Mass-spring matching layers for high-frequency ultrasound transducers: a new technique using vacuum deposition

A low-voltage-driven MEMS ultrasonic phased-array transducer for fast 3D volumetric imaging

Wearable ultrasound imaging technology has become an emerging modality for the continuous monitoring of deep-tissue physiology, providing crucial health and disease information. Fast volumetric imaging that can provide a full spatiotemporal view of intrinsic 3D targets is desirable for interpreting internal organ dynamics. However, existing 1D ultrasound transducer arrays provide 2D images, making it challenging to overcome the trade-off between the temporal resolution and volumetric coverage. In addition, the high driving voltage limits their implementation in wearable settings. With the use of microelectromechanical system (MEMS) technology, we report an ultrasonic phased-array transducer, i.e., a 2D piezoelectric micromachined ultrasound transducer (pMUT) array, which is driven by a low voltage and is chip-compatible for fast 3D volumetric imaging. By grouping multiple pMUT cells into one single drive channel/element, we propose an innovative cell-element-array design and operation of a pMUT array that can be used to quantitatively characterize the key coupling effects between each pMUT cell, allowing 3D imaging with 5-V actuation. The pMUT array demonstrates fast volumetric imaging covering a range of 40 mm × 40 mm × 70 mm in wire phantom and vascular phantom experiments, achieving a high temporal frame rate of 11 kHz. The proposed solution offers a full volumetric view of deep-tissue disorders in a fast manner, paving the way for long-term wearable imaging technology for various organs in deep tissues.

Ultrawide Bandwidth High-Frequency Ultrasonic Transducers With Gradient Acoustic Impedance Matching Layer for Biomedical Imaging

The high-frequency ultrasonic transducers with larger bandwidths yield excellent imaging performance in the biomedical field. However, achieving perfect acoustic impedance matching from the piezo-element to the target medium in the operating frequency spectrum is still a challenge. Conventional matching layers are mostly fabricated by only one or two uniform materials which are limited by their acoustic property. We propose a novel composite matching layer with gradient acoustic impedance based on a 1-3 gradient composite structure and multilevel matching theory. The proposed gradient-composite matching layer applied for ultrasonic transducer provides efficient impedance matching and ultrawide bandwidth which can significantly improve the quality of biomedical imaging. The active aperture size of the matching layer is 5× 5 mm², and the overall thickness for five equivalent layers is 115 [Formula: see text]. The -6-dB bandwidth and the center frequency obtained by the ultrasonic transducer equipped with the 1-3 gradient composite matching layer are 141.7% and 22.3 MHz, respectively. The exceedingly good imaging performance of the fabricated ultrasonic transducer was demonstrated by the tungsten wire phantom and study on the biological tissues of a zebrafish and porcine eyeball. The theoretical and experimental results provide a novel train of thought for improving the quality of biomedical ultrasonic imaging.

Design and Micro-Fabrication of Focused High-Frequency Needle Transducers for Medical Imaging

In this study, we report an advanced fabrication technique to develop a miniature focused needle transducer. Two different types of high-frequency (100 MHz) transducers were fabricated using the lead magnesium niobate-lead titanate (PMN-0.3PT) and lithium niobate (LiNbO3) single crystals. In order to enhance the transducer's performance, a unique mass-spring matching layer technique was adopted, in which gold and parylene play the roles of the mass layer and spring layer, respectively. The PMN-0.3PT transducer had a 103 MHz center frequency with a -6 dB bandwidth of 52%, and a signal-to-noise ratio (SNR) of 42 dB. The center frequency, -6 dB bandwidth, and SNR of the LiNbO3 transducer were 105 MHz, 66%, and 44 dB, respectively. In order to compare and evaluate the transducers' performances, an ultrasonic biomicroscopy (UBM) imaging on the fish eye was performed. The results showed that the LiNbO3 transducer had a better contrast resolution compared to the PMN-0.3PT transducer. The fabricated transducer showed an excellent performance with high-resolution corneal epithelium imaging of the experimental fish eye. These interesting findings are useful for the future biomedical implementation of the fabricated transducers in the field of high-resolution ultrasound imaging and diagnosis purpose.

Optimization Design of Ultrasonic Transducer With Multimatching Layer

An optimization design strategy is developed for ultrasonic transducer (UT) with multimatching layer to improve its performance. The piezoelectric equivalent circuit model is used to determine the optimization interval of matching layer, and the PiezoCAD software is used to simulate the performance of UT with multimatching layer. The neural network (NN) models are trained by the simulation data to characterize the relationship between the thickness of matching layer and performance of UT. Then, the multiobjective optimality criteria for UT is established based on its performance parameters, including center frequency (CF), -6 dB bandwidth (BW) and pulsewidth (PW). The thickness of matching layer is optimized by particle swarm optimization (PSO) algorithm. According to the designed performance, the optimized copper thickness and parylene thickness are about 17.76 and [Formula: see text], respectively. The simulation results of UT with the optimized multimatching layer well agree with the designed targets. Also, CF, -6 dB BW, and PW of the fabricated UT with the optimized multimatching layer are 5.672 MHz, 50.08%, and [Formula: see text], respectively, which nearly achieve the designed performance. In addition, the performance of UT with the optimized multimatching layer is much better than that of UT without matching layer. Moreover, compared with UT with single or double matching layers determined by the quarter wavelength theory, the UT with the optimized multimatching layer has better comprehensive performance. Finally, the fabricated UT with the optimized multimatching layer is used to measure the thickness of testing block, and the relative errors are all less than 1.0%, which implies that the optimized UT has excellent performance.

An Improved CMUT Structure Enabling Release and Collapse of the Plate in the Same Tx/Rx Cycle for Dual-Frequency Acoustic Angiography

This study demonstrates, in detail, the potential of using capacitive micromachined ultrasonic transducers (CMUTs) for acoustic angiography of the microvasculature. It is known that when ultrasound contrast agents (microbubbles) are excited with moderate acoustic pressure around their resonance (2-4 MHz), they produce higher order harmonics (greater than third harmonic) due to their nonlinear behavior. To date, the fundamental challenge has been the availability of a transducer that can generate the transmit signals to excite the microbubbles at low frequencies and, in the same cycle, confocally detect harmonics in the higher frequencies. We present a novel device structure and dual-mode operation of a CMUT that operates with a center frequency of 4.3 MHz and 150% bandwidth in the conventional mode for transmitting and a center frequency of 9.8 MHz and a 125.5% bandwidth in collapse mode for receiving. Output pressure of 1.7 MPapp is achieved on the surface of a single unfocused transducer. The mechanical index at the transducer surface is 0.56. FEM simulations are performed first to show the functionality of the proposed device, and then, the device fabrication is described in detail. Finally, we experimentally demonstrate the ability to detect the microbubble signals with good contrast, and the background reflection is adequately suppressed, indicating the feasibility of the presented approach for acoustic angiography.

A Review of Acoustic Impedance Matching Techniques for Piezoelectric Sensors and Transducers

The coupling of waves between the piezoelectric generators, detectors, and propagating media is challenging due to mismatch in the acoustic properties. The mismatch leads to the reverberation of waves within the transducer, heating, low signal-to-noise ratio, and signal distortion. Acoustic impedance matching increases the coupling largely. This article presents standard methods to match the acoustic impedance of the piezoelectric sensors, actuators, and transducers with the surrounding wave propagation media. Acoustic matching methods utilizing active and passive materials have been discussed. Special materials such as nanocomposites, metamaterials, and metasurfaces as emerging materials have been presented. Emphasis is placed throughout the article to differentiate the difference between electric and acoustic impedance matching and the relation between the two. Comparison of various techniques is made with the discussion on capabilities, advantages, and disadvantages. Acoustic impedance matching for specific and uncommon applications has also been covered.

A Low-Cost Miniature Histotripsy Transducer for Precision Tissue Ablation

A miniature, 10 mm aperture histotripsy transducer with an f-number of 0.7 was fabricated using an elliptically shaped aluminum lens, which was epoxy-bonded to an air-backed 5.0 MHz, PTZ-5A, 1-3 dice-and-fill piezoelectric composite, and the lens coupled to water using a quarter-wavelength matching layer of Parylene-C. A Krimholtz-Leedom-Matthaei model of the device and curved lens was developed. The epoxy layer resulted in an increased power output at 6.8 MHz compared to the 5 MHz composite design. Cavitation was observed in water by driving the composite with a 173 V single-cycle, unipolar 6.8 MHz pulse at a pulse repetition frequency of 50 Hz, and a bubble cloud 264 long by 124 wide was measured. A coregistered imaging and ablation device was also fabricated and characterized. The coregistered device was modified to include a mm square hole through the center, allowing access for a high-frequency imaging array, and both imaging and ablation are demonstrated in cerebral tissue with this device. Radial -3 dB beam widths were measured as 0.145 and 0.116 mm, and axial -3 dB depths of field were 0.698 and 0.752 mm for the noncoregistered and coregistered transducers, respectively. Total material cost for the transducer and pulser board is below $200 USD.

Magnesium Alloy Matching Layer for PMN-PT Single Crystal Transducer Applications

In this paper, we propose using magnesium alloy as the matching layer for the ultrasonic transducer made of 0.68 Pb(Mg_1/3Nb_2/3)O₃-0.32PbTiO₃ (PMN-0.32PT) single crystal. The complete sets of elastic constants of AZ31B, GW83, and ZK60 magnesium alloys have been measured, which is practically a homogeneous material. The AZ31B magnesium alloy has an acoustic impedance of 10.36 MRayl, which is suitable for the development of high-performance ultrasonic transducers. A 3.5-MHz PMN-PT single crystal transducer has been designed and fabricated successfully using AZ31B magnesium alloy as the first quarter-wavelength matching layer. The -6-dB bandwidth and two-way insertion loss at the center frequency of the transducer are about 67% and 11.4 dB, respectively, much superior to the transducer fabricated using 0-3 composite matching layer. The high performance of this transducer indicates that the magnesium alloy is indeed an excellent matching layer material for ultrasonic transducer applications.

Design and Simulation of a Ring-Shaped Linear Array for Microultrasound Capsule Endoscopy

Video capsule endoscopy (VCE) has significantly advanced visualization of the gastrointestinal tract since its introduction in the last 20 years. Work is now under way to combine VCE with microultrasound imaging. However, small maximum capsule dimensions, coupled with the electronics required to integrate ultrasound imaging capabilities, pose significant design challenges. This paper describes a simulation process for testing transducer geometries and imaging methodologies to achieve satisfactory imaging performance within the physical limitations of the capsule size and outlines many of the tradeoffs needed in the design of this new class of ultrasound capsule endoscopy (USCE) device. A hybrid MATLAB model is described, incorporating Krimholtz-Leedom-Matthaei circuit elements and digitizing and beamforming elements to render a gray-scale B-mode. This model is combined with a model of acoustic propagation to generate images of point scatterers. The models are used to demonstrate the performance of a USCE transducer configuration comprising a single, unfocused transmit ring of radius 5 mm separated into eight segments for electrical impedance control and a 512-element receive linear array, also formed into a ring. The MATLAB model includes an ultrasonic pulser circuit connected to a piezocrystal composite transmit transducer with a center frequency of 25 MHz. B-scan images are simulated for wire target phantoms, multilayered phantoms, and a gut wall model. To demonstrate the USCE system's ability to image tissue, a digital phantom was created from single-element ultrasonic transducer scans of porcine small bowel ex vivo obtained at a frequency of 45 MHz.

Metasurface for Water-to-Air Sound Transmission

Effective transmission of sound from water to air is crucial for the enhancement of the detection sensitivity of underwater sound. However, only 0.1% of the acoustic energy is naturally transmitted at such a boundary. At audio frequencies, quarter-wave plates or multilayered antireflection coatings are too bulky for practical use for such enhancement. Here we present an acoustic metasurface of a thickness of only ∼λ/100, where λ is the wavelength in air, consisting of an array of meta-atoms that each contain a set of membranes and an air-filled cavity. We experimentally demonstrate that such a meta-atom increases the transmission of sound at ∼700  Hz by 2 orders of magnitude, allowing about 30% of the incident acoustic power from water to be transmitted into air. Applications include underwater sonic sensing and communication.

In vivo measurement of basilar membrane vibration in the unopened chinchilla cochlea using high frequency ultrasound

The basilar membrane and organ of Corti in the cochlea are essential for sound detection and frequency discrimination in normal hearing. There are currently no methods used for real-time high resolution clinical imaging or vibrometry of these structures. The ability to perform such imaging could aid in the diagnosis of some pathologies and advance understanding of the causes. It is demonstrated that high frequency ultrasound can be used to measure basilar membrane vibrations through the round window of chinchilla cochleas in vivo. The basic vibration characteristics of the basilar membrane agree with previous studies that used other methods, although as expected, the sensitivity of ultrasound was not as high as optical methods. At the best frequency for the recording location, the average vibration velocity amplitude was about 4 mm/s/Pa with stimulus intensity of 50 dB sound pressure level. The displacement noise floor was about 0.4 nm with 256 trial averages (5.12 ms per trial). Although vibration signals were observed, which likely originated from the organ of Corti, the spatial resolution was not adequate to resolve any of the sub-structures. Improvements to the ultrasound probe design may improve resolution and allow the responses of these different structures to be better discriminated.

Design of matching layers for high-frequency ultrasonic transducers

Matching the acoustic impedance of high-frequency (≥100 MHz) ultrasound transducers to an aqueous loading medium remains a challenge for fabricating high-frequency transducers. The traditional matching layer design has been problematic to establish high matching performance given requirements on both specific acoustic impedance and precise thickness. Based on both mass-spring scheme and microwave matching network analysis, we interfaced metal-polymer layers for the matching effects. Both methods hold promises for guiding the metal-polymer matching layer design. A 100 MHz LiNbO₃ transducer was fabricated to validate the performance of the both matching layer designs. In the pulse-echo experiment, the transducer echo amplitude increased by 84.4% and its -6dB bandwidth increased from 30.2% to 58.3% comparing to the non-matched condition, demonstrating that the matching layer design method is effective for developing high-frequency ultrasonic transducers.

Piezoelectric micromachined ultrasound transducer (PMUT) arrays for integrated sensing, actuation and imaging

Many applications of ultrasound for sensing, actuation and imaging require miniaturized and low power transducers and transducer arrays integrated with electronic systems. Piezoelectric micromachined ultrasound transducers (PMUTs), diaphragm-like thin film flexural transducers typically formed on silicon substrates, are a potential solution for integrated transducer arrays. This paper presents an overview of the current development status of PMUTs and a discussion of their suitability for miniaturized and integrated devices. The thin film piezoelectric materials required to functionalize these devices are discussed, followed by the microfabrication techniques used to create PMUT elements and the constraints the fabrication imposes on device design. Approaches for electrical interconnection and integration with on-chip electronics are discussed. Electrical and acoustic measurements from fabricated PMUT arrays with up to 320 diaphragm elements are presented. The PMUTs are shown to be broadband devices with an operating frequency which is tunable by tailoring the lateral dimensions of the flexural membrane or the thicknesses of the constituent layers. Finally, the outlook for future development of PMUT technology and the potential applications made feasible by integrated PMUT devices are discussed.