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Citation(s) in
RCA
4
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For:
Crose M
, Zhang W, Tran A, Christofides PD.
Run‐to‐run control of PECVD systems: Application to a multiscale three‐dimensional CFD model of silicon thin film deposition.
AIChE J
2018. [DOI:
10.1002/aic.16400
]
[
Citation(s) in
RCA
: 5
]
[
Impact Index Per Article: 0.8
]
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Reference Citation Analysis
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[Indexed: 11/08/2022]
Number
Cited by Other Article(s)
1
Machine learning-based run-to-run control of a spatial thermal atomic layer etching reactor.
Comput Chem Eng
2022. [DOI:
10.1016/j.compchemeng.2022.108044
]
[
Citation(s) in
RCA
: 0
]
[
Impact Index Per Article: 0
]
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[Indexed: 11/18/2022]
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2
Yun S
, Tom M, Ou F, Orkoulas G, Christofides PD. Multivariable run-to-run control of thermal atomic layer etching of aluminum oxide thin films.
Chem Eng Res Des
2022. [DOI:
10.1016/j.cherd.2022.03.039
]
[
Citation(s) in
RCA
: 2
]
[
Impact Index Per Article: 1.0
]
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Reference Citation Analysis
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[Indexed: 11/30/2022]
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3
Yun S
, Ding Y, Zhang Y, Christofides PD. Integration of feedback control and run-to-run control for plasma enhanced atomic layer deposition of hafnium oxide thin films.
Comput Chem Eng
2021. [DOI:
10.1016/j.compchemeng.2021.107267
]
[
Citation(s) in
RCA
: 4
]
[
Impact Index Per Article: 1.3
]
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[Indexed: 10/22/2022]
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4
Daoutidis P
, Mitsos A. AIChE Journal Special PSE issue on sustainable energy.
AIChE J
2019. [DOI:
10.1002/aic.16630
]
[
Citation(s) in
RCA
: 1
]
[
Impact Index Per Article: 0.2
]
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[Indexed: 12/23/2022]
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Affiliation(s)
Prodromos Daoutidis
Department of Chemical Engineering and Materials ScienceUniversity of Minnesota Minneapolis Minnesota
Alexander Mitsos
JARA‐ENERGY Jülich Germany
Aachener Verfahrenstechnik ‐ Process Systems Engineering (AVT.SVT)RWTH Aachen University Aachen Germany
Institute of Energy and Climate Research‐Energy Systems Engineering (IEK‐10)Forschungszentrum Jülich GmbH Jülich Germany
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