Polishing Approaches at Atomic and Close-to-Atomic Scale

Roughness down to atomic and close-to-atomic scale is receiving an increasing attention in recent studies of manufacturing development, which can be realized by high-precision polishing processes. This review presents polishing approaches at atomic and close-to-atomic scale on planar and curved surfaces, including chemical mechanical polishing, plasma-assisted polishing, catalyst-referred etching, bonnet polishing, elastic emission machining, ion beam figuring, magnetorheological finishing, and fluid jet polishing. These polishing approaches are discussed in detail in terms of removal mechanisms, polishing systems, and industrial applications. The authors also offer perspectives for future studies to address existing and potential challenges and promote technological progress.

Wear Study of a Magnetron-Sputtered TiC/a-C Nanocomposite Coating under Media-Lubricated Oscillating Sliding Conditions

Friction and wear performance of non-reactively magnetron-sputtered hydrogen-free TiC/a-C coatings were characterized under lubricated oscillating sliding conditions against 100Cr6 steel. The friction mediators, isooctane, ethanol and distilled water, were chosen to address the actual trend of environmentally friendly green technologies in mobility and the potential use of carbon-based nanocomposite thin film materials for tribocomponents in contact with gasoline and alternative biofuels. Sliding pairs of the TiC/a-C coatings showed significantly reduced friction and wear compared to the reference materials under both unlubricated and lubricated conditions (when using the aforementioned media isooctane, ethanol and distilled water). Quasi-stationary friction coefficient of the TiC/a-C sliding pairs after running-in was almost independent of test conditions and could be traced back to self-lubrication as a result of the formation of a transfer layer on the steel counter body. Wear of the coatings based on micro-abrasion and tribochemical reaction was significantly influenced by the environmental conditions. Lowest wear was measured after tests in non-polar isooctane whereas highest wear was measured after tests in water.

Study on the Mechanism of Solid-Phase Oxidant Action in Tribochemical Mechanical Polishing of SiC Single Crystal Substrate

Na₂CO₃—1.5 H₂O₂, KClO₃, KMnO₄, KIO₃, and NaOH were selected for dry polishing tests with a 6H-SiC single crystal substrate on a polyurethane polishing pad. The research results showed that all the solid-phase oxidants, except NaOH, could decompose to produce oxygen under the frictional action. After polishing with the five solid-phase oxidants, oxygen was found on the surface of SiC, indicating that all five solid-phase oxidants can have complex tribochemical reactions with SiC. Their reaction products are mainly SiO₂ and (SiO₂)x. Under the action of friction, due to the high flash point temperature of the polishing interface, the oxygen generated by the decomposition of the solid-phase oxidant could oxidize the surface of SiC and generate a SiO₂ oxide layer on the surface of SiC. On the other hand, SiC reacted with H₂O and generated a SiO₂ oxide layer on the surface of SiC. After polishing with NaOH, the SiO₂ oxide layer and soluble Na₂SiO₃ could be generated on the SiC surface; therefore, the surface material removal rate (MRR) was the highest, and the surface roughness was the largest, after polishing. The lowest MRR was achieved after the dry polishing of SiC with KClO₃.

Sliding Speed-Dependent Tribochemical Wear of Oxide-Free Silicon

Fundamental understanding of tribochemical wear mechanism of oxide-free single crystalline silicon (without native oxide layer) is essential to optimize the process of ultra-precision surface manufacturing. Here, we report sliding speed-dependent nanowear of oxide-free silicon against SiO₂ microspheres in air and in deionized water. When contact pressure is too low to induce Si yield, tribochemical wear occurs with the existence of water molecules and wear volume decreases logarithmically to constant as sliding speed increased. TEM and Raman observations indicate that the dynamics of rupture and reformation of interfacial bonding bridges result in the variation of tribochemical wear of the oxide-free Si with the increase of sliding speed.

Ultralow friction induced by tribochemical reactions: a novel mechanism of lubrication on steel surfaces

The tribological properties of two steel surfaces rubbing against each other are measured while they are in contact with 1,3-diketones of varying structure. Such systems show after a short running-in period ultralow friction properties with a coefficient of friction of as low as μ = 0.005. It is suggested that the extremely favorable friction properties are caused by a tribochemical reaction between the 1,3-diketones and the steel surfaces, leading to formation of a chelated iron-diketo complex. The influence of temperature and the molecular structure of the 1,3 diketo-lubricants onto the friction properties of the system is elucidated under both static and dynamic conditions. With progression of the tribochemical reaction, the sliding surfaces become very conformal and smooth, so that the pressure is greatly reduced and further wear is strongly reduced. All iron particles potentially generated by wear during the initial running-in period are completely dissolved through complex formation. It is proposed that the tribochemical polishing reaction causes a transition from boundary lubrication to fluid lubrication.

Nanotribological characterization of molecularly thick lubricant films for applications to MEMS/NEMS by AFM

Molecularly thick perfluoropolyether (PFPE) films are considered to be good protective films for micro/nanoelectromechanical systems (MEMS/NEMS) to reduce stiction, friction, and improve their durability. Understanding the nanotribological performance and mechanisms of these films are quite important for efficient lubrication for MEMS/NEMS devices. These devices are used in various operating environments and their effect on friction, adhesion and durability needs to be clarified. For this purpose, mobile and chemically bonded PFPE films were deposited by dip coating technique. The friction and adhesion properties of these films were characterized by atomic force microscopy (AFM). The effect of rest time, velocity, relative humidity, and temperature on nanotribological properties of these films was studied. Durability of these films was also measured by repeated cycling tests. The adhesion, friction mechanisms of PFPE at molecular scale, and the mechanisms of the effect of operating environment and durability are subject of this paper. This study found that adsorption of water, formation of meniscus and its change during sliding, viscosity, and surface chemistry properties play a big role on the friction, adhesion, and durability of the lubricant films.