Vacuum ultraviolet nonlinear metalens

Explainable Encoder-Prediction-Reconstruction Framework for the Prediction of Metasurface Absorption Spectra

The correlation between metasurface structures and their corresponding absorption spectra is inherently complex due to intricate physical interactions. Additionally, the reliance on Maxwell's equations for simulating these relationships leads to extensive computational demands, significantly hindering rapid development in this area. Numerous researchers have employed artificial intelligence (AI) models to predict absorption spectra. However, these models often act as black boxes. Despite training high-performance models, it remains challenging to verify if they are fitting to rational patterns or merely guessing outcomes. To address these challenges, we introduce the Explainable Encoder-Prediction-Reconstruction (EEPR) framework, which separates the prediction process into feature extraction and spectra generation, facilitating a deeper understanding of the physical relationships between metasurface structures and spectra and unveiling the model's operations at the feature level. Our model achieves a 66.23% reduction in average Mean Square Error (MSE), with an MSE of 2.843 × 10-4 compared to the average MSE of 8.421×10-4 for mainstream networks. Additionally, our model operates approximately 500,000 times faster than traditional simulations based on Maxwell's equations, with a time of 3×10-3 seconds per sample, and demonstrates excellent generalization capabilities. By utilizing the EEPR framework, we achieve feature-level explainability and offer insights into the physical properties and their impact on metasurface structures, going beyond the pixel-level explanations provided by existing research. Additionally, we demonstrate the capability to adjust absorption by changing the metasurface at the feature level. These insights potentially empower designers to refine structures and enhance their trust in AI applications.

A synthetic moving-envelope metasurface antenna for independent control of arbitrary harmonic orders

Flexible frequency controls are crucial in many photonic and electronic applications, ranging from communications systems, spectroscopy, and metrology to quantum information processing. However, the state-of-the-art solutions based on nonlinear bulk media, electro-optic effect, and nonlinear metasurfaces incur very limited spectral controllability, and merely a couple of harmonic orders can be independently manipulated. Here, we theoretically propose and experimentally demonstrate synthetic moving-envelope metasurface antennas capable of simultaneously generating arbitrary harmonic orders and independently manipulating their wave properties in a software-defined manner. As proof-of-principle examples, we demonstrate unidirectional frequency transition, frequency comb generation, arbitrary harmonic orders independent control, and their applications in frequency-division multiplexing communications. All these complicated functionalities are achieved by the 1-bit spatiotemporally ON-OFF switching of meta-atoms of the waveguide-integrated metasurface antenna. Our proposed synthetic metasurface antenna solution greatly expands the frontiers of wave engineering and information manipulation, showing promising potential in wireless communications, spectroscopy, metrology, and quantum science.

Nonlinear upconverted thermal emission through difference frequency generation

Thermal radiation management is of critical importance in energy, sensing, and heat transfer. According to Planck's law, objects at room temperature predominantly emit thermal radiation within the mid- and far-infrared bands. Here, we demonstrated the upconversion of the mid- and far-infrared thermal radiation emitted by second-order nonlinear material to the easily-detectable visible band through a difference frequency process. This nonlinear broad-spectrum upconversion is facilitated by the random quasi-phase-matching technique in the nanoparticle system. Furthermore, we show the temperature measurement of thermal spots using such nonlinear thermal radiation. This scheme paves the way for applications in thermal management and sensing.

Printable Spin-Multiplexed Metasurfaces for Ultraviolet Holographic Displays

Multiplexed ultraviolet (UV) metaholograms, which are capable of displaying multiple holographic images from a single-layer device, are promising for enhancing tamper resistance and functioning as optical encryption devices. Despite considerable interest in optical security, the commercialization of UV metaholograms encounters obstacles, such as high-resolution patterning and material choices. Here, we realize spin-multiplexed UV metaholograms using a high-throughput printable platform that incorporates a zirconium dioxide (ZrO2) particle-embedded resin (PER). Utilizing ZrO2 PER, which is transparent and exhibits a refractive index of approximately 1.8 at 320 nm, we fabricated a single device capable of encoding dual holographic information depending on polarization states is fabricated. We demonstrate UV metaholograms achieving efficiencies of 56.23% with left circularly polarized incident beams and 57.28% with right circularly polarized incident beams. These multiplexed UV metaholograms fabricated using a one-step platform enable real-world applications in anticounterfeiting and encryption.

Nonlocal meta-lens with Huygens' bound states in the continuum

Meta-lenses composed of artificial meta-atoms have stimulated substantial interest due to their compact and flexible wavefront shaping capabilities, outperforming bulk optical devices. The operating bandwidth is a critical factor determining the meta-lens' performance across various wavelengths. Meta-lenses that operate in a narrowband manner relying on nonlocal effects can effectively reduce disturbance and crosstalk from non-resonant wavelengths, making them well-suitable for specialized applications such as nonlinear generation and augmented reality/virtual reality display. However, nonlocal meta-lenses require striking a balance between local phase manipulation and nonlocal resonance excitation, which involves trade-offs among factors like quality-factor, efficiency, manipulation dimensions, and footprint. In this work, we experimentally demonstrate the nonlocal meta-lens featuring Huygens' bound states in the continuum (BICs) and its near-infrared imaging application. All-dielectric integrated-resonant unit is particularly optimized to efficiently induce both the quasi-BIC and generalized Kerker effect, while ensuring the rotation-angle robustness for generating geometric phase. The experimental results show that the single-layer nonlocal Huygens' meta-lens possesses a high quality-factor of 104 and achieves a transmission polarization conversion efficiency of 55%, exceeding the theoretical limit of 25%. The wavelength-selective two-dimensional focusing and imaging are demonstrated as well. This work will pave the way for efficient nonlocal wavefront shaping and meta-devices.

Nonlocal metasurface for dark-field edge emission

Nonlocal effects originating from interactions between neighboring meta-atoms introduce additional degrees of freedom for peculiar characteristics of metadevices, such as enhancement, selectivity, and spatial modulation. However, they are generally difficult to manipulate because of the collective responses of multiple meta-atoms. Here, we experimentally demonstrate the nonlocal metasurface to realize the spatial modulation of dark-field emission. Plasmonic asymmetric split rings (ASRs) are designed to simultaneously excite local dipole resonance and nonlocal quasi-bound states in the continuum and spatially extended modes. With one type of unit, nonlocal effects are tailored by varying array periods. ASRs at the metasurface's edge lack sufficient interactions, resulting in stronger dark-field scattering and thus edge emission properties of the metasurface. Pixel-level spatial control is demonstrated by simply erasing some units, providing more flexibility than conventional local metasurfaces. This work paves the way for manipulating nonlocal effects and facilitates applications in optical trapping and sorting at the nanoscale.

High-security learning-based optical encryption assisted by disordered metasurface

Artificial intelligence has gained significant attention for exploiting optical scattering for optical encryption. Conventional scattering media are inevitably influenced by instability or perturbations, and hence unsuitable for long-term scenarios. Additionally, the plaintext can be easily compromised due to the single channel within the medium and one-to-one mapping between input and output. To mitigate these issues, a stable spin-multiplexing disordered metasurface (DM) with numerous polarized transmission channels serves as the scattering medium, and a double-secure procedure with superposition of plaintext and security key achieves two-to-one mapping between input and output. In attack analysis, when the ciphertext, security key, and incident polarization are all correct, the plaintext can be decrypted. This system demonstrates excellent decryption efficiency over extended periods in noisy environments. The DM, functioning as an ultra-stable and active speckle generator, coupled with the double-secure approach, creates a highly secure speckle-based cryptosystem with immense potentials for practical applications.

Metasurface-Controlled Holographic Microcavities

Optical microcavities confine light to wavelength-scale volumes and are a key component for manipulating and enhancing the interaction of light, vacuum states, and matter. Current microcavities are constrained to a small number of spatial mode profiles. Imaging cavities can accommodate complicated modes but require an externally preshaped input. Here, we experimentally demonstrate a visible-wavelength, metasurface-based holographic microcavity that overcomes these limitations. The micrometer-scale metasurface cavity fulfills the round-trip condition for a designed mode with a complex-shaped intensity profile and thus selectively enhances light that couples to this mode, achieving a spectral bandwidth of 0.8 nm. By imaging the intracavity mode, we show that the holographic mode changes quickly with the cavity length and that the cavity displays the desired spatial mode profile only close to the design cavity length. When a metasurface is placed on a distributed Bragg reflector and steep phase gradients are realized, the correct choice of the reflector's top layer material can boost metasurface performance considerably. The applied forward-design method can be readily transferred to other spectral regimes and mode profiles.

Design and simulation of an extreme ultraviolet metalens based on the Pancharatnam-Berry phase

Extreme ultraviolet (EUV) radiation plays a key role in the fields of material science, attosecond metrology, and lithography. However, the reflective optical components typically used in EUV systems contribute to their bulky size, weight, and increased costs for fabrication. In this paper, we theoretically investigate transmissive metalens designs capable of focusing the EUV light based on the Pancharatnam-Berry phase. The designed metalens is composed of nanoscale elliptical holes, which can guide and manipulate EUV light due to the higher refractive index of the vacuum holes compared to that of the surrounding material. We designed an EUV metalens with a diameter of 10 µm, which supports a focal length of 24 µm and a numerical aperture of up to 0.2. It can focus 55-nm EUV incident light to a diffraction-limited spot, and the focusing efficiency is calculated to be as high as about 7% over a broad EUV frequency range (50-65 nm). This study reveals the possibility of applying a dielectric metalens in the EUV region without a transmissive optical material.

Modal Phase-Matched Bound States in the Continuum for Enhancing Third Harmonic Generation of Deep Ultraviolet Emission

Coherent deep ultraviolet (DUV) light sources are crucial for various applications such as nanolithography, biomedical imaging, and spectroscopy. DUV light sources can be generated by using conventional nonlinear optical crystals (NLOs). However, NLOs are limited by their bulky size, inadequate transparency at the DUV regime, and stringent phase-matching requirements for harmonic generation. Recently, dielectric metasurfaces support high Q-factor resonances and offer a promising approach for efficient harmonic generation at short wavelengths. In this study, we demonstrated a crystalline silicon (c-Si) metasurface simultaneously exciting modal phase-matched bound states in the continuum (BIC) resonance at the fundamental wavelength of 840 nm with a higher degree of freedom for precise control of the BIC resonance and a plasmonic resonance at the wavelength of 280 nm in the DUV to enhance third harmonic generation (THG). We experimentally achieved a Q-factor of ∼180 owing to the relatively large refractive index of the c-Si and the geometric symmetry breaking of the structure. We realized THG at a wavelength of 280 nm with a power of 14.5 nW by using a peak power density of 15 GW/cm2 excitation. The measured THG power is 14 times higher than the state-of-the-art THG dielectric metasurfaces using the same peak power density in the DUV regime, and the maximum obtained THG power enhancement factor is up to 48. This approach relies on the significant third-order nonlinear susceptibility of c-Si, the interband plasmonic nature of the c-Si in the DUV, and the strong field confinement of BIC resonance to boost overall nonlinear conversion efficiency to 5.2 × 10-6% in the DUV regime. Our work shows the potential of c-Si BIC metasurfaces for developing efficient and ultracompact DUV light sources using high-efficacy nonlinear optical devices.

Switchable Two-Dimensional AND and Exclusive OR Operation Based on Dual-Wavelength Metasurfaces

Logic operation serves as the foundation and core element of computing networks; it will bring huge vitality to advanced information processing with its adaptation in the optical domain. As fundamental logic operations, AND and exclusive OR (XOR) operations serve a multitude of purposes, such as their ability to cooperate in enabling image processing and interpretation. Here, we propose and experimentally demonstrate a wavelength multiplexed AND and XOR function based on metasurfaces. By combining two cosine gratings with distinct frequencies and an initial phase difference of π/2, we extract the similarities and differences between two input images simultaneously by illuminating them with 445 and 633 nm wavelengths. Additionally, we explore its potential in information encryption, where overall security is enhanced by distributing distinct parts of initial information and encoded keys to different receivers. This design possesses the benefits of convenient mode switching and high-quality imaging, facilitating advanced applications in pattern recognition, machine vision, medical diagnosis, etc.

Tantalum pentoxide: a new material platform for high-performance dielectric metasurface optics in the ultraviolet and visible region

Dielectric metasurfaces, composed of planar arrays of subwavelength dielectric structures that collectively mimic the operation of conventional bulk optical elements, have revolutionized the field of optics by their potential in constructing high-efficiency and multi-functional optoelectronic systems on chip. The performance of a dielectric metasurface is largely determined by its constituent material, which is highly desired to have a high refractive index, low optical loss and wide bandgap, and at the same time, be fabrication friendly. Here, we present a new material platform based on tantalum pentoxide (Ta2O5) for implementing high-performance dielectric metasurface optics over the ultraviolet and visible spectral region. This wide-bandgap dielectric, exhibiting a high refractive index exceeding 2.1 and negligible extinction coefficient across a broad spectrum, can be easily deposited over large areas with good quality using straightforward physical vapor deposition, and patterned into high-aspect-ratio subwavelength nanostructures through commonly-available fluorine-gas-based reactive ion etching. We implement a series of high-efficiency ultraviolet and visible metasurfaces with representative light-field modulation functionalities including polarization-independent high-numerical-aperture lensing, spin-selective hologram projection, and vivid structural color generation, and the devices exhibit operational efficiencies up to 80%. Our work overcomes limitations faced by scalability of commonly-employed metasurface dielectrics and their operation into the visible and ultraviolet spectral range, and provides a novel route towards realization of high-performance, robust and foundry-manufacturable metasurface optics.

High-angle deflection of metagrating-integrated laser emission for high-contrast microscopy

Flat metaoptics components are looking to replace classical optics elements and could lead to extremely compact biophotonics devices if integrated with on-chip light sources and detectors. However, using metasurfaces to shape light into wide angular range wavefronts with high efficiency, as is typically required in high-contrast microscopy applications, remains a challenge. Here we demonstrate curved GaAs metagratings integrated on vertical-cavity surface-emitting lasers (VCSELs) that enable on-chip illumination in total internal reflection and dark field microscopy. Based on an unconventional design that circumvents the aspect ratio dependent etching problems in monolithic integration, we demonstrate off-axis emission centred at 60° in air and 63° in glass with > 90% and > 70% relative deflection efficiency, respectively. The resulting laser beam is collimated out-of-plane but maintains Gaussian divergence in-plane, resulting in a long and narrow illumination area. We show that metagrating-integrated VCSELs of different kinds can be combined to enable rapid switching between dark-field and total internal reflection illumination. Our approach provides a versatile illumination solution for high-contrast imaging that is compatible with conventional microscopy setups and can be integrated with biophotonics devices, such as portable microscopy, NIR-II range bioimaging, and lab-on-a-chip devices.

Compact meta-optics infrared camera based on a polarization-insensitive metalens with a large field of view

Metasurfaces have recently emerged as a crucial tool because they achieve spherical-aberration-free focusing when exposed to normal incident light. Nevertheless, these metasurfaces often exhibit considerable coma when subjected to oblique incident light, thereby limiting their imaging field of view. In light of this, our study presents the design and an experimental demonstration of a polarization-insensitive, large-field-of-view metalens that uses a silicon metasurface. The metalens is specifically tailored to the long-wavelength infrared region and possesses a numerical aperture of 0.81, which is capable of focusing light at incident angles up to ±80°. Moreover, we successfully build a meta-optics camera by integrating the large field-of-view metalens on top of an image sensor, thus enabling wide-angle thermal imaging of practical scenes. This research provides new, to the best of our knowledge, insights for designing and realizing large-field-of-view optical systems and holds promise for applications in night vision imaging and security monitoring.

Enhancing Focusing and Defocusing Capabilities with a Dynamically Reconfigurable Metalens Utilizing Sb2Se3 Phase-Change Material

Metalenses are emerging as an alternative to digital micromirror devices (DMDs), with the advantages of compactness and flexibility. The exploration of metalenses has ignited enthusiasm among optical engineers, positioning them as the forthcoming frontier in technology. In this paper, we advocate for the implementation of the phase-change material, Sb2Se3, capable of providing swift, reversible, non-volatile focusing and defocusing within the 1550 nm telecom spectrum. The lens, equipped with a robust ITO microheater, offers unparalleled functionality and constitutes a significant step toward dynamic metalenses that can be integrated with beamforming applications. After a meticulously conducted microfabrication process, we showcase a device capable of rapid tuning (0.1 MHz level) for metalens focusing and defocusing at C band communication, achieved by alternating the PCM state between the amorphous and crystalline states. The findings from the experiment show that the device has a high contrast ratio for switching of 28.7 dB.

Full-Stokes parameters detection enabled by a non-interleaved fiber-compatible metasurface

Polarization of the optical field determines the way of light-matter interaction, which lays the foundation for various applications such as chiral spectroscopy, biomedical imaging, and machine vision. Currently, with the rise of the metasurface, miniaturized polarization detectors have attracted extensive interest. However, due to the limitation of the working area, it is still a challenge to integrate polarization detectors on the fiber end face. Here, we propose a design of compact non-interleaved metasurface that can be integrated on the tip of a large-mode-area photonic crystal fiber (LMA-PCF) to realize full-Stokes parameters detection. Through concurrent control over the dynamic phase and Pancharatnam-Berry (PB) phase, different helical phases are assigned to the two orthogonal circular polarization bases, of which the amplitude contrast and relative phase difference can be represented by two non-overlapped foci and an interference ring pattern, respectively. Therefore, the determination of arbitrary polarization states through the proposed ultracompact fiber-compatible metasurface can be achieved. Moreover, we calculated full-Stokes parameters according to simulation results and obtained that the average detection deviation is relatively low at 2.84% for 20 elucidated samples. The novel metasurface exhibits excellent polarization detection performance and overcomes the limitation of the small integrated area, which provides insights into the further practical explorations of ultracompact polarization detection devices.

Extreme ultraviolet metalens by vacuum guiding

Extreme ultraviolet (EUV) radiation is a key technology for material science, attosecond metrology, and lithography. Here, we experimentally demonstrate metasurfaces as a superior way to focus EUV light. These devices exploit the fact that holes in a silicon membrane have a considerably larger refractive index than the surrounding material and efficiently vacuum-guide light with a wavelength of ~50 nanometers. This allows the transmission phase at the nanoscale to be controlled by the hole diameter. We fabricated an EUV metalens with a 10-millimeter focal length that supports numerical apertures of up to 0.05 and used it to focus ultrashort EUV light bursts generated by high-harmonic generation down to a 0.7-micrometer waist. Our approach introduces the vast light-shaping possibilities provided by dielectric metasurfaces to a spectral regime that lacks materials for transmissive optics.

One-step printable platform for high-efficiency metasurfaces down to the deep-ultraviolet region

A single-step printable platform for ultraviolet (UV) metasurfaces is introduced to overcome both the scarcity of low-loss UV materials and manufacturing limitations of high cost and low throughput. By dispersing zirconium dioxide (ZrO₂) nanoparticles in a UV-curable resin, ZrO₂ nanoparticle-embedded-resin (nano-PER) is developed as a printable material which has a high refractive index and low extinction coefficient from near-UV to deep-UV. In ZrO₂ nano-PER, the UV-curable resin enables direct pattern transfer and ZrO₂ nanoparticles increase the refractive index of the composite while maintaining a large bandgap. With this concept, UV metasurfaces can be fabricated in a single step by nanoimprint lithography. As a proof of concept, UV metaholograms operating in near-UV and deep-UV are experimentally demonstrated with vivid and clear holographic images. The proposed method enables repeat and rapid manufacturing of UV metasurfaces, and thus will bring UV metasurfaces more close to real life.

Advance of large-area achromatic flat lenses

A new framework of light coherence optimization is proposed to design non-ideal broadband achromatic lenses, enabling large-scale flat lenses' implementation and high performance. The strategy paves the way for practical planar optical devices and full-color imaging systems.

High-quality factor mid-infrared absorber based on all-dielectric metasurfaces

The absorption spectrum of metasurface absorbers can be manipulated by changing structures. However, narrowband performance absorbers with high quality factors (Q-factor) are hard to achieve, mainly for the ohmic loss of metal resonators. Here, we propose an all-dielectric metasurface absorber with narrow absorption linewidth in the mid-infrared range. Magnetic quadrupole resonance is excited in the stacked Ge-Si₃N₄ nanoarrays with an absorption of 89.6% and a Q-factor of 6120 at 6.612 µm. The separate lossless Ge resonator and lossy Si₃N₄ layer realize high electromagnetic field gain and absorption, respectively. And the proposed method successfully reduced the intrinsic loss of the absorber, which reduced the absorption beyond the resonant wavelength and improved the absorption efficiency of Si₃N₄ in the low loss range. Furthermore, the absorption intensity and wavelength can be modulated by adjusting the geometric parameters of the structure. We believe this research has good application prospects in mid-infrared lasers, thermal emitters, gas feature sensing, and spectral detection.

Large-scale achromatic flat lens by light frequency-domain coherence optimization

Flat lenses, including metalens and diffractive lens, have attracted increasing attention due to their ability to miniaturize the imaging devices. However, realizing a large scale achromatic flat lens with high performance still remains a big challenge. Here, we developed a new framework in designing achromatic multi-level diffractive lenses by light coherence optimization, which enables the implementation of large-scale flat lenses under non-ideal conditions. As results, a series achromatic polymer lenses with diameter from 1 to 10 mm are successfully designed and fabricated. The subsequent optical characterizations substantially validate our theoretical framework and show relatively good performance of the centimeter-scale achromatic multi-level diffractive lenses with a super broad bandwidth in optical wavelengths (400-1100 nm). After comparing with conventional refractive lens, this achromatic lens shows significant advantages in white-light imaging performance, implying a new strategy in developing practical planar optical devices.

Pitfalls in the spectral measurements of polarization-altering metasurfaces

The optical characterization of metasurfaces and nanostructures that alter the polarization of light is tricky and can lead to unphysical results, such as reflectance beyond unity. We track the origin of such pitfalls to the response of some typical optical components used in a commercial microscope or a custom-made setup. In particular, the beam splitter and some mirrors have different responses for both polarizations and can produce wrong results. A simple procedure is described to correct these erroneous results, based on the optical characterization of the different components in the optical setup. With this procedure, the experimental results match the numerical simulations perfectly. The methodology described here is simple and will enable the accurate spectral measurements of nanostructures and metasurfaces that alter the polarization of the incoming light.

Deep-ultraviolet nonlinear optical crystals: concept development and materials discovery

Deep-ultraviolet (DUV, wavelength λ < 200 nm) nonlinear optical (NLO) crystal is the core component of frequency conversion to generate DUV laser, which plays an important role in cutting-edge laser technology and fundamental science. Significant progress has been made in both experimental exploration and theoretical design in the field of DUV NLO crystals over the past three decades. In-depth insight into "structure-property correlations", in particular, allows for rigorous and precise identification of DUV NLO crystals. In this article, we reviewed the current experimental and theoretical research progress while elucidating the core concepts and stringent criteria of qualified DUV phase-matched second-harmonic generation crystals. We also discussed the development of the DUV NLO "structure-property correlations" from first principles and how it has sparked interest in related materials, as well as future directions for obtaining potential DUV NLO crystals.

Augmentation of surface plasmon-enhanced second harmonic generation from Au nanoprisms on SiO2/Si: interference contribution

We present an augmentation of Surface Plasmon (SP)-enhanced second harmonic generation (SHG) due to interference field enhancement in Au nanoprisms (AuNPs) on SiO₂-coated Si substrates. The SiO₂ spacer contributed for the optical interference and increased the coupling efficiency of the pump light with the SP polarization as well as a decoupling efficiency of the SHG waves from nonlinear polarization. The intensity of the SP-enhanced SHG signals increased 4.5-fold with respect to the AuNPs on the bare SiO₂ substrate by setting the SiO₂ spacer layer to the appropriate thickness. The numerical analysis revealed that the optimal SHG conversion was determined by the balance between the degree of the optical interference at the fundamental and SHG wavelengths.