• Reference Citation Analysis
  • v
  • v
  • Find an Article
Find an Article (55694417)   Find a Category (125)   Find a Journal (6164)   Find a Scholar (4356)   Find an Academic Assistant (18)
Find an Article PDF (4639566)   Today's Articles (4419)   Subscriber (50290)
Citation(s) in RCA

Indexed Articles
Ranked By
Results Analysis
  •   
  •   
  •   
  •   
Results Analysis
Article Statistics
Refine
For: Crose M, Zhang W, Tran A, Christofides PD. Run‐to‐run control of PECVD systems: Application to a multiscale three‐dimensional CFD model of silicon thin film deposition. AIChE J 2018. [DOI: 10.1002/aic.16400] [Citation(s) in RCA: 5] [Impact Index Per Article: 0.8] [Reference Citation Analysis] [What about the content of this article? (0)] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/08/2022]
Number Cited by Other Article(s)
1
Machine learning-based run-to-run control of a spatial thermal atomic layer etching reactor. Comput Chem Eng 2022. [DOI: 10.1016/j.compchemeng.2022.108044] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/18/2022]
2
Yun S, Tom M, Ou F, Orkoulas G, Christofides PD. Multivariable run-to-run control of thermal atomic layer etching of aluminum oxide thin films. Chem Eng Res Des 2022. [DOI: 10.1016/j.cherd.2022.03.039] [Citation(s) in RCA: 2] [Impact Index Per Article: 1.0] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/30/2022]
3
Yun S, Ding Y, Zhang Y, Christofides PD. Integration of feedback control and run-to-run control for plasma enhanced atomic layer deposition of hafnium oxide thin films. Comput Chem Eng 2021. [DOI: 10.1016/j.compchemeng.2021.107267] [Citation(s) in RCA: 4] [Impact Index Per Article: 1.3] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 10/22/2022]
4
Daoutidis P, Mitsos A. AIChE Journal Special PSE issue on sustainable energy. AIChE J 2019. [DOI: 10.1002/aic.16630] [Citation(s) in RCA: 1] [Impact Index Per Article: 0.2] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 12/23/2022]
PrevPage 1 of 1 1Next
© 2004-2024 Baishideng Publishing Group Inc. All rights reserved. 7041 Koll Center Parkway, Suite 160, Pleasanton, CA 94566, USA