Wide cantilever stiffness range cavity optomechanical sensors for atomic force microscopy

Single-cavity loss-enabled nanometrology

Optical monitoring of the position and alignment of objects with a precision of only a few nanometres is key in applications such as smart manufacturing and force sensing. Traditional optical nanometrology requires precise nanostructure fabrication, multibeam interference or complex postprocessing algorithms, sometimes hampering wider adoption of this technology. Here we show a simplified, yet robust, approach to achieve nanometric metrology down to 2 nm resolution that eliminates the need for any reference signal for interferometric measurements. We insert an erbium-doped quartz crystal absorber into a single Fabry-Pérot cavity with a length of 3 cm and then induce exceptional points by matching the optical loss with the intercavity coupling. We experimentally achieve a displacement response enhancement of 86 times compared with lossless methods, and theoretically argue that an enhancement of over 450 times, corresponding to subnanometre resolution, may be achievable. We also show a fivefold enhancement in the signal-to-noise ratio, thus demonstrating that non-Hermitian sensors can lead to improved performances over the Hermitian counterpart.

Dissipative Acousto-optic Interactions in Optical Microcavities

We propose and demonstrate experimentally the strong dissipative acousto-optic interaction between a suspended vibrating microfiber and a whispering-gallery microcavity. On the one hand, the dissipative response driven by an external stimulus of acoustic waves is found to be stronger than the dispersive response by 2 orders of magnitude. On the other hand, dead points emerge with the zero dissipative response at certain parameters, promising the potentials in physical sensing such as precise measurements of magnetic field and temperature. The strong dissipative acousto-optic interaction is then explored for ultrasensitive detection of broadband acoustic waves. A noise equivalent pressure as low as 0.81 Pa at 140 kHz in air is demonstrated experimentally, insensitive to cavity Q factors and does not rely on mechanical resonances.

Overcoming thermo-optical dynamics in broadband nanophotonic sensing

Advances in integrated photonics open up exciting opportunities for batch-fabricated optical sensors using high-quality-factor nanophotonic cavities to achieve ultrahigh sensitivities and bandwidths. The sensitivity improves with increasing optical power; however, localized absorption and heating within a micrometer-scale mode volume prominently distorts the cavity resonances and strongly couples the sensor response to thermal dynamics, limiting the sensitivity and hindering the measurement of broadband time-dependent signals. Here, we derive a frequency-dependent photonic sensor transfer function that accounts for thermo-optical dynamics and quantitatively describes the measured broadband optomechanical signal from an integrated photonic atomic force microscopy nanomechanical probe. Using this transfer function, the probe can be operated in the high optical power, strongly thermo-optically nonlinear regime, accurately measuring low- and intermediate-frequency components of a dynamic signal while reaching a sensitivity of 0.7 fm/Hz^1/2 at high frequencies, an improvement of ≈10× relative to the best performance in the linear regime. Counterintuitively, we discover that a higher transduction gain and sensitivity are achieved with lower quality-factor optical modes for low signal frequencies. Not limited to optomechanical transducers, the derived transfer function is generally valid for describing the small-signal dynamic responses of a broad range of technologically important photonic sensors subject to the thermo-optical effect.

Fundamental limits and optimal estimation of the resonance frequency of a linear harmonic oscillator

All physical oscillators are subject to thermodynamic and quantum perturbations, fundamentally limiting measurement of their resonance frequency. Analyses assuming specific ways of estimating frequency can underestimate the available precision and overlook unconventional measurement regimes. Here we derive a general, estimation-method-independent Cramer Rao lower bound for a linear harmonic oscillator resonance frequency measurement uncertainty, seamlessly accounting for the quantum, thermodynamic and instrumental limitations, including Fisher information from quantum backaction- and thermodynamically-driven fluctuations. We provide a universal and practical maximum-likelihood frequency estimator reaching the predicted limits in all regimes, and experimentally validate it on a thermodynamically-limited nanomechanical oscillator. Low relative frequency uncertainty is obtained for both very high bandwidth measurements (≈ 10-5 for τ = 30 μs ) and measurements using thermal fluctuations alone (<10-6). Beyond nanomechanics, these results advance frequency-based metrology across physical domains.

Frequency Stabilization of Nanomechanical Resonators Using Thermally Invariant Strain Engineering

Microfabricated mechanical resonators enable precision measurement techniques from atomic force microscopy to emerging quantum applications. The resonance frequency-based physical sensing combines high precision with long-term stability. However, widely used Si₃N₄ resonators suffer from frequency sensitivity to temperature due to the differential thermal expansion vs the Si substrates. Here we experimentally demonstrate temperature- and residual stress-insensitive 16.51 MHz tuning fork nanobeam resonators with nonlinear clamps defining the stress and frequency by design, achieving a low fractional frequency sensitivity of (2.5 ± 0.8) × 10^-6 K^-1, a 72× reduction. On-chip optical readout of resonator thermomechanical fluctuations allows precision frequency measurement without any external excitation at the thermodynamically limited frequency Allan deviation of ≈7 Hz/Hz^1/2 and (relative) bias stability of ≈10 Hz (≈ 0.6 × 10^-6) above 1 s averaging, remarkably, on par with state-of-the-art driven devices of similar mass. Both the resonator stabilization and the passive frequency readout can benefit a wide variety of micromechanical sensors.

Optomechanical detection of light with orbital angular momentum

We present the design of an optomechanical device that allows sensitive transduction of the orbital angular momentum of light. An optically induced twist imparted on the device is detected using a photonic crystal cavity optomechanical system. This device allows the measurement of the orbital angular momentum of light when photons are absorbed by the mechanical element or the detection of the presence of photons when they are scattered into new orbital angular momentum states by a sub-wavelength grating patterned on the device. Such a system allows the detection of optical pulses with an l = 1 orbital angular momentum field that have an average photon number of 3.9 × 10³ at a 5 MHz repetition rate, assuming that detector noise is not limiting measurement sensitivity. This scheme can be extended to higher order orbital angular momentum states.

Progress of infrared guided-wave nanophotonic sensors and devices

Nanophotonics, manipulating light-matter interactions at the nanoscale, is an appealing technology for diversified biochemical and physical sensing applications. Guided-wave nanophotonics paves the way to miniaturize the sensors and realize on-chip integration of various photonic components, so as to realize chip-scale sensing systems for the future realization of the Internet of Things which requires the deployment of numerous sensor nodes. Starting from the popular CMOS-compatible silicon nanophotonics in the infrared, many infrared guided-wave nanophotonic sensors have been developed, showing the advantages of high sensitivity, low limit of detection, low crosstalk, strong detection multiplexing capability, immunity to electromagnetic interference, small footprint and low cost. In this review, we provide an overview of the recent progress of research on infrared guided-wave nanophotonic sensors. The sensor configurations, sensing mechanisms, sensing performances, performance improvement strategies, and system integrations are described. Future development directions are also proposed to overcome current technological obstacles toward industrialization.

Atomic force microscopy with integrated on-chip interferometric readout

The most common readout technique used in atomic force microscopy (AFM) is based on optical beam deflection (OBD), which relies on monitoring deflection of the cantilever probe by measuring the position of the laser beam reflected from the free end of the AFM cantilever. Although systems using the OBD readout can achieve subnanometre displacement resolution and video rate imaging speeds, its main limitation is size, which is difficult to minimise, thus limiting multiprobe imaging capability. Currently, system miniaturisation has been accommodated by adopting on-chip electrical readout solutions, often at the expense of measurement sensitivity. To date, no cost-effective AFM readout solution exists without sacrificing either measurement sensitivity, system miniaturisation, or multiprobe array scalability. In this paper we present an AFM probe with integrated on-chip optical interferometric readout based on silicon photonics. Our AFM probe combines the advantages of subnanometre resolution of optical readouts with on-chip miniaturisation. The adopted approach determines deflection of the cantilever using an integrated on-chip photonics waveguide by monitoring the separation between the sensing cantilever and an interrogating grating. The implemented methodology provides ultimate interferometric resolution and sensitivity, on-chip miniaturisation, and array scalability, which makes possible ultrafast multiprobe-array AFM imaging. Using a Digital Instruments D3000 AFM retrofitted with our cantilever probe and integrated readout, we report sub-nanometre AFM topography images obtained on reference samples. We demonstrate RMS static AFM noise level of 19 pm, outperforming the operation of this system in its standard, optical beam deflection configuration (51 pm). The noise spectrum measurements of our probe indicate that the integrated readout is shot noise limited, achieving a deflection noise density (DND) of 36fm/Hz.

Analysis of microcantilevers excited by pulsed-laser-induced photoacoustic waves

This study presents a simulation-based analysis on the excitation of microcantilever in air using pulsed-laser-induced photoacoustic waves. A model was designed and coded to investigate the effects of consecutive photoacoustic waves, arising from a spherical light absorber illuminated by short laser pulses. The consecutiveness of the waves were adjusted with respect to the pulse repetition frequency of the laser to examine their cumulative effects on the oscillation of microcantilever. Using this approach, oscillation characteristics of two rectangular cantilevers with different resonant frequencies (16.9 kHz and 505.7 kHz) were investigated in the presence of the random oscillations. The results show that the effective responses of the microcantilevers to the consecutive photoacoustic waves provide steady-state oscillations, when the pulse repetition frequency matches to the fundamental resonant frequency or its lower harmonics. Another major finding is that being driven by the same photoacoustic pressure value, the high frequency cantilever tend to oscillate at higher amplitudes. Some of the issues emerging from these findings may find application area in atomic force microscopy actuation and photoacoustic signal detection.

Dynamically induced robust phonon transport and chiral cooling in an optomechanical system

The transport of sound and heat, in the form of phonons, can be limited by disorder-induced scattering. In electronic and optical settings the introduction of chiral transport, in which carrier propagation exhibits parity asymmetry, can remove elastic backscattering and provides robustness against disorder. However, suppression of disorder-induced scattering has never been demonstrated in non-topological phononic systems. Here we experimentally demonstrate a path for achieving robust phonon transport in the presence of material disorder, by explicitly inducing chirality through parity-selective optomechanical coupling. We show that asymmetric optical pumping of a symmetric resonator enables a dramatic chiral cooling of clockwise and counterclockwise phonons, while simultaneously suppressing the hidden action of disorder. Surprisingly, this passive mechanism is also accompanied by a chiral reduction in heat load leading to optical cooling of the mechanics without added damping, an effect that has no optical analog. This technique can potentially improve upon the fundamental thermal limits of resonant mechanical sensors, which cannot be attained through sideband cooling.

Chiral transport can provide robustness against disorder, resulting in improved resonant modes for sensing and metrology. Here, Kim et al. demonstrate chiral phonon transport, disorder suppression and anomalous cooling without damping in an asymmetrically-pumped optomechanical system.

Nanocavity optomechanical torque magnetometry and radiofrequency susceptometry

Nanophotonic optomechanical devices allow the observation of nanoscale vibrations with a sensitivity that has dramatically advanced the metrology of nanomechanical structures and has the potential to impact studies of nanoscale physical systems in a similar manner. Here we demonstrate this potential with a nanophotonic optomechanical torque magnetometer and radiofrequency (RF) magnetic susceptometer. Exquisite readout sensitivity provided by a nanocavity integrated within a torsional nanomechanical resonator enables observations of the unique net magnetization and RF-driven responses of single mesoscopic magnetic structures in ambient conditions. The magnetic moment resolution is sufficient for the observation of Barkhausen steps in the magnetic hysteresis of a lithographically patterned permalloy island. In addition, significantly enhanced RF susceptibility is found over narrow field ranges and attributed to thermally assisted driven hopping of a magnetic vortex core between neighbouring pinning sites. The on-chip magnetosusceptometer scheme offers a promising path to powerful integrated cavity optomechanical devices for the quantitative characterization of magnetic micro- and nanosystems in science and technology.

Nanomechanical motion transduction with a scalable localized gap plasmon architecture

Plasmonic structures couple oscillating electromagnetic fields to conduction electrons in noble metals and thereby can confine optical-frequency excitations at nanometre scales. This confinement both facilitates miniaturization of nanophotonic devices and makes their response highly sensitive to mechanical motion. Mechanically coupled plasmonic devices thus hold great promise as building blocks for next-generation reconfigurable optics and metasurfaces. However, a flexible approach for accurately batch-fabricating high-performance plasmomechanical devices is currently lacking. Here we introduce an architecture integrating individual plasmonic structures with precise, nanometre features into tunable mechanical resonators. The localized gap plasmon resonators strongly couple light and mechanical motion within a three-dimensional, sub-diffraction volume, yielding large quality factors and record optomechanical coupling strength of 2 THz·nm⁻¹. Utilizing these features, we demonstrate sensitive and spatially localized optical transduction of mechanical motion with a noise floor of 6 fm·Hz^−1/2, representing a 1.5 orders of magnitude improvement over existing localized plasmomechanical systems.

Flexible approaches are required for building plasmomechanical devices for tunable optical devices. Here, Roxworthy et al. introduce a plasmonic-nanoelectromechanical systems device where gap plasmon resonators are embedded into arrays of moving silicon nitride nanostructures, yielding thousands of devices per chip.

Scalable Fabrication of Integrated Nanophotonic Circuits on Arrays of Thin Single Crystal Diamond Membrane Windows

Diamond has emerged as a promising platform for nanophotonic, optical, and quantum technologies. High-quality, single crystalline substrates of acceptable size are a prerequisite to meet the demanding requirements on low-level impurities and low absorption loss when targeting large photonic circuits. Here, we describe a scalable fabrication method for single crystal diamond membrane windows that achieves three major goals with one fabrication method: providing high quality diamond, as confirmed by Raman spectroscopy; achieving homogeneously thin membranes, enabled by ion implantation; and providing compatibility with established planar fabrication via lithography and vertical etching. On such suspended diamond membranes we demonstrate a suite of photonic components as building blocks for nanophotonic circuits. Monolithic grating couplers are used to efficiently couple light between photonic circuits and optical fibers. In waveguide coupled optical ring resonators, we find loaded quality factors up to 66 000 at a wavelength of 1560 nm, corresponding to propagation loss below 7.2 dB/cm. Our approach holds promise for the scalable implementation of future diamond quantum photonic technologies and all-diamond photonic metrology tools.

Intracavity Squeezing Can Enhance Quantum-Limited Optomechanical Position Detection through Deamplification

It has been predicted and experimentally demonstrated that by injecting squeezed light into an optomechanical device, it is possible to enhance the precision of a position measurement. Here, we present a fundamentally different approach where the squeezing is created directly inside the cavity by a nonlinear medium. Counterintuitively, the enhancement of the signal-to-noise ratio works by deamplifying precisely the quadrature that is sensitive to the mechanical motion without losing quantum information. This enhancement works for systems with a weak optomechanical coupling and/or strong mechanical damping. This can allow for larger mechanical bandwidth of quantum-limited detectors based on optomechanical devices. Our approach can be straightforwardly extended to quantum nondemolition qubit detection.