa.23.001468] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 05/09/2023]
Abstract
We propose a rigorous full-vector integral-equation formulation for analyzing modal characteristics of the complex, two-dimensional, rectangular-like dielectric waveguide that is divisible into vertical slices of one-dimensional layered structures. The entire electromagnetic mode field is completely determined by the y-component electric and magnetic field functions on the interfaces between slices. These interfacial functions are governed by a system of vector-coupled transverse-mode integral equations (VCTMIE) whose kernels are made of orthonormal sets of both TE-to-y and TM-to-y modes from each slice. To solve for the unknown functions, we construct sets of suitable expansion functions and turn VCTMIE into a nonlinear matrix equation via orthogonal projection. The eigenvectors of the matrix provide the mode field solutions of the complex dielectric waveguide.
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Affiliation(s)
- Hung-Wen Chang
- Institute of Electro-optical Engineering, National Sun Yat-sen University, Kaohsiung, Taiwan.
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Ctyroký J. Photonic bandgap structures in planar waveguides. JOURNAL OF THE OPTICAL SOCIETY OF AMERICA. A, OPTICS, IMAGE SCIENCE, AND VISION 2001; 18:435-441. [PMID: 11205991 DOI: 10.1364/josaa.18.000435] [Citation(s) in RCA: 2] [Impact Index Per Article: 0.1] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 05/23/2023]
Abstract
If a one-dimensional (1D) or two-dimensional (2D) photonic bandgap (PBG) structure is incorporated into a planar optical waveguide, the refractive-index nonuniformity in the direction perpendicular to the waveguide plane responsible for waveguiding may affect its behavior detrimentally. Such influence is demonstrated in the paper by numerical modeling of a deeply etched first-order waveguide Bragg grating. On the basis of physical considerations, a simple condition for the design of 1D and 2D waveguide PBG structures free of this degradation is formulated; it is, in fact the separability condition for the wave equation. Its positive effect is verified by numerical modeling of a modified waveguide Bragg grating that fulfills the separability condition.
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Affiliation(s)
- J Ctyroký
- Institute of Radio Engineering and Electronics, Academy of Sciences of the Czech Republic, Praha.
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