26
|
Claus D, Mlikota M, Geibel J, Reichenbach T, Pedrini G, Mischinger J, Schmauder S, Osten W. Large-field-of-view optical elastography using digital image correlation for biological soft tissue investigation (erratum). J Med Imaging (Bellingham) 2017; 4:029801. [DOI: 10.1117/1.jmi.4.2.029801] [Citation(s) in RCA: 1] [Impact Index Per Article: 0.1] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/14/2022] Open
|
27
|
Narayanamurthy CS, Pedrini G, Osten W. Digital holographic photoelasticity. APPLIED OPTICS 2017; 56:F213-F217. [PMID: 28463266 DOI: 10.1364/ao.56.00f213] [Citation(s) in RCA: 1] [Impact Index Per Article: 0.1] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/07/2023]
Abstract
A new technique using digital holography to study the photoelastic isochromatic and isopachic fringes and their respective phases is reported. Our detailed theoretical and experimental analysis shows the possibility of whole-field analysis of every section of stressed photoelastic materials.
Collapse
|
28
|
Banerjee PP, Osten W, Picart P, Cao L, Nehmetallah G. Digital Holography and 3D Imaging: introduction to the joint feature issue in Applied Optics and Journal of the Optical Society of America B. APPLIED OPTICS 2017; 56:DH1-DH4. [PMID: 28463290 DOI: 10.1364/ao.56.000dh1] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/07/2023]
Abstract
The OSA Topical Meeting on Digital Holography and 3D Imaging (DH) was held 25-28 July 2016 in Heidelberg, Germany, as part of the Imaging Congress. Feature issues based on the DH meeting series have been released by Applied Optics (AO) since 2007. This year, AO and the Journal of the Optical Society of America B (JOSA B) jointly decided to have one such feature issue in each journal. This feature issue includes 31 papers in AO and 11 in JOSA B, and covers a large range of topics, reflecting the rapidly expanding techniques and applications of digital holography and 3D imaging. The upcoming DH meeting (DH 2017) will be held from 29 May to 1 June in Jeju Island, South Korea.
Collapse
|
29
|
Boettcher T, Gronle M, Osten W. Multi-layer topography measurement using a new hybrid single-shot technique: Chromatic Confocal Coherence Tomography (CCCT). OPTICS EXPRESS 2017; 25:10204-10213. [PMID: 28468394 DOI: 10.1364/oe.25.010204] [Citation(s) in RCA: 1] [Impact Index Per Article: 0.1] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/07/2023]
Abstract
Often measurement tasks occur, where specimens consist of multiple layers or topography shall be examined through contaminations. Especially for unknown layer materials, it is important to measure the layer's refractive index to compensate for the errors induced on the measurement of underlying surfaces. Chromatic Confocal Coherence Tomography is proposed as a new hybrid single-shot scheme for a simultaneous measurement of thickness and refractive index of semitransparent layers, combining chromatic confocal and interferometric information. As a proof of concept, first measurements are presented along with a short discussion about their uncertainties, where minimal layer thickness and resolution are dominated by the confocal part of the signal, that is mainly influenced by the chosen microscope objective.
Collapse
|
30
|
Liu J, Claus D, Xu T, Keßner T, Herkommer A, Osten W. Light field endoscopy and its parametric description. OPTICS LETTERS 2017; 42:1804-1807. [PMID: 28454165 DOI: 10.1364/ol.42.001804] [Citation(s) in RCA: 2] [Impact Index Per Article: 0.3] [Reference Citation Analysis] [Abstract] [MESH Headings] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 05/09/2023]
Abstract
In this Letter, we demonstrate the application of light field imaging to endoscopy. By introducing a microlens array into the image plane of a conventional endoscope, the 4D light field can be captured in one snapshot. This information can be used to obtain perspective images and to digitally refocus to different planes. These features allow for the recovery of 3D information in minimally invasive surgery. Important optical setup and performance parameters are derived to enable task specific engineering of the light field imaging system.
Collapse
|
31
|
Claus D, Pedrini G, Osten W. Iterative phase retrieval based on variable wavefront curvature. APPLIED OPTICS 2017; 56:F134-F137. [PMID: 28463307 DOI: 10.1364/ao.56.00f134] [Citation(s) in RCA: 4] [Impact Index Per Article: 0.6] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/07/2023]
Abstract
An alternative phase retrieval technique is discussed in this paper, which offers some advantages for the obtained resolution and reconstruction procedure. In contrast to commonly applied iterative phase retrieval routines, diffraction patterns with varying distance between the illumination source and the object are recorded. This has the same effect as changing the object sensor distance, albeit offering the advantage of preserving the resolution. Moreover, it is possible to employ the direct Fresnel propagation method without having to worry about different pixel sizes in the reconstruction plane. In addition, the influence of speckle decorrelation has carefully been studied and considered for the experimental implementation.
Collapse
|
32
|
Claus D, Mlikota M, Geibel J, Reichenbach T, Pedrini G, Mischinger J, Schmauder S, Osten W. Large-field-of-view optical elastography using digital image correlation for biological soft tissue investigation. J Med Imaging (Bellingham) 2017; 4:014505. [PMID: 28386578 PMCID: PMC5352912 DOI: 10.1117/1.jmi.4.1.014505] [Citation(s) in RCA: 6] [Impact Index Per Article: 0.9] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Download PDF] [Figures] [Journal Information] [Subscribe] [Scholar Register] [Received: 12/09/2016] [Accepted: 02/17/2017] [Indexed: 11/14/2022] Open
Abstract
In minimally invasive surgery the haptic feedback, which represents an important tool for the localization of abnormalities, is no longer available. Elastography is an imaging technique that results in quantitative elastic parameters. It can hence be used to replace the lost sense of touch, as to enable tissue localization and discrimination. Digital image correlation is the chosen elastographic imaging technique. The implementation discussed here is clinically sound, based on a spectrally engineered illumination source that enables imaging of biological surface markers (blood vessels) with high contrast. Mechanical loading and deformation of the sample is performed using a rolling indenter, which enables the investigation of large organs (size of kidney) with reduced measurement time compared to a scanning approach. Furthermore, the rolling indentation results in strain contrast improvement and an increase in detection accuracy. The successful application of digital image correlation is first demonstrated on a silicone phantom and later on biological samples. Elasticity parameters and their corresponding four-dimensional distribution are generated via solving the inverse problem (only two-dimensional displacement field and strain map experimentally available) using a well-matched hyperelastic finite element model.
Collapse
|
33
|
Singh AK, Naik DN, Pedrini G, Takeda M, Osten W. Exploiting scattering media for exploring 3D objects. LIGHT, SCIENCE & APPLICATIONS 2017; 6:e16219. [PMID: 30167232 PMCID: PMC6062180 DOI: 10.1038/lsa.2016.219] [Citation(s) in RCA: 15] [Impact Index Per Article: 2.1] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Received: 05/02/2016] [Revised: 08/22/2016] [Accepted: 09/04/2016] [Indexed: 05/20/2023]
Abstract
Scattering media, such as diffused glass and biological tissue, are usually treated as obstacles in imaging. To cope with the random phase introduced by a turbid medium, most existing imaging techniques recourse to either phase compensation by optical means or phase recovery using iterative algorithms, and their applications are often limited to two-dimensional imaging. In contrast, we utilize the scattering medium as an unconventional imaging lens and exploit its lens-like properties for lensless three-dimensional (3D) imaging with diffraction-limited resolution. Our spatially incoherent lensless imaging technique is simple and capable of variable focusing with adjustable depths of focus that enables depth sensing of 3D objects that are concealed by the diffusing medium. Wide-field imaging with diffraction-limited resolution is verified experimentally by a single-shot recording of the 1951 USAF resolution test chart, and 3D imaging and depth sensing are demonstrated by shifting focus over axially separated objects.
Collapse
|
34
|
Lingel C, Haist T, Osten W. Spatial-light-modulator-based adaptive optical system for the use of multiple phase retrieval methods. APPLIED OPTICS 2016; 55:10329-10334. [PMID: 28059267 DOI: 10.1364/ao.55.010329] [Citation(s) in RCA: 2] [Impact Index Per Article: 0.3] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 05/28/2023]
Abstract
We propose an adaptive optical setup using a spatial light modulator (SLM), which is suitable to perform different phase retrieval methods with varying optical features and without mechanical movement. By this approach, it is possible to test many different phase retrieval methods and their parameters (optical and algorithmic) using one stable setup and without hardware adaption. We show exemplary results for the well-known transport of intensity equation (TIE) method and a new iterative adaptive phase retrieval method, where the object phase is canceled by an inverse phase written into part of the SLM. The measurement results are compared to white light interferometric measurements.
Collapse
|
35
|
Schindler J, Schau P, Brodhag N, Frenner K, Osten W. Retrieving the axial position of fluorescent light emitting spots by shearing interferometry. JOURNAL OF BIOMEDICAL OPTICS 2016; 21:125009. [PMID: 28030743 DOI: 10.1117/1.jbo.21.12.125009] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [MESH Headings] [Track Full Text] [Subscribe] [Scholar Register] [Received: 10/25/2016] [Accepted: 12/07/2016] [Indexed: 06/06/2023]
Abstract
A method for the depth-resolved detection of fluorescent radiation based on imaging of an interference pattern of two intersecting beams and shearing interferometry is presented. The illumination setup provides the local addressing of the excitation of fluorescence and a coarse confinement of the excitation volume in axial and lateral directions. The reconstruction of the depth relies on the measurement of the phase of the fluorescent wave fronts. Their curvature is directly related to the distance of a source to the focus of the imaging system. Access to the phase information is enabled by a lateral shearing interferometer based on a Michelson setup. This allows the evaluation of interference signals even for spatially and temporally incoherent light such as emitted by fluorophors. An analytical signal model is presented and the relations for obtaining the depth information are derived. Measurements of reference samples with different concentrations and spatial distributions of fluorophors and scatterers prove the experimental feasibility of the method. In a setup optimized for flexibility and operating in the visible range, sufficiently large interference signals are recorded for scatterers placed in depths in the range of hundred micrometers below the surface in a material with scattering properties comparable to dental enamel.
Collapse
|
36
|
Fu L, Berrier A, Li H, Schau P, Frenner K, Dressel M, Osten W. Depolarization of a randomly distributed plasmonic meander metasurface characterized by Mueller matrix spectroscopic ellipsometry. OPTICS EXPRESS 2016; 24:28056-28064. [PMID: 27906371 DOI: 10.1364/oe.24.028056] [Citation(s) in RCA: 1] [Impact Index Per Article: 0.1] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/06/2023]
Abstract
Metallic nanostructures offer efficient solutions in polarization control with a very low thickness. In this report, we investigate the optical properties of a nano-fabricated plasmonic pseudo-depolarizer using Mueller matrix spectroscopic ellipsometry in transmission configuration. The depolarizer is composed of 256 square cells, each containing a periodically corrugated metallic film with random orientation. The full Mueller matrix was analyzed as a function of incident angle in a range between 0 and 20° and over the whole rotation angle range. Depolarization could be achieved in two visible wavelength regions around the short-range and long-range surface plasmon polariton frequencies, respectively. Furthermore, depolarization for circularly polarized light was 2.5 times stronger than that for linearly polarized light. Our results could work as a guidance for realizing a broadband high efficiency dielectric metasurface depolarizers.
Collapse
|
37
|
Eckerle M, Dietrich T, Schaal F, Pruss C, Osten W, Ahmed MA, Graf T. Novel thin-disk oscillator concept for the generation of radially polarized femtosecond laser pulses. OPTICS LETTERS 2016; 41:1680-1683. [PMID: 27192317 DOI: 10.1364/ol.41.001680] [Citation(s) in RCA: 1] [Impact Index Per Article: 0.1] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/05/2023]
Abstract
We report on the first demonstration of a radially polarized passively mode-locked thin-disk oscillator. Radial polarization was achieved by the use of a novel circular grating waveguide output coupler. We showed mode-locked operation up to a maximum average output power of 13.3 W with an optical efficiency of 21.8%. The degree of radial polarization of the emitted beam was measured to be 97±1%. The laser system generated pulses with a duration of 907 fs and an energy of 316 nJ corresponding to a peak power of 0.35 MW. To the best of our knowledge, these values exceed the performance of previously reported radially polarized mode-locked oscillator systems.
Collapse
|
38
|
Fortmeier I, Stavridis M, Wiegmann A, Schulz M, Osten W, Elster C. Evaluation of absolute form measurements using a tilted-wave interferometer. OPTICS EXPRESS 2016; 24:3393-3404. [PMID: 26906998 DOI: 10.1364/oe.24.003393] [Citation(s) in RCA: 12] [Impact Index Per Article: 1.5] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/05/2023]
Abstract
Tilted-wave interferometry is a promising measurement technique for the highly accurate measurement of aspheres and freeform surfaces. However, the interferometric fringe evaluation of the sub-apertures causes unknown patch offsets, which currently prevent this measurement technique from providing absolute measurements. Simple strategies, such as constructing differences of optical path length differences (OPDs) or ignoring the piston parameter, can diminish the accuracy resulting from the absolute form measurement. Additional information is needed instead; in this paper, the required accuracy of such information is explored in virtual experiments. Our simulation study reveals that, when one absolute OPD is known within a range of 500 nm, the accuracy of the final measurement result is significantly enhanced.
Collapse
|
39
|
Albero J, Perrin S, Passilly N, Krauter J, Gauthier-Manuel L, Froehly L, Lullin J, Bargiel S, Osten W, Gorecki C. Wafer-level fabrication of multi-element glass lenses: lens doublet with improved optical performances. OPTICS LETTERS 2016; 41:96-99. [PMID: 26696167 DOI: 10.1364/ol.41.000096] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/05/2023]
Abstract
This Letter reports on the fabrication of glass lens doublets arranged in arrays and realized at wafer level by means of micro-fabrication. The technique is based on the accurate vertical assembly of separately fabricated glass lens arrays. Since each one of these arrays is obtained by glass melting in silicon cavities, silicon is employed as a spacer in order to build a well-aligned and robust optical module. It is shown that optical performance achieved by the lens doublet is better than for a single lens of equivalent numerical aperture, thanks to lower optical aberrations. The technique has good potential to match the optical requirements of miniature imaging systems.
Collapse
|
40
|
Peterhänsel S, Gödecke ML, Paz VF, Frenner K, Osten W. Detection of overlay error in double patterning gratings using phase-structured illumination. OPTICS EXPRESS 2015; 23:24246-24256. [PMID: 26406630 DOI: 10.1364/oe.23.024246] [Citation(s) in RCA: 1] [Impact Index Per Article: 0.1] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/05/2023]
Abstract
With the help of simulations we study the benefits of using coherent, phase-structured illumination to detect the overlay error in resist gratings fabricated by double patterning. Evaluating the intensity and phase distribution along the focused spot of a high numerical aperture microscope, the capability of detecting magnitude and direction of overlay errors in the range of a few nanometers is investigated for a wide range of gratings. Furthermore, two measurement approaches are presented and tested for their reliability in the presence of white Gaussian noise.
Collapse
|
41
|
Albero J, Perrin S, Bargiel S, Passilly N, Baranski M, Gauthier-Manuel L, Bernard F, Lullin J, Froehly L, Krauter J, Osten W, Gorecki C. Dense arrays of millimeter-sized glass lenses fabricated at wafer-level. OPTICS EXPRESS 2015; 23:11702-11712. [PMID: 25969261 DOI: 10.1364/oe.23.011702] [Citation(s) in RCA: 3] [Impact Index Per Article: 0.3] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/04/2023]
Abstract
This paper presents the study of a fabrication technique of lenses arrays based on the reflow of glass inside cylindrical silicon cavities. Lenses whose sizes are out of the microfabrication standards are considered. In particular, the case of high fill factor arrays is discussed in detail since the proximity between lenses generates undesired effects. These effects, not experienced when lenses are sufficiently separated so that they can be considered as single items, are corrected by properly designing the silicon cavities. Complete topographic as well as optical characterizations are reported. The compatibility of materials with Micro-Opto-Electromechanical Systems (MOEMS) integration processes makes this technology attractive for the miniaturization of inspection systems, especially those devoted to imaging.
Collapse
|
42
|
Haist T, Peter A, Osten W. Holographic projection with field-dependent aberration correction. OPTICS EXPRESS 2015; 23:5590-5595. [PMID: 25836791 DOI: 10.1364/oe.23.005590] [Citation(s) in RCA: 2] [Impact Index Per Article: 0.2] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/04/2023]
Abstract
We present an algorithm for the computation of computer-generated holograms projecting arbitrary patterns through optical reconstruction systems with strong field-dependent aberrations. The algorithm is based on a modification of the iterative Fourier transform algorithm. Aberrations are specified using Zernike polynomials. The trade-off between reconstruction error and diffraction efficiency can be altered using a simple constant within the algorithm. We show first experimental results for the correction of the reconstruction through a strongly aberrated Fourier system.
Collapse
|
43
|
Gilbergs H, Fang H, Frenner K, Osten W. Adaptive state observer and PD control for dynamic perturbations in optical systems. OPTICS EXPRESS 2015; 23:4002-4011. [PMID: 25836439 DOI: 10.1364/oe.23.004002] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/04/2023]
Abstract
High-performance objectives pose strict limitations on residual errors present in the system. External mechanical influences can induce structural vibrations in the optical system which causes a displacement of the lenses present in the system. This will influence the imaging performance, causing degraded images or broadened structures in a lithographic processes. In this paper an adaptive state observer for the detection of structural vibrations of the optical elements of an imaging system based on a series of wavefront tilt measurements is introduced. The observer output is used as an input for a closed-loop PD control to mitigate the lens displacements directly.
Collapse
|
44
|
Baer G, Schindler J, Pruss C, Siepmann J, Osten W. Calibration of a non-null test interferometer for the measurement of aspheres and free-form surfaces. OPTICS EXPRESS 2014; 22:31200-31211. [PMID: 25607069 DOI: 10.1364/oe.22.031200] [Citation(s) in RCA: 3] [Impact Index Per Article: 0.3] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/04/2023]
Abstract
The measurement of aspheric and free-form surfaces in a non-null test configuration has the advantage that no compensation optics is required. However, if a surface is measured in a non-null test configuration, retrace errors are introduced to the measurement. We describe a method to calibrate the test space of an interferometer, enabling to compensate retrace errors. The method is effective even for strong deviations from null test configuration up to several 100 waves, enabling the fast and flexible measurement of aspheres and free-form surfaces. In this paper we present the application of the method to the calibration of the Tilted Wave Interferometer. Furthermore, the method can be generalized to the calibration of other setups.
Collapse
|
45
|
Georges MP, Vandenrijt JF, Thizy C, Alexeenko I, Pedrini G, Vollheim B, Lopez I, Jorge I, Rochet J, Osten W. Combined holography and thermography in a single sensor through image-plane holography at thermal infrared wavelengths. OPTICS EXPRESS 2014; 22:25517-25529. [PMID: 25401585 DOI: 10.1364/oe.22.025517] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [MESH Headings] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/04/2023]
Abstract
Holographic interferometry in the thermal wavelengths range, combining a CO(2) laser and digital hologram recording with a microbolometer array based camera, allows simultaneously capturing temperature and surface shape information about objects. This is due to the fact that the holograms are affected by the thermal background emitted by objects at room temperature. We explain the setup and the processing of data which allows decoupling the two types of information. This natural data fusion can be advantageously used in a variety of nondestructive testing applications.
Collapse
|
46
|
Osten W, Faridian A, Gao P, Körner K, Naik D, Pedrini G, Singh AK, Takeda M, Wilke M. Recent advances in digital holography [invited]. APPLIED OPTICS 2014; 53:G44-63. [PMID: 25322137 DOI: 10.1364/ao.53.000g44] [Citation(s) in RCA: 73] [Impact Index Per Article: 7.3] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Received: 05/07/2014] [Accepted: 06/05/2014] [Indexed: 05/25/2023]
Abstract
This article presents an overview of recent advances in the field of digital holography, ranging from holographic techniques designed to increase the resolution of microscopic images, holographic imaging using incoherent illumination, phase retrieval with incoherent illumination, imaging of occluded objects, and the holographic recording of depth-extended objects using a frequency-comb laser, to the design of an infrastructure for remote laboratories for digital-holographic microscopy and metrology. The paper refers to current trends in digital holography and explains them using new results that were recently achieved at the Institute for Applied Optics of the University Stuttgart.
Collapse
|
47
|
Fortmeier I, Stavridis M, Wiegmann A, Schulz M, Osten W, Elster C. Analytical Jacobian and its application to tilted-wave interferometry. OPTICS EXPRESS 2014; 22:21313-21325. [PMID: 25321510 DOI: 10.1364/oe.22.021313] [Citation(s) in RCA: 1] [Impact Index Per Article: 0.1] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/04/2023]
Abstract
Tilted-wave interferometry (TWI) is a novel optical measurement principle for the measurement of aspherical surfaces. For the reconstruction of the wavefront and the surface under test, respectively, perturbation methods are applied, which require the calculation of the Jacobian matrix. For the practical use of the instrument, a fast and exact calculation of the Jacobian matrices is crucial, since this strongly influences the calculation times of the TWI. By applying appropriate approaches in optical perturbation methods we are able to calculate the required Jacobian matrices analytically when the nominal optical path through the system is given. As a result, calculation times for the TWI can be considerably reduced. We finally illustrate the improved TWI procedure and apply methods of optimal design to determine optimal positions of the surface under test. For such applications the fast calculation of the Jacobian matrices is essential.
Collapse
|
48
|
Fu L, Frenner K, Osten W. Rigorous speckle simulation using surface integral equations and higher order boundary element method. OPTICS LETTERS 2014; 39:4104-4107. [PMID: 25121662 DOI: 10.1364/ol.39.004104] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/03/2023]
Abstract
The scattering of electromagnetic waves from rough surfaces has been actively studied for more than a century now because of its involvement in vast application areas. In the past two decades, great advances have been made by incorporating multiple scattering effects into analytical approaches. However, no model can yet be applied to surfaces with arbitrary roughness. It is also very difficult to study the cross-polarization, shadowing, or multiple scattering effects. In order to study more fundamentally the interaction of polarized light with more general rough surfaces of general media, we have developed a rigorous numerical simulator to calculate the resulting speckle fields. The full Maxwell equations were solved using surface integral equations combined with a boundary element method. The rough surface was discretized by higher order quadrilateral edge elements. The effective tangential electric and magnetic fields in each element in terms of 10 edges were first solved. The scattered electric and magnetic fields everywhere in space were then calculated correspondingly. One of the great advantages of such a simulator is that both the near and far fields can be calculated directly. Preliminary results of different kinds of metallic structures are presented, by which the advantages of the method are demonstrated.
Collapse
|
49
|
Peterhänsel S, Pruss C, Osten W. Limits of diffractometric reconstruction of line gratings when using scalar diffraction theory. OPTICS LETTERS 2014; 39:3764-3766. [PMID: 24978731 DOI: 10.1364/ol.39.003764] [Citation(s) in RCA: 1] [Impact Index Per Article: 0.1] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/03/2023]
Abstract
We study errors that occur in geometry and phase reconstruction when using scalar diffraction theory in line gratings with periods below 10 μm. The application of those gratings in so-called computer-generated holograms in high-precision interferometric testing of aspheres and free-form surfaces imposes high demands on the generated phase, leading to error budgets in the range of λ/100. Using rigorous simulations as references, we identify the limits where scalar diffraction theory fails to accurately describe grating geometries and identify the significant error mechanisms.
Collapse
|
50
|
Haist T, Dong S, Arnold T, Gronle M, Osten W. Multi-image position detection. OPTICS EXPRESS 2014; 22:14450-14463. [PMID: 24977542 DOI: 10.1364/oe.22.014450] [Citation(s) in RCA: 2] [Impact Index Per Article: 0.2] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/03/2023]
Abstract
The exact measurement of positions is of fundamental importance in a multitude of image-sensor based optical measurement systems. We propose a new method for enhancing the accuracy of image-sensor based optical measurement systems by using a computer-generated hologram in front of the imaging system. Thereby, the measurement spot is replicated to a predefined pattern. Given enough light to correctly expose the sensor, the position detection accuracy can be considerably improved compared to the conventional one-spot approach. For the evaluation of the spot position we used center-of-gravity based averaging. We present simulated as well as experimental results showing an improvement by a factor of 3.6 to a positioning accuracy of better than three thousandths of a pixel for a standard industrial CCD sensor.
Collapse
|