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Viti L, Pushkarev V, Abouzar Sarfraz SM, Scamarcio G, Vitiello MS. Efficient Large-Area Graphene p-n Junction Terahertz Receivers on an Integrated Optical Platform. SMALL METHODS 2025:e2500083. [PMID: 40243918 DOI: 10.1002/smtd.202500083] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Subscribe] [Scholar Register] [Received: 01/21/2025] [Revised: 03/28/2025] [Indexed: 04/18/2025]
Abstract
The integration of graphene-based p-n junctions into photonic or optoelectronic platforms can allow efficient guiding and absorption of the light signals into the detection element, promising a major improvement in the efficiency of the system, by minimizing optical losses and enhancing the light coupling. These platforms can also potentially provide additional functionalities, such as frequency filtering, modulation, or multiplexing of the signals. At terahertz (THz) frequencies, this can lead to a variety of new applications such as sensing, imaging, and communication, as well as advancements in high-speed electronics and wireless technologies. Here, we took advantage of large area industrial-scale graphene, realized via an inexpensive production process, to engineer an antenna-integrated graphene Salisbury screen (AgSS) p-n junction photodetector, in which the electromagnetic coupling between graphene and the free-space wavelength is optimized by controlling the antenna dimensions and its distance from a sub-wavelength thin reflective mirror. Room-temperature noise equivalent powers < 300 pWHz-1/2, response time < 5 ns and a power dynamic range larger than four orders of magnitude at 2.86 THz is reached, exceeding the performances of exfoliated graphene photodetectors technologies, and competitive with complementary metal-oxide semiconductor (CMOS) and micro-bolometer technologies at high THz frequencies.
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Affiliation(s)
- Leonardo Viti
- NEST, CNR-Istituto Nanoscienze and Scuola Normale Superiore, Piazza San Silvestro 12, Pisa, 56127, Italy
| | - Vladimir Pushkarev
- NEST, CNR-Istituto Nanoscienze and Scuola Normale Superiore, Piazza San Silvestro 12, Pisa, 56127, Italy
| | | | - Gaetano Scamarcio
- Dipartimento Interateneo di Fisica, Università degli studi di Bari, Via Amendola 173, Bari, Italy
| | - Miriam S Vitiello
- NEST, CNR-Istituto Nanoscienze and Scuola Normale Superiore, Piazza San Silvestro 12, Pisa, 56127, Italy
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2
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Crisci T, Moretti L, Gioffrè M, Hashemi B, Mammeri M, Della Corte FG, Casalino M. 1.3 Micron Photodetectors Enabled by the SPARK Effect. MICROMACHINES 2025; 16:440. [PMID: 40283315 PMCID: PMC12029151 DOI: 10.3390/mi16040440] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Figures] [Subscribe] [Scholar Register] [Received: 02/11/2025] [Revised: 04/04/2025] [Accepted: 04/06/2025] [Indexed: 04/29/2025]
Abstract
In this work, we present a graphene-based photodetector operating at a wavelength of 1310 nm. The device leverages the SPARK effect, which has previously been investigated only at 1550 nm. It features a hybrid waveguide structure comprising hydrogenated amorphous silicon, graphene, and crystalline silicon. Upon optical illumination, defect states release charge carriers into the graphene layer, modulating the thermionic current across the graphene/crystalline silicon Schottky junction. The photodetector demonstrates a peak responsivity of 0.3 A/W at 1310 nm, corresponding to a noise-equivalent power of 0.4 pW/Hz1/2. The experimental results provide deeper insights into the SPARK effect by enabling the determination of the efficiency × lifetime product of carriers at 1310 nm and its comparison with values previously reported at 1550 nm. The wavelength dependence of this product is analyzed and discussed. Additionally, the response times of the device are measured and evaluated. The silicon-based fabrication approach employed is versatile and does not rely on sub-micron lithography techniques. Notably, reducing the incident optical power enhances the responsivity, making this photodetector highly suitable for power monitoring applications in integrated photonic circuits.
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Affiliation(s)
- Teresa Crisci
- Department of Electrical Engineering and Information Technology, University of Naples Federico II, Via Claudio 21, 80125 Napoli, Italy; (T.C.); (M.M.); (F.G.D.C.)
- Institute of Applied Science and Intelligent Systems “Eduardo Caianiello” (CNR), Via P. Castellino n. 141, 800131 Naples, Italy;
| | - Luigi Moretti
- Department of Mathematics and Physics, University of Campania “Luigi Vanvitelli”, Viale Abramo Lincoln, 5, 81100 Caserta, Italy;
| | - Mariano Gioffrè
- Institute of Applied Science and Intelligent Systems “Eduardo Caianiello” (CNR), Via P. Castellino n. 141, 800131 Naples, Italy;
| | - Babak Hashemi
- DIIES Department, Mediterranea University of Reggio Calabria, 89124 Reggio Calabria, Italy;
| | - Mohamed Mammeri
- Department of Electrical Engineering and Information Technology, University of Naples Federico II, Via Claudio 21, 80125 Napoli, Italy; (T.C.); (M.M.); (F.G.D.C.)
| | - Francesco Giuseppe Della Corte
- Department of Electrical Engineering and Information Technology, University of Naples Federico II, Via Claudio 21, 80125 Napoli, Italy; (T.C.); (M.M.); (F.G.D.C.)
| | - Maurizio Casalino
- Institute of Applied Science and Intelligent Systems “Eduardo Caianiello” (CNR), Via P. Castellino n. 141, 800131 Naples, Italy;
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3
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Yu L, Li Y, Xiang H, Li Y, Cao H, Ji Z, Liu L, Xiao X, Yin J, Guo J, Dai D. Four-channel graphene optical receiver. NANOPHOTONICS (BERLIN, GERMANY) 2024; 13:4019-4028. [PMID: 39634959 PMCID: PMC11501057 DOI: 10.1515/nanoph-2024-0274] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Figures] [Subscribe] [Scholar Register] [Received: 05/17/2024] [Accepted: 07/19/2024] [Indexed: 12/07/2024]
Abstract
Silicon photonics with the advantages of low power consumption and low fabrication cost is a crucial technology for facilitating high-capacity optical communications and interconnects. The graphene photodetectors (GPDs) featuring broadband operation, high speed, and low integration cost can be good additions to the SiGe photodetectors, supporting high-speed photodetection in wavelength bands beyond 1.6 μm on silicon. Here we realize a silicon-integrated four-channel wavelength division multiplexing (WDM) optical receiver based on a micro-ring resonator (MRR) array and four p-n homojunction GPDs. These photo-thermoelectric (PTE) GPDs exhibit zero-bias responsivities of ∼1.1 V W-1 and set-up limited 3 dB-bandwidth >67 GHz. The GPDs show good consistence benefiting from the compact active region array (0.006 mm2) covered by a single mechanically exfoliated hBN/graphene/hBN stack. Moreover, the WDM graphene optical receiver realized 4 × 16 Gbps non-return-to-zero optical signal transmission. To the best of our knowledge, it is the first GPD-array-based optical receiver using high-quality mechanically exfoliated graphene and edge graphene-metal contacts with low resistances. Apparently, our design is also compatible with CVD-grown graphene. This work sheds light on the large-scale integration of GPDs with high consistency and uniformity, enabling the application of high-quality mechanically exfoliated graphene, and promoting the development of the graphene photonic integrated circuits.
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Affiliation(s)
- Laiwen Yu
- State Key Laboratory of Extreme Photonics and Instrumentation, College of Optical Science and Engineering, International Research Center for Advanced Photonics, Zhejiang University, Zijingang Campus, Hangzhou310058, China
| | - Yurui Li
- State Key Laboratory of Advanced Optical Communications System and Networks, School of Electronics, Peking University, Beijing100871, P.R. China
- Academy for Advanced Interdisciplinary Studies, Peking University, Beijing100871, China
- Beijing Graphene Institute, Beijing100095, P.R. China
| | - Hengtai Xiang
- State Key Laboratory of Extreme Photonics and Instrumentation, College of Optical Science and Engineering, International Research Center for Advanced Photonics, Zhejiang University, Zijingang Campus, Hangzhou310058, China
| | - Yuanrong Li
- State Key Laboratory of Extreme Photonics and Instrumentation, College of Optical Science and Engineering, International Research Center for Advanced Photonics, Zhejiang University, Zijingang Campus, Hangzhou310058, China
| | - Hengzhen Cao
- State Key Laboratory of Extreme Photonics and Instrumentation, College of Optical Science and Engineering, International Research Center for Advanced Photonics, Zhejiang University, Zijingang Campus, Hangzhou310058, China
| | - Zhongyang Ji
- State Key Laboratory of Advanced Optical Communications System and Networks, School of Electronics, Peking University, Beijing100871, P.R. China
- Beijing Graphene Institute, Beijing100095, P.R. China
| | - Liu Liu
- State Key Laboratory of Extreme Photonics and Instrumentation, College of Optical Science and Engineering, International Research Center for Advanced Photonics, Zhejiang University, Zijingang Campus, Hangzhou310058, China
- Jiaxing Key Laboratory of Photonic Sensing & Intelligent Imaging, Intelligent Optics & Photonics Research Center, Jiaxing Research Institute, Zhejiang University, Jiaxing314000, China
| | - Xi Xiao
- National Information Optoelectronics Innovation Center, China Information and Communication Technologies Group Corporation (CICT), Wuhan430074, China
| | - Jianbo Yin
- State Key Laboratory of Advanced Optical Communications System and Networks, School of Electronics, Peking University, Beijing100871, P.R. China
- Academy for Advanced Interdisciplinary Studies, Peking University, Beijing100871, China
- Beijing Graphene Institute, Beijing100095, P.R. China
| | - Jingshu Guo
- State Key Laboratory of Extreme Photonics and Instrumentation, College of Optical Science and Engineering, International Research Center for Advanced Photonics, Zhejiang University, Zijingang Campus, Hangzhou310058, China
- Jiaxing Key Laboratory of Photonic Sensing & Intelligent Imaging, Intelligent Optics & Photonics Research Center, Jiaxing Research Institute, Zhejiang University, Jiaxing314000, China
| | - Daoxin Dai
- State Key Laboratory of Extreme Photonics and Instrumentation, College of Optical Science and Engineering, International Research Center for Advanced Photonics, Zhejiang University, Zijingang Campus, Hangzhou310058, China
- Jiaxing Key Laboratory of Photonic Sensing & Intelligent Imaging, Intelligent Optics & Photonics Research Center, Jiaxing Research Institute, Zhejiang University, Jiaxing314000, China
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Molaei-Yeznabad A, Abedi K. Optimal design of graphene-based plasmonic enhanced photodetector using PSO. Sci Rep 2024; 14:15291. [PMID: 38961178 PMCID: PMC11222467 DOI: 10.1038/s41598-024-65311-x] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Received: 01/28/2024] [Accepted: 06/19/2024] [Indexed: 07/05/2024] Open
Abstract
In this paper, we report a graphene-based plasmonic photodetector optimized using the particle swarm optimization (PSO) algorithm and compatible with complementary metal-oxide-semiconductor (CMOS) technology. The proposed photodetector structure is designed to minimize fabrication challenges and reduce production costs compared to more complex alternatives. Graphene has been used for its unique properties in the detection region, titanium nitride (TiN) as a CMOS-compatible metal, and both to aid in plasmonic excitation. Photodetectors have key parameters influenced by multiple independent variables. However, practical constraints prevent thorough adjustment of all variables to achieve optimal parameter values, often resulting in analysis based on several simplified models. Here we optimize these variables by presenting a new approach in the field of photodetectors using the capabilities of the PSO algorithm. As a result, for the proposed device at the wavelength of 1550 nm, the voltage responsivity is 210.6215 V/W, the current responsivity is 3.7213 A/W, the ultra-compressed length is less than 3 μ m , and the specific detectivity is 2.566×10 7 Jones were obtained. Furthermore, the device in question works under the photothermoelectric effect (PTE) at zero bias and has zero dark current, which ultimately resulted in a very low noise equivalent power (NEP) of 4.5361 pW / Hz .
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Affiliation(s)
| | - Kambiz Abedi
- Faculty of Electrical Engineering, Shahid Beheshti University, Tehran, 1983969411, Iran.
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5
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Dragoman M, Dinescu A, Aldrigo M, Dragoman D. Quantum Graphene Asymmetric Devices for Harvesting Electromagnetic Energy. NANOMATERIALS (BASEL, SWITZERLAND) 2024; 14:1114. [PMID: 38998720 PMCID: PMC11243634 DOI: 10.3390/nano14131114] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Subscribe] [Scholar Register] [Received: 05/30/2024] [Revised: 06/26/2024] [Accepted: 06/27/2024] [Indexed: 07/14/2024]
Abstract
We present here the fabrication at the wafer level and the electrical performance of two types of graphene diodes: ballistic trapezoidal-shaped graphene diodes and lateral tunneling graphene diodes. In the case of the ballistic trapezoidal-shaped graphene diode, we observe a large DC current of 200 µA at a DC bias voltage of ±2 V and a large voltage responsivity of 2000 v/w, while in the case of the lateral tunneling graphene diodes, we obtain a DC current of 1.5 mA at a DC bias voltage of ±2 V, with a voltage responsivity of 3000 v/w. An extended analysis of the defects produced during the fabrication process and their influences on the graphene diode performance is also presented.
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Affiliation(s)
- Mircea Dragoman
- National Institute for Research and Development in Microtechnologies (IMT), Strada Erou Iancu Nicolae 126A, 077190 Voluntari, Romania
| | - Adrian Dinescu
- National Institute for Research and Development in Microtechnologies (IMT), Strada Erou Iancu Nicolae 126A, 077190 Voluntari, Romania
| | - Martino Aldrigo
- National Institute for Research and Development in Microtechnologies (IMT), Strada Erou Iancu Nicolae 126A, 077190 Voluntari, Romania
| | - Daniela Dragoman
- Physics Faculty, University of Bucharest, P.O. Box MG-11, 077125 Bucharest, Romania
- Academy of Romanian Scientists, Strada Ilfov, Nr. 3, 050044 Bucharest, Romania
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6
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Li G, Bao H, Peng Y, Fu X, Liao W, Xiang C. Strain controllable band alignment and the interfacial and optical properties of tellurene/GaAs van der Waals heterostructures. Phys Chem Chem Phys 2024; 26:16327-16336. [PMID: 38805024 DOI: 10.1039/d4cp00560k] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 05/29/2024]
Abstract
By using first principles calculations, we theoretically investigate the electronic structures and the interfacial and optical properties of the two-dimensional tellurene (Te)-gallium arsenide (GaAs) van der Waals heterostructures (vdWHs), i.e., α-Te/GaAs and γ-Te/GaAs, formed using Te and GaAs monolayers. It has been demonstrated that, the semiconductor-semiconductor contacted α-Te/GaAs vdWH exhibits a type-II band alignment with a direct band gap of 0.28 eV while the metal-semiconductor contacted γ-Te/GaAs vdWH has a p-type Schottky contact with a Schottky barrier height (SBH) of 0.36 eV at the interface. The transition from type-II to type-III band alignment is observed firstly in the α-Te/GaAs vdWH when the in-plane biaxial strain is less than -5.2% and larger than 4.4%, meanwhile, the p-type Schottky contact to Ohmic contact transition may be realized in the γ-Te/GaAs vdWH when the in-plane biaxial strain is less than -2.4%. Finally, the maximum optical absorption coefficients of the α- and γ-Te/GaAs vdWHs have been found to be up to 31% and 29%, respectively, and may be modulated effectively by applying in-plane biaxial strain. The obtained results may be of importance in the design of nanoelectronic devices based on the proposed tellurene/GaAs vdWHs.
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Affiliation(s)
- Gen Li
- College of Physics and Electromechanical Engineering, Jishou University, Jishou 416000, China.
| | - Hairui Bao
- College of Physics and Electromechanical Engineering, Jishou University, Jishou 416000, China.
| | - Yange Peng
- College of Physics and Electromechanical Engineering, Jishou University, Jishou 416000, China.
| | - Xi Fu
- College of Physics and Electromechanical Engineering, Jishou University, Jishou 416000, China.
- College of Science, Hunan University of Science and Engineering, Yongzhou 425199, China
| | - Wenhu Liao
- College of Physics and Electromechanical Engineering, Jishou University, Jishou 416000, China.
- School of Communication and Electronic Engineering, Jishou University, Jishou 416000, China
- Key Laboratory of Mineral Cleaner Production and Exploit of Green Functional Materials in Hunan Province, Jishou University, Jishou 416000, China
| | - Changqing Xiang
- College of Physics and Electromechanical Engineering, Jishou University, Jishou 416000, China.
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7
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Wang XX, Zeng G, Yu QJ, Shen L, Shi CY, Lu HL. Photodetectors integrating waveguides and semiconductor materials. NANOSCALE 2024. [PMID: 38410877 DOI: 10.1039/d4nr00305e] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 02/28/2024]
Abstract
Photodetectors integrating substrates and semiconductor materials are increasingly attractive for applications in optical communication, optical sensing, optical computing, and military owing to the unique optoelectronic properties of semiconductor materials. However, it is still a challenge to realize high-performance photodetectors by only integrating substrates and semiconductor materials because of the limitation of incident light in contact with sensitive materials. In recent years, waveguides such as silicon (Si) and silicon nitride (Si3N4) have attracted extensive attention owing to their unique optical properties. Waveguides can be easily hetero-integrated with semiconductor materials, thus providing a promising approach for realizing high-performance photodetectors. Herein, we review recent advances in photodetectors integrating waveguides in two parts. The first involves the waveguide types and semiconductor materials commonly used to fabricate photodetectors, including Si, Si3N4, gallium nitride, organic waveguides, graphene, and MoTe2. The second involves the photodetectors of different wavelengths that integrate waveguides, ranging from ultraviolet to infrared. These hybrid photodetectors integrating waveguides and semiconductor materials provide an alternative way to realize multifunctional and high-performance photonic integrated chips and circuits.
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Affiliation(s)
- Xin-Xue Wang
- State Key Laboratory of ASIC and System, Shanghai Institute of Intelligent Electronics & Systems, School of Microelectronics, Fudan University, Shanghai 200433, China.
| | - Guang Zeng
- State Key Laboratory of ASIC and System, Shanghai Institute of Intelligent Electronics & Systems, School of Microelectronics, Fudan University, Shanghai 200433, China.
| | - Qiu-Jun Yu
- State Key Laboratory of ASIC and System, Shanghai Institute of Intelligent Electronics & Systems, School of Microelectronics, Fudan University, Shanghai 200433, China.
| | - Lei Shen
- State Key Laboratory of ASIC and System, Shanghai Institute of Intelligent Electronics & Systems, School of Microelectronics, Fudan University, Shanghai 200433, China.
| | - Cai-Yu Shi
- State Key Laboratory of ASIC and System, Shanghai Institute of Intelligent Electronics & Systems, School of Microelectronics, Fudan University, Shanghai 200433, China.
| | - Hong-Liang Lu
- State Key Laboratory of ASIC and System, Shanghai Institute of Intelligent Electronics & Systems, School of Microelectronics, Fudan University, Shanghai 200433, China.
- Jiashan Fudan Institute, Jiaxing, Zhejiang Province 314100, China
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8
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Koepfli SM, Baumann M, Koyaz Y, Gadola R, Güngör A, Keller K, Horst Y, Nashashibi S, Schwanninger R, Doderer M, Passerini E, Fedoryshyn Y, Leuthold J. Metamaterial graphene photodetector with bandwidth exceeding 500 gigahertz. Science 2023; 380:1169-1174. [PMID: 37319195 DOI: 10.1126/science.adg8017] [Citation(s) in RCA: 39] [Impact Index Per Article: 19.5] [Reference Citation Analysis] [Abstract] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Received: 01/23/2023] [Accepted: 05/11/2023] [Indexed: 06/17/2023]
Abstract
Although graphene has met many of its initially predicted optoelectronic, thermal, and mechanical properties, photodetectors with large spectral bandwidths and extremely high frequency responses remain outstanding. In this work, we demonstrate a >500 gigahertz, flat-frequency response, graphene-based photodetector that operates under ambient conditions across a 200-nanometer-wide spectral band with center wavelengths adaptable from <1400 to >4200 nanometers. Our detector combines graphene with metamaterial perfect absorbers with direct illumination from a single-mode fiber, which breaks with the conventional miniaturization of photodetectors on an integrated photonic platform. This design allows for much higher optical powers while still allowing record-high bandwidths and data rates. Our results demonstrate that graphene photodetectors can outperform conventional technologies in terms of speed, bandwidth, and operation across a large spectral range.
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Affiliation(s)
- Stefan M Koepfli
- Institute of Electromagnetic Fields (IEF), ETH Zürich, 8092 Zürich, Switzerland
| | - Michael Baumann
- Institute of Electromagnetic Fields (IEF), ETH Zürich, 8092 Zürich, Switzerland
| | - Yesim Koyaz
- Institute of Electromagnetic Fields (IEF), ETH Zürich, 8092 Zürich, Switzerland
| | - Robin Gadola
- Institute of Electromagnetic Fields (IEF), ETH Zürich, 8092 Zürich, Switzerland
| | - Arif Güngör
- Institute of Electromagnetic Fields (IEF), ETH Zürich, 8092 Zürich, Switzerland
| | - Killian Keller
- Institute of Electromagnetic Fields (IEF), ETH Zürich, 8092 Zürich, Switzerland
| | - Yannik Horst
- Institute of Electromagnetic Fields (IEF), ETH Zürich, 8092 Zürich, Switzerland
| | - Shadi Nashashibi
- Institute of Electromagnetic Fields (IEF), ETH Zürich, 8092 Zürich, Switzerland
| | | | - Michael Doderer
- Institute of Electromagnetic Fields (IEF), ETH Zürich, 8092 Zürich, Switzerland
| | - Elias Passerini
- Institute of Electromagnetic Fields (IEF), ETH Zürich, 8092 Zürich, Switzerland
| | - Yuriy Fedoryshyn
- Institute of Electromagnetic Fields (IEF), ETH Zürich, 8092 Zürich, Switzerland
| | - Juerg Leuthold
- Institute of Electromagnetic Fields (IEF), ETH Zürich, 8092 Zürich, Switzerland
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9
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Titova E, Mylnikov D, Kashchenko M, Safonov I, Zhukov S, Dzhikirba K, Novoselov KS, Bandurin DA, Alymov G, Svintsov D. Ultralow-noise Terahertz Detection by p-n Junctions in Gapped Bilayer Graphene. ACS NANO 2023; 17:8223-8232. [PMID: 37094175 DOI: 10.1021/acsnano.2c12285] [Citation(s) in RCA: 2] [Impact Index Per Article: 1.0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 05/03/2023]
Abstract
Graphene shows strong promise for the detection of terahertz (THz) radiation due to its high carrier mobility, compatibility with on-chip waveguides and transistors, and small heat capacitance. At the same time, weak reaction of graphene's physical properties on the detected radiation can be traced down to the absence of a band gap. Here, we study the effect of electrically induced band gap on THz detection in graphene bilayer with split-gate p-n junction. We show that gap induction leads to a simultaneous increase in current and voltage responsivities. At operating temperatures of ∼25 K, the responsivity at a 20 meV band gap is from 3 to 20 times larger than that in the gapless state. The maximum voltage responsivity of our devices at 0.13 THz illumination exceeds 50 kV/W, while the noise equivalent power falls down to 36 fW/Hz1/2.
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Affiliation(s)
- Elena Titova
- Center for Photonics and 2D Materials, Moscow Institute of Physics and Technology, Dolgoprudny 141700, Russian Federation
- Programmable Functional Materials Lab, Brain and Consciousness Research Center, Moscow 121205, Russia
| | - Dmitry Mylnikov
- Center for Photonics and 2D Materials, Moscow Institute of Physics and Technology, Dolgoprudny 141700, Russian Federation
| | - Mikhail Kashchenko
- Center for Photonics and 2D Materials, Moscow Institute of Physics and Technology, Dolgoprudny 141700, Russian Federation
- Programmable Functional Materials Lab, Brain and Consciousness Research Center, Moscow 121205, Russia
| | - Ilya Safonov
- Center for Photonics and 2D Materials, Moscow Institute of Physics and Technology, Dolgoprudny 141700, Russian Federation
- Programmable Functional Materials Lab, Brain and Consciousness Research Center, Moscow 121205, Russia
| | - Sergey Zhukov
- Center for Photonics and 2D Materials, Moscow Institute of Physics and Technology, Dolgoprudny 141700, Russian Federation
| | - Kirill Dzhikirba
- Institute of Solid State Physics, Russian Academy of Sciences, Chernogolovka 142432, Russian Federation
| | - Kostya S Novoselov
- Programmable Functional Materials Lab, Brain and Consciousness Research Center, Moscow 121205, Russia
- Institute for Functional Intelligent Materials, National University of Singapore, Singapore 117575, Singapore
| | - Denis A Bandurin
- Department of Materials Science and Engineering, National University of Singapore, Singapore 117575, Singapore
| | - Georgy Alymov
- Center for Photonics and 2D Materials, Moscow Institute of Physics and Technology, Dolgoprudny 141700, Russian Federation
| | - Dmitry Svintsov
- Center for Photonics and 2D Materials, Moscow Institute of Physics and Technology, Dolgoprudny 141700, Russian Federation
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10
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Zhou J, Zhang Z, Dong B, Ren Z, Liu W, Lee C. Midinfrared Spectroscopic Analysis of Aqueous Mixtures Using Artificial-Intelligence-Enhanced Metamaterial Waveguide Sensing Platform. ACS NANO 2023; 17:711-724. [PMID: 36576121 DOI: 10.1021/acsnano.2c10163] [Citation(s) in RCA: 15] [Impact Index Per Article: 7.5] [Reference Citation Analysis] [Abstract] [Key Words] [MESH Headings] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/17/2023]
Abstract
As miniaturized solutions, mid-infrared (MIR) waveguide sensors are promising for label-free compositional detection of mixtures leveraging plentiful absorption fingerprints. However, the quantitative analysis of liquid mixtures is still challenging using MIR waveguide sensors, as the absorption spectrum overlaps for multiple organic components accompanied by strong water absorption background. Here, we present an artificial-intelligence-enhanced metamaterial waveguide sensing platform (AIMWSP) for aqueous mixture analysis in the MIR. With the sensitivity-improved metamaterial waveguide and assistance of machine learning, the MIR absorption spectra of a ternary mixture in water can be successfully distinguished and decomposed to single-component spectra for predicting concentration. A classification accuracy of 98.88% for 64 mixing ratios and 92.86% for four concentrations below the limit of detection (972 ppm, based on 3σ) with steps of 300 ppm are realized. Besides, the mixture concentration prediction with root-mean-squared error varying from 0.107 vol % to 1.436 vol % is also achieved. Our work indicates the potential of further extending this sensing platform to MIR spectrometer-on-chip aiming for the data analytics of multiple organic components in aqueous environments.
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Affiliation(s)
- Jingkai Zhou
- Department of Electrical and Computer Engineering, National University of Singapore, Singapore, Singapore117583
- Center for Intelligent Sensors and MEMS (CISM), National University of Singapore, Singapore, Singapore117608
| | - Zixuan Zhang
- Department of Electrical and Computer Engineering, National University of Singapore, Singapore, Singapore117583
- Center for Intelligent Sensors and MEMS (CISM), National University of Singapore, Singapore, Singapore117608
| | - Bowei Dong
- Department of Electrical and Computer Engineering, National University of Singapore, Singapore, Singapore117583
- Center for Intelligent Sensors and MEMS (CISM), National University of Singapore, Singapore, Singapore117608
| | - Zhihao Ren
- Department of Electrical and Computer Engineering, National University of Singapore, Singapore, Singapore117583
- Center for Intelligent Sensors and MEMS (CISM), National University of Singapore, Singapore, Singapore117608
| | - Weixin Liu
- Department of Electrical and Computer Engineering, National University of Singapore, Singapore, Singapore117583
- Center for Intelligent Sensors and MEMS (CISM), National University of Singapore, Singapore, Singapore117608
| | - Chengkuo Lee
- Department of Electrical and Computer Engineering, National University of Singapore, Singapore, Singapore117583
- Center for Intelligent Sensors and MEMS (CISM), National University of Singapore, Singapore, Singapore117608
- NUS Graduate School - Integrative Sciences and Engineering Programme (ISEP), National University of Singapore, Singapore, Singapore119077
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11
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Wu J, Ma H, Zhong C, Wei M, Sun C, Ye Y, Xu Y, Tang B, Luo Y, Sun B, Jian J, Dai H, Lin H, Li L. Waveguide-Integrated PdSe 2 Photodetector over a Broad Infrared Wavelength Range. NANO LETTERS 2022; 22:6816-6824. [PMID: 35787028 DOI: 10.1021/acs.nanolett.2c02099] [Citation(s) in RCA: 13] [Impact Index Per Article: 4.3] [Reference Citation Analysis] [Abstract] [Key Words] [MESH Headings] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/15/2023]
Abstract
Hybrid integration of van der Waals materials on a photonic platform enables diverse exploration of novel active functions and significant improvement in device performance for next-generation integrated photonic circuits, but developing waveguide-integrated photodetectors based on conventionally investigated transition metal dichalcogenide materials at the full optical telecommunication bands and mid-infrared range is still a challenge. Here, we integrate PdSe2 with silicon waveguide for on-chip photodetection with a high responsivity from 1260 to 1565 nm, a low noise-equivalent power of 4.0 pW·Hz-0.5, a 3-dB bandwidth of 1.5 GHz, and a measured data rate of 2.5 Gbit·s-1. The achieved PdSe2 photodetectors provide new insights to explore the integration of novel van der Waals materials with integrated photonic platforms and exhibit great potential for diverse applications over a broad infrared range of wavelengths, such as on-chip sensing and spectroscopy.
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Affiliation(s)
- Jianghong Wu
- State Key Laboratory of Modern Optical Instrumentation, College of Information Science and Electronic Engineering, Zhejiang University, Hangzhou 310027, China
- Key Laboratory of 3D Micro/Nano Fabrication and Characterization of Zhejiang Province, School of Engineering, Westlake University, Hangzhou 310024, China
- Institute of Advanced Technology, Westlake Institute for Advanced Study, Hangzhou 310024, China
| | - Hui Ma
- State Key Laboratory of Modern Optical Instrumentation, College of Information Science and Electronic Engineering, Zhejiang University, Hangzhou 310027, China
- MOE Frontier Science Center for Brain Science & Brain-Machine Integration, Zhejiang University, Hangzhou 310027, China
| | - Chuyu Zhong
- State Key Laboratory of Modern Optical Instrumentation, College of Information Science and Electronic Engineering, Zhejiang University, Hangzhou 310027, China
- MOE Frontier Science Center for Brain Science & Brain-Machine Integration, Zhejiang University, Hangzhou 310027, China
| | - Maoliang Wei
- State Key Laboratory of Modern Optical Instrumentation, College of Information Science and Electronic Engineering, Zhejiang University, Hangzhou 310027, China
- MOE Frontier Science Center for Brain Science & Brain-Machine Integration, Zhejiang University, Hangzhou 310027, China
| | - Chunlei Sun
- Key Laboratory of 3D Micro/Nano Fabrication and Characterization of Zhejiang Province, School of Engineering, Westlake University, Hangzhou 310024, China
- Institute of Advanced Technology, Westlake Institute for Advanced Study, Hangzhou 310024, China
| | - Yuting Ye
- Key Laboratory of 3D Micro/Nano Fabrication and Characterization of Zhejiang Province, School of Engineering, Westlake University, Hangzhou 310024, China
- Institute of Advanced Technology, Westlake Institute for Advanced Study, Hangzhou 310024, China
| | - Yan Xu
- Key Laboratory of 3D Micro/Nano Fabrication and Characterization of Zhejiang Province, School of Engineering, Westlake University, Hangzhou 310024, China
- Institute of Advanced Technology, Westlake Institute for Advanced Study, Hangzhou 310024, China
| | - Bo Tang
- Institute of Microelectronics, Chinese Academic Society, Beijing 100029, China
| | - Ye Luo
- Key Laboratory of 3D Micro/Nano Fabrication and Characterization of Zhejiang Province, School of Engineering, Westlake University, Hangzhou 310024, China
- Institute of Advanced Technology, Westlake Institute for Advanced Study, Hangzhou 310024, China
| | - Boshu Sun
- State Key Laboratory of Modern Optical Instrumentation, College of Information Science and Electronic Engineering, Zhejiang University, Hangzhou 310027, China
- MOE Frontier Science Center for Brain Science & Brain-Machine Integration, Zhejiang University, Hangzhou 310027, China
| | - Jialing Jian
- Key Laboratory of 3D Micro/Nano Fabrication and Characterization of Zhejiang Province, School of Engineering, Westlake University, Hangzhou 310024, China
- Institute of Advanced Technology, Westlake Institute for Advanced Study, Hangzhou 310024, China
| | - Hao Dai
- State Key Laboratory of Modern Optical Instrumentation, College of Information Science and Electronic Engineering, Zhejiang University, Hangzhou 310027, China
- MOE Frontier Science Center for Brain Science & Brain-Machine Integration, Zhejiang University, Hangzhou 310027, China
| | - Hongtao Lin
- State Key Laboratory of Modern Optical Instrumentation, College of Information Science and Electronic Engineering, Zhejiang University, Hangzhou 310027, China
- MOE Frontier Science Center for Brain Science & Brain-Machine Integration, Zhejiang University, Hangzhou 310027, China
| | - Lan Li
- Key Laboratory of 3D Micro/Nano Fabrication and Characterization of Zhejiang Province, School of Engineering, Westlake University, Hangzhou 310024, China
- Institute of Advanced Technology, Westlake Institute for Advanced Study, Hangzhou 310024, China
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12
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Vangelidis I, Bellas DV, Suckow S, Dabos G, Castilla S, Koppens FHL, Ferrari AC, Pleros N, Lidorikis E. Unbiased Plasmonic-Assisted Integrated Graphene Photodetectors. ACS PHOTONICS 2022; 9:1992-2007. [PMID: 35726242 PMCID: PMC9204831 DOI: 10.1021/acsphotonics.2c00100] [Citation(s) in RCA: 1] [Impact Index Per Article: 0.3] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Subscribe] [Scholar Register] [Received: 01/17/2022] [Indexed: 05/10/2023]
Abstract
Photonic integrated circuits (PICs) for next-generation optical communication interconnects and all-optical signal processing require efficient (∼A/W) and fast (≥25 Gbs-1) light detection at low (
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Affiliation(s)
- Ioannis Vangelidis
- Department
of Materials Science and Engineering, University
of Ioannina, Ioannina 45110, Greece
| | - Dimitris V. Bellas
- Department
of Materials Science and Engineering, University
of Ioannina, Ioannina 45110, Greece
- Department
of Informatics, Center for Interdisciplinary Research and Innovation, Aristotle University of Thessaloniki, Thessaloniki 57001, Greece
| | - Stephan Suckow
- AMO
GmbH, Advanced Microelectronic Center Aachen (AMICA), Otto-Blumenthal-Strasse 25, Aachen 52074, Germany
| | - George Dabos
- Department
of Informatics, Center for Interdisciplinary Research and Innovation, Aristotle University of Thessaloniki, Thessaloniki 57001, Greece
| | - Sebastián Castilla
- ICFO
- Institut de Ciències Fotòniques, The Barcelona Institute of Science and Technology, Castelldefels, Barcelona 08860, Spain
| | - Frank H. L. Koppens
- ICFO
- Institut de Ciències Fotòniques, The Barcelona Institute of Science and Technology, Castelldefels, Barcelona 08860, Spain
- ICREA
- Institució Catalana de Recerca i Estudis Avançats, Barcelona 08010, Spain
| | - Andrea C. Ferrari
- Cambridge
Graphene Centre, University of Cambridge, Cambridge CB3 0FA, U.K.
| | - Nikos Pleros
- Department
of Informatics, Center for Interdisciplinary Research and Innovation, Aristotle University of Thessaloniki, Thessaloniki 57001, Greece
| | - Elefterios Lidorikis
- Department
of Materials Science and Engineering, University
of Ioannina, Ioannina 45110, Greece
- University
Research Center of Ioannina (URCI), Institute of Materials Science
and Computing, Ioannina 45110, Greece
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13
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Li S, Wang W, Lin Y, Wang L, Li X. Significantly improved high k dielectric performance: Rare earth oxide as a passivation layer laminated with TiO2 film. J RARE EARTH 2022. [DOI: 10.1016/j.jre.2022.05.005] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 10/18/2022]
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14
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Okda HA, Rabia SI, Shalaby HMH. Performance enhancement of an ultrafast graphene photodetector via simultaneous two-mode absorption in a hybrid plasmonic waveguide. APPLIED OPTICS 2022; 61:3165-3173. [PMID: 35471294 DOI: 10.1364/ao.454607] [Citation(s) in RCA: 1] [Impact Index Per Article: 0.3] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Received: 01/25/2022] [Accepted: 03/13/2022] [Indexed: 06/14/2023]
Abstract
An ultrafast, compact, zero-biased, and complementary metal-oxide semiconductor-compatible graphene photodetector (PD) based on a silicon-on-insulator hybrid plasmonic waveguide (HPWG) is proposed. Lumerical MODE solver is employed to investigate the modal characteristics of TM-polarized modes in the HPWG composing the PD. It is shown that the input light can be completely coupled into the photonic-like and plasmonic-like fundamental TM modes at the PD section. These two modes are exploited together in the photodetection process to enhance the PD performance. A rigorous analysis is performed in order to extract the optoelectronic characteristics of the single-layer graphene (SLG) used in the proposed structure. Lumerical 3D-FDTD solver is then employed to quantify the light interaction of the two aforementioned optical modes with the SLG. With a proper design at a wavelength of 1550 nm, the PD voltage responsivity reaches 2.8 V/W, and the photocurrent responsivity is obtained as 18.5 mA/W, while the corresponding absorption length is kept below 8µm and the noise equivalent power is limited to 3.7pW/Hz. Moreover, as the PD operates under zero bias, its photoresponse is predominated by the photothermoelectric mechanism, exhibiting a bandwidth that exceeds 180 GHz while avoiding the dark current.
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15
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Yang H, Wang G, Guo Y, Wang L, Tan B, Zhang S, Zhang X, Zhang J, Shuai Y, Lin J, Jia D, Hu P. Growth of wafer-scale graphene-hexagonal boron nitride vertical heterostructures with clear interfaces for obtaining atomically thin electrical analogs. NANOSCALE 2022; 14:4204-4215. [PMID: 35234771 DOI: 10.1039/d1nr06004j] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/14/2023]
Abstract
Two-dimensional (2D) integrated circuits based on graphene (Gr) heterostructures have emerged as next-generation electronic devices. However, it is still challenging to produce high-quality and large-area Gr/hexagonal boron nitride (h-BN) vertical heterostructures with clear interfaces and precise layer control. In this work, a two-step metallic alloy-assisted epitaxial growth approach has been demonstrated for producing wafer-scale vertical hexagonal boron nitride/graphene (h-BN/Gr) heterostructures with clear interfaces. The heterostructures maintain high uniformity while scaling up and thickening. The layer number of both h-BN and graphene can be independently controlled by tuning the growth process. Furthermore, conductance measurements confirm that electrical hysteresis disappears on h-BN/Gr field-effect transistors, which is attributed to the h-BN dielectric surface. Our work blazes a trail toward next-generation graphene-based analog devices.
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Affiliation(s)
- Huihui Yang
- Institute for Advanced Ceramics, School of Materials Science and Engineering, Harbin Institute of Technology, Heilongjiang, Harbin, 150080, P. R. China.
- Key Laboratory of Micro-Systems and Micro-Structures Manufacturing of Ministry of Education, Harbin Institute of Technology, Harbin 150080, P. R. China
| | - Gang Wang
- Department of Physics, Southern University of Science and Technology, Shenzhen 518055, P. R. China
| | - Yanming Guo
- School of Energy Science and Engineering, Harbin Institute of Technology, Harbin 150080, P. R. China
| | - Lifeng Wang
- Institute for Frontier Materials, Deakin University, Waurn Ponds, Australia
| | - Biying Tan
- Key Laboratory of Micro-Systems and Micro-Structures Manufacturing of Ministry of Education, Harbin Institute of Technology, Harbin 150080, P. R. China
| | - Shichao Zhang
- Key Laboratory of Micro-Systems and Micro-Structures Manufacturing of Ministry of Education, Harbin Institute of Technology, Harbin 150080, P. R. China
| | - Xin Zhang
- Key Laboratory of Micro-Systems and Micro-Structures Manufacturing of Ministry of Education, Harbin Institute of Technology, Harbin 150080, P. R. China
| | - Jia Zhang
- Key Laboratory of Micro-Systems and Micro-Structures Manufacturing of Ministry of Education, Harbin Institute of Technology, Harbin 150080, P. R. China
| | - Yong Shuai
- School of Energy Science and Engineering, Harbin Institute of Technology, Harbin 150080, P. R. China
| | - Junhao Lin
- Department of Physics, Southern University of Science and Technology, Shenzhen 518055, P. R. China
| | - Dechang Jia
- Institute for Advanced Ceramics, School of Materials Science and Engineering, Harbin Institute of Technology, Heilongjiang, Harbin, 150080, P. R. China.
| | - PingAn Hu
- Institute for Advanced Ceramics, School of Materials Science and Engineering, Harbin Institute of Technology, Heilongjiang, Harbin, 150080, P. R. China.
- Key Laboratory of Micro-Systems and Micro-Structures Manufacturing of Ministry of Education, Harbin Institute of Technology, Harbin 150080, P. R. China
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16
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Tyagi A, Mišeikis V, Martini L, Forti S, Mishra N, Gebeyehu ZM, Giambra MA, Zribi J, Frégnaux M, Aureau D, Romagnoli M, Beltram F, Coletti C. Ultra-clean high-mobility graphene on technologically relevant substrates. NANOSCALE 2022; 14:2167-2176. [PMID: 35080556 DOI: 10.1039/d1nr05904a] [Citation(s) in RCA: 10] [Impact Index Per Article: 3.3] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/14/2023]
Abstract
Graphene grown via chemical vapour deposition (CVD) on copper foil has emerged as a high-quality, scalable material, that can be easily integrated on technologically relevant platforms to develop promising applications in the fields of optoelectronics and photonics. Most of these applications require low-contaminated high-mobility graphene (i.e., approaching 10 000 cm2 V-1 s-1 at room temperature) to reduce device losses and implement compact device design. To date, these mobility values are only obtained when suspending or encapsulating graphene. Here, we demonstrate a rapid, facile, and scalable cleaning process, that yields high-mobility graphene directly on the most common technologically relevant substrate: silicon dioxide on silicon (SiO2/Si). Atomic force microscopy (AFM) and spatially-resolved X-ray photoelectron spectroscopy (XPS) demonstrate that this approach is instrumental to rapidly eliminate most of the polymeric residues which remain on graphene after transfer and fabrication and that have adverse effects on its electrical properties. Raman measurements show a significant reduction of graphene doping and strain. Transport measurements of 50 Hall bars (HBs) yield hole mobility μh up to ∼9000 cm2 V-1 s-1 and electron mobility μe up to ∼8000 cm2 V-1 s-1, with average values μh ∼ 7500 cm2 V-1 s-1 and μe ∼ 6300 cm2 V-1 s-1. The carrier mobility of ultraclean graphene reaches values nearly double than those measured in graphene processed with acetone cleaning, which is the method widely adopted in the field. Notably, these mobility values are obtained over large-scale and without encapsulation, thus paving the way to the adoption of graphene in optoelectronics and photonics.
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Affiliation(s)
- Ayush Tyagi
- NEST, Scuola Normale Superiore, Piazza San Silvestro 12, 56127 Pisa, Italy
- Center for Nanotechnology Innovation @NEST, Istituto Italiano di Technologia, Piazza San Silvestro 12, 56127 Pisa, Italy.
| | - Vaidotas Mišeikis
- Center for Nanotechnology Innovation @NEST, Istituto Italiano di Technologia, Piazza San Silvestro 12, 56127 Pisa, Italy.
- Graphene Labs, Istituto Italiano di Tecnologia, via Morego 30, 16163 Genova, Italy
| | - Leonardo Martini
- Center for Nanotechnology Innovation @NEST, Istituto Italiano di Technologia, Piazza San Silvestro 12, 56127 Pisa, Italy.
| | - Stiven Forti
- Center for Nanotechnology Innovation @NEST, Istituto Italiano di Technologia, Piazza San Silvestro 12, 56127 Pisa, Italy.
| | - Neeraj Mishra
- Center for Nanotechnology Innovation @NEST, Istituto Italiano di Technologia, Piazza San Silvestro 12, 56127 Pisa, Italy.
- Graphene Labs, Istituto Italiano di Tecnologia, via Morego 30, 16163 Genova, Italy
| | - Zewdu M Gebeyehu
- Center for Nanotechnology Innovation @NEST, Istituto Italiano di Technologia, Piazza San Silvestro 12, 56127 Pisa, Italy.
- Graphene Labs, Istituto Italiano di Tecnologia, via Morego 30, 16163 Genova, Italy
| | | | - Jihene Zribi
- Institut Lavoisier de Versailles UMR 8180 Université Paris-Saclay, UVSQ, CNRS, 78035 Versailles, France
| | - Mathieu Frégnaux
- Institut Lavoisier de Versailles UMR 8180 Université Paris-Saclay, UVSQ, CNRS, 78035 Versailles, France
| | - Damien Aureau
- Institut Lavoisier de Versailles UMR 8180 Université Paris-Saclay, UVSQ, CNRS, 78035 Versailles, France
| | - Marco Romagnoli
- Photonic Networks and Technologies Lab, CNIT, 56124 Pisa, Italy
| | - Fabio Beltram
- NEST, Scuola Normale Superiore, Piazza San Silvestro 12, 56127 Pisa, Italy
| | - Camilla Coletti
- Center for Nanotechnology Innovation @NEST, Istituto Italiano di Technologia, Piazza San Silvestro 12, 56127 Pisa, Italy.
- Graphene Labs, Istituto Italiano di Tecnologia, via Morego 30, 16163 Genova, Italy
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17
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Graphene on Silicon Photonics: Light Modulation and Detection for Cutting-Edge Communication Technologies. APPLIED SCIENCES-BASEL 2021. [DOI: 10.3390/app12010313] [Citation(s) in RCA: 1] [Impact Index Per Article: 0.3] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 11/16/2022]
Abstract
Graphene—a two-dimensional allotrope of carbon in a single-layer honeycomb lattice nanostructure—has several distinctive optoelectronic properties that are highly desirable in advanced optical communication systems. Meanwhile, silicon photonics is a promising solution for the next-generation integrated photonics, owing to its low cost, low propagation loss and compatibility with CMOS fabrication processes. Unfortunately, silicon’s photodetection responsivity and operation bandwidth are intrinsically limited by its material characteristics. Graphene, with its extraordinary optoelectronic properties has been widely applied in silicon photonics to break this performance bottleneck, with significant progress reported. In this review, we focus on the application of graphene in high-performance silicon photonic devices, including modulators and photodetectors. Moreover, we explore the trend of development and discuss the future challenges of silicon-graphene hybrid photonic devices.
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18
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Asgari M, Riccardi E, Balci O, De Fazio D, Shinde SM, Zhang J, Mignuzzi S, Koppens FHL, Ferrari AC, Viti L, Vitiello MS. Chip-Scalable, Room-Temperature, Zero-Bias, Graphene-Based Terahertz Detectors with Nanosecond Response Time. ACS NANO 2021; 15:17966-17976. [PMID: 34706194 PMCID: PMC8613901 DOI: 10.1021/acsnano.1c06432] [Citation(s) in RCA: 4] [Impact Index Per Article: 1.0] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Subscribe] [Scholar Register] [Received: 07/28/2021] [Accepted: 10/12/2021] [Indexed: 06/01/2023]
Abstract
The scalable synthesis and transfer of large-area graphene underpins the development of nanoscale photonic devices ideal for new applications in a variety of fields, ranging from biotechnology, to wearable sensors for healthcare and motion detection, to quantum transport, communications, and metrology. We report room-temperature zero-bias thermoelectric photodetectors, based on single- and polycrystal graphene grown by chemical vapor deposition (CVD), tunable over the whole terahertz range (0.1-10 THz) by selecting the resonance of an on-chip patterned nanoantenna. Efficient light detection with noise equivalent powers <1 nWHz-1/2 and response time ∼5 ns at room temperature are demonstrated. This combination of specifications is orders of magnitude better than any previous CVD graphene photoreceiver operating in the sub-THz and THz range. These state-of-the-art performances and the possibility of upscaling to multipixel architectures on complementary metal-oxide-semiconductor platforms are the starting points for the realization of cost-effective THz cameras in a frequency range still not covered by commercially available microbolometer arrays.
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Affiliation(s)
- Mahdi Asgari
- NEST,
CNR - Istituto Nanoscienze and Scuola Normale Superiore, Piazza San Silvestro 12, 56127, Pisa, Italy
| | - Elisa Riccardi
- NEST,
CNR - Istituto Nanoscienze and Scuola Normale Superiore, Piazza San Silvestro 12, 56127, Pisa, Italy
| | - Osman Balci
- Cambridge
Graphene Centre, University of Cambridge, Cambridge CB3 0FA, United Kingdom
| | - Domenico De Fazio
- ICFO-Institut
de Ciencies Fotoniques, Mediterranean Technology Park, 08860, Castelldefels, Barcelona, Spain
| | - Sachin M. Shinde
- Cambridge
Graphene Centre, University of Cambridge, Cambridge CB3 0FA, United Kingdom
| | - Jincan Zhang
- Cambridge
Graphene Centre, University of Cambridge, Cambridge CB3 0FA, United Kingdom
| | - Sandro Mignuzzi
- Cambridge
Graphene Centre, University of Cambridge, Cambridge CB3 0FA, United Kingdom
| | - Frank H. L. Koppens
- ICFO-Institut
de Ciencies Fotoniques, Mediterranean Technology Park, 08860, Castelldefels, Barcelona, Spain
| | - Andrea C. Ferrari
- Cambridge
Graphene Centre, University of Cambridge, Cambridge CB3 0FA, United Kingdom
| | - Leonardo Viti
- NEST,
CNR - Istituto Nanoscienze and Scuola Normale Superiore, Piazza San Silvestro 12, 56127, Pisa, Italy
| | - Miriam S. Vitiello
- NEST,
CNR - Istituto Nanoscienze and Scuola Normale Superiore, Piazza San Silvestro 12, 56127, Pisa, Italy
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19
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Wu J, Wei M, Mu J, Ma H, Zhong C, Ye Y, Sun C, Tang B, Wang L, Li J, Xu X, Liu B, Li L, Lin H. High-Performance Waveguide-Integrated Bi 2O 2Se Photodetector for Si Photonic Integrated Circuits. ACS NANO 2021; 15:15982-15991. [PMID: 34652907 DOI: 10.1021/acsnano.1c04359] [Citation(s) in RCA: 13] [Impact Index Per Article: 3.3] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/13/2023]
Abstract
Due to the excellent electrical and optical properties and their integration capability without lattice matching requirements, low-dimensional materials have received increasing attention in silicon photonic circuits. Bi2O2Se with high carrier mobility, narrow bandgap, and good air stability is very promising for high-performance near-infrared photodetectors. Here, the chemical vapor deposition method is applied to grow Bi2O2Se onto mica, and our developed polycarbonate/polydimethylsiloxane-assisted transfer method enables the clean and intact transfer of Bi2O2Se on top of a silicon waveguide. We demonstrated the Bi2O2Se/Si waveguide integrated photodetector with a small dark current of 72.9 nA, high responsivity of 3.5 A·W-1, fast rise/decay times of 22/78 ns, and low noise-equivalent power of 15.1 pW·Hz-0.5 at an applied voltage of 2 V in the O-band for transverse electric modes. Additionally, a microring resonator is designed for enhancing light-matter interaction, resulting in a wavelength-sensitive photodetector with reduced dark current (15.3 nA at 2 V) and more than a 3-fold enhancement in responsivity at the resonance wavelength, which is suitable for spectrally resolved applications. These results promote the integration of Bi2O2Se with a silicon photonic platform and are expected to accelerate the future use of integrated photodetectors in spectroscopy, sensing, and communication applications.
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Affiliation(s)
- Jianghong Wu
- State Key Laboratory of Modern Optical Instrumentation, College of Information Science and Electronic Engineering, Zhejiang University, Hangzhou 310027, China
- Key Laboratory of 3D Micro/Nano Fabrication and Characterization of Zhejiang Province, School of Engineering, Westlake University, Hangzhou 310024, China
- Institute of Advanced Technology, Westlake Institute for Advanced Study, 18 Shilongshan Road, Hangzhou 310024, China
| | - Maoliang Wei
- State Key Laboratory of Modern Optical Instrumentation, College of Information Science and Electronic Engineering, Zhejiang University, Hangzhou 310027, China
| | - Jianglong Mu
- Shenzhen Geim Graphene Center, Tsinghua-Berkeley Shenzhen Institute and Tsinghua Shenzhen International Graduate School, Tsinghua University, Shenzhen, Guangdong 518055, China
| | - Hui Ma
- State Key Laboratory of Modern Optical Instrumentation, College of Information Science and Electronic Engineering, Zhejiang University, Hangzhou 310027, China
| | - Chuyu Zhong
- State Key Laboratory of Modern Optical Instrumentation, College of Information Science and Electronic Engineering, Zhejiang University, Hangzhou 310027, China
| | - Yuting Ye
- Key Laboratory of 3D Micro/Nano Fabrication and Characterization of Zhejiang Province, School of Engineering, Westlake University, Hangzhou 310024, China
- Institute of Advanced Technology, Westlake Institute for Advanced Study, 18 Shilongshan Road, Hangzhou 310024, China
| | - Chunlei Sun
- Key Laboratory of 3D Micro/Nano Fabrication and Characterization of Zhejiang Province, School of Engineering, Westlake University, Hangzhou 310024, China
- Institute of Advanced Technology, Westlake Institute for Advanced Study, 18 Shilongshan Road, Hangzhou 310024, China
| | - Bo Tang
- Institute of Microelectronics, Chinese Academic Society, Beijing 100029, China
| | - Lichun Wang
- State Key Laboratory of Modern Optical Instrumentation, College of Information Science and Electronic Engineering, Zhejiang University, Hangzhou 310027, China
| | - Junying Li
- State Key Laboratory of Modern Optical Instrumentation, College of Information Science and Electronic Engineering, Zhejiang University, Hangzhou 310027, China
| | - Xiaomin Xu
- Shenzhen Geim Graphene Center, Tsinghua-Berkeley Shenzhen Institute and Tsinghua Shenzhen International Graduate School, Tsinghua University, Shenzhen, Guangdong 518055, China
| | - Bilu Liu
- Shenzhen Geim Graphene Center, Tsinghua-Berkeley Shenzhen Institute and Tsinghua Shenzhen International Graduate School, Tsinghua University, Shenzhen, Guangdong 518055, China
| | - Lan Li
- Key Laboratory of 3D Micro/Nano Fabrication and Characterization of Zhejiang Province, School of Engineering, Westlake University, Hangzhou 310024, China
- Institute of Advanced Technology, Westlake Institute for Advanced Study, 18 Shilongshan Road, Hangzhou 310024, China
| | - Hongtao Lin
- State Key Laboratory of Modern Optical Instrumentation, College of Information Science and Electronic Engineering, Zhejiang University, Hangzhou 310027, China
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20
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Schuler S, Muench JE, Ruocco A, Balci O, Thourhout DV, Sorianello V, Romagnoli M, Watanabe K, Taniguchi T, Goykhman I, Ferrari AC, Mueller T. High-responsivity graphene photodetectors integrated on silicon microring resonators. Nat Commun 2021; 12:3733. [PMID: 34145226 PMCID: PMC8213857 DOI: 10.1038/s41467-021-23436-x] [Citation(s) in RCA: 33] [Impact Index Per Article: 8.3] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Download PDF] [Figures] [Journal Information] [Subscribe] [Scholar Register] [Received: 07/05/2020] [Accepted: 04/14/2021] [Indexed: 02/05/2023] Open
Abstract
Graphene integrated photonics provides several advantages over conventional Si photonics. Single layer graphene (SLG) enables fast, broadband, and energy-efficient electro-optic modulators, optical switches and photodetectors (GPDs), and is compatible with any optical waveguide. The last major barrier to SLG-based optical receivers lies in the current GPDs' low responsivity when compared to conventional PDs. Here we overcome this by integrating a photo-thermoelectric GPD with a Si microring resonator. Under critical coupling, we achieve >90% light absorption in a ~6 μm SLG channel along a Si waveguide. Cavity-enhanced light-matter interactions cause carriers in SLG to reach ~400 K for an input power ~0.6 mW, resulting in a voltage responsivity ~90 V/W, with a receiver sensitivity enabling our GPDs to operate at a 10-9 bit-error rate, on par with mature semiconductor technology, but with a natural generation of a voltage, rather than a current, thus removing the need for transimpedance amplification, with a reduction of energy-per-bit, cost, and foot-print.
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Affiliation(s)
- S Schuler
- Vienna University of Technology, Institute of Photonics, Vienna, Austria
- Cambridge Graphene Centre, University of Cambridge, Cambridge, UK
| | - J E Muench
- Cambridge Graphene Centre, University of Cambridge, Cambridge, UK
| | - A Ruocco
- Cambridge Graphene Centre, University of Cambridge, Cambridge, UK
| | - O Balci
- Cambridge Graphene Centre, University of Cambridge, Cambridge, UK
| | - D van Thourhout
- Ghent University-IMEC, Photonics Research Group, Gent, Belgium
| | - V Sorianello
- Consorzio Nazionale per le Telecomunicazioni and Inphotec, Pisa, Italy
| | - M Romagnoli
- Consorzio Nazionale per le Telecomunicazioni and Inphotec, Pisa, Italy
| | - K Watanabe
- National Institute for Materials Science, Tsukuba, Japan
| | - T Taniguchi
- National Institute for Materials Science, Tsukuba, Japan
| | - I Goykhman
- Cambridge Graphene Centre, University of Cambridge, Cambridge, UK
- Technion-Israel Institute of Technology, Haifa, Israel
| | - A C Ferrari
- Cambridge Graphene Centre, University of Cambridge, Cambridge, UK.
| | - T Mueller
- Vienna University of Technology, Institute of Photonics, Vienna, Austria.
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21
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Liu C, Guo J, Yu L, Li J, Zhang M, Li H, Shi Y, Dai D. Silicon/2D-material photodetectors: from near-infrared to mid-infrared. LIGHT, SCIENCE & APPLICATIONS 2021; 10:123. [PMID: 34108443 PMCID: PMC8190178 DOI: 10.1038/s41377-021-00551-4] [Citation(s) in RCA: 98] [Impact Index Per Article: 24.5] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Download PDF] [Figures] [Subscribe] [Scholar Register] [Received: 12/19/2020] [Revised: 04/21/2021] [Accepted: 05/06/2021] [Indexed: 05/06/2023]
Abstract
Two-dimensional materials (2DMs) have been used widely in constructing photodetectors (PDs) because of their advantages in flexible integration and ultrabroad operation wavelength range. Specifically, 2DM PDs on silicon have attracted much attention because silicon microelectronics and silicon photonics have been developed successfully for many applications. 2DM PDs meet the imperious demand of silicon photonics on low-cost, high-performance, and broadband photodetection. In this work, a review is given for the recent progresses of Si/2DM PDs working in the wavelength band from near-infrared to mid-infrared, which are attractive for many applications. The operation mechanisms and the device configurations are summarized in the first part. The waveguide-integrated PDs and the surface-illuminated PDs are then reviewed in details, respectively. The discussion and outlook for 2DM PDs on silicon are finally given.
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Affiliation(s)
- Chaoyue Liu
- State Key Laboratory for Modern Optical Instrumentation, Zhejiang Provincial Key Laboratory for Sensing Technologies, College of Optical Science and Engineering, International Research Center for Advanced Photonics, Zhejiang University, Zijingang Campus, Hangzhou, 310058, China
| | - Jingshu Guo
- State Key Laboratory for Modern Optical Instrumentation, Zhejiang Provincial Key Laboratory for Sensing Technologies, College of Optical Science and Engineering, International Research Center for Advanced Photonics, Zhejiang University, Zijingang Campus, Hangzhou, 310058, China
| | - Laiwen Yu
- State Key Laboratory for Modern Optical Instrumentation, Zhejiang Provincial Key Laboratory for Sensing Technologies, College of Optical Science and Engineering, International Research Center for Advanced Photonics, Zhejiang University, Zijingang Campus, Hangzhou, 310058, China
| | - Jiang Li
- State Key Laboratory for Modern Optical Instrumentation, Zhejiang Provincial Key Laboratory for Sensing Technologies, College of Optical Science and Engineering, International Research Center for Advanced Photonics, Zhejiang University, Zijingang Campus, Hangzhou, 310058, China
| | - Ming Zhang
- State Key Laboratory for Modern Optical Instrumentation, Zhejiang Provincial Key Laboratory for Sensing Technologies, College of Optical Science and Engineering, International Research Center for Advanced Photonics, Zhejiang University, Zijingang Campus, Hangzhou, 310058, China
- Ningbo Research Institute, Zhejiang University, Ningbo, 315100, China
| | - Huan Li
- State Key Laboratory for Modern Optical Instrumentation, Zhejiang Provincial Key Laboratory for Sensing Technologies, College of Optical Science and Engineering, International Research Center for Advanced Photonics, Zhejiang University, Zijingang Campus, Hangzhou, 310058, China
| | - Yaocheng Shi
- State Key Laboratory for Modern Optical Instrumentation, Zhejiang Provincial Key Laboratory for Sensing Technologies, College of Optical Science and Engineering, International Research Center for Advanced Photonics, Zhejiang University, Zijingang Campus, Hangzhou, 310058, China
- Ningbo Research Institute, Zhejiang University, Ningbo, 315100, China
| | - Daoxin Dai
- State Key Laboratory for Modern Optical Instrumentation, Zhejiang Provincial Key Laboratory for Sensing Technologies, College of Optical Science and Engineering, International Research Center for Advanced Photonics, Zhejiang University, Zijingang Campus, Hangzhou, 310058, China.
- Ningbo Research Institute, Zhejiang University, Ningbo, 315100, China.
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22
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Chee SS, Gréboval C, Magalhaes DV, Ramade J, Chu A, Qu J, Rastogi P, Khalili A, Dang TH, Dabard C, Prado Y, Patriarche G, Chaste J, Rosticher M, Bals S, Delerue C, Lhuillier E. Correlating Structure and Detection Properties in HgTe Nanocrystal Films. NANO LETTERS 2021; 21:4145-4151. [PMID: 33956449 DOI: 10.1021/acs.nanolett.0c04346] [Citation(s) in RCA: 8] [Impact Index Per Article: 2.0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/12/2023]
Abstract
HgTe nanocrystals (NCs) enable broadly tunable infrared absorption, now commonly used to design light sensors. This material tends to grow under multipodic shapes and does not present well-defined size distributions. Such point generates traps and reduces the particle packing, leading to a reduced mobility. It is thus highly desirable to comprehensively explore the effect of the shape on their performance. Here, we show, using a combination of electron tomography and tight binding simulations, that the charge dissociation is strong within HgTe NCs, but poorly shape dependent. Then, we design a dual-gate field-effect-transistor made of tripod HgTe NCs and use it to generate a planar p-n junction, offering more tunability than its vertical geometry counterpart. Interestingly, the performance of the tripods is higher than sphere ones, and this can be correlated with a stronger Te excess in the case of sphere shapes which is responsible for a higher hole trap density.
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Affiliation(s)
- Sang-Soo Chee
- CNRS, Institut des NanoSciences de Paris, Sorbonne Université, 4 place Jussieu, 75005 Paris, France
- Nanomaterials and Nanotechnology Center, Korea Institute of Ceramic Engineering and Technology (KICET), 101 Soho-ro, 52851 Jinju-si, Republic of Korea
| | - Charlie Gréboval
- CNRS, Institut des NanoSciences de Paris, Sorbonne Université, 4 place Jussieu, 75005 Paris, France
| | - Debora Vale Magalhaes
- Electron Microscopy for Materials Science, University of Antwerp, Groenenborgerlaan 171, B-2020 Antwerp, Belgium
- NANOlab Center of Excellence, University of Antwerp, B-2020 Antwerp, Belgium
| | - Julien Ramade
- Electron Microscopy for Materials Science, University of Antwerp, Groenenborgerlaan 171, B-2020 Antwerp, Belgium
- NANOlab Center of Excellence, University of Antwerp, B-2020 Antwerp, Belgium
| | - Audrey Chu
- CNRS, Institut des NanoSciences de Paris, Sorbonne Université, 4 place Jussieu, 75005 Paris, France
| | - Junling Qu
- CNRS, Institut des NanoSciences de Paris, Sorbonne Université, 4 place Jussieu, 75005 Paris, France
| | - Prachi Rastogi
- CNRS, Institut des NanoSciences de Paris, Sorbonne Université, 4 place Jussieu, 75005 Paris, France
| | - Adrien Khalili
- CNRS, Institut des NanoSciences de Paris, Sorbonne Université, 4 place Jussieu, 75005 Paris, France
| | - Tung Huu Dang
- CNRS, Institut des NanoSciences de Paris, Sorbonne Université, 4 place Jussieu, 75005 Paris, France
- Laboratoire de Physique de l'Ecole normale supérieure, ENS, Université PSL, CNRS, Sorbonne Université, Université Paris-Diderot, Sorbonne Paris Cité, 75005 Paris, France
| | - Corentin Dabard
- CNRS, Institut des NanoSciences de Paris, Sorbonne Université, 4 place Jussieu, 75005 Paris, France
| | - Yoann Prado
- CNRS, Institut des NanoSciences de Paris, Sorbonne Université, 4 place Jussieu, 75005 Paris, France
| | - Gilles Patriarche
- Centre de Nanosciences et de Nanotechnologies, CNRS, Université Paris-Saclay, C2N, Palaiseau 2110, France
| | - Julien Chaste
- Centre de Nanosciences et de Nanotechnologies, CNRS, Université Paris-Saclay, C2N, Palaiseau 2110, France
| | - Michael Rosticher
- Laboratoire de Physique de l'Ecole normale supérieure, ENS, Université PSL, CNRS, Sorbonne Université, Université Paris-Diderot, Sorbonne Paris Cité, 75005 Paris, France
| | - Sara Bals
- Electron Microscopy for Materials Science, University of Antwerp, Groenenborgerlaan 171, B-2020 Antwerp, Belgium
- NANOlab Center of Excellence, University of Antwerp, B-2020 Antwerp, Belgium
| | - Christophe Delerue
- Université Lille, CNRS, Centrale Lille, Université Polytechnique Hauts-de-France, Junia, UMR 8520 - IEMN F-59000 Lille, France
| | - Emmanuel Lhuillier
- CNRS, Institut des NanoSciences de Paris, Sorbonne Université, 4 place Jussieu, 75005 Paris, France
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23
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Massicotte M, Soavi G, Principi A, Tielrooij KJ. Hot carriers in graphene - fundamentals and applications. NANOSCALE 2021; 13:8376-8411. [PMID: 33913956 PMCID: PMC8118204 DOI: 10.1039/d0nr09166a] [Citation(s) in RCA: 36] [Impact Index Per Article: 9.0] [Reference Citation Analysis] [Abstract] [Grants] [Track Full Text] [Subscribe] [Scholar Register] [Received: 12/28/2020] [Accepted: 03/30/2021] [Indexed: 05/15/2023]
Abstract
Hot charge carriers in graphene exhibit fascinating physical phenomena, whose understanding has improved greatly over the past decade. They have distinctly different physical properties compared to, for example, hot carriers in conventional metals. This is predominantly the result of graphene's linear energy-momentum dispersion, its phonon properties, its all-interface character, and the tunability of its carrier density down to very small values, and from electron- to hole-doping. Since a few years, we have witnessed an increasing interest in technological applications enabled by hot carriers in graphene. Of particular interest are optical and optoelectronic applications, where hot carriers are used to detect (photodetection), convert (nonlinear photonics), or emit (luminescence) light. Graphene-enabled systems in these application areas could find widespread use and have a disruptive impact, for example in the field of data communication, high-frequency electronics, and industrial quality control. The aim of this review is to provide an overview of the most relevant physics and working principles that are relevant for applications exploiting hot carriers in graphene.
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Affiliation(s)
- Mathieu Massicotte
- Institut Quantique and Département de Physique, Université de SherbrookeSherbrookeQuébecCanada
| | - Giancarlo Soavi
- Institute of Solid State Physics, Friedrich Schiller University Jena07743 JenaGermany
- Abbe Center of Photonics, Friedrich Schiller University Jena07745 JenaGermany
| | | | - Klaas-Jan Tielrooij
- Catalan Institute of Nanoscience and Nanotechnology (ICN2), BIST & CSIC, Campus UAB08193BellaterraBarcelonaSpain
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24
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Pace S, Martini L, Convertino D, Keum DH, Forti S, Pezzini S, Fabbri F, Mišeikis V, Coletti C. Synthesis of Large-Scale Monolayer 1T'-MoTe 2 and Its Stabilization via Scalable hBN Encapsulation. ACS NANO 2021; 15:4213-4225. [PMID: 33605730 PMCID: PMC8023802 DOI: 10.1021/acsnano.0c05936] [Citation(s) in RCA: 42] [Impact Index Per Article: 10.5] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Download PDF] [Figures] [Subscribe] [Scholar Register] [Received: 07/16/2020] [Accepted: 02/02/2021] [Indexed: 06/02/2023]
Abstract
Out of the different structural phases of molybdenum ditelluride (MoTe2), the distorted octahedral 1T' possesses great interest for fundamental physics and is a promising candidate for the implementation of innovative devices such as topological transistors. Indeed, 1T'-MoTe2 is a semimetal with superconductivity, which has been predicted to be a Weyl semimetal and a quantum spin Hall insulator in bulk and monolayer form, respectively. Large instability of monolayer 1T'-MoTe2 in environmental conditions, however, has made its investigation extremely challenging so far. In this work, we demonstrate homogeneous growth of large single-crystal (up to 500 μm) monolayer 1T'-MoTe2 via chemical vapor deposition (CVD) and its stabilization in air with a scalable encapsulation approach. The encapsulant is obtained by electrochemically delaminating CVD hexagonal boron nitride (hBN) from copper foil, and it is applied on the freshly grown 1T'-MoTe2 via a top-down dry lamination step. The structural and electrical properties of encapsulated 1T'-MoTe2 have been monitored over several months to assess the degree of degradation of the material. We find that when encapsulated with hBN, the lifetime of monolayer 1T'-MoTe2 successfully increases from a few minutes to more than a month. Furthermore, the encapsulated monolayer can be subjected to transfer, device processing, and heating and cooling cycles without degradation of its properties. The potential of this scalable heterostack is confirmed by the observation of signatures of low-temperature phase transition in monolayer 1T'-MoTe2 by both Raman spectroscopy and electrical measurements. The growth and encapsulation methods reported in this work can be employed for further fundamental studies of this enticing material as well as facilitate the technological development of monolayer 1T'-MoTe2.
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Affiliation(s)
- Simona Pace
- Center
for Nanotechnology Innovation @NEST, Istituto Italiano di Tecnologia, Piazza San Silvestro 12, 56127 Pisa, Italy
- Graphene
Laboratories, Istituto Italiano di Tecnologia, Via Morego 30, 16163 Genova, Italy
| | - Leonardo Martini
- Center
for Nanotechnology Innovation @NEST, Istituto Italiano di Tecnologia, Piazza San Silvestro 12, 56127 Pisa, Italy
| | - Domenica Convertino
- Center
for Nanotechnology Innovation @NEST, Istituto Italiano di Tecnologia, Piazza San Silvestro 12, 56127 Pisa, Italy
- Graphene
Laboratories, Istituto Italiano di Tecnologia, Via Morego 30, 16163 Genova, Italy
| | - Dong Hoon Keum
- Center
for Nanotechnology Innovation @NEST, Istituto Italiano di Tecnologia, Piazza San Silvestro 12, 56127 Pisa, Italy
- Graphene
Laboratories, Istituto Italiano di Tecnologia, Via Morego 30, 16163 Genova, Italy
| | - Stiven Forti
- Center
for Nanotechnology Innovation @NEST, Istituto Italiano di Tecnologia, Piazza San Silvestro 12, 56127 Pisa, Italy
| | - Sergio Pezzini
- Center
for Nanotechnology Innovation @NEST, Istituto Italiano di Tecnologia, Piazza San Silvestro 12, 56127 Pisa, Italy
- Graphene
Laboratories, Istituto Italiano di Tecnologia, Via Morego 30, 16163 Genova, Italy
| | - Filippo Fabbri
- Center
for Nanotechnology Innovation @NEST, Istituto Italiano di Tecnologia, Piazza San Silvestro 12, 56127 Pisa, Italy
- Graphene
Laboratories, Istituto Italiano di Tecnologia, Via Morego 30, 16163 Genova, Italy
| | - Vaidotas Mišeikis
- Center
for Nanotechnology Innovation @NEST, Istituto Italiano di Tecnologia, Piazza San Silvestro 12, 56127 Pisa, Italy
- Graphene
Laboratories, Istituto Italiano di Tecnologia, Via Morego 30, 16163 Genova, Italy
| | - Camilla Coletti
- Center
for Nanotechnology Innovation @NEST, Istituto Italiano di Tecnologia, Piazza San Silvestro 12, 56127 Pisa, Italy
- Graphene
Laboratories, Istituto Italiano di Tecnologia, Via Morego 30, 16163 Genova, Italy
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25
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Giambra M, Mišeikis V, Pezzini S, Marconi S, Montanaro A, Fabbri F, Sorianello V, Ferrari AC, Coletti C, Romagnoli M. Wafer-Scale Integration of Graphene-Based Photonic Devices. ACS NANO 2021; 15:3171-3187. [PMID: 33522789 PMCID: PMC7905876 DOI: 10.1021/acsnano.0c09758] [Citation(s) in RCA: 38] [Impact Index Per Article: 9.5] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Download PDF] [Figures] [Subscribe] [Scholar Register] [Received: 11/20/2020] [Accepted: 01/21/2021] [Indexed: 05/13/2023]
Abstract
Graphene and related materials can lead to disruptive advances in next-generation photonics and optoelectronics. The challenge is to devise growth, transfer and fabrication protocols providing high (≥5000 cm2 V-1 s-1) mobility devices with reliable performance at the wafer scale. Here, we present a flow for the integration of graphene in photonics circuits. This relies on chemical vapor deposition (CVD) of single layer graphene (SLG) matrices comprising up to ∼12000 individual single crystals, grown to match the geometrical configuration of the devices in the photonic circuit. This is followed by a transfer approach which guarantees coverage over ∼80% of the device area, and integrity for up to 150 mm wafers, with room temperature mobility ∼5000 cm2 V-1 s-1. We use this process flow to demonstrate double SLG electro-absorption modulators with modulation efficiency ∼0.25, 0.45, 0.75, 1 dB V-1 for device lengths ∼30, 60, 90, 120 μm. The data rate is up to 20 Gbps. Encapsulation with single-layer hexagonal boron nitride (hBN) is used to protect SLG during plasma-enhanced CVD of Si3N4, ensuring reproducible device performance. The processes are compatible with full automation. This paves the way for large scale production of graphene-based photonic devices.
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Affiliation(s)
- Marco
A. Giambra
- Photonic
Networks and Technologies Lab, CNIT, Via G. Moruzzi 1, 56124 Pisa, Italy
- INPHOTEC, Via G. Moruzzi 1, 56124 Pisa, Italy
- Center
for Nanotechnology Innovation @NEST - Istituto Italiano di Tecnologia, Piazza San Silvestro 12, I-56127 Pisa, Italy
| | - Vaidotas Mišeikis
- Center
for Nanotechnology Innovation @NEST - Istituto Italiano di Tecnologia, Piazza San Silvestro 12, I-56127 Pisa, Italy
- Graphene
Labs, Istituto Italiano di Tecnologia, Via Morego 30, 16163 Genova, Italy
| | - Sergio Pezzini
- Center
for Nanotechnology Innovation @NEST - Istituto Italiano di Tecnologia, Piazza San Silvestro 12, I-56127 Pisa, Italy
- Graphene
Labs, Istituto Italiano di Tecnologia, Via Morego 30, 16163 Genova, Italy
- NEST,
Scuola Normale Superiore and Istituto Nanoscienze-CNR, Piazza San Silvestro 12, I-56127 Pisa, Italy
| | - Simone Marconi
- Photonic
Networks and Technologies Lab, Tecip Institute, Scuola Superiore Sant’Anna, Via G. Moruzzi 1, 56124 Pisa, Italy
| | - Alberto Montanaro
- Photonic
Networks and Technologies Lab, CNIT, Via G. Moruzzi 1, 56124 Pisa, Italy
| | - Filippo Fabbri
- Center
for Nanotechnology Innovation @NEST - Istituto Italiano di Tecnologia, Piazza San Silvestro 12, I-56127 Pisa, Italy
- Graphene
Labs, Istituto Italiano di Tecnologia, Via Morego 30, 16163 Genova, Italy
- NEST,
Scuola Normale Superiore and Istituto Nanoscienze-CNR, Piazza San Silvestro 12, I-56127 Pisa, Italy
| | - Vito Sorianello
- Photonic
Networks and Technologies Lab, CNIT, Via G. Moruzzi 1, 56124 Pisa, Italy
| | - Andrea C. Ferrari
- Cambridge
Graphene Centre, Cambridge University, 9 J.J. Thompson, Cambridge, U.K.
| | - Camilla Coletti
- Center
for Nanotechnology Innovation @NEST - Istituto Italiano di Tecnologia, Piazza San Silvestro 12, I-56127 Pisa, Italy
- Graphene
Labs, Istituto Italiano di Tecnologia, Via Morego 30, 16163 Genova, Italy
| | - Marco Romagnoli
- Photonic
Networks and Technologies Lab, CNIT, Via G. Moruzzi 1, 56124 Pisa, Italy
- INPHOTEC, Via G. Moruzzi 1, 56124 Pisa, Italy
- CamGraPhiC, Via Moruzzi 1, 56124 Pisa, Italy
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26
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Marconi S, Giambra MA, Montanaro A, Mišeikis V, Soresi S, Tirelli S, Galli P, Buchali F, Templ W, Coletti C, Sorianello V, Romagnoli M. Photo thermal effect graphene detector featuring 105 Gbit s -1 NRZ and 120 Gbit s -1 PAM4 direct detection. Nat Commun 2021; 12:806. [PMID: 33547318 PMCID: PMC7864989 DOI: 10.1038/s41467-021-21137-z] [Citation(s) in RCA: 29] [Impact Index Per Article: 7.3] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Download PDF] [Figures] [Journal Information] [Subscribe] [Scholar Register] [Received: 05/29/2020] [Accepted: 01/13/2021] [Indexed: 01/30/2023] Open
Abstract
One of the main challenges of next generation optical communication is to increase the available bandwidth while reducing the size, cost and power consumption of photonic integrated circuits. Graphene has been recently proposed to be integrated with silicon photonics to meet these goals because of its high mobility, fast carrier dynamics and ultra-broadband optical properties. We focus on graphene photodetectors for high speed datacom and telecom applications based on the photo-thermo-electric effect, allowing for direct optical power to voltage conversion, zero dark current, and ultra-fast operation. We report on a chemical vapour deposition graphene photodetector based on the photo-thermoelectric effect, integrated on a silicon waveguide, providing frequency response >65 GHz and optimized to be interfaced to a 50 Ω voltage amplifier for direct voltage amplification. We demonstrate a system test leading to direct detection of 105 Gbit s-1 non-return to zero and 120 Gbit s-1 4-level pulse amplitude modulation optical signals.
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Affiliation(s)
- S. Marconi
- grid.263145.70000 0004 1762 600XTecip Institute – Scuola Superiore Sant’Anna, Pisa, Italy
| | - M. A. Giambra
- Photonic Networks and Technologies Lab – CNIT, Pisa, Italy
| | - A. Montanaro
- Photonic Networks and Technologies Lab – CNIT, Pisa, Italy
| | - V. Mišeikis
- grid.25786.3e0000 0004 1764 2907Center for Nanotechnology Innovation @NEST - Istituto Italiano di Tecnologia, Pisa, Italy ,grid.25786.3e0000 0004 1764 2907Graphene Labs, Istituto Italiano di Tecnologia, Genova, Italy
| | - S. Soresi
- Photonic Networks and Technologies Lab – CNIT, Pisa, Italy ,Fondazione INPHOTEC, Pisa, Italy
| | - S. Tirelli
- Photonic Networks and Technologies Lab – CNIT, Pisa, Italy ,Fondazione INPHOTEC, Pisa, Italy
| | - P. Galli
- Nokia Solutions and Networks Italia, Vimercate, Italy
| | - F. Buchali
- grid.425792.fNokia Bell Labs, Stuttgart, Germany
| | - W. Templ
- grid.425792.fNokia Bell Labs, Stuttgart, Germany
| | - C. Coletti
- grid.25786.3e0000 0004 1764 2907Center for Nanotechnology Innovation @NEST - Istituto Italiano di Tecnologia, Pisa, Italy ,grid.25786.3e0000 0004 1764 2907Graphene Labs, Istituto Italiano di Tecnologia, Genova, Italy
| | - V. Sorianello
- Photonic Networks and Technologies Lab – CNIT, Pisa, Italy
| | - M. Romagnoli
- Photonic Networks and Technologies Lab – CNIT, Pisa, Italy
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27
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Singh P, Abedini Sohi P, Kahrizi M. Finite Element Modelling of Bandgap Engineered Graphene FET with the Application in Sensing Methanethiol Biomarker. SENSORS 2021; 21:s21020580. [PMID: 33467459 PMCID: PMC7830839 DOI: 10.3390/s21020580] [Citation(s) in RCA: 7] [Impact Index Per Article: 1.8] [Reference Citation Analysis] [Abstract] [Key Words] [MESH Headings] [Track Full Text] [Download PDF] [Figures] [Subscribe] [Scholar Register] [Received: 12/19/2020] [Revised: 01/10/2021] [Accepted: 01/12/2021] [Indexed: 12/31/2022]
Abstract
In this work, we have designed and simulated a graphene field effect transistor (GFET) with the purpose of developing a sensitive biosensor for methanethiol, a biomarker for bacterial infections. The surface of a graphene layer is functionalized by manipulation of its surface structure and is used as the channel of the GFET. Two methods, doping the crystal structure of graphene and decorating the surface by transition metals (TMs), are utilized to change the electrical properties of the graphene layers to make them suitable as a channel of the GFET. The techniques also change the surface chemistry of the graphene, enhancing its adsorption characteristics and making binding between graphene and biomarker possible. All the physical parameters are calculated for various variants of graphene in the absence and presence of the biomarker using counterpoise energy-corrected density functional theory (DFT). The device was modelled using COMSOL Multiphysics. Our studies show that the sensitivity of the device is affected by structural parameters of the device, the electrical properties of the graphene, and with adsorption of the biomarker. It was found that the devices made of graphene layers decorated with TM show higher sensitivities toward detecting the biomarker compared with those made by doped graphene layers.
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