Adaptive electrowetting lens-prism element

Tunable liquid lens for three-photon excitation microscopy

We demonstrate a novel electrowetting liquid combination using a room temperature ionic liquid (RTIL) and a nonpolar liquid, 1-phenyl-1-cyclohexene (PCH) suitable for focus-tunable 3-photon microscopy. We show that both liquids have over 90% transmission at 1300 nm over a 1.1 mm pathlength and an index of refraction contrast of 0.123. A lens using these liquids can be tuned from a contact angle of 133 to 48° with applied voltages of 0 and 60 V, respectively. Finally, a three-photon imaging system including an RTIL electrowetting lens was used to image a mouse brain slice. Axial scans taken with an electrowetting lens show excellent agreement with images acquired using a mechanically scanned objective.

Silicon-based high-resolution and low-power-consumption two-dimensional beam scanner integrated with hybrid wavelength-tunable laser diode

Optical phased array (OPA) is a useful device for achieving the solid-state beam scanner required in compact light detection and ranging. However, conventional OPAs actively control the phase difference between arrays. Therefore, power consumption is extremely high in a high-resolution OPA. Herein, we fabricated a passive OPA with a 128-channel silicon arrayed waveguide and Si-dot grating antennas with large apertures. Moreover, we integrated a hybrid wavelength-tunable laser diode with a passive OPA. The field of view was 43.9° × 10.4°, and the FWHM of the beam width was 0.233° × 0.0495°. The power consumption per antenna was 0.397 mW.

Characterization of Surface Modifications in Oxygen Plasma-Treated Teflon AF1600

We explore the surface properties of Teflon AF1600 films treated by oxygen plasma with various procedure parameters. Contact angle (CA) measurements, scanning electron microscopy (SEM), atomic force microscopy (AFM), and X-ray photoelectron microscopy (XPS) are employed to investigate the wetting behavior, surface topography, and chemical composition, respectively. While the etched thickness reveals a linear relationship to the applied plasma energy, the surface presents various wetting properties and topographies depending on the plasma energy: low advancing and zero receding CA (1 kJ), super high advancing and zero receding CA (2-3 kJ), and super high advancing and high receding CA (≥4.5 kJ) for the wetting behaviors; pillar-like (≤6 kJ) and fiber-like (>6 kJ) nanoscaled structures for the topographies. The results of XPS analysis reveal slight changes in the presence of O- and F-components (<4%) after oxygen plasma treatment. Furthermore, we discuss the applicability of the Wenzel and Cassie-Baxter equations and employ the Friction-Adsorption (FA) model, where no wetting state and structure-related parameters are needed, to describe the CAs on the plasma-treated surfaces. Additionally, we conduct electrowetting experiments on the treated surfaces and find that the experimental results of the advancing CA are in good agreement with the predictions of the FA model.

Technologies for depth scanning in miniature optical imaging systems [Invited]

Biomedical optical imaging has found numerous clinical and research applications. For achieving 3D imaging, depth scanning presents the most significant challenge, particularly in miniature imaging devices. This paper reviews the state-of-art technologies for depth scanning in miniature optical imaging systems, which include two general approaches: 1) physically shifting part of or the entire imaging device to allow imaging at different depths and 2) optically changing the focus of the imaging optics. We mainly focus on the second group of methods, introducing a wide variety of tunable microlenses, covering the underlying physics, actuation mechanisms, and imaging performance. Representative applications in clinical and neuroscience research are briefly presented. Major challenges and future perspectives of depth/focus scanning technologies for biomedical optical imaging are also discussed.

Development of Cyclic Tetrasiloxane Polymer as a High-Performance Dielectric and Hydrophobic Layer for Electrowetting Displays

Cyclic tetrasiloxane polymer (CTP) has recently garnered interest as a hydrophobic material with unique properties. This study aims to enhance the dielectric constant of CTP films by introducing excess Si-H groups and to explore the impact of synthesis and processing conditions on the resulting properties. The film demonstrates high hydrophobicity, with contact angles of 107° in air and 165° in n-decane, along with a notable dielectric constant of 5.1°. Furthermore, the CTP film displays reversible electrowetting behavior with low contact angle hysteresis (2°) and possesses good transparency (∼99%) and thermal stability. As such, the CTP film has significant potential as a material for the electric wetting of hydrophobic dielectric layers and may serve as a promising alternative in electrowetting applications.

Fabrication and characterization of a two-dimensional individually addressable electrowetting microlens array

We demonstrate a two-dimensional, individually tunable electrowetting microlens array fabricated using standard microfabrication techniques. Each lens in our array has a large range of focal tunability from -1.7 mm to -∞ in the diverging regime, which we verify experimentally from 0 to 75 V for a device coated in Parylene C. Additionally, each lens can be actuated to within 1% of their steady-state value within 1.5 ms. To justify the use of our device in a phase-sensitive optical system, we measure the wavefront of a beam passing through the center of a single lens in our device over the actuation range and show that these devices have a surface quality comparable to static microlens arrays. The large range of tunability, fast response time, and excellent surface quality of these devices open the door to potential applications in compact optical imaging systems, transmissive wavefront shaping, and beam steering.

Axisymmetrical resonance modes in an electrowetting optical lens

Electrowetting-based adaptive optics are of great interest for applications ranging from confocal microscopy to LIDAR, but the impact of low-frequency mechanical vibration on these devices remains to be studied. We present a simple theoretical model for predicting the resonance modes induced on the liquid interface in conjunction with a numerical simulation. We experimentally confirm the resonance frequencies by contact angle modulation. They are found to be in excellent agreement with the roots of the zero-order Bessel functions of the first kind. Next, we experimentally verify that external axial vibration of an electrowetting lens filled with density mismatched liquids (Δρ = 250 kg/m³) will exhibit observable Bessel modes on the liquid-liquid interface. An electrowetting lens filled with density matched liquids (Δρ = 4 kg/m³) is robust to external axial vibration and is shown to be useful in mitigating the effect of vibrations in an optical system.

Adaptive aberration correction using an electrowetting array

We demonstrate a method that permits wavefront aberration correction using an array of electrowetting prisms. A fixed high fill factor microlens array followed by a lower fill factor adaptive electrowetting prism array is used to correct wavefront aberration. The design and simulation of such aberration correction mechanism is described. Our results show significant improvement to the Strehl ratio by using our aberration correction scheme which results in diffraction limited performance. Compactness and effectiveness of our design can be implemented in many applications that require aberration correction, such as microscopy and consumer electronics.

Temperature Dependence of Water Contact Angle on Teflon AF1600

In this work, we investigate the change of contact angle (CA) of a water droplet during evaporation on a Teflon AF1600 surface in the temperature range between 20 and 80 °C under standard laboratory conditions. An almost constant initial CA and a significant increase of the stabilized CA have been observed. The results reveal a temperature-dependent CA change, mainly due to water adsorption on the solid surface. Soaking experiments indicate that besides adsorption, a temperature-independent friction-like force contributes to the pinning of triple-line and therefore to the CA change. We propose an adsorption coverage parameter and a friction-like force to describe the CA change. Furthermore, we describe a reproducible process to produce smooth and homogeneous Teflon AF1600 thin films, minimizing the influence of roughness and local heterogeneity on the CA.

Achromatic doublet electrowetting prism array for beam steering device in foveated display

A foveated display is a technology that can solve the problem of insufficient angular resolution (relative to the human eye) for near-eye display. In a high-resolution foveated display, a beam steering element is required to track the human gaze. An electrowetting prism array is a transmissive non-mechanical beam steering device, that allows a light and compact optical system to be configured and a large aperture possible. However, the view is obstructed by the sidewall of the prism array. When the size of the cell prism is 7mm, the prism array has an 87% fill-factor. To push the fill-factor to 100%, the cell prisms were magnified using a lens array. Image processing was performed such that the image produced by the lens array was identical to the original. Beam steering by refraction is accompanied by chromatic dispersion, which causes chromatic aberration, making colors appear blurry. The refractive index condition to reduce chromatic dispersion was obtained using the doublet structure of the electrowetting prism. The chromatic dispersion was reduced by 70% on average.

Accelerated electrowetting-based tunable fluidic lenses

One of the limitations in the application of electrowetting-based tunable fluidic lenses is their slow response time. We consider here two approaches for enhancing the response speed of tunable fluidic lenses: optimization of the properties of the fluids employed and modification of the time-dependent actuation voltages. Using a tubular optofluidic configuration, it is shown through simulations how one may take advantage of the interplay between liquid viscosities and surface tension to reduce the actuation time. In addition, by careful designing the actuation pulses, the response speed of both overdamped and underdamped systems may be increased by over an order of magnitude, leading to response times of several ten milliseconds. These performance improvements may significantly enhance the applicability of tunable optofluidic-based components and systems.

Oil Conductivity, Electric-Field-Induced Interfacial Charge Effects, and Their Influence on the Electro-Optical Response of Electrowetting Display Devices

A pixel in an electrowetting display (EWD) can be viewed as a confined water/oil two-phase microfluidic system that can be manipulated by applying an electric field. The phenomenon of charge trapping in the protective dielectric and conductivity of the oil phase reduce the effective electric field that is required to keep the three-phase contact line (TCL) in place. This probably leads to an oil-backflow effect which deteriorates the electro-optical performance of EWD devices. In order to investigate charge trapping and conduction effects on the device electro-optical response, an EWD device was studied, which was fabricated with a black oil, aiming for a high-contrast ratio and color-filter display. For comparison, we also prepared a device containing a purple oil, which had a lower electrical conductivity. As anticipated, the black-oil device showed faster backflow than the purple-oil device. A simple model was proposed to explain the role of oil conductivity in the backflow effect. In addition, the rebound and reopening effects were also observed after the voltage was switched to zero. The above observations were strongly dependent on polarity. By combining observations of the polarity dependence of the oil conductivity and assuming that negative charges trap more strongly in the dielectric than positive charges, our experimental results on rebound and reopening can be explained. In the AC optical response, the pixel closing speed decreased in time for intermediate frequencies. This is likely related to the phenomenon of charge trapping. It was also found that the periodic driving method could not suppress the backflow effect when the driving frequency was above ~10 kHz. Our findings confirm the significance of the above charge-related effects of EWD devices, which need to be investigated further for better understanding in order to properly design/use materials and driving schemes to suppress them.

Calibration and characteristics of an electrowetting laser scanner

We present a calibration method to correct for fabrication variations and optical misalignment in a two-dimensional electrowetting scanner. These scanners are an attractive option due to being transmissive, nonmechanical, having a large scan angle (±13.7°), and low power consumption (μW). Fabrication imperfections lead to non-uniform deposition of the dielectric or hydrophobic layer which results in actuation inconsistency of each electrode. To demonstrate our calibration method, we scan a 5 × 5 grid target using a four-electrode electrowetting prism and observe a pincushion type optical distortion in the imaging plane. Zemax optical simulations verify that the symmetric distortion is due to the projection of a radial scanning surface onto a flat imaging plane, while in experiment we observe asymmetrical distortion due to optical misalignment and fabrication imperfections. By adjusting the actuation voltages through an iterative Delaunay triangulation interpolation method, the distortion is corrected and saw an improvement in the mean error across 25 grid points from 43 μm (0.117°) to 10 μm (0.027°).

High extinction ratio, low insertion loss, optical switch based on an electrowetting prism

An optical switch based on an electrowetting prism coupled to a multimode fiber has demonstrated a large extinction ratio with speeds up to 300 Hz. Electrowetting prisms provide a transmissive, low power, and compact alternative to conventional free-space optical switches, with no moving parts. The electrowetting prism performs beam steering of ±3° with an extinction ratio of 47 dB between the ON and OFF states and has been experimentally demonstrated at scanning frequencies of 100-300 Hz. The optical design is modeled in Zemax to account for secondary rays created at each surface interface (without scattering). Simulations predict 50 dB of extinction, in good agreement with experiment.

Multifunction reflector controlled by liquid piston for optical switch and beam steering

This paper presents a multifunction reflector controlled by liquid piston for optical switch and beam steering. The multifunction reflector consists of two liquid cavities that are designed with microchannels. Two holes covered with elastic membranes are fabricated on the upper surface of the liquid cavities. When the liquid cavity is injected with liquid, the shape of the elastic membrane changes to form a liquid piston in the position of the holes accordingly. The magnetic base covered with a reflector is fixed on the surface. We can adjust the active number and height of the liquid pistons to drive the reflector deflecting to different directions. Our experiments show that the multifunction reflector can realize the function of 2×2 optical switch. It can also deflect the light beam through an angle of 0°∼72° in two directions. The multifunction reflector has potential applications of free-space optical communications, laser detections and variable optical attenuators.

A multidirectional beam steering reflector actuated by hydraulic control

This paper presents a multidirectional beam steering reflector (MBSR) actuated by hydraulic control. It consists of three substrates, an elastic membrane, a magnetic base and a mirror reflector (MR). The MR is fixed on the magnetic base and covered upon the top substrate. The bottom substrate is designed with three channels for pulling in/out the liquid. When liquid volume changes, the shape of the elastic membrane changes to form a liquid piston, accordingly. The liquid piston can make the MR rotate to different directions. When a light beam irradiates the MR, it can achieve the function of beam steering in latitude and longitude, simultaneously. Our experiments show that the proposed MBSR can deflect the light beam through a maximum angle of 0~12.7° in latitude and six-directions in longitude. The MBSR has potential applications in the fields of free-space optical communications, laser detections and solar cells.

Real-Time Prosthetic Digit Actuation by Optical Read-out of Activity-Dependent Calcium Signals in an Ex Vivo Peripheral Nerve

Improved neural interfacing strategies are needed for the full articulation of advanced prostheses. To address limitations of existing control interface designs, the work of our laboratory has presented an optical approach to reading activity from individual nerve fibers using activity-dependent calcium transients. Here, we demonstrate the feasibility of such signals to control prosthesis actuation by using the axonal fluorescence signal in an ex vivo mouse nerve to drive a prosthetic digit in real-time. Additionally, signals of varying action potential frequency are streamed post hoc to the prosthesis, showing graded motor output and the potential for proportional neural control. This proof-of-concept work is a novel demonstration of the functional use of activity-dependent optical read-out in the nerve.

Lidar system with nonmechanical electrowetting-based wide-angle beam steering

A light detection and ranging (lidar) system with ±90° of steering based on an adaptive electrowetting-based prism for nonmechanical beam steering has been demonstrated. Electrowetting-based prisms provide a transmissive, low power, and compact alternative to conventional adaptive optics as a nonmechanical beam scanner. The electrowetting prism has a steering range of ±7.8°. We demonstrate a method to amplify the scan angle to ±90° and perform a one-dimensional scan in a lidar system.

Liquid Combination with High Refractive Index Contrast and Fast Scanning Speeds for Electrowetting Adaptive Optics

Electrowetting adaptive optical devices are versatile, with applications ranging from microscopy to remote sensing. The choice of liquids in these devices governs its tuning range, temporal response, and wavelength of operation. We characterized a liquid system, consisting of 1-phenyl-1-cyclohexene and deionized water, using both lens and prism devices. The liquids have a large contact angle tuning range, from 173 to 60°. Measured maximum scanning angle was realized at ±13.7° in a two-electrode prism, with simulation predictions of ±18.2°. The liquid's switching time to reach 90° contact angle from rest, in a 4 mm diameter device, was measured at 100 ms. Steady-state scanning with a two-electrode prism showed linear and consistent scan angles of ±4.8° for a 20 V differential between the two electrodes, whereas beam scanning using the liquid system achieved ±1.74° at 500 Hz for a voltage differential of 80 V.

Multiscale Interface Effect on Homogeneous Dielectric Structure of ZrO₂/Teflon Nanocomposite for Electrowetting Application

Electrowetting-on-dielectric is a preferred option in practical applications of the electrowetting phenomenon but limited by dielectric and breakdown performances of the dielectric layer. In the present work, a ceramic/polymer nanocomposite as a novel dielectric layer is developed to intensify the overall electrowetting performances by multiscale interface effect. Hereinto, surface fluoro-modified ZrO₂ nanoparticles (mZrO₂) are dispersed well in AF 1600 matrix to form a mZrO₂@AF 1600 nanocomposite. The small addition of mZrO₂ improves the dielectric constant of the nanocomposite, and the experimental value is larger than the theoretical value calculated by Maxwell⁻Garnett model, but fits well with the Rahaman⁻Khastgir model. The molecular dynamics simulations with the explicit model further verify the interfacial effect. Meanwhile, double contact angle modulation and higher breakdown field strength (Eb) are obtained. For the three-layer sandwich structure, both the top and bottom AF 1600 layer decrease the surface roughness for better electrowetting reproducibility and wider wettability modulation. The Forlani⁻Minnaja theory related to the empirical relationship between Eb and thickness of dielectric layer fit well with the monolayer structure, but cannot be applied in multi-layer structures. A new relationship is proposed to guide the design of dielectric multi-layers with high breakdown field strength.

Electro-wetting lenticular lens with improved diopter for 2D and 3D conversion using lens-shaped ETPTA chamber

In this paper, we introduce a method for improving the lens diopter of 2D/3D convertible devices using electro-wetting. For stable operation, an electro-wetting device requires high dioptric performance and this was achieved using bi-convex liquid-liquid-solid phases. 1-Chloronaphthalene with a refractive index of 1.633 was used as an oil phase to achieve high diopters. ETPTA (trimethylolpropane ethoxylate triacrylate), a UV-sensitive material with low chemical reactivity to the 1-Chloronaphthalene, was used as a chamber material. This resulted in a diopter of 3030D for high quality multi-view images without unstable oil movement or trembling. The ETPTA was molded on a 0.3mm thick glass substrate that was coated with UV adhesive (NOA 81). The maximum diopter capable of stable operation was 3425D. 2D and 3D conversion and parallax motion were demonstrated.

Double wedge prism based beam deflector for precise laser beam steering

Aiming to increase laser beam pointing stability required in interferometric measurements, we designed a laser beam deflector intended for active laser beam stabilization systems. The design is based on two wedge-prisms: the deflecting wedge driven by a tilting piezo-platform and the fixed wedge to compensate initial beam deflection. Our design allows linear beam steering, independently in the horizontal or vertical direction, with resolution of less than 1 μrad in a range of more than 100 μrad, and no initial deflection of the beam. Moreover, the ratio of the output beam deflection angle and the wedge tilt angle is less than 0.1; therefore, the noise influence is significantly reduced in comparison to standard mirror-based deflectors. The theoretical analyses support the designing process and can serve as a guide to wedge-prism selection. The experimental results are in agreement with theory and confirm the advantages of the presented double wedge system.

Optical read-out and modulation of peripheral nerve activity

Numerous clinical and research applications necessitate the ability to interface with peripheral nerve fibers to read and control relevant neural pathways. Visceral organ modulation and rehabilitative prosthesis are two areas which could benefit greatly from improved neural interfacing approaches. Therapeutic neural interfacing, or ‘bioelectronic medicine’, has potential to affect a broad range of disorders given that all the major organs of the viscera are neurally innervated. However, a better understanding of the neural pathways that underlie function and a means to precisely interface with these fibers are required. Existing peripheral nerve interfaces, consisting primarily of electrode-based designs, are unsuited for highly specific (individual axon) communication and/or are invasive to the tissue. Our laboratory has explored an optogenetic approach by which optically sensitive reporters and actuators are targeted to specific cell (axon) types. The nature of such an approach is laid out in this short perspective, along with associated technologies and challenges.

Numerical analysis of wavefront aberration correction using multielectrode electrowetting-based devices

We present numerical simulations of multielectrode electrowetting devices used in a novel optical design to correct wavefront aberration. Our optical system consists of two multielectrode devices, preceded by a single fixed lens. The multielectrode elements function as adaptive optical devices that can be used to correct aberrations inherent in many imaging setups, biological samples, and the atmosphere. We are able to accurately simulate the liquid-liquid interface shape using computational fluid dynamics. Ray tracing analysis of these surfaces shows clear evidence of aberration correction. To demonstrate the strength of our design, we studied three different input aberrations mixtures that include astigmatism, coma, trefoil, and additional higher order aberration terms, with amplitudes as large as one wave at 633 nm.

Two-photon laser scanning microscopy with electrowetting-based prism scanning

Laser scanners are an integral part of high resolution biomedical imaging systems such as confocal or 2-photon excitation (2PE) microscopes. In this work, we demonstrate the utility of electrowetting on dielectric (EWOD) prisms as a lateral laser-scanning element integrated in a conventional 2PE microscope. To the best of our knowledge, this is the first such demonstration for EWOD prisms. EWOD devices provide a transmissive, low power consuming, and compact alternative to conventional adaptive optics, and hence this technology has tremendous potential. We demonstrate 2PE microscope imaging of cultured mouse hippocampal neurons with a FOV of 130 × 130 μm² using EWOD prism scanning. In addition, we show simulations of the optical system with the EWOD prism, to evaluate the effect of propagating a Gaussian beam through the EWOD prism on the imaging quality. Based on the simulation results a beam size of 0.91 mm full width half max was chosen to conduct the imaging experiments, resulting in a numerical aperture of 0.17 of the imaging system.

Optical Read-out of Neural Activity in Mammalian Peripheral Axons: Calcium Signaling at Nodes of Ranvier

Current neural interface technologies have serious limitations for advanced prosthetic and therapeutic applications due primarily to their lack of specificity in neural communication. An optogenetic approach has the potential to provide single cell/axon resolution in a minimally invasive manner by optical interrogation of light-sensitive reporters and actuators. Given the aim of reading neural activity in the peripheral nervous system, this work has investigated an activity-dependent signaling mechanism in the peripheral nerve. We demonstrate action potential evoked calcium signals in mammalian tibial nerve axons using an in vitro mouse model with a dextran-conjugated fluorescent calcium indicator. Spatial and temporal dynamics of the signal are presented, including characterization of frequency-modulated amplitude. Pharmacological experiments implicate T-type CaV channels and sodium-calcium exchanger (NCX) as predominant mechanisms of calcium influx. This work shows the potential of using calcium-associated optical signals for neural activity read-out in peripheral nerve axons.

Electrowetting Performances of Novel Fluorinated Polymer Dielectric Layer Based on Poly(1H,1H,2H,2H-perfluoroctylmethacrylate) Nanoemulsion

In electrowetting devices, hydrophobic insulating layer, namely dielectric layer, is capable of reversibly switching surface wettability through applied electric field. It is critically important but limited by material defects in dielectricity, reversibility, film forming, adhesiveness, price and so on. To solve this key problem, we introduced a novel fluorinated polyacrylate—poly(1H,1H,2H,2H-perfluoroctylmethacrylate (PFMA) to construct micron/submicron-scale dielectric layer via facile spray coating of nanoemulsion for replacing the most common Teflon AF series. All the results illustrated that, continuous and dense PFMA film with surface relief less than 20 nm was one-step fabricated at 110 °C, and exhibited much higher static water contact angle of 124°, contact angle variation of 42°, dielectric constant of about 2.6, and breakdown voltage of 210 V than Teflon AF 1600. Particularly, soft and highly compatible polyacrylate mainchain assigned five times much better adhesiveness than common adhesive tape, to PFMA layer. As a promising option, PFMA dielectric layer may further facilitate tremendous development of electrowetting performances and applications.

Wide-angle nonmechanical beam steering using liquid lenses

Nonmechanical beam steering is a rapidly growing branch of adaptive optics with applications such as light detection and ranging, imaging, optical communications, and atomic physics. Here, we present an innovative technique for one- and two-dimensional beam steering using multiple tunable liquid lenses. We use an approach in which one lens controls the spot divergence, and one to two decentered lenses act as prisms and steer the beam. Continuous 1D beam steering was demonstrated, achieving steering angles of ±39° using two tunable liquid lenses. The beam scanning angle was further enhanced to ±75° using a fisheye lens. By adding a third tunable liquid lens, we achieved 2D beam steering of ±75°. In this approach, the divergence of the scanning beam is controlled at all steering angles.

Large extinction ratio optical electrowetting shutter

A large extinction ratio optical shutter has been demonstrated using electrowetting liquids. The device is based on switching between a liquid-liquid interface curvature that produces total internal reflection and one that does not. The interface radius of curvature can be tuned continuously from 9 mm at 0 V to -45 mm at 26 V. Extinction ratios from 55.8 to 66.5 dB were measured. The device shows promise for ultracold chip-scale atomic clocks.

Optofluidic laser scanner based on a rotating liquid prism

We demonstrate an electrowetting-actuated optofluidic system based on a rotatable liquid prism implemented as a two-dimensional laser scanner. The system is fabricated through a novel technology using a patterned flexible polymeric foil on which a high density of electrodes is structured and which is subsequently inserted into a cylindrical housing. The resulting radial electrode array is used for electrowetting actuation of two fluids filled into the cylinder, which allows a controllable tilt and orientation of the planar liquid interface and thus represents a tunable rotating prism. Finite element simulations and subsequent experimental verification show that this highly planar and precisely positionable liquid/liquid interface may be actuated to a deflection angle of ±6.4°, with a standard deviation of ±0.18°, and rotated 360° about the vertical axis. Power consumption is limited to several microwatts, and switching times of several hundred milliseconds were determined.