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Tsarapkin A, Maćkosz K, Jureddy CS, Utke I, Höflich K. Area-Selective Chemical Vapor Deposition of Gold by Electron Beam Seeding. ADVANCED MATERIALS (DEERFIELD BEACH, FLA.) 2024:e2313571. [PMID: 38546415 DOI: 10.1002/adma.202313571] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Subscribe] [Scholar Register] [Received: 12/12/2023] [Revised: 03/06/2024] [Indexed: 04/19/2024]
Abstract
Chemical vapor deposition (CVD) is an established method for producing high-purity thin films, but it typically necessitates the pre- and post-processing using a mask to produce structures. This study presents a novel maskless patterning technique that enables area-selective CVD of gold. A focused electron beam is used to decompose the metal-organic precursor Au(acac)Me2 locally, thereby creating an autocatalytically active seed layer for subsequent CVD with the same precursor. The procedure can be included in the same CVD process without the need for clean room lithographic processing. Moreover, it operates at low temperatures of 80 °C, over 200 K lower than standard CVD temperatures for this precursor, reducing thermal load on the specimen. Given that electron beam seeding operates on any even moderately conductive surface, the process does not constrain device design. This is demonstrated by the example of vertical nanostructures with high aspect ratios of ≈40:1 and more. Written using a focused electron beam and the same precursor, these nanopillars exhibit catalytically active nuclei on their surface. Furthermore, by using the onset of the autocatalytic CVD growth, for the first time the local temperature increase caused by the writing of nanostructures with an electron beam can be precisely determined.
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Affiliation(s)
- Aleksei Tsarapkin
- Ferdinand-Braun-Institut (FBH), Leibniz-Institut für Höchstfrequenztechnik, Gustav-Kirchhoff-Str. 4, D-12489, Berlin, Germany
| | - Krzysztof Maćkosz
- Empa - Swiss Federal Laboratories for Materials Science and Technology, Laboratory for Mechanics of Materials and Nanostructures, Feuerwerkerstrasse 39, Thun, CH-3602, Switzerland
| | - Chinmai Sai Jureddy
- Empa - Swiss Federal Laboratories for Materials Science and Technology, Laboratory for Mechanics of Materials and Nanostructures, Feuerwerkerstrasse 39, Thun, CH-3602, Switzerland
| | - Ivo Utke
- Empa - Swiss Federal Laboratories for Materials Science and Technology, Laboratory for Mechanics of Materials and Nanostructures, Feuerwerkerstrasse 39, Thun, CH-3602, Switzerland
| | - Katja Höflich
- Ferdinand-Braun-Institut (FBH), Leibniz-Institut für Höchstfrequenztechnik, Gustav-Kirchhoff-Str. 4, D-12489, Berlin, Germany
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2
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Györök M, Wagner T, Gründlinger P, Monkowius U, Zeppenfeld P. Aurophilic Molecules on Surfaces. Part I. (NapNC)AuCl on Au(110). ACS OMEGA 2023; 8:30109-30117. [PMID: 37636919 PMCID: PMC10448646 DOI: 10.1021/acsomega.3c02473] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Grants] [Track Full Text] [Figures] [Subscribe] [Scholar Register] [Received: 04/12/2023] [Accepted: 07/19/2023] [Indexed: 08/29/2023]
Abstract
Aurophilicity is a well-known phenomenon in structural gold chemistry and is found in many crystals of Au(I) complexes. However, these attractive dispersion forces between and within complexes containing Au(I) moieties have not been well studied in ultrathin films. In this paper, we elucidate the interaction of chlorido(2-naphthyl isonitrile)gold(I) on and with Au(110) surfaces. Already during physical vapor deposition, the condensation of ultrathin films is monitored by photoelectron emission microscopy (PEEM) and by incremental and spectrally resolved changes in the optical reflectance (DDRS). Additional structural data obtained by STM and LEED reveal that the "crossed swords" packing motif known from the bulk is also present in thin films. The molecular arrangement changes several times during thin-film deposition.
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Affiliation(s)
- Michael Györök
- Institute
of Experimental Physics, Surface Science Division, Johannes Kepler University, Altenberger Straße 69, 4040 Linz, Austria
| | - Thorsten Wagner
- Institute
of Experimental Physics, Surface Science Division, Johannes Kepler University, Altenberger Straße 69, 4040 Linz, Austria
| | - Petra Gründlinger
- Institute
of Experimental Physics, Surface Science Division, Johannes Kepler University, Altenberger Straße 69, 4040 Linz, Austria
| | - Uwe Monkowius
- School
of Education, Johannes Kepler University, Chemistry, Altenberger Straße
69, 4040 Linz, Austria
| | - Peter Zeppenfeld
- Institute
of Experimental Physics, Surface Science Division, Johannes Kepler University, Altenberger Straße 69, 4040 Linz, Austria
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Pintea M, Mason N, Peiró-Franch A, Clark E, Samanta K, Glessi C, Schmidtke IL, Luxford T. Dissociative electron attachment to gold(I)-based compounds: 4,5-dichloro-1,3-diethyl-imidazolylidene trifluoromethyl gold(I). Front Chem 2023; 11:1028008. [PMID: 37405247 PMCID: PMC10315492 DOI: 10.3389/fchem.2023.1028008] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Figures] [Journal Information] [Subscribe] [Scholar Register] [Received: 08/26/2022] [Accepted: 06/01/2023] [Indexed: 07/06/2023] Open
Abstract
With the use of proton-NMR and powder XRD (XRPD) studies, the suitability of specific Au-focused electron beam induced deposition (FEBID) precursors has been investigated with low electron energy, structure, excited states and resonances, structural crystal modifications, flexibility, and vaporization level. 4,5-Dichloro-1,3-diethyl-imidazolylidene trifluoromethyl gold(I) is a compound that is a uniquely designed precursor to meet the needs of focused electron beam-induced deposition at the nanostructure level, which proves its capability in creating high purity structures, and its growing importance in other AuImx and AuClnB (where x and n are the number of radicals, B = CH, CH3, or Br) compounds in the radiation cancer therapy increases the efforts to design more suitable bonds in processes of SEM (scanning electron microscopy) deposition and in gas-phase studies. The investigation performed of its powder shape using the XRPD XPERT3 panalytical diffractometer based on CoKα lines shows changes to its structure with change in temperature, level of vacuum, and light; the sensitivity of this compound makes it highly interesting in particular to the radiation research. Used in FEBID, though its smaller number of C, H, and O atoms has lower levels of C contamination in the structures and on the surface, it replaces these bonds with C-Cl and C-N bonds that have lower bond-breaking energy. However, it still needs an extra purification step in the deposition process, either H2O, O2, or H jets.
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Affiliation(s)
- Maria Pintea
- School of Physical Sciences, University of Kent, Canterbury, United Kingdom
| | - Nigel Mason
- School of Physical Sciences, University of Kent, Canterbury, United Kingdom
| | - Anna Peiró-Franch
- School of Physical Sciences, University of Kent, Canterbury, United Kingdom
| | - Ewan Clark
- School of Physical Sciences, University of Kent, Canterbury, United Kingdom
| | - Kushal Samanta
- School of Physical Sciences, University of Kent, Canterbury, United Kingdom
| | | | | | - Thomas Luxford
- Department of Chemistry, J. Heyrovský Institute of Physical Chemistry of the Czech Academy of Sciences, Prague, Czechia
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Kamali A, Bilgilisoy E, Wolfram A, Gentner TX, Ballmann G, Harder S, Marbach H, Ingólfsson O. On the Electron-Induced Reactions of (CH 3)AuP(CH 3) 3: A Combined UHV Surface Science and Gas-Phase Study. NANOMATERIALS (BASEL, SWITZERLAND) 2022; 12:2727. [PMID: 35957158 PMCID: PMC9370483 DOI: 10.3390/nano12152727] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Figures] [Subscribe] [Scholar Register] [Received: 06/29/2022] [Revised: 07/27/2022] [Accepted: 08/03/2022] [Indexed: 06/15/2023]
Abstract
Focused-electron-beam-induced deposition (FEBID) is a powerful nanopatterning technique where electrons trigger the local dissociation of precursor molecules, leaving a deposit of non-volatile dissociation products. The fabrication of high-purity gold deposits via FEBID has significant potential to expand the scope of this method. For this, gold precursors that are stable under ambient conditions but fragment selectively under electron exposure are essential. Here, we investigated the potential gold precursor (CH3)AuP(CH3)3 using FEBID under ultra-high vacuum (UHV) and spectroscopic characterization of the corresponding metal-containing deposits. For a detailed insight into electron-induced fragmentation, the deposit's composition was compared with the fragmentation pathways of this compound through dissociative ionization (DI) under single-collision conditions using quantum chemical calculations to aid the interpretation of these data. Further comparison was made with a previous high-vacuum (HV) FEBID study of this precursor. The average loss of about 2 carbon and 0.8 phosphor per incident was found in DI, which agreed well with the carbon content of the UHV FEBID deposits. However, the UHV deposits were found to be as good as free of phosphor, indicating that the trimethyl phosphate is a good leaving group. Differently, the HV FEBID experiments showed significant phosphor content in the deposits.
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Affiliation(s)
- Ali Kamali
- Department of Chemistry and Science Institute, University of Iceland, Dunhagi 3, 107 Reykjavik, Iceland
| | - Elif Bilgilisoy
- Physikalische Chemie II, Friedrich-Alexander Universität Erlangen-Nürnberg, 91058 Erlangen, Germany
| | - Alexander Wolfram
- Physikalische Chemie II, Friedrich-Alexander Universität Erlangen-Nürnberg, 91058 Erlangen, Germany
| | - Thomas Xaver Gentner
- Inorganic and Organometallic Chemistry, Universität Erlangen-Nürnberg, 91058 Erlangen, Germany
| | - Gerd Ballmann
- Inorganic and Organometallic Chemistry, Universität Erlangen-Nürnberg, 91058 Erlangen, Germany
| | - Sjoerd Harder
- Inorganic and Organometallic Chemistry, Universität Erlangen-Nürnberg, 91058 Erlangen, Germany
| | - Hubertus Marbach
- Physikalische Chemie II, Friedrich-Alexander Universität Erlangen-Nürnberg, 91058 Erlangen, Germany
- Carl Zeiss SMT GmbH, 64380 Roßdorf, Germany
| | - Oddur Ingólfsson
- Department of Chemistry and Science Institute, University of Iceland, Dunhagi 3, 107 Reykjavik, Iceland
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Utke I, Swiderek P, Höflich K, Madajska K, Jurczyk J, Martinović P, Szymańska I. Coordination and organometallic precursors of group 10 and 11: Focused electron beam induced deposition of metals and insight gained from chemical vapour deposition, atomic layer deposition, and fundamental surface and gas phase studies. Coord Chem Rev 2022. [DOI: 10.1016/j.ccr.2021.213851] [Citation(s) in RCA: 6] [Impact Index Per Article: 3.0] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 12/11/2022]
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Glessi C, Mahgoub A, Hagen CW, Tilset M. Gold(I) N-heterocyclic carbene precursors for focused electron beam-induced deposition. BEILSTEIN JOURNAL OF NANOTECHNOLOGY 2021; 12:257-269. [PMID: 33824846 PMCID: PMC7991619 DOI: 10.3762/bjnano.12.21] [Citation(s) in RCA: 1] [Impact Index Per Article: 0.3] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Figures] [Subscribe] [Scholar Register] [Received: 01/02/2021] [Accepted: 03/02/2021] [Indexed: 06/12/2023]
Abstract
Seven gold(I) N-heterocyclic carbene (NHC) complexes were synthesized, characterized, and identified as suitable precursors for focused electron beam-induced deposition (FEBID). Several variations on the core Au(NHC)X moiety were introduced, that is, variations of the NHC ring (imidazole or triazole), of the alkyl N-substituents (Me, Et, or iPr), and of the ancillary ligand X (Cl, Br, I, or CF3). The seven complexes were tested as FEBID precursors in an on-substrate custom setup. The effect of the substitutions on deposit composition and growth rate indicates that the most suitable organic ligand for the gold precursor is triazole-based, with the best deposit composition of 15 atom % gold, while the most suitable anionic ligand is the trifluoromethyl group, leading to a growth rate of 1 × 10-2 nm3/e-.
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Affiliation(s)
- Cristiano Glessi
- Department of Chemistry and Centre for Materials Science and Nanotechnology (SMN), Faculty of Mathematics and Natural Sciences, University of Oslo, P.O. Box 1126 Blindern, NO-0318 Oslo, Norway
| | - Aya Mahgoub
- Delft University of Technology, Fac. Applied Sciences, Dept. Imaging Physics, Lorentzweg 1, 2628CJ Delft, Netherlands
| | - Cornelis W Hagen
- Delft University of Technology, Fac. Applied Sciences, Dept. Imaging Physics, Lorentzweg 1, 2628CJ Delft, Netherlands
| | - Mats Tilset
- Department of Chemistry and Centre for Materials Science and Nanotechnology (SMN), Faculty of Mathematics and Natural Sciences, University of Oslo, P.O. Box 1126 Blindern, NO-0318 Oslo, Norway
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Carden WG, Thorman RM, Unlu I, Abboud KA, Fairbrother DH, McElwee-White L. Design, Synthesis, and Evaluation of CF 3AuCNR Precursors for Focused Electron Beam-Induced Deposition of Gold. ACS APPLIED MATERIALS & INTERFACES 2019; 11:11976-11987. [PMID: 30835431 DOI: 10.1021/acsami.8b18368] [Citation(s) in RCA: 3] [Impact Index Per Article: 0.6] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/09/2023]
Abstract
The Au(I) complexes CF3AuCNMe (1a) and CF3AuCN tBu (1b) were investigated as Au(I) precursors for focused electron beam-induced deposition (FEBID) of metallic gold. Both 1a and 1b are sufficiently volatile for sublimation at 125 ± 1 mTorr in the temperature range of roughly 40-50 °C. Electron impact mass spectra of 1a-b show gold-containing ions resulting from fragmenting the CF3 group and the CNR ligand, whereas in negative chemical ionization of 1a-b, the major fragment results from dealkylation of the CNR ligand. Steady-state depositions from 1a in an Auger spectrometer produce deposits with a similar gold content to the commercial precursor Me2Au(acac) (3) deposited under the same conditions, while the gold content from 1b is less. These results enable us to suggest the likely fate of the CF3 and CNR ligands during FEBID.
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Affiliation(s)
- Will G Carden
- Department of Chemistry , University of Florida , Gainesville , Florida 32611-7200 , United States
| | - Rachel M Thorman
- Department of Chemistry , Johns Hopkins University , Baltimore , Maryland 21218-2685 , United States
| | - Ilyas Unlu
- Department of Chemistry , Johns Hopkins University , Baltimore , Maryland 21218-2685 , United States
| | - Khalil A Abboud
- Department of Chemistry , University of Florida , Gainesville , Florida 32611-7200 , United States
| | - D Howard Fairbrother
- Department of Chemistry , Johns Hopkins University , Baltimore , Maryland 21218-2685 , United States
| | - Lisa McElwee-White
- Department of Chemistry , University of Florida , Gainesville , Florida 32611-7200 , United States
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8
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Swiderek P, Marbach H, Hagen CW. Chemistry for electron-induced nanofabrication. BEILSTEIN JOURNAL OF NANOTECHNOLOGY 2018; 9:1317-1320. [PMID: 29977666 PMCID: PMC6009412 DOI: 10.3762/bjnano.9.124] [Citation(s) in RCA: 2] [Impact Index Per Article: 0.3] [Reference Citation Analysis] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Received: 03/12/2018] [Accepted: 03/16/2018] [Indexed: 06/08/2023]
Affiliation(s)
- Petra Swiderek
- University of Bremen, Faculty 2 (Chemistry/Biology), Institute of Applied and Physical Chemistry, Leobener Straße 5, 28334 Bremen, Germany
| | - Hubertus Marbach
- Lehrstuhl für Physikalische Chemie II and Interdisciplinary Center for Molecular Materials (ICMM), Friedrich-Alexander-Universität Erlangen-Nürnberg, Egerlandstr. 3, 91058 Erlangen, Germany
| | - Cornelis W Hagen
- Department of Imaging Physics, Delft University of Technology, Lorentzweg 1, 2628CJ Delft, The Netherlands
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Höflich K, Jurczyk JM, Madajska K, Götz M, Berger L, Guerra-Nuñez C, Haverkamp C, Szymanska I, Utke I. Towards the third dimension in direct electron beam writing of silver. BEILSTEIN JOURNAL OF NANOTECHNOLOGY 2018; 9:842-849. [PMID: 29600145 PMCID: PMC5852464 DOI: 10.3762/bjnano.9.78] [Citation(s) in RCA: 6] [Impact Index Per Article: 1.0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Received: 10/09/2017] [Accepted: 02/14/2018] [Indexed: 05/06/2023]
Abstract
Carboxylates constitute an extremely promising class of precursor compounds for the electron beam induced deposition of silver. In this work both silver 2,2-dimethylbutyrate and silver pentafluoropropionate were investigated with respect to their dwell-time-dependent deposition behavior and growth characteristics. While silver 2,2-dimethylbutyrate showed a strong depletion in the center of the impinging electron beam profile hindering any vertical growth, silver pentafluoropropionate indicated a pronounced dependency of the deposit height on the dwell time. Truly three-dimensional silver structures could be realized with silver pentafluoropropionate. The pillars were polycrystalline with silver contents of more than 50 atom % and exhibit strong Raman enhancement. This constitutes a promising route towards the direct electron beam writing of three-dimensional plasmonic device parts from the gas phase.
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Affiliation(s)
- Katja Höflich
- Empa - Swiss Federal Laboratories for Materials Science and Technology, Laboratory for Mechanics of Materials and Nanostructures, Feuerwerkerstrasse 39, 3602 Thun, Switzerland
- Helmholtz-Zentrum Berlin für Materialien und Energie, Nanoscale Structures and Microscopic Analysis, Hahn-Meitner-Platz 1, 14109 Berlin, Germany
| | - Jakub Mateusz Jurczyk
- Empa - Swiss Federal Laboratories for Materials Science and Technology, Laboratory for Mechanics of Materials and Nanostructures, Feuerwerkerstrasse 39, 3602 Thun, Switzerland
- Faculty of Physics and Applied Computer Sciences, AGH University of Science and Technology, 30-059 Kraków, Poland
| | - Katarzyna Madajska
- Faculty of Chemistry, Nicolaus Copernicus University in Toruń, Gagarina 7, 87-100 Toruń, Poland
| | - Maximilian Götz
- Helmholtz-Zentrum Berlin für Materialien und Energie, Nanoscale Structures and Microscopic Analysis, Hahn-Meitner-Platz 1, 14109 Berlin, Germany
| | - Luisa Berger
- Empa - Swiss Federal Laboratories for Materials Science and Technology, Laboratory for Mechanics of Materials and Nanostructures, Feuerwerkerstrasse 39, 3602 Thun, Switzerland
| | - Carlos Guerra-Nuñez
- Empa - Swiss Federal Laboratories for Materials Science and Technology, Laboratory for Mechanics of Materials and Nanostructures, Feuerwerkerstrasse 39, 3602 Thun, Switzerland
| | - Caspar Haverkamp
- Helmholtz-Zentrum Berlin für Materialien und Energie, Nanoscale Structures and Microscopic Analysis, Hahn-Meitner-Platz 1, 14109 Berlin, Germany
| | - Iwona Szymanska
- Faculty of Chemistry, Nicolaus Copernicus University in Toruń, Gagarina 7, 87-100 Toruń, Poland
| | - Ivo Utke
- Empa - Swiss Federal Laboratories for Materials Science and Technology, Laboratory for Mechanics of Materials and Nanostructures, Feuerwerkerstrasse 39, 3602 Thun, Switzerland
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