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Yuan H, Zhang Q, Cheng Y, Xu R, Li H, Tian M, Ma J, Jiao T. Double-sided microstructured flexible iontronic pressure sensor with wide linear sensing range. J Colloid Interface Sci 2024; 670:41-49. [PMID: 38754330 DOI: 10.1016/j.jcis.2024.05.054] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Received: 03/05/2024] [Revised: 04/29/2024] [Accepted: 05/08/2024] [Indexed: 05/18/2024]
Abstract
Iontronic pressure sensors have garnered significant attention for their potential in wearable electronic devices. While simple microstructures can enhance sensor sensitivity, the majority of them predominantly amplify sensitivity at lower pressure ranges and fail to enhance sensitivity at higher pressure ranges, leading to nonlinearity. In the absence of linear sensitivity in a pressure sensor, users are unable to derive precise information from its output, necessitating further signal processing. Hence, crafting a linearity flexible pressure sensor through a straightforward approach remains a formidable task. Herein, a double-sided microstructured flexible iontronic pressure sensor is presented with wide linear sensing range. The ionic gel is made by 1-Ethyl-3-methylimidazolium bis(tri-fluoromethylsulfonyl)imide (EMIM:TFSI) into the matrix of poly(vinylidene fluoride-co-hexafluoropropylene) (PVDF-HFP), which acts as active layer, featuring irregular microstructures (IMS) and pyramid microstructures (PMS) on both sides. Unlike previous complex methods, IMS and uniform PMS are easily and achieved through pattern transfer from a sandpaper mold and micro-pyramid template. The iontronic pressure sensor exhibits exceptional signal linearity with R2 values of 0.9975 and 0.9985, in the wide pressure range from 100 to 760 kPa and 760 kPa to 1000 kPa, respectively. This outstanding linearity and wide sensing range stem from a delicate balance between microstructure compression and mechanical alignment at the ionic gel interface. This study provides valuable insights into achieving linear responses by strategically designing microstructures in flexible pressure sensors, with potential applications in intelligent robots and health monitoring.
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Affiliation(s)
- Hao Yuan
- State Key Laboratory of Metastable Materials Science and Technology, Hebei Key Laboratory of Applied Chemistry, Hebei Key Laboratory of Nanobiotechnology, Hebei Key Laboratory of Heavy Metal Deep-Remediation in Water and Resource Reuse, Yanshan University, Qinhuangdao 066004, PR China
| | - Qiran Zhang
- State Key Laboratory of Metastable Materials Science and Technology, Hebei Key Laboratory of Applied Chemistry, Hebei Key Laboratory of Nanobiotechnology, Hebei Key Laboratory of Heavy Metal Deep-Remediation in Water and Resource Reuse, Yanshan University, Qinhuangdao 066004, PR China
| | - Yunqi Cheng
- State Key Laboratory of Metastable Materials Science and Technology, Hebei Key Laboratory of Applied Chemistry, Hebei Key Laboratory of Nanobiotechnology, Hebei Key Laboratory of Heavy Metal Deep-Remediation in Water and Resource Reuse, Yanshan University, Qinhuangdao 066004, PR China
| | - Rongyu Xu
- State Key Laboratory of Metastable Materials Science and Technology, Hebei Key Laboratory of Applied Chemistry, Hebei Key Laboratory of Nanobiotechnology, Hebei Key Laboratory of Heavy Metal Deep-Remediation in Water and Resource Reuse, Yanshan University, Qinhuangdao 066004, PR China
| | - Haoran Li
- State Key Laboratory of Metastable Materials Science and Technology, Hebei Key Laboratory of Applied Chemistry, Hebei Key Laboratory of Nanobiotechnology, Hebei Key Laboratory of Heavy Metal Deep-Remediation in Water and Resource Reuse, Yanshan University, Qinhuangdao 066004, PR China
| | - Mengyao Tian
- State Key Laboratory of Metastable Materials Science and Technology, Hebei Key Laboratory of Applied Chemistry, Hebei Key Laboratory of Nanobiotechnology, Hebei Key Laboratory of Heavy Metal Deep-Remediation in Water and Resource Reuse, Yanshan University, Qinhuangdao 066004, PR China
| | - Jinming Ma
- State Key Laboratory of Metastable Materials Science and Technology, Hebei Key Laboratory of Applied Chemistry, Hebei Key Laboratory of Nanobiotechnology, Hebei Key Laboratory of Heavy Metal Deep-Remediation in Water and Resource Reuse, Yanshan University, Qinhuangdao 066004, PR China.
| | - Tifeng Jiao
- State Key Laboratory of Metastable Materials Science and Technology, Hebei Key Laboratory of Applied Chemistry, Hebei Key Laboratory of Nanobiotechnology, Hebei Key Laboratory of Heavy Metal Deep-Remediation in Water and Resource Reuse, Yanshan University, Qinhuangdao 066004, PR China.
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Hong W, Guo X, Zhang T, Liu Y, Yan Z, Zhang A, Qian Z, Wang J, Zhang X, Jin C, Zhao J, Liu T, Hong Q, Xu Y, Xia Y, Zhao Y. Bioinspired Engineering of Fillable Gradient Structure into Flexible Capacitive Pressure Sensor Toward Ultra-High Sensitivity and Wide Working Range. Macromol Rapid Commun 2023; 44:e2300420. [PMID: 37775102 DOI: 10.1002/marc.202300420] [Citation(s) in RCA: 1] [Impact Index Per Article: 1.0] [Reference Citation Analysis] [Abstract] [Key Words] [MESH Headings] [Grants] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Received: 07/12/2023] [Revised: 09/08/2023] [Indexed: 10/01/2023]
Abstract
Tactile sensing is required for electronic skin and intelligent robots to function properly. However, the dielectric layer's poor structural compressibility in conventional pressure sensors results in a limited pressure sensing range and low sensitivity. To solve this issue, a flexible pressure sensor with a crocodile-inspired fillable gradient structure is provided. The fillable gradient structure and grooves in the pressure sensor accommodate the deformed microstructure that permits the enhancement of the media layer compressibility via COMSOL finite element simulation and optimization. The pressure sensor exhibits a high sensitivity of up to 0.97 k Pa-1 (0-4 kPa), a wide pressure detection range (7 Pa-380 kPa), and outstanding repeatability. The sensor can detect Morse code, robotic grabbing, and human motion monitoring. As a result, flexible sensors with a bionic fillable gradient structure pave the way for wearable devices and offer a novel method for achieving highly precise tactile perception.
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Affiliation(s)
- Weiqiang Hong
- Key Laboratory of Intelligent Computing and Signal Processing of Ministry of Education, School of Integrated Circuits, Anhui University, Hefei, 230601, P. R. China
- State Key Laboratory of High-Performance Precision Manufacturing, Dalian University of Technology, Dalian, 116024, P. R. China
- Key Laboratory for Micro/Nano Technology and System of Liaoning Province, Dalian University of Technology, Dalian, 116024, P. R. China
| | - Xiaohui Guo
- Key Laboratory of Intelligent Computing and Signal Processing of Ministry of Education, School of Integrated Circuits, Anhui University, Hefei, 230601, P. R. China
| | - Tianxu Zhang
- Key Laboratory of Intelligent Computing and Signal Processing of Ministry of Education, School of Integrated Circuits, Anhui University, Hefei, 230601, P. R. China
| | - Yiyang Liu
- Key Laboratory of Intelligent Computing and Signal Processing of Ministry of Education, School of Integrated Circuits, Anhui University, Hefei, 230601, P. R. China
| | - Zihao Yan
- Key Laboratory of Intelligent Computing and Signal Processing of Ministry of Education, School of Integrated Circuits, Anhui University, Hefei, 230601, P. R. China
| | - Anqi Zhang
- Key Laboratory of Intelligent Computing and Signal Processing of Ministry of Education, School of Integrated Circuits, Anhui University, Hefei, 230601, P. R. China
| | - Zhibin Qian
- Key Laboratory of Intelligent Computing and Signal Processing of Ministry of Education, School of Integrated Circuits, Anhui University, Hefei, 230601, P. R. China
| | - Junyi Wang
- Key Laboratory of Intelligent Computing and Signal Processing of Ministry of Education, School of Integrated Circuits, Anhui University, Hefei, 230601, P. R. China
| | - Xinyi Zhang
- Key Laboratory of Intelligent Computing and Signal Processing of Ministry of Education, School of Integrated Circuits, Anhui University, Hefei, 230601, P. R. China
| | - Chengchao Jin
- Key Laboratory of Intelligent Computing and Signal Processing of Ministry of Education, School of Integrated Circuits, Anhui University, Hefei, 230601, P. R. China
| | - Jingji Zhao
- Key Laboratory of Intelligent Computing and Signal Processing of Ministry of Education, School of Integrated Circuits, Anhui University, Hefei, 230601, P. R. China
| | - Tiancheng Liu
- Key Laboratory of Intelligent Computing and Signal Processing of Ministry of Education, School of Integrated Circuits, Anhui University, Hefei, 230601, P. R. China
| | - Qi Hong
- Key Laboratory of Intelligent Computing and Signal Processing of Ministry of Education, School of Integrated Circuits, Anhui University, Hefei, 230601, P. R. China
| | - Yaohua Xu
- Key Laboratory of Intelligent Computing and Signal Processing of Ministry of Education, School of Integrated Circuits, Anhui University, Hefei, 230601, P. R. China
| | - Yun Xia
- Bengbu Zhengyuan Electronics Technology Co. Ltd, Bengbu, 233000, P. R. China
| | - Yunong Zhao
- Key Laboratory of Intelligent Computing and Signal Processing of Ministry of Education, School of Integrated Circuits, Anhui University, Hefei, 230601, P. R. China
- School of Integrated Circuits, Huazhong University of Science and Technology, Wuhan, 430074, P. R. China
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Hong W, Guo X, Zhang T, Zhang A, Yan Z, Zhang X, Li X, Guan Y, Liao D, Lu H, Liu H, Hu J, Niu Y, Hong Q, Zhao Y. Flexible Capacitive Pressure Sensor with High Sensitivity and Wide Range Based on a Cheetah Leg Structure via 3D Printing. ACS APPLIED MATERIALS & INTERFACES 2023; 15:46347-46356. [PMID: 37733928 DOI: 10.1021/acsami.3c09841] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 09/23/2023]
Abstract
Flexible pressure sensors can be used in human-computer interaction and wearable electronic devices, but one main challenge is to fabricate capacitive sensors with a wide pressure range and high sensitivity. Here, we designed a capacitive pressure sensor based on a bionic cheetah leg microstructure, validated the benefits of the bionic microstructure design, and optimized the structural feature parameters using 3D printing technology. The pressure sensor inspired by the cheetah leg shape has a high sensitivity (0.75 kPa-1), a wide linear sensing range (0-280 kPa), a fast response time of roughly 80 ms, and outstanding durability (24,000 cycles). Furthermore, the sensor can recognize a finger-operated mouse, monitor human motion, and transmit Morse code information. This work demonstrates that bionic capacitive pressure sensors hold considerable promise for use in wearable devices.
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Affiliation(s)
- Weiqiang Hong
- Key Laboratory of Intelligent Computing and Signal Processing of Ministry of Education, School of Integrated Circuits, Anhui University, Hefei 230601, P. R. China
- State Key Laboratory of High-Performance Precision Manufacturing, Dalian University of Technology, Dalian 116024, P. R. China
- Key Laboratory for Micro/Nano Technology and System of Liaoning Province, Dalian University of Technology, Dalian 116024, P. R. China
| | - Xiaohui Guo
- Key Laboratory of Intelligent Computing and Signal Processing of Ministry of Education, School of Integrated Circuits, Anhui University, Hefei 230601, P. R. China
| | - Tianxu Zhang
- Key Laboratory of Intelligent Computing and Signal Processing of Ministry of Education, School of Integrated Circuits, Anhui University, Hefei 230601, P. R. China
| | - Anqi Zhang
- Key Laboratory of Intelligent Computing and Signal Processing of Ministry of Education, School of Integrated Circuits, Anhui University, Hefei 230601, P. R. China
| | - Zihao Yan
- Key Laboratory of Intelligent Computing and Signal Processing of Ministry of Education, School of Integrated Circuits, Anhui University, Hefei 230601, P. R. China
| | - Xinyi Zhang
- Key Laboratory of Intelligent Computing and Signal Processing of Ministry of Education, School of Integrated Circuits, Anhui University, Hefei 230601, P. R. China
| | - Xianghui Li
- Key Laboratory of Intelligent Computing and Signal Processing of Ministry of Education, School of Integrated Circuits, Anhui University, Hefei 230601, P. R. China
| | - Yuxin Guan
- Key Laboratory of Intelligent Computing and Signal Processing of Ministry of Education, School of Integrated Circuits, Anhui University, Hefei 230601, P. R. China
| | - Dongzhi Liao
- Key Laboratory of Intelligent Computing and Signal Processing of Ministry of Education, School of Integrated Circuits, Anhui University, Hefei 230601, P. R. China
| | - Haochen Lu
- Key Laboratory of Intelligent Computing and Signal Processing of Ministry of Education, School of Integrated Circuits, Anhui University, Hefei 230601, P. R. China
| | - Hanyu Liu
- Key Laboratory of Intelligent Computing and Signal Processing of Ministry of Education, School of Integrated Circuits, Anhui University, Hefei 230601, P. R. China
| | - Jiangtao Hu
- Key Laboratory of Intelligent Computing and Signal Processing of Ministry of Education, School of Integrated Circuits, Anhui University, Hefei 230601, P. R. China
| | - Yongzheng Niu
- Key Laboratory of Intelligent Computing and Signal Processing of Ministry of Education, School of Integrated Circuits, Anhui University, Hefei 230601, P. R. China
| | - Qi Hong
- Key Laboratory of Intelligent Computing and Signal Processing of Ministry of Education, School of Integrated Circuits, Anhui University, Hefei 230601, P. R. China
| | - Yunong Zhao
- Key Laboratory of Intelligent Computing and Signal Processing of Ministry of Education, School of Integrated Circuits, Anhui University, Hefei 230601, P. R. China
- School of Integrated Circuits, Huazhong University of Science and Technology, Wuhan 430074, P. R. China
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Qu C, Lu M, Zhang Z, Chen S, Liu D, Zhang D, Wang J, Sheng B. Flexible Microstructured Capacitive Pressure Sensors Using Laser Engraving and Graphitization from Natural Wood. Molecules 2023; 28:5339. [PMID: 37513212 PMCID: PMC10385064 DOI: 10.3390/molecules28145339] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Received: 05/18/2023] [Revised: 06/28/2023] [Accepted: 07/01/2023] [Indexed: 07/30/2023] Open
Abstract
In recent years, laser engraving has received widespread attention as a convenient, efficient, and programmable method which has enabled high-quality porous graphene to be obtained from various precursors. Laser engraving is often used to fabricate the dielectric layer with a microstructure for capacitive pressure sensors; however, the usual choice of electrodes remains poorly flexible metal electrodes, which greatly limit the overall flexibility of the sensors. In this work, we propose a flexible capacitive pressure sensor made entirely of thermoplastic polyurethane (TPU) and laser-induced graphene (LIG) derived from wood. The capacitive pressure sensor consisted of a flexible LIG/TPU electrode (LTE), an LIG/TPU electrode with a microhole array, and a dielectric layer of TPU with microcone array molded from a laser-engraved hole array on wood, which provided high sensitivity (0.11 kPa-1), an ultrawide pressure detection range (20 Pa to 1.4 MPa), a fast response (~300 ms), and good stability (>4000 cycles, at 0-35 kPa). We believe that our research makes a significant contribution to the literature, because the easy availability of the materials derived from wood and the overall consistent flexibility meet the requirements of flexible electronic devices.
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Affiliation(s)
- Chenkai Qu
- School of Optical Electrical and Computer Engineering, University of Shanghai for Science and Technology, Shanghai 200093, China
- Shanghai Key Laboratory of Modern Optical Systems, Engineering Research Center of Optical Instruments and Systems, Shanghai 200093, China
| | - Meilan Lu
- School of Optical Electrical and Computer Engineering, University of Shanghai for Science and Technology, Shanghai 200093, China
- Shanghai Key Laboratory of Modern Optical Systems, Engineering Research Center of Optical Instruments and Systems, Shanghai 200093, China
| | - Ziyan Zhang
- School of Optical Electrical and Computer Engineering, University of Shanghai for Science and Technology, Shanghai 200093, China
- Shanghai Key Laboratory of Modern Optical Systems, Engineering Research Center of Optical Instruments and Systems, Shanghai 200093, China
| | - Shangbi Chen
- Inertial Technology Division, Shanghai Aerospace Control Technology Institute, Shanghai 201109, China
| | - Dewen Liu
- Inertial Technology Division, Shanghai Aerospace Control Technology Institute, Shanghai 201109, China
| | - Dawei Zhang
- School of Optical Electrical and Computer Engineering, University of Shanghai for Science and Technology, Shanghai 200093, China
- Shanghai Key Laboratory of Modern Optical Systems, Engineering Research Center of Optical Instruments and Systems, Shanghai 200093, China
| | - Jing Wang
- Department of Ultrasound Medicine, The First Affiliated Hospital, Zhejiang University School of Medicine, Hangzhou 310006, China
| | - Bin Sheng
- School of Optical Electrical and Computer Engineering, University of Shanghai for Science and Technology, Shanghai 200093, China
- Shanghai Key Laboratory of Modern Optical Systems, Engineering Research Center of Optical Instruments and Systems, Shanghai 200093, China
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Gao L, Yang Z. Editorial for the Special Issue on Flexible and Wearable Sensors. MICROMACHINES 2023; 14:1400. [PMID: 37512711 PMCID: PMC10385848 DOI: 10.3390/mi14071400] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Received: 07/04/2023] [Accepted: 07/07/2023] [Indexed: 07/30/2023]
Abstract
Flexible wearable sensors have garnered significant interest in the fields of human-computer interaction, materials science, and biomedicine [...].
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Affiliation(s)
- Libo Gao
- Pen-Tung Sah Institute of Micro-Nano Science and Technology, Xiamen University, Xiamen 361102, China
- Innovation Laboratory for Sciences and Technologies of Energy Materials of Fujian Province (IKKEM), Xiamen 361005, China
| | - Zhuoqing Yang
- National Key Laboratory of Micro/Nano Fabrication Technology, School of Electronic Information and Electrical Engineering, Shanghai Jiao Tong University, Shanghai 200240, China
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Zhao T, Zhu H, Zhang H. Rapid Prototyping Flexible Capacitive Pressure Sensors Based on Porous Electrodes. BIOSENSORS 2023; 13:bios13050546. [PMID: 37232907 DOI: 10.3390/bios13050546] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Subscribe] [Scholar Register] [Received: 04/21/2023] [Revised: 05/08/2023] [Accepted: 05/11/2023] [Indexed: 05/27/2023]
Abstract
Flexible pressure sensors are widely applied in tactile perception, fingerprint recognition, medical monitoring, human-machine interfaces, and the Internet of Things. Among them, flexible capacitive pressure sensors have the advantages of low energy consumption, slight signal drift, and high response repeatability. However, current research on flexible capacitive pressure sensors focuses on optimizing the dielectric layer for improved sensitivity and pressure response range. Moreover, complicated and time-consuming fabrication methods are commonly applied to generate microstructure dielectric layers. Here, we propose a rapid and straightforward fabrication approach to prototyping flexible capacitive pressure sensors based on porous electrodes. Laser-induced graphene (LIG) is produced on both sides of the polyimide paper, resulting in paired compressible electrodes with 3D porous structures. When the elastic LIG electrodes are compressed, the effective electrode area, the relative distance between electrodes, and the dielectric property vary accordingly, thereby generating a sensitive pressure sensor in a relatively large working range (0-9.6 kPa). The sensitivity of the sensor is up to 7.71%/kPa-1, and it can detect pressure as small as 10 Pa. The simple and robust structure allows the sensor to produce quick and repeatable responses. Our pressure sensor exhibits broad potential in practical applications in health monitoring, given its outstanding comprehensive performance combined with its simple and quick fabrication method.
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Affiliation(s)
- Tiancong Zhao
- School of Biomedical Engineering, Faculty of Medicine, Dalian University of Technology, Dalian 116024, China
| | - Huichao Zhu
- Liaoning Key Lab of Integrated Circuit and Biomedical Electronic System, Dalian University of Technology, Dalian 116024, China
- School of Artificial Intelligence, Dalian University of Technology, Dalian 116024, China
| | - Hangyu Zhang
- School of Biomedical Engineering, Faculty of Medicine, Dalian University of Technology, Dalian 116024, China
- Liaoning Key Lab of Integrated Circuit and Biomedical Electronic System, Dalian University of Technology, Dalian 116024, China
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