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Ferré-Borrull J, Rahman MM, Pallarès J, Marsal LF. Tuning nanoporous anodic alumina distributed-Bragg reflectors with the number of anodization cycles and the anodization temperature. NANOSCALE RESEARCH LETTERS 2014; 9:416. [PMID: 25177225 PMCID: PMC4147935 DOI: 10.1186/1556-276x-9-416] [Citation(s) in RCA: 3] [Impact Index Per Article: 0.3] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Received: 05/16/2014] [Accepted: 07/16/2014] [Indexed: 05/09/2023]
Abstract
The influence of the anodization temperature and of the number of applied voltage cycles on the photonic properties of nanoporous anodic alumina-based distributed-Bragg reflectors obtained by cyclic voltage anodization is analyzed. Furthermore, the possibility of tuning the stop band central wavelength with a pore-widening treatment after anodization and its combined effect with temperature has been studied by means of scanning electron microscopy and spectroscopic transmittance measurements. The spectra for samples measured right after anodization show irregular stop bands, which become better defined with the pore widening process. The results show that with 50 applied voltage cycles, stop bands are obtained and that increasing the number of cycles contributes to enhancing the photonic stop bands (specially for the case of the as-produced samples) but at the expense of increased scattering losses. The anodization temperature is a crucial factor in the tuning of the photonic stop bands, with a linear rate of 42 nm/°C. The pore widening permits further tuning to reach stop bands with central wavelengths as low as 500 nm. Furthermore, the results also show that applying different anodization temperatures does not have a great influence in the pore-widening rate or in the photonic stop band width.
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Rahman MM, Marsal LF, Pallarès J, Ferré-Borrull J. Tuning the photonic stop bands of nanoporous anodic alumina-based distributed bragg reflectors by pore widening. ACS APPLIED MATERIALS & INTERFACES 2013; 5:13375-81. [PMID: 24283602 DOI: 10.1021/am4043118] [Citation(s) in RCA: 19] [Impact Index Per Article: 1.7] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 05/24/2023]
Abstract
A distributed Bragg reflector based on nanoporous anodic alumina was fabricated using an innovative cyclic anodization voltage approach, which resulted in an in-depth modulation of the pore geometry and the refractive index. The effect of a pore-widening wet-etching step on the structure's photonic stop-band properties was studied. From transmittance measurements, it was shown that by changing the pore-widening time it is possible to modulate the photonic stop band in the range of visible to near infrared. With the help of a theoretical model, we were able to obtain information about the evolution with the pore widening of the material effective refractive indexes. This opens the possibility of obtaining several optoelectronic devices based on nanoporous anodic alumina.
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Macias G, Hernández-Eguía LP, Ferré-Borrull J, Pallares J, Marsal LF. Gold-coated ordered nanoporous anodic alumina bilayers for future label-free interferometric biosensors. ACS APPLIED MATERIALS & INTERFACES 2013; 5:8093-8. [PMID: 23910449 DOI: 10.1021/am4020814] [Citation(s) in RCA: 40] [Impact Index Per Article: 3.6] [Reference Citation Analysis] [Abstract] [MESH Headings] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 05/24/2023]
Abstract
A cost-effective label-free optical biosensor based on gold-coated self-ordered nanoporous anodic alumina bilayers is presented. The structure is formed by two uniform nanoporous layers of different porosity (i.e., a top layer with large pores and a bottom layer with smaller pores). Each layer presents uniform pore size, regular pore distribution, and regular diameter along its pore length. To increase and improve the output sensing signals, a thin gold layer on the top surface was deposited. The gold layer increases the refractive index contrast between the nanoporous alumina layer and the analytical aqueous solution, and it results in a greater contrast in the interferometric spectrum and a higher sensitivity of the structure. From this structurally engineered architecture, the resulting reflectivity spectrum shows a complex series of Fabry-Pérot interference fringes, which was analyzed by the reflective interferometric Fourier transform spectroscopy (RIFTS) method. To determine the performance of this structure for biosensing applications, we tested bovine serum albumin (BSA) as the target protein. The results show a significant enhancement of the RIFTS peak intensity and position when a gold layer is on the top surface.
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Alba M, Pazos-Perez N, Vaz B, Formentin P, Tebbe M, Correa-Duarte MA, Granero P, Ferré-Borrull J, Alvarez R, Pallares J, Fery A, de Lera AR, Marsal LF, Alvarez-Puebla RA. Innenrücktitelbild: Macroscale Plasmonic Substrates for Highly Sensitive Surface-Enhanced Raman Scattering (Angew. Chem. 25/2013). Angew Chem Int Ed Engl 2013. [DOI: 10.1002/ange.201304231] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/08/2022]
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Alba M, Pazos-Perez N, Vaz B, Formentin P, Tebbe M, Correa-Duarte MA, Granero P, Ferré-Borrull J, Alvarez R, Pallares J, Fery A, de Lera AR, Marsal LF, Alvarez-Puebla RA. Inside Back Cover: Macroscale Plasmonic Substrates for Highly Sensitive Surface-Enhanced Raman Scattering (Angew. Chem. Int. Ed. 25/2013). Angew Chem Int Ed Engl 2013. [DOI: 10.1002/anie.201304231] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/10/2022]
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Alba M, Pazos-Perez N, Vaz B, Formentin P, Tebbe M, Correa-Duarte MA, Granero P, Ferré-Borrull J, Alvarez R, Pallares J, Fery A, de Lera AR, Marsal LF, Alvarez-Puebla RA. Macroscale Plasmonic Substrates for Highly Sensitive Surface-Enhanced Raman Scattering. Angew Chem Int Ed Engl 2013. [DOI: 10.1002/ange.201302285] [Citation(s) in RCA: 12] [Impact Index Per Article: 1.1] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/11/2022]
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Alba M, Pazos-Perez N, Vaz B, Formentin P, Tebbe M, Correa-Duarte MA, Granero P, Ferré-Borrull J, Alvarez R, Pallares J, Fery A, de Lera AR, Marsal LF, Alvarez-Puebla RA. Macroscale plasmonic substrates for highly sensitive surface-enhanced Raman scattering. Angew Chem Int Ed Engl 2013; 52:6459-63. [PMID: 23630080 PMCID: PMC3749443 DOI: 10.1002/anie.201302285] [Citation(s) in RCA: 66] [Impact Index Per Article: 6.0] [Reference Citation Analysis] [Track Full Text] [Download PDF] [Figures] [Journal Information] [Subscribe] [Scholar Register] [Received: 03/18/2013] [Indexed: 11/10/2022]
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Rahman MM, Garcia-Caurel E, Santos A, Marsal LF, Pallarès J, Ferré-Borrull J. Effect of the anodization voltage on the pore-widening rate of nanoporous anodic alumina. NANOSCALE RESEARCH LETTERS 2012; 7:474. [PMID: 22916731 PMCID: PMC3460793 DOI: 10.1186/1556-276x-7-474] [Citation(s) in RCA: 14] [Impact Index Per Article: 1.2] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Received: 04/30/2012] [Accepted: 07/26/2012] [Indexed: 05/24/2023]
Abstract
A detailed study of the pore-widening rate of nanoporous anodic alumina layers as a function of the anodization voltage was carried out. The study focuses on samples produced under the same electrolyte and concentration but different anodization voltages within the self-ordering regime. By means of ellipsometry-based optical characterization, it is shown that in the pore-widening process, the porosity increases at a faster rate for lower anodization voltages. This opens the possibility of obtaining three-dimensional nanostructured nanoporous anodic alumina with controlled thickness and refractive index of each layer, and with a refractive index difference of up to 0.24 between layers, for samples produced with oxalic acid electrolytes.
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Santos A, Macías G, Ferré-Borrull J, Pallarès J, Marsal LF. Photoluminescent enzymatic sensor based on nanoporous anodic alumina. ACS APPLIED MATERIALS & INTERFACES 2012; 4:3584-8. [PMID: 22734648 DOI: 10.1021/am300648j] [Citation(s) in RCA: 31] [Impact Index Per Article: 2.6] [Reference Citation Analysis] [Abstract] [MESH Headings] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 05/24/2023]
Abstract
Herein, we present a smart enzymatic sensor based on nanoporous anodic alumina (NAA) and its photoluminescence (PL) in the UV-visible range. The as-produced structure of NAA is functionalized and activated in order to perform the enzyme immobilization in a controlled manner. The whole process is monitored through the PL spectrum and each stage is characterized by an exclusive barcode, which is associated with the PL oscillations. This characteristic property allows us to calculate the change in the effective optical thickness that takes place after each stage. This makes it possible to accurately detect and quantify the immobilized enzyme within the NAA structure. Finally, the NAA geometry (i.e., the pore length and its diameter) is optimized to improve the enzyme immobilization and its detection inside the pores. This enzymatic sensor can give quick and accurate measurements of enzyme levels, what is crucial in clinical enzymology to prevent and detect diseases at their primary stage.
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Santos A, Balderrama VS, Alba M, Formentín P, Ferré-Borrull J, Pallarès J, Marsal LF. Tunable Fabry-Pérot interferometer based on nanoporous anodic alumina for optical biosensing purposes. NANOSCALE RESEARCH LETTERS 2012; 7:370. [PMID: 22759928 PMCID: PMC3413587 DOI: 10.1186/1556-276x-7-370] [Citation(s) in RCA: 16] [Impact Index Per Article: 1.3] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Received: 04/30/2012] [Accepted: 07/03/2012] [Indexed: 05/28/2023]
Abstract
Here, we present a systematic study about the effect of the pore length and its diameter on the specular reflection in nanoporous anodic alumina. As we demonstrate, the specular reflection can be controlled at will by structural tuning (i.e., by designing the pore geometry). This makes it possible to produce a wide range of Fabry-Pérot interferometers based on nanoporous anodic alumina, which are envisaged for developing smart and accurate optical sensors in such research fields as biotechnology and medicine. Additionally, to systematize the responsiveness to external changes in optical sensors based on nanoporous anodic alumina, we put forward a barcode system based on the oscillations in the specular reflection.
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Santos A, Alba M, Rahman MM, Formentín P, Ferré-Borrull J, Pallarès J, Marsal LF. Structural tuning of photoluminescence in nanoporous anodic alumina by hard anodization in oxalic and malonic acids. NANOSCALE RESEARCH LETTERS 2012; 7:228. [PMID: 22515214 PMCID: PMC3413565 DOI: 10.1186/1556-276x-7-228] [Citation(s) in RCA: 16] [Impact Index Per Article: 1.3] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Received: 10/17/2011] [Accepted: 04/19/2012] [Indexed: 05/07/2023]
Abstract
We report on an exhaustive and systematic study about the photoluminescent properties of nanoporous anodic alumina membranes fabricated by the one-step anodization process under hard conditions in oxalic and malonic acids. This optical property is analysed as a function of several parameters (i.e. hard anodization voltage, pore diameter, membrane thickness, annealing temperature and acid electrolyte). This analysis makes it possible to tune the photoluminescent behaviour at will simply by modifying the structural characteristics of these membranes. This structural tuning ability is of special interest in such fields as optoelectronics, in which an accurate design of the basic nanostructures (e.g. microcavities, resonators, filters, supports, etc.) yields the control over their optical properties and, thus, upon the performance of the nanodevices derived from them (biosensors, interferometers, selective filters, etc.).
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Santos A, Balderrama VS, Alba M, Formentín P, Ferré-Borrull J, Pallarès J, Marsal LF. Nanoporous anodic alumina barcodes: toward smart optical biosensors. ADVANCED MATERIALS (DEERFIELD BEACH, FLA.) 2012; 24:1050-4. [PMID: 22266815 DOI: 10.1002/adma.201104490] [Citation(s) in RCA: 40] [Impact Index Per Article: 3.3] [Reference Citation Analysis] [Abstract] [MESH Headings] [Track Full Text] [Subscribe] [Scholar Register] [Received: 11/23/2011] [Revised: 12/19/2011] [Indexed: 05/24/2023]
Abstract
Toward a smart optical biosensor based on nanoporous anodic alumina (NAA): by modifying the pore geometry in nanoporous anodic alumina we are able to change the effective medium at will and tune the photoluminescence of NAA. The oscillations in the PL spectrum are converted into exclusive barcodes, which are useful for developing optical biomedical sensors in the UV-Visible region.
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Santos A, Montero-Moreno JM, Bachmann J, Nielsch K, Formentín P, Ferré-Borrull J, Pallarès J, Marsal LF. Understanding pore rearrangement during mild to hard transition in bilayered porous anodic alumina membranes. ACS APPLIED MATERIALS & INTERFACES 2011; 3:1925-1932. [PMID: 21539376 DOI: 10.1021/am200139k] [Citation(s) in RCA: 16] [Impact Index Per Article: 1.2] [Reference Citation Analysis] [Abstract] [MESH Headings] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 05/30/2023]
Abstract
We present a systematic study about the influence of the main anodization parameters (i.e., anodization voltage ramp and hard anodization voltage) on the pore rearrangement in nanoporous anodic alumina during mild to hard anodization regime transition. To cover the ranges between mild and hard regimes, the anodization parameters were each set to three levels (i.e., 0.5, 1.0, and 2.0 V s(-1) for the anodization voltage ramp and 80, 110, and 140 V for the hard anodization voltage). To the best of our knowledge, this is the first rigorous study about this phenomenon, which is quantified indirectly by means of a nickel electrodeposition. It is found that pore rearrangement takes place in a relatively random manner. Large areas of pores remain blocked when the anodization regime changes from mild to hard and, under certain anodization conditions, a pore branching takes place based on the self-ordering mechanism at work during anodization. Furthermore, it is statistically demonstrated by means of a design of experiments strategy that the effect of the anodization voltage ramp on the pore rearrangement is practically negligible in contrast to the hard anodization voltage effect. It is expected that this study gives a better understanding of structural changes in nanoporous anodic alumina when anodization is switched from mild to hard regime. Furthermore, the resulting nanostructures could be used to develop a wide range of nanodevices (e.g., waveguides, 1D photonic crystals, Fabry-Pérot interferometers, hybrid mosaic arrays of nanowires).
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Santos A, Formentín P, Pallarès J, Ferré-Borrull J, Marsal LF. Structural engineering of nanoporous anodic alumina funnels with high aspect ratio. J Electroanal Chem (Lausanne) 2011. [DOI: 10.1016/j.jelechem.2011.02.005] [Citation(s) in RCA: 46] [Impact Index Per Article: 3.5] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/16/2022]
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Rahman MM, Ferré-Borrull J, Pallarès J, Marsal LF. Photonic stop bands of two-dimensional quasi-random structures based on macroporous silicon. ACTA ACUST UNITED AC 2011. [DOI: 10.1002/pssc.201000415] [Citation(s) in RCA: 5] [Impact Index Per Article: 0.4] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/09/2022]
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41
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Cos J, Ferré-Borrull J, Pallarès J, Marsal LF. Tunable waveguides based on liquid crystal-infiltrated silicon photonic crystals. ACTA ACUST UNITED AC 2011. [DOI: 10.1002/pssc.201000414] [Citation(s) in RCA: 4] [Impact Index Per Article: 0.3] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/06/2022]
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Ferré-Borrull J, Garcia-Caurel E, Olaizola S, Kral Z, Pallarès J, Marsal L. Characterization of photonic structures using visible and infrared polarimetry. EPJ WEB OF CONFERENCES 2010. [DOI: 10.1051/epjconf/20100502002] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/14/2022] Open
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Palacios R, Formentín P, Ferré-Borrull J, Pallarés J, Marsal LF. Polymer nanopillars using self-ordered nanoporous alumina templates. ACTA ACUST UNITED AC 2009. [DOI: 10.1002/pssc.200881057] [Citation(s) in RCA: 6] [Impact Index Per Article: 0.4] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/10/2022]
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Santos A, Vojkuvka L, Pallarés J, Ferré-Borrull J, Marsal LF. Cobalt and Nickel Nanopillars on Aluminium Substrates by Direct Current Electrodeposition Process. NANOSCALE RESEARCH LETTERS 2009; 4:1021-1028. [PMID: 20596338 PMCID: PMC2894324 DOI: 10.1007/s11671-009-9351-5] [Citation(s) in RCA: 8] [Impact Index Per Article: 0.5] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Received: 03/26/2009] [Accepted: 05/14/2009] [Indexed: 05/23/2023]
Abstract
A fast and cost-effective technique is applied for fabricating cobalt and nickel nanopillars on aluminium substrates. By applying an electrochemical process, the aluminium oxide barrier layer is removed from the pore bottom tips of nanoporous anodic alumina templates. So, cobalt and nickel nanopillars are fabricated into these templates by DC electrodeposition. The resulting nanostructure remains on the aluminium substrate. In this way, this method could be used to fabricate a wide range of nanostructures which could be integrated in new nanodevices.
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Sancho-Parramon J, Ferré-Borrull J, Bosch S, Ferrara MC. Use of information on the manufacture of samples for the optical characterization of multilayers through a global optimization. APPLIED OPTICS 2003; 42:1325-1329. [PMID: 12638889 DOI: 10.1364/ao.42.001325] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 05/24/2023]
Abstract
We present a procedure for the optical characterization of thin-film stacks from spectrophotometric data. The procedure overcomes the intrinsic limitations arising in the numerical determination of many parameters from reflectance or transmittance spectra measurements. The key point is to use all the information available from the manufacturing process in a single global optimization process. The method is illustrated by a case study of solgel applications.
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Ristau D, Günster S, Bosch S, Duparré A, Masetti E, Ferré-Borrull J, Kiriakidis G, Peiró F, Quesnel E, Tikhonravov A. Ultraviolet optical and microstructural properties of MgF2 and LaF3 coatings deposited by ion-beam sputtering and boat and electron-beam evaporation. APPLIED OPTICS 2002; 41:3196-3204. [PMID: 12064402 DOI: 10.1364/ao.41.003196] [Citation(s) in RCA: 18] [Impact Index Per Article: 0.8] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 05/23/2023]
Abstract
Single layers of MgF2 and LaF3 were deposited upon superpolished fused-silica and CaF2 substrates by ion-beam sputtering (IBS) as well as by boat and electron beam (e-beam) evaporation and were characterized by a variety of complementary analytical techniques. Besides undergoing photometric and ellipsometric inspection, the samples were investigated at 193 and 633 nm by an optical scatter measurement facility. The structural properties were assessed with atomic-force microscopy, x-ray diffraction, TEM techniques that involved conventional thinning methods for the layers. For measurement of mechanical stress in the coatings, special silicon substrates were coated and analyzed. The dispersion behavior of both deposition materials, which was determined on the basis of various independent photometric measurements and data reduction techniques, is in good agreement with that published in the literature and with the bulk properties of the materials. The refractive indices of the MgF2 coatings ranged from 1.415 to 1.440 for the wavelength of the ArF excimer laser (193 nm) and from 1.435 to 1.465 for the wavelength of the F2 excimer laser (157 nm). For single layers of LaF3 the refractive indices extended from 1.67 to 1.70 at 193 nm to approximately 1.80 at 157 nm. The IBS process achieves the best homogeneity and the lowest surface roughness values (close to 1 nm(rms)) of the processes compared in the joint experiment. In contrast to MgF2 boat and e-beam evaporated coatings, which exhibit tensile mechanical stress ranging from 300 to 400 MPa, IBS coatings exhibit high compressive stress of as much as 910 MPa. A similar tendency was found for coating stress in LaF3 single layers. Experimental results are discussed with respect to the microstructural and compositional properties as well as to the surface topography of the coatings.
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Ferré-Borrull J, Steinert J, Duparré A. Extending the capabilities of scanning probe microscopy for microroughness analysis in surface engineering. SURF INTERFACE ANAL 2002. [DOI: 10.1002/sia.1169] [Citation(s) in RCA: 6] [Impact Index Per Article: 0.3] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/10/2022]
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Ferré-Borrull J, Duparre A, Quesnel E. Procedure to characterize microroughness of optical thin films: application to ion-beam-sputtered vacuum-ultraviolet coatings. APPLIED OPTICS 2001; 40:2190-2199. [PMID: 18357227 DOI: 10.1364/ao.40.002190] [Citation(s) in RCA: 12] [Impact Index Per Article: 0.5] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 05/26/2023]
Abstract
A method for characterizing the microroughness of samples in optical coating technology is developed. Measurements over different spatial-frequency ranges are composed into a single power spectral density (PSD) covering a large bandwidth. This is followed by the extraction of characteristic parameters through fitting of the PSD to a suitable combination of theoretical models. The method allows us to combine microroughness measurements performed with different techniques, and the fitting procedure can be adapted to any behavior of a combined PSD. The method has been applied to a set of ion-beam-sputtered fluoride vacuum-UV coatings with increasing number of alternative low- and high-index layers. Conclusions about roughness development and microstructural growth are drawn.
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Bosch S, Ferré-Borrull J. Geometrical-numerical approach to diffraction phenomena. OPTICS LETTERS 2001; 26:181-183. [PMID: 18033540 DOI: 10.1364/ol.26.000181] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 05/25/2023]
Abstract
The calculation of diffracted fields is considered by means of a geometrical analysis of the incoming wave into semiperiodic zones in the aperture plane, followed by a numerical process for addition of the contributions corresponding to the semiperiodic zones. This general approach constitutes a novel interpretation of diffraction phenomena that permits exact evaluation of the mathematical expressions of diffraction theory and overcomes the limitations of any approximation. The method is illustrated by analysis of two important configuration in optics: the pinhole camera, for which we deduce the optimum radius for imaging, and the diffraction of a spherical converging wave through a circular aperture, from which we determine the limit of the validity of the Fraunhofer approximation (i.e., of the Airy pattern) and the influence of the obliquity factor.
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Ferré-Borrull J, Duparré A, Quesnel E. Roughness and Light Scattering of Ion-Beam-Sputtered Fluoride Coatings for 193 nm. APPLIED OPTICS 2000; 39:5854-5864. [PMID: 18354589 DOI: 10.1364/ao.39.005854] [Citation(s) in RCA: 5] [Impact Index Per Article: 0.2] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 05/26/2023]
Abstract
Scattering characteristics of multilayer fluoride coatings for 193 nm deposited by ion beam sputtering and the related interfacial roughnesses are investigated. Quarter- and half-wave stacks of MgF(2) and LaF(3) with increasing thickness are deposited onto CaF(2) and fused silica and are systematically characterized. Roughness measurements carried out by atomic force microscopy reveal the evolution of the power spectral densities of the interfaces with coating thickness. Backward-scattering measurements are presented, and the results are compared with theoretical predictions that use different models for the statistical correlation of interfacial roughnesses.
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