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Aguila MAC, Esmenda JC, Wang JY, Chen YC, Lee TH, Yang CY, Lin KH, Chang-Liao KS, Kafanov S, Pashkin YA, Chen CD. Photothermal Responsivity of van der Waals Material-Based Nanomechanical Resonators. NANOMATERIALS (BASEL, SWITZERLAND) 2022; 12:2675. [PMID: 35957105 PMCID: PMC9370576 DOI: 10.3390/nano12152675] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Download PDF] [Figures] [Subscribe] [Scholar Register] [Received: 07/07/2022] [Revised: 07/30/2022] [Accepted: 07/31/2022] [Indexed: 02/04/2023]
Abstract
Nanomechanical resonators made from van der Waals materials (vdW NMRs) provide a new tool for sensing absorbed laser power. The photothermal response of vdW NMRs, quantified from the resonant frequency shifts induced by optical absorption, is enhanced when incorporated in a Fabry-Pérot (FP) interferometer. Along with the enhancement comes the dependence of the photothermal response on NMR displacement, which lacks investigation. Here, we address the knowledge gap by studying electromotively driven niobium diselenide drumheads fabricated on highly reflective substrates. We use a FP-mediated absorptive heating model to explain the measured variations of the photothermal response. The model predicts a higher magnitude and tuning range of photothermal responses on few-layer and monolayer NbSe2 drumheads, which outperform other clamped vdW drum-type NMRs at a laser wavelength of 532 nm. Further analysis of the model shows that both the magnitude and tuning range of NbSe2 drumheads scale with thickness, establishing a displacement-based framework for building bolometers using FP-mediated vdW NMRs.
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Affiliation(s)
- Myrron Albert Callera Aguila
- Department of Engineering and System Science, National Tsing Hua University, Hsinchu 30013, Taiwan
- Nano Science and Technology Program, Taiwan International Graduate Program, Academia Sinica, Taipei 11529, Taiwan
- Institute of Physics, Academia Sinica, Nankang, Taipei 11529, Taiwan
| | - Joshoua Condicion Esmenda
- Department of Engineering and System Science, National Tsing Hua University, Hsinchu 30013, Taiwan
- Nano Science and Technology Program, Taiwan International Graduate Program, Academia Sinica, Taipei 11529, Taiwan
- Institute of Physics, Academia Sinica, Nankang, Taipei 11529, Taiwan
| | - Jyh-Yang Wang
- Institute of Physics, Academia Sinica, Nankang, Taipei 11529, Taiwan
| | - Yen-Chun Chen
- Institute of Physics, Academia Sinica, Nankang, Taipei 11529, Taiwan
| | - Teik-Hui Lee
- Institute of Physics, Academia Sinica, Nankang, Taipei 11529, Taiwan
| | - Chi-Yuan Yang
- Institute of Physics, Academia Sinica, Nankang, Taipei 11529, Taiwan
| | - Kung-Hsuan Lin
- Institute of Physics, Academia Sinica, Nankang, Taipei 11529, Taiwan
| | - Kuei-Shu Chang-Liao
- Department of Engineering and System Science, National Tsing Hua University, Hsinchu 30013, Taiwan
| | - Sergey Kafanov
- Department of Physics, Lancaster University, Lancaster LA1 4YB, UK
| | - Yuri A. Pashkin
- Department of Physics, Lancaster University, Lancaster LA1 4YB, UK
| | - Chii-Dong Chen
- Institute of Physics, Academia Sinica, Nankang, Taipei 11529, Taiwan
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Callera Aguila MA, Esmenda JC, Wang JY, Lee TH, Yang CY, Lin KH, Chang-Liao KS, Kafanov S, Pashkin YA, Chen CD. Fabry-Perot interferometric calibration of van der Waals material-based nanomechanical resonators. NANOSCALE ADVANCES 2022; 4:502-509. [PMID: 36132699 PMCID: PMC9416946 DOI: 10.1039/d1na00794g] [Citation(s) in RCA: 1] [Impact Index Per Article: 0.5] [Reference Citation Analysis] [Abstract] [Grants] [Track Full Text] [Figures] [Subscribe] [Scholar Register] [Received: 11/09/2021] [Accepted: 11/21/2021] [Indexed: 06/16/2023]
Abstract
One of the challenges in integrating nanomechanical resonators made from van der Waals materials in optoelectromechanical technologies is characterizing their dynamic properties from vibrational displacement. Multiple calibration schemes using optical interferometry have tackled this challenge. However, these techniques are limited only to optically thin resonators with an optimal vacuum gap height and substrate for interferometric detection. Here, we address this limitation by implementing a modeling-based approach via multilayer thin-film interference for in situ, non-invasive determination of the resonator thickness, gap height, and motional amplitude. This method is demonstrated on niobium diselenide drumheads that are electromotively driven in their linear regime of motion. The laser scanning confocal configuration enables a resolution of hundreds of picometers in motional amplitude for circular and elliptical devices. The measured thickness and spacer height, determined to be in the order of tens and hundreds of nanometers, respectively, are in excellent agreement with profilometric measurements. Moreover, the transduction factor estimated from our method agrees with the result of other studies that resolved Brownian motion. This characterization method, which applies to both flexural and acoustic wave nanomechanical resonators, is robust because of its scalability to thickness and gap height, and any form of reflecting substrate.
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Affiliation(s)
- Myrron Albert Callera Aguila
- National Tsing Hua University Hsinchu 30013 Taiwan
- Nano Science and Technology Program, Taiwan International Graduate Program, Academia Sinica and National Tsing Hua University Taiwan
- Institute of Physics, Academia Sinica Nangang 11529 Taiwan
| | - Joshoua Condicion Esmenda
- National Tsing Hua University Hsinchu 30013 Taiwan
- Nano Science and Technology Program, Taiwan International Graduate Program, Academia Sinica and National Tsing Hua University Taiwan
- Institute of Physics, Academia Sinica Nangang 11529 Taiwan
| | - Jyh-Yang Wang
- Institute of Physics, Academia Sinica Nangang 11529 Taiwan
| | - Teik-Hui Lee
- Institute of Physics, Academia Sinica Nangang 11529 Taiwan
| | - Chi-Yuan Yang
- Institute of Physics, Academia Sinica Nangang 11529 Taiwan
| | - Kung-Hsuan Lin
- Institute of Physics, Academia Sinica Nangang 11529 Taiwan
| | | | - Sergey Kafanov
- Department of Physics, Lancaster University Lancaster LA1 4YB UK
| | - Yuri A Pashkin
- Department of Physics, Lancaster University Lancaster LA1 4YB UK
| | - Chii-Dong Chen
- Institute of Physics, Academia Sinica Nangang 11529 Taiwan
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