Numerical simulation of atomic layer deposition for thin deposit formation in a mesoporous substrate

Scaling-Up of Thin-Film Photoelectrodes for Solar Water Splitting Based on Atomic Layer Deposition

Atomic layer deposition (ALD) is an established method to prepare protective layers for Si-based photoelectrodes for photoelectrochemical (PEC) water splitting. Although ALD has been widely used in microelectronics and photovoltaics, it remains a great challenge to design simple and effective ALD systems to deposit large and uniform protective films for Si-based photoelectrodes with industrial sizes. This paper describes the design and realization of a simple ALD chamber configuration for photoelectrodes with large sizes, in which the influence of a gas redistributor over the gas flow and heat transfer during film growth was revealed by computational fluid dynamics simulations and experimental investigations. A simple circular baffle-type redistributor was proposed to establish a uniform gas flow field throughout the ALD reactor, resulting in a uniform temperature profile. With this simple baffle redistributor, the large-area Al₂O₃ monitor film (46 nm thickness) reached a good nonuniformity (Nu %) of 0.88% over a large area of 256 cm². This design enables the fabrication of large-scale photocathodes from standard industrial-grade 166 mm Si(100) wafers (276 cm²) by depositing 50 nm TiO₂ protective films with Nu % less than 5%. The obtained photocathode achieves a saturation current of 6.45 A with a hydrogen production rate of 43.2 mL/min under outdoor illumination. This work elucidates how flow pattern and heat transfer may influence the deposition of protective layers over large photoelectrodes, providing guidance for future industrial applications of PEC water splitting.

Zeolitic Imidazolate Framework Membranes: Novel Synthesis Methods and Progress Toward Industrial Use

In the last decade, zeolitic imidazolate frameworks (ZIFs) have been studied extensively for their potential as selective separation membranes. In this review, we highlight unique structural properties of ZIFs that allow them to achieve certain important separations, like that of propylene from propane, and summarize the state of the art in ZIF thin-film deposition on porous substrates and their modification by postsynthesis treatments. We also review the reported membrane performance for representative membrane synthesis approaches and attempt to rank the synthesis methods with respect to potential for scalability. To compare the dependence of membrane performance on membrane synthesis methods and operating conditions, we map out fluxes and separation factors of selected ZIF-8 membranes for propylene/propane separation. Finally, we provide future directions considering the importance of further improvements in scalability, cost effectiveness, and stable performance under industrially relevant conditions. Expected final online publication date for the Annual Review of Chemical and Biomolecular Engineering, Volume 13 is October 2022. Please see http://www.annualreviews.org/page/journal/pubdates for revised estimates.