High-precision analysis of a lateral shearing interferogram by use of the integration method and polynomials

Wavefront restoration from lateral shearing data using spectral interpolation

Although a lateral-shear interferometer is robust against optical component vibrations, its interferogram provides information about differential wavefronts rather than the wavefronts themselves, resulting in the loss of specific frequency components. Previous studies have addressed this limitation by measuring four interferograms with different shear amounts to accurately restore the two-dimensional wavefront. This study proposes a technique that employs spectral interpolation to reduce the number of required interferograms. The proposed approach introduces an origin-shift technique for accurate spectral interpolation, which in turn is implemented by combining two methods: natural extension and least-squares determination of ambiguities in uniform biases. Numerical simulations confirmed that the proposed method accurately restored a two-dimensional wavefront from just two interferograms, thereby indicating its potential to address the limitations of the lateral-shear interferometer.

Rigorous simulation model of double-Ronchi shearing interferometry on lithographic tools

Double-Ronchi shearing interferometry is widely used in wavefront aberration measurements for advanced lithography projection lens systems. A rigorous simulation model of double-Ronchi shearing interferometry on lithographic tools is the precondition for phase-shifting retrieval algorithm design and error analysis. This paper presents a rigorous simulation model of double-Ronchi shearing interferometry considering the vector nature of light. The model is accurate and can be used in the study of double-Ronchi shearing interferometry.

Adjustable flexure mount to compensate for deformation of an optic surface

An adjustable mounting structure is proposed to compensate for surface deformation of a mirror caused by the assembly process. The mount adopts a six-point support based on the kinematic mount principle. Three of the support points are adjustable, and they are moved along the axial direction by actuators. Surface deformation is expressed by Zernike coefficients in this paper, and a sensitivity matrix of the surface deformation is established by varying the unit displacement of each adjustment support point and getting the corresponding Zernike coefficient changes. The surface deformation is measured, and the compensation adjustment of each adjustable support point is then obtained by anti-sensitivity calculation. Finally, the feasibility of present support structure design and surface figure compensating method are verified by experiments. The experimental results show that the present structure and method could significantly reduce the surface deformation caused by the assembly process. The surface deformation is 4.6 nm RMS after assembly and it is decreased to 1.3 nm RMS after four iterations of compensation, which is close to the 1.1 nm RMS after optical polishing.

High spatial resolution zonal reconstruction with modified multishear method in frequency domain

An exact multishear zonal algorithm is proposed to reconstruct two-dimensional wavefronts in frequency domain. The algorithm maintains the advantage of fast Fourier transform and loosens the "natural extension" requirement that the shear amounts must be divisors of sampling points N; therefore, it can be rapidly executed for large data arrays. The effect of tilt errors in multishear interferometry is analyzed and compensated in our method. The presented algorithm is applicable for a general aperture shape by using an iterative method. Application of large shears is allowed, and high resolution of the reconstructed wavefront can be achieved. Results of numerical simulations demonstrate the capability of our method.

Extended shift-rotation method for absolute interferometric testing of a spherical surface with pixel-level spatial resolution

An improved shift-rotation method for the absolute testing of spherical surfaces is developed to obtain pixel-level spatial resolution and a low noise propagation ratio. The absolute testing process includes multiple rotational tests and two lateral shifting tests with large shifts. A wavefront reconstruction algorithm based on subaperture division and least squares fitting is proposed to reconstruct the surface figure of the test optics. Numerical simulation results show that the method reveals high-frequency figures missed in the traditional Zernike-based shift-rotation method. The algorithm error is lower than 0.4%, and the noise propagation ratio can be reduced by 70% using large shifts. The absolute testing of spherical optics is carried out to verify this method. One spherical surface was tested with the presented absolute testing method and the method using a point diffraction interferometer. The difference of the measurement results based on the two methods showed that the testing uncertainty reached 0.19 nm root mean square (RMS), which indicated that the presented method has potential subnanometer testing uncertainty.

Exact recovery of wavefront from multishearing interferograms in spatial domain

An exact algorithm based on the multishearing interferograms has been proposed to reconstruct a two-dimensional wavefront. It allows large shears and high resolution of the reconstructed wavefront to be achieved. In this paper, we use simultaneous linear equations to express the relationship between difference wavefronts and the unknown original wavefront, and then the least-squares method is applied to reconstruct the wavefront. To solve the memory problem, an improved wavefront reconstruction algorithm based on virtual subaperture stitching was proposed to improve the calculation efficiency. Lastly, numerical simulations are implemented and the proposed algorithm is compared with another modal and zonal method. The results indicate that the proposed algorithm is capable of reconstructing continuous or discontinuous wavefronts exactly with a large grid. Numerical simulation also shows high accuracy recovery capability of the proposed method in the existence of mixed noise.

Ultra-large field-of-view two-photon microscopy

We present a two-photon microscope that images the full extent of murine cortex with an objective-limited spatial resolution across an 8 mm by 10 mm field. The lateral resolution is approximately 1 µm and the maximum scan speed is 5 mm/ms. The scan pathway employs large diameter compound lenses to minimize aberrations and performs near theoretical limits. We demonstrate the special utility of the microscope by recording resting-state vasomotion across both hemispheres of the murine brain through a transcranial window and by imaging histological sections without the need to stitch.

3D surface mapping of freeform optics using wavelength scanning lateral shearing interferometry

Freeform optics have emerged as promising components in diverse applications due to the potential for superior optical performance. There are many research fields in the area ranging from fabrication to measurement, with metrology being one of the most challenging tasks. In this paper, we describe a new variant of lateral shearing interferometer with a tunable laser source that enables 3D surface profile measurements of freeform optics with high speed, high vertical resolution, large departure, and large field-of-view. We have verified the proposed technique by comparing our measurement result with that of an existing technique and measuring a representative freeform optic.

An 11-frame phase shifting algorithm in lateral shearing interferometry

In order to eliminate zeroth order effect and to make the phase shifting algorithm insensitive to phase shifting error, an 11-frame phase shifting algorithm is proposed in this paper. The analytical expression of phase-restoration error function is derived. The principle of phase shifting error compensation and the capability of suppressing zeroth order effect are explained, in comparison of existing algorithm. The analytical results show that this algorithm's phase-restoration error is proportional to sine of double shearing phase and to biquadratic of phase shifting error. Finally, we generate the interference patterns of 11-frame algorithm and existing algorithm, restore the shearing phases and calculate the phase-restoration errors by simulations. The simulation results verify the theoretical analyses.

Correction of rotational inaccuracy in lateral shearing interferometry for freeform measurement

A lateral shearing interferometer has an advantage over previous wavefront measuring interferometers since it requires no reference. Therefore the lateral shearing interferometer can be a powerful solution to measure a freeform surface. It, however, has some issues to be resolved before it can be implemented. One of them is the orthogonality problem between two shearing directions in LSI. Previous wavefront reconstruction algorithms assume that the shearing directions are perfectly orthogonal to each other and lateral shear is obtained simultaneously in the sagittal and tangential directions. For practical LSI, however, there is no way to guarantee perfect orthogonality between two shearing directions. Motivated by this, we propose a new algorithm that is able to compensate the rotational inaccuracy. The mathematical model is derived in this paper. Computer simulations and experiments are also displayed to verify our algorithm.

High spatial resolution zonal wavefront reconstruction with improved initial value determination scheme for lateral shearing interferometry

In a recent paper [J. Opt. Soc. Am. A 29, 2038 (2012)], we proposed a generalized high spatial resolution zonal wavefront reconstruction method for lateral shearing interferometry. The test wavefront can be reconstructed with high spatial resolution by using linear interpolation on a subgrid for initial values estimation. In the current paper, we utilize the difference between the Zernike polynomial fitting method and linear interpolation in determining the subgrid initial values. The validity of the proposed method is investigated through comparison with the previous high spatial resolution zonal method. Simulation results show that the proposed method is more accurate and more stable to shear ratios compared with the previous method. A comprehensive comparison of the properties of the proposed method, the previous high spatial resolution zonal method, and the modal method is performed.

Modal wavefront reconstruction based on Zernike polynomials for lateral shearing interferometry: comparisons of existing algorithms

Four modal methods of reconstructing a wavefront from its difference fronts based on Zernike polynomials in lateral shearing interferometry are currently available, namely the Rimmer-Wyant method, elliptical orthogonal transformation, numerical orthogonal transformation, and difference Zernike polynomial fitting. The present study compared these four methods by theoretical analysis and numerical experiments. The results show that the difference Zernike polynomial fitting method is superior to the three other methods due to its high accuracy, easy implementation, easy extension to any high order, and applicability to the reconstruction of a wavefront on an aperture of arbitrary shape. Thus, this method is recommended for use in lateral shearing interferometry for wavefront reconstruction.

Two-dimensional wavefront reconstruction from lateral multi-shear interferograms

We propose and demonstrate multiple shearing interferometry for measuring two-dimensional phase object. Multi-shear interference can effectively eliminate the problem of spectral leakage that results from the single-shear interference. The Fourier coefficients of a two-dimensional wavefront are computed from phase differences obtained from multiple shearing interferograms, which are acquired by a shearing interferometer, and the desired phase is then reconstructed. Numerical and optical tests have confirmed that the multiple shearing interferometry has a higher recovery accuracy than single-shear interferometry and the reconstruction precision increases as the number of shear steps increases.

Use of numerical orthogonal transformation for the Zernike analysis of lateral shearing interferograms

A numerical orthogonal transformation method for reconstructing a wavefront by use of Zernike polynomials in lateral shearing interferometry is proposed. The difference fronts data in two perpendicular directions are fitted to numerical orthonormal polynomials instead of Zernike polynomials, and then the orthonormal coefficients are used to evaluate the Zernike coefficients of the original wavefront by use of a numerical shear matrix. Due to the fact that the dimensions of the shear matrix are finite, the high-order terms of the original wavefront above a certain order have to be neglected. One of advantages of the proposed method is that the impact of the neglected high-order terms on the outcomes of the lower-order terms can be decreased, which leads to a more accurate reconstruction result. Another advantage is that the proposed method can be applied to reconstruct a wavefront on an aperture of arbitrary shape from its difference fronts. Theoretical analysis and numerical simulations shows that the proposed method is correct and its reconstruction error is obviously smaller than that of Rimmer-Wyant method.

Improved Saunders method for the analysis of lateral shearing interferograms

An interferogram obtained by use of ordinary interferometers, such as Fizeau and Twyman-Green interferometers, will show a contour map of the wave front under test. A lateral-shearing interferogram, however, will show a contour map of the difference between the wave front under test and a sheared wave front, that is, a contour map of the derivative of the wave front under test. Therefore one can reconstruct the shape of the wave front under test by analyzing that difference. Many methods for reconstructing a wave front have been proposed. The Saunders method reconstructs a wave front; rapidly however the wave-front data are reconstructed only at intervals of the amount of shear along the direction of the shear. Therefore the method has low spatial resolution. A method for reconstructing a wave front that is based on the Saunders method and has high spatial resolution is proposed. The method analyzes the differences that are produced by shearing of the wave front under test in many directions. This method requires a large number of interferograms for reconstructing the wave front. Here the method is described, and its validity is confirmed by simulation.