A Digitized Representation of the Modified Prandtl-Ishlinskii Hysteresis Model for Modeling and Compensating Piezoelectric Actuator Hysteresis

Combined Control for a Piezoelectric Actuator Using a Feed-Forward Neural Network and Feedback Integral Fast Terminal Sliding Mode Control

In recent years, there has been significant interest in incorporating micro-actuators into industrial environments; this interest is driven by advancements in fabrication methods. Piezoelectric actuators (PEAs) have emerged as vital components in various applications that require precise control and manipulation of mechanical systems. These actuators play a crucial role in the micro-positioning systems utilized in nanotechnology, microscopy, and semiconductor manufacturing; they enable extremely fine movements and adjustments and contribute to vibration control systems. More specifically, they are frequently used in precision positioning systems for optical components, mirrors, and lenses, and they enhance the accuracy of laser systems, telescopes, and image stabilization devices. Despite their numerous advantages, PEAs exhibit complex dynamics characterized by phenomena such as hysteresis, which can significantly impact accuracy and performance. The characterization of these non-linearities remains a challenge for PEA modeling. Recurrent artificial neural networks (ANNs) may simplify the modeling of the hysteresis dynamics for feed-forward compensation. To address these challenges, robust control strategies such as integral fast terminal sliding mode control (IFTSMC) have been proposed. Unlike traditional fast terminal sliding mode control methods, IFTSMC includes integral action to minimize steady-state errors, improving the tracking accuracy and disturbance rejection capabilities. However, accurate modeling of the non-linear dynamics of PEAs remains a challenge. In this study, we propose an ANN-based IFTSMC controller to address this issue and to enhance the precision and reliability of PEA positioning systems. We implement and validate the proposed controller in a real-time setup and compare its performance with that of a PID controller. The results obtained from real PEA experiments demonstrate the stability of the novel control structure, as corroborated by the theoretical analysis. Furthermore, experimental validation reveals a notable reduction in error compared to the PID controller.

Imaging-Guided Micromachines: Towards Intelligent Systems

Micromachines with controllable motion, deformation, and collective behaviors provide advanced methods for performing tasks that traditional machines have difficulty completing thanks to the development of small-scale robotics, nanotechnology, biocompatible materials, and imaging techniques [...].

A Modified Prandtl-Ishlinskii Hysteresis Model for Modeling and Compensating Asymmetric Hysteresis of Piezo-Actuated Flexure-Based Systems

Piezo-actuated flexure-based systems are widely used in applications with high accuracy requirements, but the intrinsic hysteresis has a detrimental effect on the performance which should be compensated. Conventional models were presented to model this undesired effect using additional dead-zone operators. This paper presents a new approach using two sets of operators with a distributed compensator to model and compensate for the asymmetric system hysteresis based on inversion calculation with a simplified digitized representation. The experimental results validate the effectiveness of the proposed model in modeling and compensating the asymmetric system hysteresis.

Hysteresis Characteristics and MPI Compensation of Two-Dimensional Piezoelectric Positioning Stage

Piezoelectric positioning stage is the core component of precision positioning system and advanced instrument. Its hysteresis characteristics, especially rate-dependent characteristics, are the main factors affecting the positioning or control accuracy. The multi-slope Prandtl-Ishlinskii (MPI) based hysteresis modeling and compensation experiments of two-dimensional piezoelectric positioning stage are discussed. The impact of the driving voltage amplitude and frequency on the hysteresis characteristics of uniaxial piezoelectric actuator in the piezoelectric positioning stage are studied, especially the influence of variable-frequency voltages on the output displacement of a piezoelectric actuator. The MPI compensation control of two-dimensional piezoelectric positioning stage is carried out, and the fitting coefficient R2 is proposed to evaluate the hysteresis compensation accuracy of MPI model. Under the full range driving voltage of 20~120 V, the fitting coefficient reaches more than 99.6%. The experiments of feedforward compensation and feedback compensation are implemented. Having applied the composite triangular-wave signal, the average absolute displacement error of the piezoelectric actuator is 0.1192 μm, as well as the mean square error 0.2949 μm. It demonstrates that the MPI model is effective against hysteresis for two-dimensional piezoelectric positioning stage.