Huang YH, Chang GE, Li H, Cheng HH. Sn-based waveguide p-i-n photodetector with strained GeSn/Ge multiple-quantum-well active layer.
OPTICS LETTERS 2017;
42:1652-1655. [PMID:
28454127 DOI:
10.1364/ol.42.001652]
[Citation(s) in RCA: 8] [Impact Index Per Article: 1.1] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/07/2023]
Abstract
We report on Sn-based p-i-n waveguide photodetectors (WGPD) with a pseudomorphic GeSn/Ge multiple-quantum-well (MQW) active layer on a Ge-buffered Si substrate. A reduced dark-current density of 59 mA/cm2 was obtained at a reverse bias of 1 V due to the suppressed strain relaxation in the GeSn/Ge active layer. Responsivity experiments revealed an extended photodetection range covering the O, E, S, C, and L telecommunication bands completely due to the bandgap reduction resulting from Sn-alloying. Band structure analysis of the pseudomorphic GeSn/Ge quantum well structures indicated that, despite the stronger quantum confinement, the absorption edge can be shifted to longer wavelengths by increasing the Sn content, thereby enabling efficient photodetection in the infrared region. These results demonstrate the feasibility of using GeSn/Ge MQW planar photodetectors as building blocks of electronic-photonic integrated circuits for telecommunication and optical interconnection applications.
Collapse