1
|
Lim T, Lee JH, Kim D, Bae J, Jung S, Yang SM, Jang JI, Jang J. Large-Area Growth of Ferroelectric 2D γ-In 2 Se 3 Semiconductor by Spray Pyrolysis for Next-Generation Memory. ADVANCED MATERIALS (DEERFIELD BEACH, FLA.) 2024; 36:e2308301. [PMID: 37929619 DOI: 10.1002/adma.202308301] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Subscribe] [Scholar Register] [Received: 08/16/2023] [Revised: 11/02/2023] [Indexed: 11/07/2023]
Abstract
In2 Se3 , 2D ferroelectric-semiconductor, is a promising candidate for next-generation memory device because of its outstanding electrical properties. However, the large-area manufacturing of In2 Se3 is still a big challenge. In this work, spray pyrolysis technique is introduced for the growth of large-area In2 Se3 thin film. A polycrystalline γ-In2 Se3 layer can be grown on 15 cm × 15 cm glasss at the substrate temperature of 275 °C. The In2 Se3 ferroelectric-semiconductor field effect transistor (FeS-FET) on glass substrate demonstrates a large hysteresis window of 40.3 V at the ±40 V of gate voltage sweep and excellent uniformity. The FeS-FET exhibits an electron field effect mobility of 0.97 cm2 V-1 s-1 and an on/off current ratio of >107 in the transfer curves. The memory behavior of the large-area, In2 Se3 FeS-FETs for next-generation memory is demonstrated.
Collapse
Affiliation(s)
- Taebin Lim
- Advanced Display Research Center (ADRC), Department of Information Display, Kyung Hee University, Seoul, 02447, South Korea
| | - Jae Heon Lee
- Department of Physics, Sogang University, Seoul, 04107, South Korea
| | - Donggyu Kim
- Department of Physics, Sogang University, Seoul, 04107, South Korea
| | - Jinbaek Bae
- Advanced Display Research Center (ADRC), Department of Information Display, Kyung Hee University, Seoul, 02447, South Korea
| | - Seungchae Jung
- Advanced Display Research Center (ADRC), Department of Information Display, Kyung Hee University, Seoul, 02447, South Korea
| | - Sang Mo Yang
- Department of Physics, Sogang University, Seoul, 04107, South Korea
| | - Joon I Jang
- Department of Physics, Sogang University, Seoul, 04107, South Korea
| | - Jin Jang
- Advanced Display Research Center (ADRC), Department of Information Display, Kyung Hee University, Seoul, 02447, South Korea
| |
Collapse
|