Plasma-assisted approaches in inorganic nanostructure fabrication

Surface engineering toward stable lithium metal anodes

The lithium (Li) metal anode (LMA) is susceptible to failure due to the growth of Li dendrites caused by an unsatisfied solid electrolyte interface (SEI). With this regard, the design of artificial SEIs with improved physicochemical and mechanical properties has been demonstrated to be important to stabilize the LMAs. This review comprehensively summarizes current efficient strategies and key progresses in surface engineering for constructing protective layers to serve as the artificial SEIs, including pretreating the LMAs with the reagents situated in different primary states of matter (solid, liquid, and gas) or using some peculiar pathways (plasma, for example). The fundamental characterization tools for studying the protective layers on the LMAs are also briefly introduced. Last, strategic guidance for the deliberate design of surface engineering is provided, and the current challenges, opportunities, and possible future directions of these strategies for the development of LMAs in practical applications are discussed.

Dynamic Surface Evolution of Metal Oxides for Autonomous Adaptation to Catalytic Reaction Environments

Metal oxides possessing distinctive physical/chemical properties due to different crystal structures and stoichiometries play a pivotal role in numerous current technologies, especially heterogeneous catalysis for production/conversion of high-valued chemicals and energy. To date, many researchers have investigated the effect of the structure and composition of these materials on their reactivity to various chemical and electrochemical reactions. However, metal oxide surfaces evolve from their initial form under dynamic reaction conditions due to the autonomous behaviors of the constituent atoms to adapt to the surrounding environment. Such nanoscale surface phenomena complicate reaction mechanisms and material properties, interrupting the clarification of the origin of functionality variations in reaction environments. In this review, the current findings on the spontaneous surface reorganization of metal oxides during reactions are categorized into three types: 1) the appearance of nano-sized second phase from oxides, 2) the (partial) encapsulation of oxide atoms toward supported metal surfaces, and 3) the oxide surface reconstruction with selective cation leaching in aqueous solution. Then their effects on each reaction are summarized in terms of activity and stability, providing novel insight for those who design metal-oxide-based catalytic materials.

CF4 Plasma-Generated LiF-Li2 C2 Artificial Layers for Dendrite-Free Lithium-Metal Anodes

Lithium metal anodes have long been considered as "holy grail" in the field of energy storage batteries, but dendrite growth and large volume changes hinder their practical applications. Herein, a facile and eco-friendly CF₄ plasma treatment is employed for the surface modification of Li anodes, and an artificial layer consisting of LiF and Li₂ C₂ is fabricated for the first time. Experimental results and theoretical calculations reveal that the high adsorption energy of LiF and low Li⁺ diffusion barriers in Li₂ C₂ induce uniform nucleation and planar growth of Li, guaranteeing a stable and dendrite-free Li structure during the repeated plating/stripping process of cycling. Symmetric cells using CF₄ plasma-treated Li operate stably for more than 6500 h (at 2 mA cm^-2 and 1 mAh cm^-2 ) or 950 h (at 1 mA cm^-2 and 10 mAh cm^-2 ). When paired with a LiFePO₄ cathode, full batteries deliver a high reversible capacity of 136 mAh g^-1 (at 1 C) with considerable cycling stability (97.2% capacity retention over 200 cycles) and rate performance (116 mAh g^-1 up to 5 C). This powerful application of plasma technology toward novel LiF-Li₂ C₂ artificial layers provide new routes for constructing environment-friendly and high-performance energy storage devices.

In Situ Synthesis and Dual Functionalization of Nano Silicon Enabled by a Semisolid Lithium Rechargeable Flow Battery

Nanosized silicon has attracted considerable attentions as a new-generation anode material for lithium-ion batteries (LIBs) due to its exceptional theoretical capacity and reasonable cyclic stability. However, serious side reactions often take place at the nanosized silicon/electrolyte interface in LIBs, where critical electrochemical properties such as initial Coulombic efficiency (ICE) are compromised. On the basis of this feature, a new method is developed to synthesize nanosilicon-based particles in a facile, scalable way, which are endowed with the function of prelithiation and storage stability in air. A semisolid lithium rechargeable flow battery (SSFB) technology is used for the first time to convert the micrometer-sized silicon raw material into an amorphous-nanosilicon-based material (ANSBM), as a result of the pulverization process induced by the repeated lithiation/delithiation cycles. The particle size is successfully reduced from 1-4 μm to around 30 nm after cycles in the flow battery. Bulk functionalization of the nano silicon is introduced by the unbalanced lithiation/delithiation cyclic process, which endows ANSBM with a unique prelithiation capability universally applicable to different anode systems such as nanosized Si, SiO_x, and graphite, as evidenced by the significantly improved ICEs. Superior air stability (10% relative humidity) is exhibited by ANSBM due to surface functionalization by the stable interfacial layer encapsulated by electron-conductive carbon. The outcome of this work provides a promising way to synthesize dual-functionalized nano silicon with good electrochemical performance in terms of improved capacity and increased initial Coulombic efficiency when it is composited with other typical anode materials.

Two-Phase-Interfaced, Graded-Permittivity Titania Electrical Insulation by Atmospheric Pressure Plasmas

Functionally graded materials (FGMs) exhibit unique properties and are expected to deliver outstanding and stable performance under extreme conditions. High-voltage, high-power FGM-based electric insulation commonly fails because of inadequate surface charge control (flashover) performance and stability of stacked layers of dielectric materials with graded permittivity ε_r. Here, we address these issues by interfacing the rutile and anatase TiO₂ layers on a ceramic with very different ε_r values of 110, 48, and 9, respectively, using scalable, environment-benign, and energy-efficient atmospheric pressure plasma processing. The FGM drastically reduces the maximum electric field along the optimized surface by 66% and increases surface flashover voltage by 36 %, while featuring a remarkable (120/180 days) long-term stability. The mechanisms of the plasma-enabled graded layer formation are presented, which can be used for precise engineering of FGMs for diverse applications in other fields.

Defect engineering and characterization of active sites for efficient electrocatalysis

Electrocatalysis plays a decisive role in various energy-related applications. Engineering the active sites of electrocatalysts is an important aspect to promote their catalytic performance. In particular, defect engineering provides a feasible and efficient approach to improve the intrinsic activities and increase the number of active sites in electrocatalysts. In this review, recent investigations on defect engineering of a wide range of electrocatalysts such as metal-free carbon materials, transition metal oxides, transition metal dichalcogenides and metal-organic frameworks (MOFs) will be summarized. Different defect creation strategies will be outlined, for example, heteroatom doping and removal, plasma irradiation, hydrogenation, amorphization, phase transition and reduction treatment. In addition, we will overview the commonly used advanced characterization techniques that could confirm the existence and identify the detailed structures, types and concentration of defects in electrocatalysts. The defect characterization tools are beneficial for gaining an in-depth understanding of defects on electrocatalysis and thus could reveal the structure-performance relationship. Finally, the major challenges and future development directions on defect engineering of electrocatalysts will be discussed.

Patterning and control of the nanostructure in plasma thin films with acoustic waves: mechanical vs. electrical polarization effects

Nanostructuration and 2D patterning of thin films are common strategies to fabricate biomimetic surfaces and components for microfluidic, microelectronic or photonic applications. This work presents the fundamentals of a surface nanotechnology procedure for laterally tailoring the nanostructure and crystalline structure of thin films that are plasma deposited onto acoustically excited piezoelectric substrates. Using magnetron sputtering as plasma technique and TiO₂ as case example, it is demonstrated that the deposited films depict a sub-millimetre 2D pattern that, characterized by large lateral differences in nanostructure, density (up to 50%), thickness, and physical properties between porous and dense zones, reproduces the wave features distribution of the generated acoustic waves (AW). Simulation modelling of the AW propagation and deposition experiments carried out without plasma and under alternative experimental conditions reveal that patterning is not driven by the collision of ad-species with mechanically excited lattice atoms of the substrate, but emerges from their interaction with plasma sheath ions locally accelerated by the AW-induced electrical polarization field developed at the substrate surface and growing film. The possibilities of the AW activation as a general approach for the tailored control of nanostructure, pattern size, and properties of thin films are demonstrated through the systematic variation of deposition conditions and the adjustment of AW operating parameters.

RF Thermal Plasma Synthesis of Ultrafine ZrB2-ZrC Composite Powders

Ultrafine ZrB₂-ZrC composite powders were synthesized via a radiofrequency (RF) thermal plasma process. Numerical simulation and thermodynamic analysis were conducted to predict the synthesis process, and experimental work was performed accordingly to demonstrate its feasibility. The as-prepared samples were characterized by XRD, FESEM, particle size analyzer, nitrogen/oxygen analyzer, Hall flowmeter, and the Brunner-Emmet-Teller (BET) measurements. The thermodynamic analysis indicated that ZrB₂ was preferentially generated, rather than ZrC, and numerical simulation revealed that the solid raw materials could disperse well in the gaseous reactants, and experimental work showed that free carbon particles were easily removed from the products and the elements of Zr, B, C, and O exhibited a uniform distribution. Finally, ZrB₂-ZrC composite powders with a particle size of about 100 nm were obtained, the surface area of which was 32.15 m²/g and the apparent density was 0.57 g/cm³.

Modeling and Selection of RF Thermal Plasma Hot-Wall Torch for Large-Scale Production of Nanopowders

Fouling is a great problem that significantly affects the continuous operation for large-scale radio-frequency (RF) thermal plasma synthesizing nanopowders. In order to eliminate or weaken the phenomenon, numerical simulations based on FLUENT software were founded to investigate the effect of operation parameters, including feeding style of central gas and sheath gas, on plasma torches. It is shown that the tangential feeding style of central gas brings serious negative axial velocity regions, which always forces the synthesized nanopowders to "back-mix", and further leads to the fouling of the quartz tube. Moreover, it is shown that sheath gas should be tangentially fed into the plasma reactor to further eliminate the gas stream's back-mixing. However, when this feeding style is applied, although the negative axial velocity region is decreased, the plasma gas and kinetic energy of the vapor phase near the wall of the plasma reactor are less and lower, respectively; as a result, that plasma flame is more difficult to be arced. A new plasma arcing method by way of feeding gun instead of torch wall was proposed and put in use. The fouling problem has been well solved and plasma arcing is well ensured, and as a result, the experiment on large-scale production of nanopowders can be carried out for 8 h without any interruption, and synthesized Si and Al₂O₃ nanopowders exhibit good dispersion and sphericity.

Outstanding Room-Temperature Hydrogen Gas Detection by Plasma-Assisted and Graphene-Functionalized Core-Shell Assembly of SnO2 Nanoburflower

Here, we have reported the synthesis of three-dimensional, mesoporous, nano-SnO₂ cores encapsulated in nonstoichiometric SnO₂ shells grown by chemical as well as physical synthesis procedures such as plasma-enhanced chemical vapor deposition, followed by functionalization with reduced graphene oxide (rGO) on the surface. The main motif to fabricate such morphology, i.e., core-shell assembly of burflower-like SnO₂ nanobid is to distinguish gases quantitatively at reduced operating temperatures. Electrochemical results reveal that rGO anchored on SnO₂ surface offers excellent gas detection performances at room temperature. It exhibits outstanding H₂ selectivity through a wide range, from ∼10 ppm to 1 vol %, with very little cross-sensitivity against other similar types of reducing gases. Good recovery as well as prompt responses also added flair in its quality due to the highly mesoporous architecture. Without using any expensive dopant/catalyst/filler or any special class of surfactants, these unique SnO₂ mesoporous nanostructures have exhibited exceptional gas sensing performances at room temperature and are thus helpful to fabricate sensing devices in most cost-effective and eco-friendly manner.

Plasma-Assisted Synthesis of Monodispersed and Robust Ruthenium Ultrafine Nanocatalysts for Organosilane Oxidation and Oxygen Evolution Reactions

We report a facile and general approach for preparing ultrafine ruthenium nanocatalysts by using a plasma-assisted synthesis at <100 °C. The resulting Ru nanoparticles are monodispersed (typical size 2 nm) and remain that way upon loading onto carbon and TiO2 supports. This gives robust catalysts with excellent activities in both organosilane oxidation and the oxygen evolution reaction.

Effects of Nitrogen and Hydrogen Codoping on the Electrical Performance and Reliability of InGaZnO Thin-Film Transistors

Despite intensive research on improvement in electrical performances of ZnO-based thin-film transistors (TFTs), the instability issues have limited their applications for complementary electronics. Herein, we have investigated the effect of nitrogen and hydrogen (N/H) codoping on the electrical performance and reliability of amorphous InGaZnO (α-IGZO) TFTs. The performance and bias stress stability of α-IGZO device were simultaneously improved by N/H plasma treatment with a high field-effect mobility of 45.3 cm²/(V s) and small shifts of threshold voltage (V_th). On the basis of X-ray photoelectron spectroscopy analysis, the improved electrical performances of α-IGZO TFT should be attributed to the appropriate amount of N/H codoping, which could not only control the V_th and carrier concentration efficiently, but also passivate the defects such as oxygen vacancy due to the formation of stable Zn-N and N-H bonds. Meanwhile, low-frequency noise analysis indicates that the average trap density near the α-IGZO/SiO₂ interface is reduced by the nitrogen and hydrogen plasma treatment. This method could provide a step toward the development of α-IGZO TFTs for potential applications in next-generation high-definition optoelectronic displays.

Rational Design of ZnO:H/ZnO Bilayer Structure for High-Performance Thin-Film Transistors

The intriguing properties of zinc oxide-based semiconductors are being extensively studied as they are attractive alternatives to current silicon-based semiconductors for applications in transparent and flexible electronics. Although they have promising properties, significant improvements on performance and electrical reliability of ZnO-based thin film transistors (TFTs) should be achieved before they can be applied widely in practical applications. This work demonstrates a rational and elegant design of TFT, composed of poly crystalline ZnO:H/ZnO bilayer structure without using other metal elements for doping. The field-effect mobility and gate bias stability of the bilayer structured devices have been improved. In this device structure, the hydrogenated ultrathin ZnO:H active layer (∼3 nm) could provide suitable carrier concentration and decrease the interface trap density, while thick pure-ZnO layer could control channel conductance. Based on this novel structure, a high field-effect mobility of 42.6 cm(2) V(-1) s(-1), a high on/off current ratio of 10(8) and a small subthreshold swing of 0.13 V dec(-1) have been achieved. Additionally, the bias stress stability of the bilayer structured devices is enhanced compared to the simple single channel layer ZnO device. These results suggest that the bilayer ZnO:H/ZnO TFTs have a great potential for low-cost thin-film electronics.

One-dimensional lanthanide coordination polymers: synthesis, structures, and single-ion magnetic behaviour

The one-dimensional Dy coordination polymer displays a single-ion magnetic behaviour with a narrow distribution of relaxation under a dc field.

Microplasma-chemical synthesis and tunable real-time plasmonic responses of alloyed AuxAg1−x nanoparticles

A new conceptual microplasma-based approach is developed to produce AuAg alloyed crystalline nanoparticles at atmospheric pressure and low temperatures, in the absence of a chemical reducing agent. Real-time plasmonic monitoring is demonstrated.

Functionalization of nanomaterials by non-thermal large area atmospheric pressure plasmas: application to flexible dye-sensitized solar cells

A key challenge to the industrial application of nanotechnology is the development of fabrication processes for functional devices based on nanomaterials which can be scaled up for mass production. In this report, we disclose the results of non-thermal radio-frequency (rf) atmospheric pressure plasma (APP) based deposition of TiO2 nanoparticles on a flexible substrate for the fabrication of dye-sensitized solar cells (DSSCs). Operating at 190 °C without a vacuum enclosure, the APP method can avoid thermal damage and vacuum compatibility restrictions and utilize roll-to-roll processing over a large area. The various analyses of the TiO2 films demonstrate that superior film properties can be obtained by the non-thermal APP method when compared with the thermal sintering process operating at 450 °C. The crystallinity of the anatase TiO2 nanoparticles is significantly improved without thermal agglomeration, while the surface defects such as Ti(3+) ions are eliminated, thus providing efficient charge collecting properties for solar cells. Finally, we successfully fabricated a flexible DSSC with an energy conversion efficiency of 4.2% using a transparent plastic substrate. This work demonstrates the potential of non-thermal APP technology in the area of device-level, nano-enabled material manufacturing.

Defining plasma polymerization: new insight into what we should be measuring

External parameters (RF power and precursor flow rate) are typically quoted to define plasma polymerization experiments. Utilizing a parallel-plate electrode reactor with variable geometry, it is shown that these parameters cannot be transferred to reactors with different geometries in order to reproduce plasma polymer films using four precursors. Measurements of ion flux and power coupling efficiency confirm that intrinsic plasma properties vary greatly with reactor geometry at constant applied RF power. It is further demonstrated that controlling intrinsic parameters, in this case the ion flux, offers a more widely applicable method of defining plasma polymerization processes, particularly for saturated and allylic precursors.

Exploration of plasma-enhanced chemical vapor deposition as a method for thin-film fabrication with biological applications

Chemical vapor deposition (CVD) has been used historically for the fabrication of thin films composed of inorganic materials. But the advent of specialized techniques such as plasma-enhanced chemical vapor deposition (PECVD) has extended this deposition technique to various monomers. More specifically, the deposition of polymers of responsive materials, biocompatible polymers, and biomaterials has made PECVD attractive for the integration of biotic and abiotic systems. This review focuses on the mechanisms of thin-film growth using low-pressure PECVD and current applications of classic PECVD thin films of organic and inorganic materials in biological environments. The last part of the review explores the novel application of low-pressure PECVD in the deposition of biological materials.

Manufacturing of inorganic nanomaterials: concepts and perspectives

The present paper aims at extracting key physical and chemical concepts for the development of inorganic nanomaterials with controlled size, shape, and topology. In particular, efforts are made to identify general guiding principles for the rational design of 0D, 1D, 2D and 3D architectures, focusing on selected model systems as representative case studies. To this aim, different strategies and approaches are discussed, in an attempt to unify concepts and ideas common to solid-, liquid- and gas-phase synthetic routes. Furthermore, the importance of tailoring the nanomaterial composition, structure and morphology is also highlighted in relation to their eventual technological applications.

Plasma effects in semiconducting nanowire growth

Three case studies are presented to show low-temperature plasma-specific effects in the solution of (i) effective control of nucleation and growth; (ii) environmental friendliness; and (iii) energy efficiency critical issues in semiconducting nanowire growth. The first case (related to (i) and (iii)) shows that in catalytic growth of Si nanowires, plasma-specific effects lead to a substantial increase in growth rates, decrease of the minimum nanowire thickness, and much faster nanowire nucleation at the same growth temperatures. For nucleation and growth of nanowires of the same thickness, much lower temperatures are required. In the second example (related to (ii)), we produce Si nanowire networks with controllable nanowire thickness, length, and area density without any catalyst or external supply of Si building material. This case is an environmentally-friendly alternative to the commonly used Si microfabrication based on a highly-toxic silane precursor gas. The third example is related to (iii) and demonstrates that ZnO nanowires can be synthesized in plasma-enhanced CVD at significantly lower process temperatures than in similar neutral gas-based processes and without compromising structural quality and performance of the nanowires. Our results are relevant to the development of next-generation nanoelectronic, optoelectronic, energy conversion and sensing devices based on semiconducting nanowires.

Role of positive ions in determining the deposition rate and film chemistry of continuous wave hexamethyl disiloxane plasmas

New data shed light on the mechanisms of film growth from low power, low pressure plasmas of organic compounds. These data rebalance the widely held view that plasma polymer formation is due to radical/neutral reactions only and that ions play no direct role in contributing mass at the surface. Ion reactions are shown to play an important role in both the plasma phase and at the surface. The mass deposition rate and ion flux in continuous wave hexamethyl disiloxane (HMDSO) plasmas have been studied as a function of pressure and applied RF power. Both the deposition rate and ion flux were shown to increase with applied power; however, the deposition rate increased with pressure while the ion flux decreased. Positive ion mass spectrometry of the plasma phase demonstrates that the dominant ionic species is the (HMDSO-CH(3))(+) ion at m/z 147, but significant fragmentation and subsequent oligomerization was also observed. Chemical analysis of the deposits by X-ray photoelectron spectroscopy and secondary ion mass spectrometry show that the deposits were consistent with deposits reported by previous workers grown from plasma and hyperthermal (HMDSO-CH(3))(+) ions. Increasing coordination of silicon with oxygen in the plasma deposits reveals the role of ions in the growth of plasma polymers. Comparing the calculated film thicknesses after a fixed total fluence of 1.5 × 10(19) ions/m(2) to results for hyperthermal ions shows that ions can contribute significantly to the total absorbed mass in the deposits.

Microwave-mediated synthesis for improved morphology and pseudocapacitance performance of nickel oxide

Synthetic methods greatly control the structural and functional characteristics of the materials. In this article, porous NiO samples were prepared in conventional-reflux and microwave assisted heating method under homogeneous precipitation conditions. The NiO samples synthesized in conventional reflux method showed flakelike morphology, whereas the sample synthesized in microwave methods showed hierarchical porous ball like surface morphology with uniform ripple-shaped pores. The NiO samples characterized using BET method were found to bear characteristic meso- and macroporosity due to differently crystallized Ni(OH)(2) precursors under various heating conditions. Thermogravimety analysis showed morphology dependent decomposition of Ni(OH)(2) precursors. The microwave synthesized porous NiO sample with unique morphology and pore size distribution showed significantly improved charge storage and electrochemical stability than the flaky NiO sample synthesized by employing conventional reflux method. The cyclic voltammetry measurements on microwave synthesized NiO sample showed considerably high capacitance and better electrochemical reversibility. The charge-discharge measurements made at a discharge current of 2 A/g showed higher rate specific capacitance (370 F/g) for the NiO sample synthesized by microwave method than the sample synthesized by reflux method (101 F/g). The impedance study illustrates lower electronic and ionic resistance of rippled-shaped porous NiO due to its superior surface properties for enhanced electrode-electrolyte contact during the Faradaic redox reactions. It has been further established from the Ragone plot that the microwave synthesized NiO sample shows higher energy and power densities than the reflux synthesized NiO sample. Broadly, this study reveals that microwave-mediated synthesis approach is significantly a better strategy for the synthesis of porous NiO suitable to electrochemical supercapacitor applications.

Low- and high-temperature controls in carbon nanofiber growth in reactive plasmas

A numerical growth model is used to describe the catalyzed growth of carbon nanofibers in the sheath of a low-temperature plasma. Using the model, the effects of variation in the plasma sheath parameters and substrate potential on the carbon nanofiber growth characteristics, such as the growth rate, the effective carbon flux to the catalyst surface, and surface coverages, have been investigated. It is shown that variations in the parameters, which change the sheath width, mainly affect the growth parameters at the low catalyst temperatures, whereas the other parameters such as the gas pressure, ion temperature, and percentages of the hydrocarbon and etching gases, strongly affect the carbon nanofiber growth at higher temperatures. The conditions under which the carbon nanofiber growth can still proceed under low nanodevice-friendly process temperatures have been formulated and summarized. These results are consistent with the available experimental results and can also be used for catalyzed growth of other high-aspect-ratio nanostructures in low-temperature plasmas.