Side-by-Side Patterning of Multiple Alkanethiolate Monolayers on Gold by Edge-Spreading Lithography

Fabrication of nano-patterned sapphire substrates by combining nanoimprint lithography with edge effects

A volcano-shaped nano-patterned sapphire substrate fabricated by combining nanoimprint lithography with edge effects.

Vibrational response of clusters of Fe3O4 nanoparticles patterned on glass surfaces investigated with magnetic sample modulation AFM

The vibration of Fe3O4 nanoparticles in response to an alternating magnetic field can be sensitively detected using contact mode atomic force microscopy (AFM) combined with selective modulation of magnetic domains. While imaging patterned samples of magnetic nanoparticles with contact mode AFM, a magnetic field was applied to drive sample vibration. The field altered in polarity and strength according to parameters of an AC current applied to a solenoid located under the sample. The vibration of Fe3O4 nanoparticles was detected by a nonmagnetic AFM tip to map the changes in frequency and amplitude of the vibrating sample at the level of individual Fe3O4 nanoparticles and clusters. Colloidal lithography, was used to prepare patterns of Fe3O4 nanoparticles on a glass surface using the basic steps of mixing, drying and removing the surface template of latex spheres. Monodisperse latex spheres were used to guide the deposition of magnetic nanoparticles in the spaces between the close-packed spheres of the latex film. With a mixture approach of "two-particle" lithography, 2D arrays of patterned aggregates of metal nanoparticles were generated which formed a periodic, well-defined arrangement that was suitable for subsequent characterizations with magnetic sample modulation (MSM).

Self-Assembled Polystyrene Beads for Templated Covalent Functionalization of Graphitic Substrates Using Diazonium Chemistry

A network of self-assembled polystyrene beads was employed as a lithographic mask during covalent functionalization reactions on graphitic surfaces to create nanocorrals for confined molecular self-assembly studies. The beads were initially assembled into hexagonal arrays at the air-liquid interface and then transferred to the substrate surface. Subsequent electrochemical grafting reactions involving aryl diazonium molecules created covalently bound molecular units that were localized in the void space between the nanospheres. Removal of the bead template exposed hexagonally arranged circular nanocorrals separated by regions of chemisorbed molecules. Small molecule self-assembly was then investigated inside the resultant nanocorrals using scanning tunneling microscopy to highlight localized confinement effects. Overall, this work illustrates the utility of self-assembly principles to transcend length scale gaps in the development of hierarchically patterned molecular materials.

Direct Fabrication of Monodisperse Silica Nanorings from Hollow Spheres - A Template for Core-Shell Nanorings

We report a new type of nanosphere colloidal lithography to directly fabricate monodisperse silica (SiO2) nanorings by means of reactive ion etching of hollow SiO2 spheres. Detailed TEM, SEM, and AFM structural analysis is complemented by a model describing the geometrical transition from hollow sphere to ring during the etching process. The resulting silica nanorings can be readily redispersed in solution and subsequently serve as universal templates for the synthesis of ring-shaped core-shell nanostructures. As an example we used silica nanorings (with diameter of ∼200 nm) to create a novel plasmonic nanoparticle topology, a silica-Au core-shell nanoring, by self-assembly of Au nanoparticles (<20 nm) on the ring's surface. Spectroscopic measurements and finite difference time domain simulations reveal high quality factor multipolar and antibonding surface plasmon resonances in the near-infrared. By loading different types of nanoparticles on the silica core, hybrid and multifunctional composite nanoring structures could be realized for applications such as MRI contrast enhancement, catalysis, drug delivery, plasmonic and magnetic hyperthermia, photoacoustic imaging, and biochemical sensing.

Templated fabrication of periodic arrays of metallic and silicon nanorings with complex nanostructures

Here we report a scalable colloidal templating approach for fabricating periodic arrays of metallic and silicon nanorings with complex nanostructures. Non-close-packed monolayer silica colloidal crystal prepared by a simple spin-coating technology is first used as template for making periodic arrays of mushroom-like composite nanostructures consisting of silica spherical caps and polymer stems. Subsequent metal sputtering and reactive ion etching lead to the formation of ordered asymmetric nickel nanorings which can be further utilized as etching masks for patterning periodic arrays of symmetric silicon nanorings. Moreover, periodic arrays of metallic and silicon concentric double nanorings can be fabricated by using the asymmetric nickel nanorings as templates. We have also demonstrated that gold concentric double nanorings show strong surface-enhanced Raman scattering (SERS) with a SERS enhancement factor of ∼9.5 × 10(7) from adsorbed benzenethiol molecules. The SERS enhancement and the electric field amplitude distribution surrounding gold concentric double nanorings have been calculated by using finite element electromagnetic modeling. This new colloidal templating technique is compatible with standard microfabrication and enables wafer-scale production of a variety of periodic nanorings with hierarchical structures that could find important technological applications in plasmonic and magnetic devices.

Particle Lithography Enables Fabrication of Multicomponent Nanostructures

Multicomponent nanostructures with individual geometries have attracted much attention because of their potential to carry out multiple functions synergistically. The current work reports a simple method using particle lithography to fabricate multicomponent nanostructures of metals, proteins, and organosiloxane molecules, each with its own geometry. Particle lithography is well-known for its capability to produce arrays of triangular-shaped nanostructures with novel optical properties. This paper extends the capability of particle lithography by combining a particle template in conjunction with surface chemistry to produce multicomponent nanostructures. The advantages and limitations of this approach will also be addressed.

Periodic arrays of metal nanorings and nanocrescents fabricated by a scalable colloidal templating approach

Here, we report a scalable bottom-up approach for fabricating periodic arrays of metal nanorings and nanocrescents. Wafer-scale monolayer silica colloidal crystals with an unusual non-close-packed structure prepared by a simple and rapid spin-coating technology are used as both etching and shadowing masks to create nanoring-shaped trenches in between templated polymer posts and sacrificial nanoholes. Directional deposition of metals in the trenches followed by liftoff of the polymer posts and the sacrificial nanoholes results in forming ordered metal nanorings. The inner and outer radii of the final nanorings are determined by the sizes of the templated polymer posts and the silica microspheres which can be easily adjusted by tuning the spin-coating and templating conditions. Most importantly, by simply controlling the tilt angle of the substrate toward the directional metal beams, continuous geometric transition from concentric nanorings to eccentric nanorings to nanocrescents can be achieved. This new colloidal templating approach is compatible with standard semiconductor microfabrication, promising for mass-production and on-chip integration of periodic nanorings and nanocrescents for a wide spectrum of technological applications ranging from nanooptical devices and ultrasensitive biosensing to magnetic memories and logic circuits.

Directed surface assembly of 4-(chloromethyl)phenyltrichlorosilane: self-polymerization within spatially confined sites of Si(111) viewed by atomic force microscopy

The self-polymerization of 4-chloromethylphenyltrichlorosilane (CMPS) was studied within spatially confined nanoholes on Si(111) using atomic force microscopy (AFM). Surface platforms of nanoholes were fabricated within a film of octadecyltrichlorosilane using immersion particle lithography. A heating step was developed to temporarily solder the silica mesospheres to the surface, to enable sustained immersion of mesoparticle masks in solvent solutions for the particle lithography protocol. Substrates with a film of mesospheres were heated briefly to anneal the particles to the surface, followed by a rinsing step with sonication to remove the silica beads to generate nanopores within an octadecyltrichlorosilane (OTS) film. Nanopatterned surface templates were immersed in CMPS solutions and removed at different time points to monitor the successive growth of nanostructures over time. Analysis of AFM images after progressive exposure of the nanoholes to solutions of CMPS provided quantitative information and details of the surface self-assembly reaction. Pillar nanostructures of CMPS with different heights and diameters were produced exclusively within the exposed areas of the substrates. Throughout the reaction, the surrounding matrix of OTS-passivated substrate did not evidence growth of CMPS; the surface assembly of CMPS was strictly confined within the nanopores. The diameter of the CMPS nanostructures grew to match the initial sizes of the confined areas of Si(111) but did not spread out beyond the edges of the OTS nanocontainers. However, the vertical growth of columns was affected by the initial size of the sites of uncovered substrate, evidencing a direct correspondence; larger sites produced taller structures, and correspondingly the growth of shorter structures was observed within smaller nanoholes. The heights of CMPS nanostructures indicate that multilayers were formed, with taller columns generated after longer immersion times. These experiments offer intriguing possibilities for using particle lithography as a general approach for nanoscale studies of molecular self-assembly.

From the bottom up: dimensional control and characterization in molecular monolayers

Self-assembled monolayers are a unique class of nanostructured materials, with properties determined by their molecular lattice structures, as well as the interfaces with their substrates and environments. As with other nanostructured materials, defects and dimensionality play important roles in the physical, chemical, and biological properties of the monolayers. In this review, we discuss monolayer structures ranging from surfaces (two-dimensional) down to single molecules (zero-dimensional), with a focus on applications of each type of structure, and on techniques that enable characterization of monolayer physical properties down to the single-molecule scale.

Lithographically patterned electrodeposition of gold, silver, and nickel nanoring arrays with widely tunable near-infrared plasmonic resonances

A novel low-cost nanoring array fabrication method that combines the process of lithographically patterned nanoscale electrodeposition (LPNE) with colloidal lithography is described. Nanoring array fabrication was accomplished in three steps: (i) a thin (70 nm) sacrificial nickel or silver film was first vapor-deposited onto a plasma-etched packed colloidal monolayer; (ii) the polymer colloids were removed from the surface, a thin film of positive photoresist was applied, and a backside exposure of the photoresist was used to create a nanohole electrode array; (iii) this array of nanoscale cylindrical electrodes was then used for the electrodeposition of gold, silver, or nickel nanorings. Removal of the photoresist and sacrificial metal film yielded a nanoring array in which all of the nanoring dimensions were set independently: the inter-ring spacing was fixed by the colloidal radius, the radius of the nanorings was controlled by the plasma etching process, and the width of the nanorings was controlled by the electrodeposition process. A combination of scanning electron microscopy (SEM) measurements and Fourier transform near-infrared (FT-NIR) absorption spectroscopy were used to characterize the nanoring arrays. Nanoring arrays with radii from 200 to 400 nm exhibited a single strong NIR plasmonic resonance with an absorption maximum wavelength that varied linearly from 1.25 to 3.33 μm as predicted by a simple standing wave model linear antenna theory. This simple yet versatile nanoring array fabrication method was also used to electrodeposit concentric double gold nanoring arrays that exhibited multiple NIR plasmonic resonances.

Colloidal lithography for fabricating patterned polymer-brush microstructures

We exploit a series of robust, but simple and convenient colloidal lithography (CL) approaches, using a microsphere array as a mask or as a guiding template, and combine this with surface-initiated atom-transfer radical polymerization (SI-ATRP) to fabricate patterned polymer-brush microstructures. The advantages of the CL technique over other lithographic approaches for the fabrication of patterned polymer brushes are (i) that it can be carried out with commercially available colloidal particles at a relatively low cost, (ii) that no complex equipment is required to create the patterned templates with micro- and nanoscale features, and (iii) that polymer brush features are controlled simply by changing the size or chemical functionality of the microspheres or the substrate.

Self-assembly of octadecyltrichlorosilane: Surface structures formed using different protocols of particle lithography

Particle lithography offers generic capabilities for the high-throughput fabrication of nanopatterns from organosilane self-assembled monolayers, which offers the opportunity to study surface-based chemical reactions at the molecular level. Nanopatterns of octadecyltrichlorosilane (OTS) were prepared on surfaces of Si(111) using designed protocols of particle lithography combined with either vapor deposition, immersion, or contact printing. Changing the physical approaches for applying molecules to masked surfaces produced OTS nanostructures with different shapes and heights. Ring nanostructures, nanodots and uncovered pores of OTS were prepared using three protocols, with OTS surface coverage ranging from 10% to 85%. Thickness measurements from AFM cursor profiles were used to evaluate the orientation and density of the OTS nanostructures. Differences in the thickness and morphology of the OTS nanostructures are disclosed based on atomic force microscopy (AFM) images. Images of OTS nanostructures prepared on Si(111) that were generated by the different approaches provide insight into the self-assembly mechanism of OTS, and particularly into the role of water and solvents in hydrolysis and silanation.

Orthogonal functionalization of silicon substrates using self-assembled monolayers

A fabrication process for multifunctional surfaces is designed leading to five different functional moieties (amine, thiol, carboxylic acid, fluoro, and methyl) being present on a single structured surface. The multifunctional surface is created by combining UV-ozone patterning, electro-oxidative lithography, the local deposition of self-assembled monolayers (SAMs), and surface modification schemes. Besides the characterization with conventional surface-sensitive techniques, the nature of the locally functionalized regions is demonstrated by self-assembly of three different probe nanomaterials (Si nanoparticles, Au nanoparticles, and hydroxyl functionalized micelles). A versatile fabrication approach for complex surfaces with addressable functionalities can be created, and it was possible to integrate five different functionalized areas on one substrate.

Engineering the spatial selectivity of surfaces at the nanoscale using particle lithography combined with vapor deposition of organosilanes

Particle lithography is a practical approach to generate millions of organosilane nanostructures on various surfaces, without the need for vacuum environments or expensive instrumentation. This report describes a stepwise chemistry route to prepare organosilane nanostructures and then apply the patterns as a spatially selective foundation to attach gold nanoparticles. Sites with thiol terminal groups were sufficiently small to localize the attachment of clusters of 2-5 nanoparticles. Basic steps such as centrifuging, drying, heating, and rinsing were used to generate arrays of regular nanopatterns. Close-packed films of monodisperse latex spheres can be used as an evaporative mask to spatially direct the placement of nanoscopic amounts of water on surfaces. Vapor phase organosilanes deposit selectively at areas of the surface containing water residues to generate nanostructures with regular thickness, geometry, and periodicity as revealed in atomic force microscopy images. The area of contact underneath the mesospheres is effectively masked for later synthetic steps, providing exquisite control of surface coverage and local chemistry. By judicious selection in designing the terminal groups of organosilanes, surface sites can be engineered at the nanoscale for building more complex structures. The density of the nanopatterns and surface coverage scale predictably with the diameter of the mesoparticle masks. The examples presented definitively illustrate the capabilities of using the chemistry of molecularly thin films of organosilanes to spatially define the selectivity of surfaces at very small size scales.

Nanostructures of octadecyltrisiloxane self-assembled monolayers produced on Au111 using particle lithography

Preparing high-quality self-assembled monolayers (SAMs) of organosilanes on conductive metal substrates such as gold is problematic because of the hydrophobic nature of the surface under ambient conditions. Trace amounts of water are required for a surface hydrolysis reaction to form siloxane bridges to the metal substrate. We describe an approach using sequential steps of ultraviolet (UV) irradiation, particle lithography, and chemical vapor deposition of octadecyltrichlorosilane (OTS) to successfully prepare silane nanostructures on Au111 surfaces. Pretreatment of gold films with UV irradiation renders the surface to be sufficiently hydrophilic for particle lithography. Close-packed films of monodisperse latex mesospheres provide an evaporative mask to spatially direct the placement of nanoscopic amounts of water on surfaces. Vapor-phase organosilanes deposit selectively at areas of the surface containing water residues to produce millions of nanopatterns with regular thickness, geometry, and periodicity. Atomic force microscopy (AFM) images reveal that OTS binding is localized to areas defined by water residues. The spacing between adjacent nanopatterns is determined by the periodicity of the latex mask; however, the dimensions of the nanostructures are confined to a narrow contact area of the water meniscus, which surrounds the base of the latex spheres. The siloxane nanostructures on Au111 furnish an excellent model surface for AFM characterizations, as demonstrated with current-sensing measurements.

Evaporation-induced assembly of quantum dots into nanorings

Herein, we demonstrate the controlled formation of two-dimensional periodic arrays of ring-shaped nanostructures assembled from CdSe semiconductor quantum dots (QDs). The patterns were fabricated by using an evaporative templating method. This involves the introduction of an aqueous solution containing both quantum dots and polystyrene microspheres onto the surface of a planar hydrophilic glass substrate. The quantum dots became confined to the meniscus of the microspheres during evaporation, which drove ring assembly via capillary forces at the polystyrene sphere/glass substrate interface. The geometric parameters for nanoring formation could be controlled by tuning the size of the microspheres and the concentration of the QDs employed. This allowed hexagonal arrays of nanorings to be formed with thicknesses ranging from single dot necklaces to thick multilayer structures over surface areas of many square millimeters. Moreover, the diameter of the ring structures could be simultaneously controlled. A simple model was employed to explain the forces involved in the formation of nanoparticle nanorings.

Mechanism of reactive wetting and direct visual determination of the kinetics of self-assembled monolayer formation

Reactive wetting (RW) of alkane thiols and disulfides on gold is studied experimentally using the wet stamping technique. Theoretical description based on Langevin dynamics is developed to explain the experimental results and to clarify the physical processes underlying RW. In this description, thermal fluctuations of the three-phase contact line combine with the surface reaction to gradually build a low-energy self-assembled monolayer (SAM) onto which the front propagates. The results of the model match the experiments and allow determination of the kinetic rate constants of SAM formation.

Controlling the surface coverage and arrangement of proteins using particle lithography

Aims: The applicability of particle lithography with monodisperse mesospheres is tested with various proteins to control the surface coverage and dimensions of protein nanopatterns. Methods & Materials: The natural self-assembly of monodisperse spheres provides an efficient, high-throughput route to prepare protein nanopatterns. Mesospheres assemble spontaneously into organized crystalline layers when dried on flat substrates, which supply a structural frame or template to direct the placement of proteins. The template particles are displaced with a simple rinsing step to disclose periodic arrays of protein nanopatterns on surfaces. Results & Discussion: The proteins are attached securely to the surface, forming nanopatterns with a measured thickness of a single layer. The morphology and diameter of the protein nanostructures can be tailored by selecting the diameter of the mesospheres and choosing the protein concentration. Conclusions: Particle lithography is shown to be a practical, highly reproducible method for patterning proteins on surfaces of mica, glass and gold. High-throughput patterning was achieved with ferritin, apoferritin, bovine serum albumin and immunoglobulin-G. Depending on the ratio of proteins to mesospheres, either porous films or ring structures were produced. This approach can be applied for fundamental investigations of protein-binding interactions of biological systems in surface-bound bioassays and biosensor surfaces.

Elucidating the role of surface hydrolysis in preparing organosilane nanostructures via particle lithography

A new method of particle lithography is described for preparing rings or nanoporous films of organosilanes. Millions of exquisitely uniform and precisely spaced nanostructures with designed surface chemistry can be rapidly produced using vapor deposition through mesoparticle masks. Nanoscopic amounts of water are essential for initiating surface hydrosilation. Thus, the key step for preparing covalently bonded nanostructures of organosilanes is to control drying parameters to spatially direct the placement of water on surfaces.

Self-assembled monolayers of alkanoic acids on the native oxide surface of SS316L by solution deposition

Stainless steel 316L is a widely used biomaterial substrate whose biocompatibility could be improved by surface modification. As a first step in this process, self-assembled monolayers of octanoic acid, octadecylcarboxylic acid, 16-hydroxyhexadecanoic acid, 12-aminododecanoic acid, and 1,12-dodecane dicarboxylic acid have been formed on the native oxide surface of stainless steel 316L by a simple, one-step solution deposition method. The ordering, close-packing, and coverage of the monolayers formed were characterized by diffuse reflectance infrared spectroscopy, contact angle measurements, and atomic force microscopy. The same procedure was applicable for all long alkyl chain carboxylic acids. This process formed chemically and mechanically stable monolayers. These carboxylic acids formed a bidentate bond with the stainless steel substrate. Robust chemical attachment of the acids to stainless steel through a simple process provides a stepping stone to improving the biocompatibility of stainless steel 316L.

Controlled strain on a double-templated textured polymer film: a new approach to patterned surfaces with bravais lattices and chains

A double template-assisted fabrication method for making surface patterns with tunable lattice geometries on a polymer surface is reported. This technique is based on a locally nonuniform strain produced in a double-templated polymer film that has a strong modulation in thickness. It can produce all 2D primitive Bravais lattices as well as chains on the surface of a polymer. The lattice parameters are controllable with nanoprecision by varying the direction and amount of the applied strain.

Arrays of covalently bonded single gold nanoparticles on thiolated molecular assemblies

A simple approach to form arrays of covalently bonded single gold nanoparticles (AuNPs) is demonstrated. Asymmetric molecular assemblies composed of two layers of rigid aromatic molecules with different structures, arranged in hexagonal arrays on a template produced by edge-spreading lithography, are used to guide the assembly of AuNPs. Arrays of single AuNPs are achieved by taking advantage of the interplay of electrostatic interactions and covalent bonding in conjunction with the positional constraint on the template. Schiff base chemistry is highlighted in the surface chemical reaction to selectively modify nanoscale surface features with high yield.

Nanomachining by colloidal lithography

Colloidal lithography is a recently emerging field; the evolution of this simple technique is still in progress. Recent advances in this area have developed a variety of practical routes of colloidal lithography, which have great potential to replace, at least partially, complex and high-cost advanced lithographic techniques. This Review presents the state of the art of colloidal lithography and consists of three main parts, beginning with synthetic routes to monodisperse colloids and their self-assembly with low defect concentrations, which are used as lithographic masks. Then, we will introduce the modification of the colloidal masks using reactive ion etching (RIE), which produces a variety of nanoscopic features and multifaceted particles. Finally, a few prospective applications of colloidal lithography will be discussed.

Nanopatterned self-assembled monolayers

We report on the fabrication of chemically nanopatterned gold surfaces by combining electron-beam lithography with gas and liquid phase thiolization. The line-edge roughness of the patterns is ∼4 nm, corresponding to a limiting feature size in the range of 15 nm. Indications for a lower packing density of the self-assembled monolayers grown in the nanofeatures are given, and evidences for the bleeding of thiols along the grain boundaries of the gold substrate are displayed. A comparison is provided between nanopatterned thiol and silane monolayers on gold and on silicon wafers, respectively. The line-edge roughnesses are shown to be close to each other for these two systems, indicating that the limiting step is currently the lithography step, suggesting possible improvement of the resolution. The advantages and drawbacks of thiol versus silane monolayers are finally discussed with respect to the formation of chemically nanopatterned surfaces.