Single-pulse writing of a concave microlens array

Single femtosecond pulse writing of a bifocal lens

In this Letter, a method for the fabrication of bifocal lenses is presented by combining surface ablation and bulk modification in a single laser exposure followed by the wet etching processing step. The intensity of a single femtosecond laser pulse was modulated axially into two foci with a designed computer-generated hologram (CGH). Such pulse simultaneously induced an ablation region on the surface and a modified volume inside the fused silica. After etching in hydrofluoric acid (HF), the two exposed regions evolved into a bifocal lens. The area ratio (diameter) of the two lenses can be flexibly adjusted via control of the pulse energy distribution through the CGH. Besides, bifocal lenses with a center offset as well as convex lenses were obtained by a replication technique. This method simplifies the fabrication of micro-optical elements and opens a highly efficient and simple pathway for complex optical surfaces and integrated imaging systems.

Efficient and Controllable Preparation of Tridirectionally Anisotropic Sliding Surfaces Based on Spatial Light Modulator

Realizing the efficient and controllable preparation of tridirectionally anisotropic sliding surfaces (TASSs) is extremely important. However, achieving efficient preparation of TASSs remains a great challenge. Using a spatial light modulator combined with an image feedback algorithm to adjust the femtosecond laser beam to multifocus array with a gradient intensity distribution is an efficient solution to achieve this target. Specifically, the two solutions of multifocus combination and focus intensity design are used to realize the efficient and controllable preparation of TASSs, and the structure and performance characterizations are carried out to prove the superiority of this method. It is believed that the proposal of this method can provide more inspiration for solving the high-efficiency processing problems of complex micro/nanostructures.

Recent Developments of Femtosecond Laser Direct Writing for Meta-Optics

Micro-optics based on the artificial adjustment of physical dimensions, such as the phase, polarization, and wavelength of light, constitute the basis of contemporary information optoelectronic technology. As the main means of optical integration, it has become one of the important ways to break through the future bottleneck of microelectronic technology. Geometric phase optical components can precisely control the polarization, phase, amplitude and other properties of the light field at the sub-wavelength scale by periodically arranging nanometer-sized unit structures. It has received extensive attention in the fields of holographic imaging and polarization optics. This paper reviews the physical mechanism of micro-nano structure modification, research progress of femtosecond laser direct-writing photoresist, femtosecond laser ablation of metal thin films, femtosecond laser-induced nanograting, and other methods for preparing polarization converters and geometric phase optics. The challenges of fabricating ultrafast optical devices using femtosecond laser technology are discussed.

Ultra-precision manufacturing of microlens arrays using an optimum machining process chain

There are still significant challenges in the accurate and uniform manufacturing of microlens arrays (MLAs) with advanced ultra-precision diamond cutting technologies due to increasingly stringent requirements and shape complexity. In this paper, an optimum machining process chain is proposed based on the integration of a micro-abrasive fluid jet polishing (MAFJP) process to improve the machining quality by single point diamond turning (SPDT). The MLAs were first machined and compensated by SPDT until the maximum possible surface quality was obtained. The MAFJP was used to correct the surface form error and reduce the nonuniformity for each lens. The polishing characterization was analyzed based on the computational fluid dynamics (CFD) method to enhance the polishing efficiency. To better polish the freeform surface, two-step tool path generation using a regional adaptive path and a raster and cross path was employed. Moreover, the compensation error map was also investigated by revealing the relationship between the material removal mechanism and the surface curvature and polishing parameters. A series of experiments were conducted to prove the reliability and capability of the proposed method. The results indicate that the two integrated machining processes are capable of improving the surface form accuracy with a decrease in PV value from 1.67 µm to 0.56 µm and also elimination of the nonuniform surface error for the lenses.

Design, fabrication, and performance evaluation of a concave lens array on an aspheric curved surface

A microlens array (MLA) is a fundamental optical element, which has been widely applied in the fields of imaging sensing, 3D display, and lighting source. However, it is still a challenge to design the MLAs simultaneously satisfying small size, wide field of view, and high image quality. Herein, a novel type of concave lens array on an aspheric convex substrate (CLAACs) is presented, which is composed of an aspheric substrate and a spherical concave subeye array. The facilely designed method of the CLAACs is described and its geometric model is also established by a numerical example. Furthermore, a fabrication method, which is directly machining the CLAACs on PMMA material, is proposed. To realize the ultra-precision machining of the lens, tool path planning is carried out before fabricating. The profile, surface quality, and imaging performance of the fabricated lens are then characterized to reveal its optical capabilities. The results show that the proposed method can realize the rapid design and fabrication of lenses flexibly and efficiently. The fabricated CLAACs exhibit excellent morphology uniformity, high imaging quality, and focusing performance. The study provides a feasible solution for the design and fabrication of such lens arrays with complex discontinuous surfaces.

Rapid fabrication of large-area concave microlens arrays on silica glasses by femtosecond laser bursts

An efficient and flexible method using femtosecond laser bursts assisted by wet etching is presented to fabricate large-area high-quality microlens arrays (MLAs) on a silica glass surface. In this method, femtosecond laser bursts can ablate micro craters on silica glass in a fast, single-step process by controlling the electron density and a high-speed scanning galvanometer, and the influence mechanism of the number of pulses within a burst on the accuracy and quality of micro craters is analyzed in detail. The experimental results show that the preparation efficiency of micro craters is significantly improved to approximately 32,700 per second. By subsequent acid etching, concave microlenses with controllable dimensions, shapes, and alignments are easily obtained. A large area close-packed hexagonal concave MLA is successfully fabricated by using this method and shows high surface quality and uniformity, which excellently demonstrates the feasibility and flexibility of rapidly fabricating MLAs in the burst regime.

The rapid and controllable fabrication of large-scale and highly ordered micro-honeycomb arrays induced by nonsolvent phase separation

Structures that are highly ordered in nature show unique light propagation abilities. Among them, micro-honeycomb arrays are attractive owing to their advantages relating to the collection of light or enlarging the viewing angle and, also, owing to their potential applications in precision optics. Inspired by the natural phenomenon of droplet condensation on a cold surface, breath figure self-assembly has been a common approach used to fabricate such ordered micro-honeycomb arrays. However, the harsh preparation conditions and specific polymer architecture required have limited the widespread application of this approach. In this work, by using a commercial linear homopolymer and introducing its nonsolvent, we successfully fabricated uniform micro-honeycomb arrays on a large scale in just seconds and at ambient humidity. The morphology of the structures can be easily tuned via controlling the preparation conditions. Furthermore, high fill-factor convex micro-lenses were prepared based on the as-prepared concave micro-honeycomb arrays as templates through a simple replication process. They demonstrate properties such as clear multiple image presentation and light diffraction. They can also assist the strong scattering of light, which enhances the fluorescent intensity by more than 10%. This method is envisaged as a potential candidate to replace breath figure self-assembly for micro-honeycomb arrays in a low-cost and high-efficiency manner under mild conditions.

Fabrication of microlenses with continuously variable numerical aperture through a temporally shaped femtosecond laser

We developed a novel method for fabricating microlenses and microlens arrays by controlling numerical aperture (NA) through temporally shaped femtosecond laser on fused silica. The modification area was controlled through the pulse delay of temporally shaped femtosecond laser. The final radius and sag height were obtained through subsequent hydrofluoric acid etching. Electron density was controlled by the temporally shaped femtosecond laser, and the maximum NA value (0.65) of a microlens was obtained in the relevant studies with femtosecond laser fabrication. Furthermore, the NA can be continuously adjusted from 0.1 to 0.65 by this method. Compared with the traditional methods, this method exhibited high flexibility and yielded microlenses with various NAs and microlens arrays to meet the different demands for microlens applications.

High-Efficiency Fabrication of Geometric Phase Elements by Femtosecond-Laser Direct Writing

The nanoresolution of geometric phase elements for visible wavelengths calls for a flexible technology with high throughout and free from vacuum. In this article, we propose a high-efficiency and simple manufacturing method for the fabrication of geometric phase elements with femtosecond–laser direct writing (FsLDW) and thermal annealing by combining the advantages of high-efficiency processing and thermal smoothing effect. By using a femtosecond laser at a wavelength of 343 nm and a circular polarization, free-form nanogratings with a period of 300 nm and 170-nm-wide grooves were obtained in 50 s by laser direct ablation at a speed of 5 mm/s in a non-vacuum environment. After fine-tuning through a hot-annealing process, the surface morphology of the geometric phase element was clearly improved. With this technology, we fabricated blazed gratings, metasurface lens, vortex Q-plates and “M” holograms and confirmed the design performance by analyzing their phases at the wavelength of 808 nm. The efficiency and capabilities of our proposed method can pave the possible way to fabricate geometric phase elements with essentially low loss, high-temperature resistance, high phase gradients and novel polarization functionality for potentially wide applications.

Directional Control and Enhancement of Light Output of Scintillators by Using Microlens Arrays

Scintillators play an important role in the field of nuclear radiation detection, such as nuclear medical imaging, dark matter detection, nuclear physics experiments, and national security. However, the light extraction efficiency of a scintillator with a high refractive index is severely restricted because of the total internal reflection. In this paper, microlens arrays have been applied onto the surface of a cerium-doped lutetium-yttrium oxyorthosilicate scintillator to improve the light extraction efficiency and to control the directivity of the light output. Compared to that of a reference sample, a 3.26-fold enhancement with an emission angle of 45° has been obtained by using microlens arrays with optimal parameters. It was also found that the enhancement ratio can be affected by the refractive index of the microlens, the spacing of individual microlens. The control mechanism of microlens arrays is revealed by a combination of simulations and experiments. X-ray imaging characteristics exhibit an improved gray scale amplitude without any loss of the spatial resolution. The present results suggest that the application of microlens arrays to scintillators is beneficial to the field of nuclear radiation detection.

Bioinspired Zoom Compound Eyes Enable Variable-Focus Imaging

Natural compound eyes provide the inspiration for developing artificial optical devices that feature a large field of view (FOV). However, the imaging ability of artificial compound eyes is generally based on the large number of ommatidia. The lack of a tunable imaging mechanism significantly limits the practical applications of artificial compound eyes, for instance, distinguishing targets at different distances. Herein, we reported zoom compound eyes that enable variable-focus imaging by integrating a deformable poly(dimethylsiloxane) (PDMS) microlens array (MLA) with a microfluidic chamber. The thin and soft PDMS MLA was fabricated by soft lithography using a hard template prepared by a combined technology of femtosecond laser processing and wet etching. As compared with other mechanical machining strategies, our combined technology features high flexibility, efficiency, and uniformity, as well as designable processing capability, since the size, distribution, and arrangement of the ommatidia can be well controlled during femtosecond laser processing. By tuning the volume of water injected into the chamber, the PDMS MLA can deform from a planar structure to a hemispherical shape, evolving into a tunable compound eye of variable FOV up to 180°. More importantly, the tunable chamber can functionalize as the main zoom lens for tunable imaging, which endows the compound eye with the additional capability of distinguishing targets at different distances. Its focal length can be turned from 3.03 mm to infinity with an angular resolution of 3.86 × 10^-4 rad. This zoom compound eye combines the advantages of monocular eyes and compound eyes together, holding great promise for developing advanced micro-optical devices that enable large FOV and variable-focus imaging.

CO2 laser thermal reflow shaped convex glass microlens array after Bessel picosecond laser inscribing and hydrofluoric acid processing

In this paper, a convex micro-glass lens array fabrication process that utilizes ${{\rm CO}_2}$CO₂ laser thermal reflow in the Bessel picosecond laser inscribing and hydrofluoric acid processed micro-glass pillars array is presented. The Bessel picosecond laser permits high tolerance and precise micro-pillar fabrication. In the thermal reshape process, the ${{\rm CO}_2}$CO₂ laser power, relative defocus length, and scanning velocity are three crucial parameters to the microlens array's focal length. By using this method, microlens arrays with focal length ranging from several tens of micrometers to several hundred micrometers can be created. This research provides another way to fabricate convex micro-glass lens arrays with several hundred micrometers focal length in good utility.

Mechanisms and optimization for the rapid fabrication method of polymeric microlens arrays

This paper presents a simple and cost-effective rapid method to make defect-free polymeric microlens arrays at room temperature without applying external pressure. This method uses an optically clear and high-transparency Norland Optical Adhesive (NOA) monomer solution. This is realized by using a combination of a mold and an ultraviolet (UV) polymerization technique. NOA can cross-link in a tenth of a second upon UV exposure. The uniformity and surface quality of the manufactured microlens arrays are investigated through atomic force microscopy and optical microscopy techniques. Experimental results show that the microlens arrays manufactured by the polymerization process are of very high quality without any defects. Further, the surface quality of the lenses can be significantly enhanced by increasing the viscosity of the photosensitive monomer solution.

Control of diameter and numerical aperture of microlens by a single ultra-short laser pulse

We demonstrate a versatile method for fast and flexible fabrication of either one or an array of microlenses. Multi-foci axial intensity distribution generated by a phase pattern displayed on a spatial light modulator irradiates silica, causing ablation and its internal modification. The following wet etching step defines the diameter r, while the radius of curvature R (hence, the focal length f) is maintained the same. As a result, the numerical aperture NA=r/f changes from 0.2 to 0.4 for the same pulse energy (but different number of multi-foci) during ablation. An isotropic wet etching of silica becomes highly anisotropic for the initial stages of etching following the irradiated pattern. Subsequent evolution of the shape is governed by an isotropic silica etch and forms a spherical lens. This method can be extended to other materials and geometries of micro-optical elements.

Low f-Number Diffraction-Limited Pancharatnam-Berry Microlenses Enabled by Plasmonic Photopatterning of Liquid Crystal Polymers

Microlenses are desired by a wide range of industrial applications while it is always challenging to make them with diffraction-limited quality. Here, it is shown that high-quality microlenses based on Pancharatnam-Berry (PB) phases can be made with liquid crystal polymers by using a plasmonic photopatterning technique. Based on the generalized Snell's law for the PB phases, PB microlenses with a range of focal lengths and f-numbers are designed and fabricated and their point-spread functions and ability to image micrometer-sized particles are carefully characterized. The results show that these PB microlenses with f-number down to 2 are all diffraction-limited. The capability of arraying these PB microlenses with 100% filling factor with a step-and-flash approach is further demonstrated.

Femtosecond Mathieu Beams for Rapid Controllable Fabrication of Complex Microcages and Application in Trapping Microobjects

Structured laser beam based microfabrication technology provides a rapid and flexible way to create some special microstructures. As an important member in the propagation of invariant structured optical fields, Mathieu beams (MBs) exhibit regular intensity distribution and diverse controllable parameters, which makes it extremely suitable for flexible fabrication of functional microstructures. In this study, MBs are generated by a phase-only spatial light modulator (SLM) and used for femtosecond laser two-photon polymerization (TPP) fabrication. Based on structured beams, a dynamic holographic processing method for controllable three-dimensional (3D) microcage fabrication has been presented. MBs with diverse intensity distributions are generated by controlling the phase factors imprinted on MBs with a SLM, including feature parity, ellipticity parameter q, and integer m. The focusing properties of MBs in a high numerical aperture laser microfabrication system are theoretically and experimentally investigated. On this basis, complex two-dimensional microstructures and functional 3D microcages are rapidly and flexibly fabricated by the controllable patterned focus, which enhances the fabrication speed by 2 orders of magnitude compared with conventional single-point TPP. The fabricated microcages act as a nontrivial tool for trapping and sorting microparticles with different sizes. Finally, culturing of budding yeasts is investigated with these microcages, which demonstrates its application as 3D cell culture scaffolds.

10-million-elements-per-second printing of infrared-resonant plasmonic arrays by multiplexed laser pulses

We report on high-quality infrared (IR)-resonant plasmonic nanoantenna arrays fabricated on a thin gold film by tightly focused femtosecond (fs) laser pulses coming at submegahertz repetition rates at a printing rate of 10 million elements per second. To achieve this, the laser pulses were spatially multiplexed by fused silica diffractive optical elements into 51 identical submicrometer-sized laser spots arranged into a linear array at periodicity down to 1 μm. The demonstrated high-throughput nanopatterning modality indicates fs laser maskless microablation as an emerging robust, flexible, and competitive lithographic tool for advanced fabrication of IR-range plasmonic sensors for environmental sensing, chemosensing, and biosensing.

Wet-etching-assisted femtosecond laser holographic processing of a sapphire concave microlens array

We report rapid and mask-free fabrication of a sapphire concave microlens array by a combined method of femtosecond laser holographic processing and wet etching. The method features high fabrication efficiency, as crater arrays can be created on sapphire through a parallel processing manner, and the subsequent wet etching facilitates the formation of microlens arrays with a smooth surface. More importantly, the size and spacing of the concave microlenses can be well tuned by varying the distance of craters and etching time. Two types of microlens arrays with a spacing of 25 and 40 μm have been successfully fabricated, both of which showed good imaging performance. This method holds great promise for developing sapphire-based micro-optical components.