Grazing-incidence small-angle X-ray scattering of soft and hard nanofabricated gratings

Uncertainties in the reconstruction of nanostructures in EUV scatterometry and grazing incidence small-angle X-ray scattering

Increasing miniaturization and complexity of nanostructures require innovative metrology solutions with high throughput that can assess complex 3D structures in a non-destructive manner. EUV scatterometry is investigated for the characterization of nanostructured surfaces and compared to grazing-incidence small-angle X-ray scattering (GISAXS). The reconstruction is based on a rigorous simulation using a Maxwell solver based on finite-elements and is statistically validated with a Markov-Chain-Monte-Carlo sampling method. It is shown that in comparison to GISAXS, EUV allows to probe smaller areas and to reduce the computation times obtaining comparable uncertainties.

Straightforward Patterning of Functional Polymers by Sequential Nanosecond Pulsed Laser Irradiation

Laser-based methods have demonstrated to be effective in the fabrication of surface micro- and nanostructures, which have a wide range of applications, such as cell culture, sensors or controlled wettability. One laser-based technique used for micro- and nanostructuring of surfaces is the formation of laser-induced periodic surface structures (LIPSS). LIPSS are formed upon repetitive irradiation at fluences well below the ablation threshold and in particular, linear structures are formed in the case of irradiation with linearly polarized laser beams. In this work, we report on the simple fabrication of a library of ordered nanostructures in a polymer surface by repeated irradiation using a nanosecond pulsed laser operating in the UV and visible region in order to obtain nanoscale-controlled functionality. By using a combination of pulses at different wavelengths and sequential irradiation with different polarization orientations, it is possible to obtain different geometries of nanostructures, in particular linear gratings, grids and arrays of nanodots. We use this experimental approach to nanostructure the semiconductor polymer poly(3-hexylthiophene) (P3HT) and the ferroelectric copolymer poly[(vinylidenefluoride-co-trifluoroethylene] (P(VDF-TrFE)) since nanogratings in semiconductor polymers, such as P3HT and nanodots, in ferroelectric systems are viewed as systems with potential applications in organic photovoltaics or non-volatile memories.

Controllable CaF2 Nanosized Stripe Arrays on Si(001) Studied by X-ray and Electron Diffraction

Adding uniaxial in-plane anisotropy to the otherwise four-fold Si(001) surface has for a long time been known to be possible via epitaxial deposition of a single atomic layer of calcium fluoride (CaF2), which forms an array of micron-long (110) oriented parallel stripes when the substrate temperature during the growth is kept in the range of 700–800 °C. As shown in the present paper, a fine control over dimensions and periodicity of the stripe array is possible through the introduction of a two-stage growth process at which the (110) orientation of the fluorite layer is settled at the high-temperature nucleation stage, while the stripes of controllable dimensions are formed at the second stage. By varying the substrate temperature at the second growth stage in the range of 800–400 °C, the stripe arrays with a periodicity from above 30 nm to below 10 nm can be fabricated with the height variation changing accordingly. Such variability can be of use in the applications in which the striped fluorite surface is used to influence the anisotropy of other functional (e.g., magnetically ordered or organic) materials grown on top. While large CaF2 stripes can be easily characterized by direct space techniques such as atomic force microscopy, the study of the shape and in-plane correlation between the stripes of a much smaller size is most effectively achieved through the use of grazing incidence reciprocal space techniques applied in the present paper. The discussed universal approach to 3D reciprocal space mapping utilizing scattering of X-rays and high-energy electrons offers a complementary way to study samples with arrays of long and narrow one-dimensional stripes at their surface.

Self-assembly of block copolymers under non-isothermal annealing conditions as revealed by grazing-incidence small-angle X-ray scattering

An accurate knowledge of the parameters governing the kinetics of block copolymer self-assembly is crucial to model the time- and temperature-dependent evolution of pattern formation during annealing as well as to predict the most efficient conditions for the formation of defect-free patterns. Here, the self-assembly kinetics of a lamellar PS-b-PMMA block copolymer under both isothermal and non-isothermal annealing conditions are investigated by combining grazing-incidence small-angle X-ray scattering (GISAXS) experiments with a novel modelling methodology that accounts for the annealing history of the block copolymer film before it reaches the isothermal regime. Such a model allows conventional studies in isothermal annealing conditions to be extended to the more realistic case of non-isothermal annealing and prediction of the accuracy in the determination of the relevant parameters, namely the correlation length and the growth exponent, which define the kinetics of the self-assembly.

Applicability of the Debye-Waller damping factor for the determination of the line-edge roughness of lamellar gratings

Periodic nanostructures are fundamental elements in optical instrumentation as well as basis structures in integrated electronic circuits. Decreasing sizes and increasing complexity of nanostructures have made roughness a limiting parameter to the performance. Grazing-incidence small-angle X-ray scattering is a characterization method that is sensitive to three-dimensional structures and their imperfections. To quantify line-edge roughness, a Debye-Waller factor (DWF), which is derived for binary gratings, is usually used. In this work, we systematically analyze the effect of roughness on the diffracted intensities. Two different limits to the application of the DWF are found depending on whether the roughness is normally distributed or not.

Distortion analysis of crystalline and locally quasicrystalline 2D photonic structures with grazing-incidence small-angle X-ray scattering

In this study, grazing-incidence small-angle X-ray scattering (GISAXS) is used to collect statistical information on dimensional parameters in an area of 20 × 15 mm on photonic structures produced by nanoimprint lithography. The photonic structures are composed of crystalline and locally quasicrystalline two-dimensional patterns with structure sizes between about 100 nm and 10 µm to enable broadband visible light absorption for use in solar-energy harvesting. These first GISAXS measurements on locally quasicrystalline samples demonstrate that GISAXS is capable of showing the locally quasicrystalline nature of the samples while at the same time revealing the long-range periodicity introduced by the lattice design. The scattering is described qualitatively in the framework of the distorted-wave Born approximation using a hierarchical model mirroring the sample design, which consists of a rectangular and locally quasicrystalline supercell that is repeated periodically to fill the whole surface. The nanoimprinted samples are compared with a sample manufactured using electron-beam lithography and the distortions of the periodic and locally quasiperiodic samples are quantified statistically. Owing to the high sensitivity of GISAXS to deviations from the perfect lattice, the misalignment of the crystallographic axes was measured with a resolution of 0.015°, showing distortions of up to ±0.15° in the investigated samples.

Synergistic Effect of Fullerenes on the Laser-Induced Periodic Surface Structuring of Poly(3-Hexyl Thiophene)

Ordered and homogeneous laser-induced periodic surface structures (LIPSS) could be fabricated in poly(3-hexyl thiophene):[6,6]-phenyl C71-butyric acid methyl ester (P3HT:PC₇₁BM) blends by using wavelengths in the ultraviolet (UV) range (266 nm). The absorption coefficient of PC₇₁BM, which is maximum in its UV–Visible absorption spectrum around 266 nm, enhanced the overall absorption of the blend. In addition, PC₇₁BM itself was capable of developing homogeneous LIPSS by laser irradiation at λ_laser = 266 nm. Therefore, we proposed that the synergistic effect of PC₇₁BM on the LIPSS formation in P3HT:PC₇₁BM (1:1) was due to a templating effect for the LIPSS formation of the PC₇₁BM itself, which added to the overall increment of the absorption of the blend. LIPSS formation at ambient conditions in this wavelength range led to chemical modification of both P3HT and PC₇₁BM, which rendered to non-conducting samples. Irradiation in vacuum significantly reduced radiation damage, rendering to the characteristic electrical conductivity pattern observed in P3HT LIPSS samples irradiated in the visible range. This effect could be of potential interest in order to obtain LIPSS in low absorbing polymers.

Element sensitive reconstruction of nanostructured surfaces with finite elements and grazing incidence soft X-ray fluorescence

The geometry of a Si3N4 lamellar grating was investigated experimentally with reference-free grazing-incidence X-ray fluorescence analysis. While simple layered systems are usually treated with the matrix formalism to determine the X-ray standing-wave field, this approach fails for laterally structured surfaces. Maxwell solvers based on finite elements are often used to model electrical field strengths for any 2D or 3D structures in the optical spectral range. We show that this approach can also be applied in the field of X-rays. The electrical field distribution obtained with the Maxwell solver can subsequently be used to calculate the fluorescence intensities in full analogy to the X-ray standing-wave field obtained by the matrix formalism. Only the effective 1D integration for the layer system has to be replaced by a 2D integration of the finite elements, taking into account the local excitation conditions. We will show that this approach is capable of reconstructing the geometric line shape of a structured surface with high elemental sensitivity. This combination of GIXRF and finite-element simulations paves the way for a versatile characterization of nanoscale-structured surfaces.

Orthogonally Aligned Block Copolymer Line Patterns on Minimal Topographic Patterns

We demonstrate the generation of block copolymer (BCP) line patterns oriented orthogonal to a very small (minimal) topographic trench pattern over arbitrarily large areas using solvent-vapor annealing. Increasing the thickness of BCP films induced an orthogonal alignment of the BCP cylindrical microdomains, where full orthogonal alignment of the cylindrical microdomains with respect to the trench direction was obtained at a film thickness corresponding to 1.70 L₀. A capillary flow of the solvent across the trenches was a critical factor in the alignment of the cylindrical microdomains. Grazing incidence small-angle X-ray scattering was used to determine the orientation function of the microdomains, with a value of 0.997 being found reflecting a nearly perfect orientation. This approach to produce orthogonally aligned BCP line patterns could be extended to the nanomanufacturing and fabrication of hierarchical nanostructures.

Characteristic diffuse scattering from distinct line roughnesses

Lamellar gratings are widely used diffractive optical elements; gratings etched into Si can be used as structural elements or prototypes of structural elements in integrated electronic circuits. For the control of the lithographic manufacturing process, a rapid in-line characterization of nanostructures is indispensable. Numerous studies on the determination of regular geometry parameters of lamellar gratings from optical and extreme ultraviolet (EUV) scattering highlight the impact of roughness on the optical performance as well as on the reconstruction of these structures. Thus, a set of nine lamellar Si gratings with a well defined line edge roughness or line width roughness were designed. The investigation of these structures using EUV small-angle scattering reveals a strong correlation between the type of line roughness and the angular scattering distribution. These distinct scattering patterns open new paths for the unequivocal characterization of such structures by EUV scatterometry.

Macroscopically ordered hexagonal arrays by directed self-assembly of block copolymers with minimal topographic patterns

A simple and robust method has been developed for the generation of macroscopically ordered hexagonal arrays from the directed self-assembly (DSA) of cylinder-forming block copolymers (BCPs) based on minimal trench patterns with solvent vapor annealing. The use of minimal trench patterns allows us to probe the guided hexagonal arrays of cylindrical microdomains using grazing incidence small angle X-ray scattering (GISAXS), where the sample stage is rotated on the basis of the six-fold symmetry of a hexagonal system. It is found that the (10) planes of hexagonal arrays of cylindrical microdomains are oriented parallel to the underlying trench direction over macroscopic length scales (∼1 × 1 cm²). However, there are misorientations of the hexagonal arrays with short-range ordering. GISAXS patterns show that the hexagonal arrays on the minimal trench pattern are distorted, deviating from a perfect hexagonal lattice. This distortion has been attributed to the absence of topographic constraints in the unconfined direction on the 1-D minimal trench pattern. Also, the frustration of BCP microdomains, arising from the incommensurability between the trench pitch and natural period of the BCP at the base of the trench, influences the distortion of the hexagonal arrays.

Reconstructing detailed line profiles of lamellar gratings from GISAXS patterns with a Maxwell solver

Laterally periodic nanostructures have been investigated with grazing-incidence small-angle X-ray scattering (GISAXS) by using the diffraction patterns to reconstruct the surface shape. To model visible light scattering, rigorous calculations of the near and far field by numerical solution of Maxwell's equations with a finite-element method are well established. The application of this technique to X-rays is still challenging, owing to the discrepancy between the incident wavelength and the finite-element size. This drawback vanishes for GISAXS because of the small angles of incidence, the conical scattering geometry and the periodicity of the surface structures, which allows a rigorous computation of the diffraction efficiencies with sufficient numerical precision. To develop metrology tools based on GISAXS, lamellar gratings with line widths down to 55 nm were produced by state-of-the-art electron-beam lithography and then etched into silicon. The high surface sensitivity of GISAXS in conjunction with a Maxwell solver allows the detailed reconstruction of the grating line shape for thick non-homogeneous substrates as well. The reconstructed geometric line-shape models are statistically validated by applying a Markov chain Monte Carlo sampling technique which reveals that GISAXS is able to reconstruct critical parameters like the widths of the lines with sub-nanometre uncertainty.

Grazing-incidence small-angle X-ray scattering (GISAXS) on small periodic targets using large beams

Grazing-incidence small-angle X-ray scattering (GISAXS) is often used as a versatile tool for the contactless and destruction-free investigation of nano-structured surfaces. However, due to the shallow incidence angles, the footprint of the X-ray beam is significantly elongated, limiting GISAXS to samples with typical target lengths of several millimetres. For many potential applications, the production of large target areas is impractical, and the targets are surrounded by structured areas. Because the beam footprint is larger than the targets, the surrounding structures contribute parasitic scattering, burying the target signal. In this paper, GISAXS measurements of isolated as well as surrounded grating targets in Si substrates with line lengths from 50 µm down to 4 µm are presented. For the isolated grating targets, the changes in the scattering patterns due to the reduced target length are explained. For the surrounded grating targets, the scattering signal of a 15 µm × 15 µm target grating structure is separated from the scattering signal of 100 µm × 100 µm nanostructured surroundings by producing the target with a different orientation with respect to the predominant direction of the surrounding structures. As virtually all litho-graphically produced nanostructures have a predominant direction, the described technique allows GISAXS to be applied in a range of applications, e.g. for characterization of metrology fields in the semiconductor industry, where up to now it has been considered impossible to use this method due to the large beam footprint.

Laser-Induced Periodic Surface Structures on P3HT and on Its Photovoltaic Blend with PC71BM

We describe the conditions for optimal formation of laser-induced periodic surface structures (LIPSS) over poly(3-hexylthiophene) (P3HT) spin-coated films. Optimal LIPSS on P3HT are observed within a particular range of thicknesses and laser fluences. These conditions can be translated to the photovoltaic blend formed by the 1:1 mixture of P3HT and [6,6]-phenyl C₇₁-butyric acid methyl ester (PC₇₁BM) when deposited on an indium tin oxide (ITO) electrode coated with (poly(3,4-ethylenedioxythiophene): poly(styrenesulfonate) (PEDOT:PSS). Solar cells formed by using either a bilayer of P3HT structured by LIPSS covered by PC₇₁BM or a bulk heterojunction with a P3HT:PC₇₁BM blend structured by LIPSS exhibit generation of electrical photocurrent under light illumination. These results suggest that LIPSS could be a compatible technology with organic photovoltaic devices.

Characterization of the shape and line-edge roughness of polymer gratings with grazing incidence small-angle X-ray scattering and atomic force microscopy

Grazing-incidence small-angle X-ray scattering (GISAXS) is increasingly used for the metrology of substrate-supported nanoscale features and nanostructured films. In the case of line gratings, where long objects are arranged with a nanoscale periodicity perpendicular to the beam, a series of characteristic spots of high-intensity (grating truncation rods, GTRs) are recorded on a two-dimensional detector. The intensity of the GTRs is modulated by the three-dimensional shape and arrangement of the lines. Previous studies aimed to extract an average cross-sectional profile of the gratings, attributing intensity loss at GTRs to sample imperfections. Such imperfections are just as important as the average shape when employing soft polymer gratings which display significant line-edge roughness. Herein are reported a series of GISAXS measurements of polymer line gratings over a range of incident angles. Both an average shape and fluctuations contributing to the intensity in between the GTRs are extracted. The results are critically compared with atomic force microscopy (AFM) measurements, and it is found that the two methods are in good agreement if appropriate corrections for scattering from the substrate (GISAXS) and contributions from the probe shape (AFM) are accounted for.

Determining the shape and periodicity of nanostructures using small-angle X-ray scattering

The semiconductor industry is exploring new metrology techniques capable of meeting the future requirement to characterize three-dimensional structure where the critical dimensions are less than 10 nm. X-ray scattering techniques are one candidate owing to the sub-Å wavelengths which are sensitive to internal changes in electron density. Critical-dimension small-angle X-ray scattering (CDSAXS) has been shown to be capable of determining the average shape of a line grating. Here it is used to study a set of line gratings patternedviaa self-aligned multiple patterning process, which resulted in a set of mirrored lines, where the individual line shapes were asymmetric. The spacing between lines was systematically varied by sub-nm shifts. The model used to simulate the scattering was developed in stages of increasing complexity in order to justify the large number of parameters included. Comparisons between the models at different stages of development demonstrate that the measurement can determine differences in line shapes within the superlattice. The shape and spacing between lines within a given set were determined to sub-nm accuracy. This demonstrates the potential for CDSAXS as a high-resolution nanostructure metrology tool.

Effect of Methanol Addition on the Resistivity and Morphology of PEDOT:PSS Layers on Top of Carbon Nanotubes for Use as Flexible Electrodes

Overcoating carbon nanotube (CNT) films on flexible poly(ethylene terephthalate) (PET) foils with poly(3,4-ethylenedioxythiophene):poly(styrenesulfonate) (

PEDOT

PSS) layers reduces the surface roughness, which is interesting for use in organic electronics. Adding methanol to the

PEDOT

PSS aqueous solution used for spin coating of the

PEDOT

PSS layer improves the wetting behavior of the CNT/PET surface. Samples with different volume fractions of methanol (0, 33, 50, 67, and 75 vol %) are compared with respect to the transmission, horizontal, and vertical resistivity. With grazing-incidence small-angle X-ray scattering, the film morphologies are probed, which is challenging because of the substrate flexibility. At 50 vol %, methanol optimum conditions are achieved with the resistivity close to that of the bare CNT/PET substrates because of the best contact between the

PEDOT

PSS film and CNT surface. At lower methanol ratios, the

PEDOT

PSS films cannot adapt the CNT morphology, and at higher methanol ratios, they rupture into domains and no continuous

PEDOT

PSS layers are formed.

In situ monitoring of laser-induced periodic surface structures formation on polymer films by grazing incidence small-angle X-ray scattering

The formation of laser-induced periodic surface structures (LIPSS) on model spin-coated polymer films has been followed in situ by grazing incidence small-angle X-ray scattering (GISAXS) using synchrotron radiation. The samples were irradiated at different repetition rates ranging from 1 up to 10 Hz by using the fourth harmonic of a Nd:YAG laser (266 nm) with pulses of 8 ns. Simultaneously, GISAXS patterns were acquired during laser irradiation. The variation of both the GISAXS signal with the number of pulses and the LIPSS period with laser irradiation time is revealing key kinetic aspects of the nanostructure formation process. By considering LIPSS as one-dimensional paracrystalline lattice and using a correlation found between the paracrystalline disorder parameter, g, and the number of reflections observed in the GISAXS patterns, the variation of the structural order of LIPSS can be assessed. The role of the laser repetition rate in the nanostructure formation has been clarified. For high pulse repetition rates (i.e., 10 Hz), LIPSS evolve in time to reach the expected period matching the wavelength of the irradiating laser. For lower pulse repetition rates LIPSS formation is less effective, and the period of the ripples never reaches the wavelength value. Results support and provide information on the existence of a feedback mechanism for LIPSS formation in polymer films.

Mapping the structural order of laser-induced periodic surface structures in thin polymer films by microfocus beam grazing incidence small-angle X-ray scattering

In this work we present an accurate mapping of the structural order of laser-induced periodic surface structures (LIPSS) in spin-coated thin polymer films, via a microfocus beam grazing incidence small-angle X-ray scattering (μGISAXS) scan, GISAXS modeling, and atomic force microscopy imaging all along the scanned area. This combined study has allowed the evaluation of the effects on LIPSS formation due to nonhomogeneous spatial distribution of the laser pulse energy, mapping with micrometric resolution the evolution of the period and degree of structural order of LIPSS across the laser beam diameter in a direction perpendicular to the polarization vector. The experiments presented go one step further toward controlling nanostructure formation in LIPSS through a deep understanding of the parameters that influence this process.

The active layer morphology of organic solar cells probed with grazing incidence scattering techniques

Grazing incidence X-ray scattering (GIXS) provides unique insights into the morphology of active materials and thin film layers used in organic photovoltaic devices. With grazing incidence wide angle X-ray scattering (GIWAXS) the molecular arrangement of the material is probed. GIWAXS is sensitive to the crystalline parts and allows for the determination of the crystal structure and the orientation of the crystalline regions with respect to the electrodes. With grazing incidence small angle X-ray scattering (GISAXS) the nano-scale structure inside the films is probed. As GISAXS is sensitive to length scales from nanometers to several hundred nanometers, all relevant length scales of organic solar cells are detectable. After an introduction to GISAXS and GIWAXS, selected examples for application of both techniques to active layer materials are reviewed. The particular focus is on conjugated polymers, such as poly(3-hexylthiophene) (P3HT).

Micro- and submicrostructuring thin polymer films with two and three-beam single pulse laser interference lithography

In this work we report the application of two and three-beam single pulse laser interference lithography to thin polymer films of poly(trimethylene terephthalate) (PTT). By irradiating the sample surface with temporary and spatially overlapped single pulses from two or three coherent beams and changing the angles of incidence, we have accomplished the fabrication of large-area polymer micro and submicrogratings as well as submicrometric cavities arranged in a hexagonal lattice. The characterization of the structures in real space by atomic force microscopy (AFM) and scanning electron microscopy (SEM) has allowed us to determine the formation mechanism of the microgratings to be based on different ablation regimes depending on the local fluence. Moreover, complementary characterization of the submicrometric cavities in reciprocal space by grazing incidence small-angle X-ray scattering (GISAXS) confirms the existence of large areas where two-dimensional order is present. The experiments presented in this work demonstrate the suitability of single pulse laser interference lithography for micro and submicrostructuring polymer films, opening up new possibilities for patterning and paving the way for potential applications where polymer structures are involved.

Nanoimprinted comb structures in a low bandgap polymer: thermal processing and their application in hybrid solar cells

In this paper, we investigate conjugated polymer layers structured by nanoimprint lithography toward their suitability for the fabrication of nanostructured polymer/metal sulfide hybrid solar cells. Consequently, we first study the thermal stability of the nanoimprinted conjugated polymer layers by means of scanning electron microscopy and grazing incidence small-angle X-ray scattering, which reveals a reasonable thermal stability up to 145 °C and sufficient robustness against the solvent mixture used in the subsequent fabrication process. In the second part, we demonstrate the preparation of nanostructured polymer/copper indium sulfide hybrid solar cells via the infiltration and thermal decomposition of a mixture of copper and indium xanthates. Although this step needs temperatures of more than 160 °C, the nanostructures are retained in the final polymer/copper indium sulfide layers. The nanostructured solar cells show significantly improved power conversion efficiencies compared to similarly prepared flat bilayer devices, which is based on a distinct improvement of the short circuit current in the nanostructured solar cells.

On the assessment by grazing-incidence small-angle X-ray scattering of replica quality in polymer gratings fabricated by nanoimprint lithography

Grazing-incidence small-angle X-ray scattering (GISAXS) can be used to characterize the replica quality of polymer gratings prepared by thermal nanoimprint lithography (NIL). Here it is shown using GISAXS experiments that a series of NIL polymer gratings with different line quality present characteristic features that can be associated with the level of defects per line. Both stamps and NIL polymer gratings exhibit characteristic semicircle-like GISAXS patterns. However NIL polymer gratings with defective lines exhibit GISAXS patterns with an excess of diffuse scattering as compared to those of the corresponding stamps. In a first approach, this effect is attributed to a reduction of the effective length of the lines diffracting coherently as the number of defects per line increases.

Nanostructuring thin polymer films with optical near fields

In the present work, we report on the application of optical near fields to nanostructuring of poly(trimethylene terephthalate) (PTT) thin films. By exposure to a single ultraviolet nanosecond laser pulse, the spatial intensity modulation of the near-field distribution created by a silica microsphere is imprinted into the films. Setting different angles of incidence of the laser, elliptical or circular periodic ring patterns can be produced with periods as small as half the laser wavelength used. These highly complex patterns show optical and topographical contrast and can be characterized by optical microscopy (OM) and atomic force microscopy (AFM). We demonstrate the key role of the laser wavelength and coherence length in achieving smooth, extended patterns in PTT by using excimer laser (193 nm) and Nd:YAG laser (266 nm) pulses. Reference experiments performed in Ge2Sb2Te5 (GST) demonstrate that nanopatterning in PTT is triggered by ablation as opposed to GST, in which nanopatterning originates from laser-induced phase change, accompanied by a small topographical contrast. The experiments presented in this work demonstrate the suitability of optical near fields for structuring polymer films, opening up new possibilities for nanopatterning and paving the way for potential applications where optical near fields and polymer nanostructures are involved.

Understanding crystallization features of P(VDF-TrFE) copolymers under confinement to optimize ferroelectricity in nanostructures

The successful development of ferroelectric polymer devices depends on the effective fabrication of polar ferroelectric crystalline nanostructures. We demonstrate, by scanning X-ray microdiffraction using synchrotron light, the heterogeneous character of high aspect ratio one-dimensional nanoarrays of poly(vinylidene fluoride-co-trifluoroethylene) copolymers supported by a residual polymer film. They were prepared by melt and solution template wetting, using porous anodic aluminum oxide as a template. The spatial evolution of different polymorphs from the mixture of paraelectric and ferroelectric crystal forms (residual film) to the pure ferroelectric form (nanoarray) is evidenced for the samples prepared by solution wetting. However, for samples prepared by melt wetting the ferroelectric phase is exclusively obtained in both the residual film and nanoarray. The crystal nuclei formed in the polymer film connected to the nanoarray play a key role in determining the formation of a crystallinity distribution gradient, where the crystallinity decreases along the first 5-10 microns in the nanorods reaching a steady value afterwards. The minimum decrease in crystallinity is revealed for samples prepared by melt wetting. The results reported in this work endeavour to enhance the understanding of crystallization under confinement for ferroelectric copolymers and reveal the parameters for improving the ferroelectric character of polymer nanostructures.

Crystallization under one-dimensional confinement in alumina nanopores of poly(trimethylene terephthalate) and its composites with single wall carbon nanotubes

We report the preparation of semicrystalline polymer nanorods of PTT and of its nanocomposites with SWCNTs by infiltration of the molten polymer into disordered anodic alumina membranes. An accurate study of the crystalline orientation of these systems has been accomplished by means of X-ray microdiffraction. While polymer residual film exhibits isotropic character, edge-on lamellae are formed upon approaching the polymer/membrane interface. This effect might be due to the elongational flow that takes place in the molten state as polymer chains infiltrate the AAO membrane. At the interface, edge-on and flat-on crystalline lamellae coexist as a consequence of the strong interaction between the polymer and the AAO surface. Inside the nanopores, the confined environment induces a kinetic selection of polymer crystals which only allows the growth of crystalline lamellae with its a-axis parallel to that of the pore. In the case of PTT/SWCNT nanocomposites, this effect, in conjunction with the strong interaction between polymer and AAO surface, seems to prevail over the templating effect of the carbon nanotubes and a similar orientation to that of the neat PTT case is observed.

Assessment of femtosecond laser induced periodic surface structures on polymer films

In this work we present the formation of laser induced periodic surface structures (LIPSS) on spin-coated thin films of several model aromatic polymers including poly(ethylene terephthalate), poly(trimethylene terephthalate) and poly carbonate bis-phenol A upon irradiation with femtosecond pulses of 795 and 265 nm at fluences well below the ablation threshold. LIPSS are formed with period lengths similar to the laser wavelength and parallel to the direction of the laser polarization vector. Formation of LIPSS upon IR irradiation at 795 nm, a wavelength at which the polymers absorb weakly, contrasts with the absence of LIPSS in this spectral range upon irradiation with nanosecond pulses. Real and reciprocal space characterization of LIPSS obtained by Atomic Force Microscopy (AFM) and Grazing Incidence Small Angle X-ray Scattering (GISAXS), respectively, yields well correlated morphological information. Comparison of experimental and simulated GISAXS patterns suggests that LIPSS can be suitably described considering a quasi-one-dimensional paracrystalline lattice and that irradiation parameters have an influence on the order of such a lattice. Fluorescence measurements, after laser irradiation, provide indirect information about dynamics and structure of the polymer at the molecular level. Our results indicate that the LIPSS are formed by interference of the incident and surface scattered waves. As a result of this process, heating of the polymer surface above its glass transition temperature takes place enabling LIPSS formation.

Grazing-incidence transmission X-ray scattering: surface scattering in the Born approximation

Determination of the three-dimensional order in thin nanostructured films remains challenging. Real-space imaging methods, including electron microscopies and scanning-probe methods, have difficulty reconstructing the depth of a film and suffer from limited statistical sampling. X-ray and neutron scattering have emerged as powerful complementary techniques but have substantial data collection and analysis challenges. This article describes a new method, grazing-incidence transmission small-angle X-ray scattering, which allows for fast scattering measurements that are not burdened by the refraction and reflection effects that have to date plagued grazing-incidence X-ray scattering. In particular, by arranging a sample/beam geometry wherein the scattering exits through the edge of the substrate, it is possible to record scattering images that are well described by straightforward (Born approximation) scattering models.