From 1D to 3D: Tunable Sub-10 nm Gaps in Large Area Devices

Tunable sub-10 nm 1D nanogaps are fabricated based on nanoskiving. The electric field in different sized nanogaps is investigated theoretically and experimentally, yielding nonmonotonic dependence and an optimized gap-width (5 nm). 2D nanogap arrays are fabricated to pack denser gaps combining surface patterning techniques. Innovatively, 3D multistory nanogaps are built via a stacking procedure, processing higher integration, and much improved electric field.

A high performance, visible to mid-infrared photodetector based on graphene nanoribbons passivated with HfO2

Graphene has drawn tremendous attention as a promising candidate for electronic and optoelectronic applications owing to its extraordinary properties, such as broadband absorption and ultrahigh mobility. Nevertheless, the absence of a bandgap makes graphene unfavorable for digital electronic or photonic applications. Although patterning graphene into nanostructures with the quantum confinement effect is able to open a bandgap, devices based on these graphene nanostructures generally suffer from low carrier mobility and scattering losses. In this paper, we demonstrated that encapsulation of an atomic layer deposited high-quality HfO2 film will greatly enhance the carrier mobility and decrease the scattering losses of graphene nanoribbons, because this high-k dielectric layer weakens carrier coulombic interactions. In addition, a photodetector based on HfO2 layer capped graphene nanoribbons can cover broadband wavelengths from visible to mid-infrared at room temperature, exhibiting ∼10 times higher responsivity than the one without a HfO2 layer in the visible regime and ∼8 times higher responsivity in the mid-infrared regime. The method employed here could be potentially used as a general approach to improve the performance of graphene nanostructures for electronic and optoelectronic applications.

Charge transfer plasmon resonances across silver–molecule–silver junctions: estimating the terahertz conductance of molecules at near-infrared frequencies

Quantum plasmon resonances have been recently observed across molecular tunnel junctions. The present work extends these studies theoretically using a generalized space-charge corrected electromagnetic model for a wider range of molecules.

All-metal nanostructured substrates as subtractive color reflectors with near-perfect absorptance

All-metal structures consisting of nanoprotrusions on a bulk silver layer are theoretically investigated and shown to have narrow near-perfect absorption peaks (>95%). Within the constraints of constant nanostructure height (50 nm) and pitch (250 nm), these peaks are tunable across the visible spectrum by adjusting the width and shape of the protrusion. The peaks are caused by localized surface plasmon resonances leading to dissipation on the surface of the protrusions. As the peaks occur in the visible range, they produce subtractive colors with high saturation, in accordance with Schrödinger's rule for maximum pigment purity.

Accurate Modeling of Dark-Field Scattering Spectra of Plasmonic Nanostructures

Dark-field microscopy is a widely used tool for measuring the optical resonance of plasmonic nanostructures. However, current numerical methods for simulating the dark-field scattering spectra were carried out with plane wave illumination either at normal incidence or at an oblique angle from one direction. In actual experiments, light is focused onto the sample through an annular ring within a range of glancing angles. In this paper, we present a theoretical model capable of accurately simulating the dark-field light source with an annular ring. Simulations correctly reproduce a counterintuitive blue shift in the scattering spectra from gold nanodisks with a diameter beyond 140 nm. We believe that our proposed simulation method can be potentially applied as a general tool capable of simulating the dark-field scattering spectra of plasmonic nanostructures as well as other dielectric nanostructures with sizes beyond the quasi-static limit.

Second-Harmonic Generation from Sub-5 nm Gaps by Directed Self-Assembly of Nanoparticles onto Template-Stripped Gold Substrates

Strong field enhancement and confinement in plasmonic nanostructures provide suitable conditions for nonlinear optics in ultracompact dimensions. Despite these enhancements, second-harmonic generation (SHG) is still inefficient due to the centrosymmetric crystal structure of the bulk metals used, e.g., Au and Ag. Taking advantage of symmetry breaking at the metal surface, one could greatly enhance SHG by engineering these metal surfaces in regions where the strong electric fields are localized. Here, we combine top-down lithography and bottom-up self-assembly to lodge single rows of 8 nm diameter Au nanoparticles into trenches in a Au film. The resultant "double gap" structures increase the surface-to-volume ratio of Au colocated with the strong fields in ∼2 nm gaps to fully exploit the surface SHG of Au. Compared to a densely packed arrangement of AuNPs on a smooth Au film, the double gaps enhance SHG emission by 4200-fold to achieve an effective second-order susceptibility χ((2)) of 6.1 pm/V, making it comparable with typical nonlinear crystals. This patterning approach also allows for the scalable fabrication of smooth gold surfaces with sub-5 nm gaps and presents opportunities for optical frequency up-conversion in applications that require extreme miniaturization.

Large Area Directed Self-Assembly of Sub-10 nm Particles with Single Particle Positioning Resolution

Directed self-assembly of nanoparticles (DSA-n) holds great potential for device miniaturization in providing patterning resolution and throughput that exceed existing lithographic capabilities. Although nanoparticles excel at assembling into regular close-packed arrays, actual devices on the other hand are often laid out in sparse and complex configurations. Hence, the deterministic positioning of single or few particles at specific positions with low defect density is imperative. Here, we report an approach of DSA-n that satisfies these requirements with less than 1% defect density over micrometer-scale areas and at technologically relevant sub-10 nm dimensions. This technique involves a simple and robust process where a solvent film containing sub-10 nm gold nanoparticles climbs against gravity to coat a prepatterned template. Particles are placed individually into nanoscale cavities, or between nanoposts arranged in varying degrees of geometric complexity. Brownian dynamics simulations suggest a mechanism in which the particles are pushed into the template by a nanomeniscus at the drying front. This process enables particle-based self-assembly to access the sub-10 nm dimension, and for device fabrication to benefit from the wealth of chemically synthesized nanoparticles with unique material properties.

Room temperature Coulomb blockade effects in Au nanocluster/pentacene single electron transistors

Single-electron transistors incorporating single ∼1 nm gold nanocluster (AuNCs) and pentacene as a complex charge transport system have been used to study the quantum Coulomb blockade and its single electron tunnelling behaviour at room temperature (RT) (300 K). Monodisperse ultra-small (0.86 ± 0.30 nm) AuNCs were deposited by the tilted-target sputtering technique into 12 nm nanogaps fabricated by high-resolution e-beam lithography. Tunnelling resistance was modulated to ∼10(9) Ω by addition of a pentacene layer, allowing clear observation of quantum staircases and Coulomb oscillations with on/off current modulation ratio of ∼100 in RT current-voltage measurements. The electron addition energy and average quantized energy level spacing were found to be 282 and 80.4 meV, respectively, which are significantly larger than the thermal energy at 300 K (25.9 meV).

Directed Self-Assembly of sub-10 nm Particles: Role of Driving Forces and Template Geometry in Packing and Ordering

By comparing the magnitude of forces, a directed self-assembly mechanism has been suggested previously in which immersion capillary is the only driving force responsible for packing and ordering of nanoparticles, which occur only after the meniscus recedes. However, this mechanism is insufficient to explain vacancies formed by directed self-assembly at low particle concentrations. Utilizing experiments, and Monte Carlo and Brownian dynamics simulations, we developed a theoretical model based on a new proposed mechanism. In our proposed mechanism, the competing driving forces controlling the packing and ordering of sub-10 nm particles are (1) the repulsive component of the pair potential and (2) the attractive capillary forces, both of which apply at the contact line. The repulsive force arises from the high particle concentration, and the attractive force is caused by the surface tension at the contact line. Our theoretical model also indicates that the major part of packing and ordering of nanoparticles occurs before the meniscus recedes. Furthermore, utilizing our model, we are able to predict the various self-assembly configurations of particles as their size increases. These results lay out the interplay between driving forces during directed self-assembly, motivating a better template design now that we know the importance and the dominating driving forces in each regime of particle size.

Color generation via subwavelength plasmonic nanostructures

Recent developments in color filtering and display technologies have focused predominantly on high resolution, color vibrancy, high efficiency, and slim dimensions. To achieve these goals, metallic nanostructures have attracted extensive research interest due to their abilities to manipulate the properties of light through surface plasmon resonances. In this paper, we review recent representative developments in plasmonic color engineering at the nanoscale using subwavelength nanostructures, demonstrating their great potential in high-resolution and high-fidelity color rendering, spectral filtering applications, holography, three-dimensional stereoscopic imaging, etc.

High aspect ratio 10-nm-scale nanoaperture arrays with template-guided metal dewetting

We introduce an approach to fabricate ordered arrays of 10-nm-scale silica-filled apertures in a metal film without etching or liftoff. Using low temperature (<400°C) thermal dewetting of metal films guided by nano-patterned templates, apertures with aspect ratios up to 5:1 are demonstrated. Apertures form spontaneously during the thermal process without need for further processing. Although the phenomenon of dewetting has been well studied, this is the first demonstration of its use in the fabrication of nanoapertures in a spatially controllable manner. In particular, the achievement of 10-nm length-scale patterning at high aspect ratio with thermal dewetting is unprecedented. By varying the nanotemplate design, we show its strong influence over the positions and sizes of the nanoapertures. In addition, we construct a three-dimensional phase field model of metal dewetting on nano-patterned substrates. The simulation data obtained closely corroborates our experimental results and reveals new insights to template dewetting at the nanoscale. Taken together, this fabrication method and simulation model form a complete toolbox for 10-nm-scale patterning using template-guided dewetting that could be extended to a wide range of material systems and geometries.

Plasmon excitation on flat graphene by s-polarized beams using four-wave mixing

Graphene plasmons have received significant attention recently due to its attractive properties such as high spatial confinement and tunability. However, exciting plasmons on graphene effectively still remains a challenge owing to the large wave-vector mismatch between the optical beam in air and graphene plasmon. In this paper, we present a novel scheme capable of exciting graphene surface plasmons (GSPs) on a flat suspended graphene by using only s-polarized optical beams through four-wave mixing (FWM) process, where the GSPs fields were derived analytically based on the Green's function analysis, under the basis of momentum conservation. By incorporating the merits of nonlinear optics, the presented scheme avoids any patterning of either graphene or substrate. We believe that the proposed scheme potentially paves the way towards an efficient pure optical excitation, switching and modulation of GSPs for realizing graphene-based nano-photonic and optoelectronic integrated circuits.

Plasmonic color palettes for photorealistic printing with aluminum nanostructures

We introduce the first plasmonic palette utilizing color generation strategies for photorealistic printing with aluminum nanostructures. Our work expands the visible color space through spatially mixing and adjusting the nanoscale spacing of discrete nanostructures. With aluminum as the plasmonic material, we achieved enhanced durability and dramatically reduced materials costs with our nanostructures compared to commonly used plasmonic materials such as gold and silver, as well as size regimes scalable to higher-throughput approaches such as photolithography and nanoimprint lithography. These advances could pave the way toward a new generation of low-cost, high-resolution, plasmonic color printing with direct applications in security tagging, cryptography, and information storage.

Encapsulated annealing: enhancing the plasmon quality factor in lithographically-defined nanostructures

Lithography provides the precision to pattern large arrays of metallic nanostructures with varying geometries, enabling systematic studies and discoveries of new phenomena in plasmonics. However, surface plasmon resonances experience more damping in lithographically–defined structures than in chemically–synthesized nanoparticles of comparable geometries. Grain boundaries, surface roughness, substrate effects, and adhesion layers have been reported as causes of plasmon damping, but it is difficult to isolate these effects. Using monochromated electron energy–loss spectroscopy (EELS) and numerical analysis, we demonstrate an experimental technique that allows the study of these effects individually, to significantly reduce the plasmon damping in lithographically–defined structures. We introduce a method of encapsulated annealing that preserves the shape of polycrystalline gold nanostructures, while their grain-boundary density is reduced. We demonstrate enhanced Q–factors in lithographically–defined nanostructures, with intrinsic damping that matches the theoretical Drude damping limit.

A facile approach for screening isolated nanomagnetic behavior for bit-patterned media

Bit-patterned media (BPM) fabricated by the direct deposition of magnetic material onto prepatterned arrays of nanopillars is a promising approach for increasing magnetic recording of areal density. One of the key challenges of this approach is to identify and control the magnetic interaction between the bits (on top of the nanopillars) and the trench material between the pillars. Using independent techniques, including magnetic force microscopy, the variable-angle magneto-optic Kerr effect, and remanence curves, we were able to determine the presence and relative intensities of exchange and dipolar interactions in Co-Pd multilayer-based BPM fabricated by direct deposition. We found that for pitches of 30 nm or less, there were negligible exchange interactions, and the bits were found to be magnetically isolated. As we move to higher densities, the absence of exchange interactions indicates that direct deposition is a promising approach to BPM fabrication.

Template-induced structure transition in sub-10 nm self-assembling nanoparticles

We report on the directed self-assembly of sub-10 nm gold nanoparticles confined within a template comprising channels of gradually varying widths. When the colloidal lattice parameter is mismatched with the channel width, the nanoparticles rearrange and break their natural close-packed ordering, transiting through a range of structural configurations according to the constraints imposed by the channel. While much work has been done in assembling ordered configurations, studies of the transition regime between ordered states have been limited to microparticles under applied compression. Here, with coordinated experiments and Monte Carlo simulations we show that particles transit through a more diverse set of self-assembled configurations than observed for compressed systems. The new insight from this work could lead to the control and design of complex self-assembled patterns other than periodic arrays of ordered particles.

A circuit model for plasmonic resonators

Simple circuit models provide valuable insight into the properties of plasmonic resonators. Yet, it is unclear how the circuit elements can be extracted and connected in the model in an intuitive and accurate manner. Here, we present a detailed treatment for constructing such circuits based on energy and charge oscillation considerations. The accuracy and validity of this approach was demonstrated for a gold nanorod, and extended for a split-ring resonator with varying gap sizes, yielding good intuitive and quantitative agreement with full electromagnetic simulations.

Fabrication of suspended metal-dielectric-metal plasmonic nanostructures

Dipole nano-antennas have predominantly been investigated in their lateral orientation with their long axes in plane with a supporting substrate. However, the response of coupled dipole antennas oriented vertically to a supporting substrate has so far been out of experimental reach. Here, we present a self-aligned electron-beam lithography technique for fabricating such antennas consisting of metal nanostructures on both sides of a suspended silicon nitride membrane. This 30 nm thick membrane provides an ultra-smooth metal/dielectric interface and uniformly defines the antenna feed-gap size in an array of antennas. It is also a suitable substrate for probing the nano-antenna response with monochromated electron energy-loss spectroscopy (EELS) in a transmission electron microscope. We provide details of this double-sided patterning process, and show the excitation of hybridized plasmon modes in EELS with electrons directed along, and at an angle to, the antenna axis.

Direct excitation of dark plasmonic resonances under visible light at normal incidence

Dark plasmon resonance modes are optical modes that have small scattering cross-sections and are thus difficult to excite directly by light at normal incidence. In this paper, we propose to excite quadrupolar and higher-order modes with normal incident light (in the visible regime) on a continuous plasmonic metallic surface covering a dielectric pillar array, hence resulting in narrow-band perfect absorption. Different from the general electromagnetic means of inducing dark modes, our dark modes are due to charge densities that are electrically induced by the standing-wave resonance of current on the thin metal sidewall of pillars. This new means of exciting dark modes can significantly improve the excitation efficiency and also provides an easy way to excite strong higher-order modes.

Photoluminescence via gap plasmons between single silver nanowires and a thin gold film

In this work, we investigate the one-photon photoluminescence from a system consisting of an Ag nanowire on an Au film with a ~6 nm dielectric spacer that supports a localized resonance known as the gap plasmon mode. Although the Ag nanowire and Au film exhibit weak photoluminescence on their own, the combined system produces an enhanced PL emission. Our analysis reveals that the strong PL emission in this system was due to the enhanced laser absorption in, and PL emission from Au, with the Ag nanowire acting as an efficient antenna. The PL due to the gap mode is sensitive to the polarization of the laser excitation with respect to the nanowire orientation, and shows a clear dipolar emission profile. PL emission wavelengths were found to depend only on the nanowire width, and independent of its length. These observations were supported by simulation results indicating that gap plasmons are excited by light polarized transverse to the nanowire length.

Surface plasmon damping quantified with an electron nanoprobe

Fabrication and synthesis of plasmonic structures is rapidly moving towards sub-nanometer accuracy in control over shape and inter-particle distance. This holds the promise for developing device components based on novel, non-classical electro-optical effects. Monochromated electron energy-loss spectroscopy (EELS) has in recent years demonstrated its value as a qualitative experimental technique in nano-optics and plasmonic due to its unprecedented spatial resolution. Here, we demonstrate that EELS can also be used quantitatively, to probe surface plasmon kinetics and damping in single nanostructures. Using this approach, we present from a large (>50) series of individual gold nanoparticles the plasmon Quality factors and the plasmon Dephasing times, as a function of energy/frequency. It is shown that the measured general trend applies to regular particle shapes (rods, spheres) as well as irregular shapes (dendritic, branched morphologies). The combination of direct sub-nanometer imaging with EELS-based plasmon damping analysis launches quantitative nanoplasmonics research into the sub-nanometer realm.

Electron-energy loss study of nonlocal effects in connected plasmonic nanoprisms

We investigate the emergence of nonlocal effects in plasmonic nanostructures through electron-energy loss spectroscopy. To theoretically describe the spatial dispersion in the metal permittivity, we develop a full three-dimensional nonlocal hydrodynamic solution of Maxwell's equations in frequency domain that implements the electron beam as a line current source. We use our numerical approach to perform an exhaustive analysis of the impact of nonlocality in the plasmonic response of single triangular prisms and connected bowtie dimers. Our results demonstrate the complexity of the interplay between nonlocal and geometric effects taking place in these structures. We show the different sensitivities to both effects of the various plasmonic modes supported by these systems. Finally, we present an experimental electron-energy loss study on gold nanoprisms connected by bridges as narrow as 1.6 nm. The comparison with our theoretical predictions enables us to reveal in a phenomenological fashion the enhancement of absorption damping that occurs in these atomistic junctions due to quantum confinement and grain boundary electron scattering.

Free-standing sub-10 nm nanostencils for the definition of gaps in plasmonic antennas

Nanogaps between metal nanostructures are useful in localizing optical energy in plasmonic antennas, but are challenging to directly pattern. Patterning with the positive-tone polymethyl methacrylate (PMMA) resist causes an undesirable spread in nanogap dimensions. On the other hand, the negative-tone hydrogen silsesquioxane (HSQ) resist possesses the high resolution suited for the definition of nanogaps. However, it requires a hydrofluoric acid solution for liftoff, making it incompatible with the quartz or glass substrates used in optical devices. In this work, we created free-standing nanostencils in HSQ with sub-10 nm dimensions onto PMMA supports, which allow liftoff in organic solvents, thus extending this method to a broad range of substrate materials. The cross-sectional profiles of the nanogaps formed between the gold nanostructures were imaged in a transmission electron microscope and measured to be ~8 nm. We demonstrated the utility of this process in fabricating entire arrays of dimer nanostructures with sub-10 nm gaps. Using a surface enhanced Raman scattering setup, an order of magnitude increase in peak intensity was observed when the fields in the gap were resonantly excited compared to when the fields were localized at the corners of the nanostructures.

Fowler-Nordheim tunneling induced charge transfer plasmons between nearly touching nanoparticles

Reducing the gap between two metal nanoparticles down to atomic dimensions uncovers novel plasmon resonant modes. Of particular interest is a mode known as the charge transfer plasmon (CTP). This mode has been experimentally observed in touching nanoparticles, where charges can shuttle between the nanoparticles via a conductive path. However, the CTP mode for nearly touching nanoparticles has only been predicted theoretically to occur via direct tunneling when the gap is reduced to ~0.4 nm. Because of challenges in fabricating and characterizing gaps at these dimensions, experiments have been unable to provide evidence for this plasmon mode that is supported by tunneling. In this work, we consider an alternative tunneling process, that is, the well-known Fowler-Nordheim (FN) tunneling that occurs at high electric fields, and apply it for the first time in the theoretical investigation of plasmon resonances between nearly touching nanoparticles. This new approach relaxes the requirements on gap dimensions, and intuitively suggests that with a sufficiently high-intensity irradiation, the CTP can be excited via FN tunneling for a range of subnanometer gaps. The unique feature of FN tunneling induced CTP is the ability to turn on and off the charge transfer by varying the intensity of an external light source, and this could inspire the development of novel quantum devices.

Directed self-assembly of densely packed gold nanoparticles

Directing the self-assembly of sub-10-nm nanoparticles has been challenging because of the simultaneous requirements to achieve a densely packed monolayer and rearrange nanoparticles to assemble within a template. We met both requirements by separating the processes into two steps by first forming a monolayer of gold nanoparticles on a suitable liquid subphase of anisole and then transferring it edgewise onto a silicon substrate with a prepatterned template comprising nanoposts and nanogratings. Doing so resulted in nanoparticles that assembled in commensuration with the template design while exhibiting appreciable template-induced strain. These dense arrays of nanostructures could either be directly applied or used as lithographic masks in applications for light collection, chemical sensing, and data storage.

Plasmon-modulated photoluminescence of individual gold nanostructures

In this work, we performed a systematic study on the photoluminescence and scattering spectra of individual gold nanostructures that were lithographically defined. We identify the role of plasmons in photoluminescence as modulating the energy transfer between excited electrons and emitted photons. By comparing photoluminescence spectra with scattering spectra, we observed that the photoluminescence of individual gold nanostructures showed the same dependencies on shape, size, and plasmon coupling as the particle plasmon resonances. Our results provide conclusive evidence that the photoluminescence in gold nanostructures indeed occurs via radiative damping of plasmon resonances driven by excited electrons in the metal itself. Moreover, we provide new insight on the underlying mechanism based on our analysis of a reproducible blue shift of the photoluminescence peak (relative to the scattering peak) and observation of an incomplete depolarization of the photoluminescence.

Printing colour at the optical diffraction limit

The highest possible resolution for printed colour images is determined by the diffraction limit of visible light. To achieve this limit, individual colour elements (or pixels) with a pitch of 250 nm are required, translating into printed images at a resolution of ∼100,000 dots per inch (d.p.i.). However, methods for dispensing multiple colourants or fabricating structural colour through plasmonic structures have insufficient resolution and limited scalability. Here, we present a non-colourant method that achieves bright-field colour prints with resolutions up to the optical diffraction limit. Colour information is encoded in the dimensional parameters of metal nanostructures, so that tuning their plasmon resonance determines the colours of the individual pixels. Our colour-mapping strategy produces images with both sharp colour changes and fine tonal variations, is amenable to large-volume colour printing via nanoimprint lithography, and could be useful in making microimages for security, steganography, nanoscale optical filters and high-density spectrally encoded optical data storage.

Nanoplasmonics: classical down to the nanometer scale

We push the fabrication limit of gold nanostructures to the exciting sub-nanometer regime, in which light-matter interactions have been anticipated to be strongly affected by the quantum nature of electrons in metals. Doing so allows us to (1) evaluate the validity of classical electrodynamics to describe plasmonic effects at this length scale and (2) witness the gradual (instead of sudden) evolution of plasmon modes when two gold nanoprisms are brought into contact. Using electron energy-loss spectroscopy and transmission electron microscope imaging, we investigated nanoprisms separated by gaps of only 0.5 nm and connected by conductive bridges as narrow as 3 nm. Good agreement of our experimental results with electromagnetic calculations and LC circuit models evidence the gradual evolution of the plasmonic resonances toward the quantum coupling regime. We demonstrate that down to the nanometer length scales investigated classical electrodynamics still holds, and a full quantum description of electrodynamics phenomena in such systems might be required only when smaller gaps of a few angstroms are considered. Our results show also the gradual onset of the charge-transfer plasmon mode and the evolution of the dipolar bright mode into a 3λ/2 mode as one literally bridges the gap between two gold nanoprisms.

Direct and reliable patterning of plasmonic nanostructures with sub-10-nm gaps

Nanoscale gaps in metal films enable strong field enhancements in plasmonic structures. However, the reliable fabrication of ultrasmall gaps (<10 nm) for real applications is still challenging. In this work, we report a method to directly and reliably fabricate sub-10-nm gaps in plasmonic structures without restrictions on pattern design. This method is based on a lift-off process using high-resolution electron-beam lithography with a negative-tone hydrogen silsesquioxane (HSQ) resist, where the resulting nanogap size is determined by the width of the patterned HSQ structure, which could be written at less than 10 nm. With this method, we fabricated densely packed gold nanostructures of varying geometries separated by ultrasmall gaps. By controlling structure sizes during lithography with nanometer precision, the plasmon resonances of the resulting patterns could be accurately tuned. Optical and surface-enhanced Raman scattering (SERS) measurements on the patterned structures show that this technique has promising applications in the fabrication of passively tunable plasmonic nanostructures with ultrasmall gaps.

Fabrication and characterization of bit-patterned media beyond 1.5 Tbit/in2

We fabricated bit-patterned media (BPM) at densities as high as 3.3 Tbit/in(2) using a process consisting of high-resolution electron-beam lithography followed directly by magnetic film deposition. By avoiding pattern transfer processes such as etching and liftoff that inherently reduce pattern fidelity, the resolution of the final pattern was kept close to that of the lithographic step. Magnetic force microscopy (MFM) showed magnetic isolation of the patterned bits at 1.9 Tbit/in(2), which was close to the resolution limit of the MFM. The method presented will enable studies on magnetic bits packed at ultra-high densities, and can be combined with other scalable patterning methods such as templated self-assembly and nanoimprint lithography for high-volume manufacturing.

Controlled collapse of high-aspect-ratio nanostructures

Capillary-force-induced collapse of high-aspect-ratio (HAR) micro- and nanostructures is common in the evaporation-drying process and a number of applications based on the collapse have been proposed. However, the collapse of small HAR structures is usually uncontrollable, which has prevented it from being used in engineering applications. Here, the collapse of 10-nm-scale structures is separately controlled through engineering an asymmetric cross section, curvature, and tilt in the structures prior to collapse. It is shown that this deterministic-collapse approach can be used to create linear structures from collapsed pillars and planar rectangular structures from collapsed fencelike linear structures, and can further be used to create small gaps by controlling the collapse of nearby structures. These techniques could be used to improve the performance of beam-based lithography methods for certain types of patterns by increasing throughput and resolution, reducing the proximity effect, and reducing irradiation damage. In addition, this controlled-collapse concept provides a possible platform with which to study mechanical behavior at the 10-nm scale.

Electrochemical development of hydrogen silsesquioxane by applying an electrical potential

We present a new method for developing hydrogen silsesquioxane (HSQ) by using electrical potentials and deionized water. Nested-L test structures with a pitch as small as 9 nm were developed using this electrochemical technique in saline solution without adding hydroxyl ions. Furthermore, we showed that high-resolution structures can be electrochemically developed in deionized water alone. Electrochemical development is controlled by the applied voltage and may overcome several of the limitations discussed for alkaline developers, such as poor hydroxyl anion diffusion and charge repulsion effects in small trenches.

Enhanced ordering in gold nanoparticles self-assembly through excess free ligands

Self-assembly of nanometer-sized particles is an elegant and economical approach to achieve dense patterns over large areas beyond the resolution and throughput capabilities of electron-beam lithography. In this paper, we present results of self-assembly of oleylamine-capped gold nanoparticles with 8.0 ± 0.3 nm diameter into densely packed and well-ordered monolayers with center-to-center distance of ∼11 nm. Self-assembly was done in a Langmuir-Blodgett trough and picked up onto Si substrates. The nanoparticles undesirably assembled within micrometer-sized "droplets" that were organic in nature. However, within these droplets, we observed that the addition of the excess ligand, oleylamine, drastically enhanced the self-assembly of the nanoparticles into monolayers with near-perfect ordering. This approach has the potential use in templated self-assembly of nanoparticles for rearranging poorly ordered assembly into a commensurate prepatterned substrate.

High-resolution mapping of electron-beam-excited plasmon modes in lithographically defined gold nanostructures

We demonstrate the use of high-resolution electron beam lithography to fabricate complex nanocavities with nanometric spatial and positional control. The plasmon modes of these nanostructures are then mapped using electron energy-loss spectroscopy in a scanning transmission electron microsope. This powerful combination of patterning and plasmon mapping provides direct experimental verification to theoretical predictions of plasmon hybridization theory in complex metal nanostructures and allows the determination of the full mode spectrum of such cavities.

Complex self-assembled patterns using sparse commensurate templates with locally varying motifs

Templated self-assembly of block copolymer thin films can generate periodic arrays of microdomains within a sparse template, or complex patterns using 1:1 templates. However, arbitrary pattern generation directed by sparse templates remains elusive. Here, we show that an array of carefully spaced and shaped posts, prepared by electron-beam patterning of an inorganic resist, can be used to template complex patterns in a cylindrical-morphology block copolymer. We use two distinct methods: making the post spacing commensurate with the equilibrium periodicity of the polymer, which controls the orientation of the linear features, and making local changes to the shape or distribution of the posts, which direct the formation of bends, junctions and other aperiodic features in specific locations. The first of these methods permits linear patterns to be directed by a sparse template that occupies only a few percent of the area of the final self-assembled pattern, while the second method can be used to selectively and locally template complex linear patterns.

Graphoepitaxy of self-assembled block copolymers on two-dimensional periodic patterned templates

Self-assembling materials are the building blocks of bottom-up nanofabrication processes, but they need to be templated to impose long-range order and eliminate defects. In this work, the self-assembly of a thin film of a spherical-morphology block copolymer is templated using an array of nanoscale topographical elements that act as surrogates for the minority domains of the block copolymer. The orientation and periodicity of the resulting array of spherical microdomains are governed by the commensurability between the block copolymer period and the template period and is accurately described by a free-energy model. This method, which forms high-spatial-frequency arrays using a lower-spatial-frequency template, will be useful in nanolithography applications such as the formation of high-density microelectronic structures.

Optical properties of superconducting nanowire single-photon detectors

We measured the optical absorptance of superconducting nanowire single photon detectors. We found that 200-nm-pitch, 50%-fill-factor devices had an average absorptance of 21% for normally-incident front-illumination of 1.55-microm-wavelength light polarized parallel to the nanowires, and only 10% for perpendicularly-polarized light. We also measured devices with lower fill-factors and narrower wires that were five times more sensitive to parallel-polarized photons than perpendicular-polarized photons. We developed a numerical model that predicts the absorptance of our structures. We also used our measurements, coupled with measurements of device detection efficiencies, to determine the probability of photon detection after an absorption event. We found that, remarkably, absorbed parallel-polarized photons were more likely to result in detection events than perpendicular-polarized photons, and we present a hypothesis that qualitatively explains this result. Finally, we also determined the enhancement of device detection efficiency and absorptance due to the inclusion of an integrated optical cavity over a range of wavelengths (700-1700 nm) on a number of devices, and found good agreement with our numerical model.

781 Mbit/s photon-counting optical communications using a superconducting nanowire detector

We demonstrate 1550 nm photon-counting optical communications with a NbN-nanowire superconducting single-photon detector. Source data are encoded with a rate-1/2 forward-error correcting code and transmitted by use of 32-ary pulse-position modulation at 5 and 10 GHz slot rates. Error-free performance is obtained with -0.5 detected photon per source bit at a source data rate of 781 Mbits/s. To the best of our knowledge, this is the highest reported data rate for a photon-counting receiver.

Nanowire single-photon detector with an integrated optical cavity and anti-reflection coating

We have fabricated and tested superconducting single-photon detectors and demonstrated detection efficiencies of 57% at 1550-nm wavelength and 67% at 1064 nm. In addition to the peak detection efficiency, a median detection efficiency of 47.7% was measured over 132 devices at 1550 nm. These measurements were made at 1.8K, with each device biased to 97.5% of its critical current. The high detection efficiencies resulted from the addition of an optical cavity and anti-reflection coating to a nanowire photodetector, creating an integrated nanoelectrophotonic device with enhanced performance relative to the original device. Here, the testing apparatus and the fabrication process are presented. The detection efficiency of devices before and after the addition of optical elements is also reported.