Parallel beam generation method for a high-precision roll angle measurement with a long working distance

Transversal optical singularity induced precision measurement of step-nanostructures

Optical singularities indicate zero-intensity points in space where parameters, such as phase, polarization, are undetermined. Vortex beams such as the Laguerre-Gaussian modes are characterized by a phase factor eilθ, and contain a phase singularity in the middle of its beam. In the case of a transversal optical singularity (TOS), it occurs perpendicular to the propagation, and its phase integral is 2π in nature. Since it emerges within a nano-size range, one expects that TOSs could be sensitive in the light-matter interaction process and could provide a great possibility for accurate determination of certain parameters of nanostructure. Here, we propose to use TOSs generated by a three-wave interference to illuminate a step nanostructure. After interaction with the nanostructure, the TOS is scattered into the far field. The scattering direction can have a relation with the physical parameters of the nanostructure. We show that by monitoring the spatial coordinates of the scattered TOS, its propagation direction can be determined, and as consequence, certain physical parameters of the step nanostructure can be retrieved with high precision.

Robust five-degree-of-freedom measurement system with self-compensation and air turbulence protection

A robust five-degree-of-freedom (5-DOF) measurement system is proposed in this paper. The compact optical configuration with high resolution is designed based on lens combination and multiple reflections. Beam drift and dual-beam parallelism are monitored and compensated by autocollimator units and a polarizer unit respectively. In addition, a protection method is proposed to reduce the intensity of air turbulence by reducing the Reynolds number of the beam path. The performance of the system is verified by experiments. The experimental results show that the self-compensation methods and air turbulence protection can effectively improve the accuracy and stability of the system under the long-term interference of external environments. The proposed system has high precision, desirable robustness, and convenient pre-calibration, which can be used for error measurement of precision machines.

Six-Degree-of-Freedom Posture Measurement Technologies Using Position Sensitive Detectors (PSDs): State of the Art

Six degree-of-freedom (6-DOF) posture measurement is an important academic research topic which has been broadly applied in many fields. As a high-speed photoelectronic sensor with ultra-high resolution and precision, position sensitive detector (PSD) has shown to be one of the most competitive candidates in 6-DOF measurement. This review presents the research progress of PSD-based 6-DOF posture measurement systems in the field of large-scale equipment assembly, ultra-precision manufacturing and other emerging areas. A total of six methods for implementing 6-DOF measurement are summarized and their advantages and limitations are discussed. Meanwhile, the paper illustrates challenges, potential solutions and future development trends.

Roll angle autocollimator measurement method based on a cylindrical cube-corner reflector with a high resolution and large range

A novel high-resolution and large-range autocollimator measurement system for roll angle is proposed. The system retains the basic internal structure of the traditional autocollimator (AC), which only uses a novel non-standard cylindrical cube-corner reflector (CCCR) instead of the planar reflector. In the article, the mathematical relationship between the structure of this special reflector and the spatial coordinate vector change of the reflected beam is deduced, and the measurement formula of the roll angle autocollimator (RAC) measurement system is established based on this mathematical relationship. The effectiveness of the measurement system and method is verified by experiments. Experimental results show that this method can effectively enhance the range to ±20°, and the whole measurement accuracy is 6.1", the measuring resolution is 1".

Self-compensation method for dual-beam roll angle measurement of linear stages

In this paper, a self-compensation method for improving the accuracy of roll angle measurement of a linear stage caused by the non-parallelism of dual-beam due to time-dependent mechanical deformation of the support is proposed and integrated into a 5-DOF sensor to verify the feasibility. The non-parallelism between two laser beams is online real-time monitored by a pair of small autocollimator units. Through the ray-tracing analysis, the method to separate the roll angle of the moving stage and non-parallelism induced roll error is determined. A series of experiments under different supporting forces and ambient conditions have been carried out. The compensated P-V values of the roll angles are all within ±4 arc-sec, no matter how bad the originally measured value of the linear stage is. The average improvement of about 95% is significant. The effectiveness and robustness of the proposed measurement system in the changing environment are verified.