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Lee J, Woo G, Lee G, Jeon J, Lee S, Wang Z, Shin H, Lee GW, Kim YJ, Lee DH, Kim MJ, Kim E, Seok H, Cho J, Kang B, No YS, Jang WJ, Kim T. Ultrastable 3D Heterogeneous Integration via N-Heterocyclic Carbene Self-Assembled Nanolayers. ACS APPLIED MATERIALS & INTERFACES 2024; 16:35505-35515. [PMID: 38935928 DOI: 10.1021/acsami.4c04665] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/29/2024]
Abstract
The commercialization of 3D heterogeneous integration through hybrid bonding has accelerated, and accordingly, Cu-polymer bonding has gained significant attention as a means of overcoming the limitations of conventional Cu-SiO2 hybrid bonding, offering high compatibility with other fabrication processes. Polymers offer robust bonding strength and a low dielectric constant, enabling high-speed signal transmission with high reliability, but suffer from low thermomechanical stability. Thermomechanical stability of polymers was not achieved previously because of thermal degradation and unstable anchoring. To overcome these limitations, wafer-scale Cu-polymer bonding via N-heterocyclic carbene (NHC) nanolayers was presented for 3D heterogeneous integration, affording ultrastable packing density, crystallinity, and thermal properties. NHC nanolayers were deposited on copper electrodes via electrochemical deposition, and wafer-scale 3D heterogeneous integration was achieved by adhesive bonding at 170 °C for 1 min. Ultrastable conductivity and thermomechanical properties were observed by the spatial mapping of conductivity, work function, and force-distance curves. With regard to the characterization of NHC nanolayers, low-temperature bonding, robust corrosion inhibition, enhanced electrical conductivity, back-end-of-line process compatibility, and fabrication process reduction, NHC Cu/polymer bonding provides versatile advances in 3D heterogeneous integration, indicating that NHC Cu/polymer bonding can be utilized as a platform for future 3D vertical chip architectures.
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Affiliation(s)
- Jinhyoung Lee
- School of Mechanical Engineering, Sungkyunkwan University (SKKU), Suwon-si, Gyeonggi-do 16419, Republic of Korea
- Center for Quantum Nanoscience, Institute for Basic Science (IBS), Seoul 03760, Republic of Korea
| | - Gunhoo Woo
- SKKU Advanced Institute of Nanotechnology (SAINT), Sungkyunkwan University, Suwon-si, Gyeonggi-do 16419, Republic of Korea
- Department of Nano Science and Technology, Sungkyunkwan University, Suwon-si, Gyeonggi-do 16419, Republic of Korea
| | - Gyuyoung Lee
- School of Mechanical Engineering, Sungkyunkwan University (SKKU), Suwon-si, Gyeonggi-do 16419, Republic of Korea
| | - Jongyeong Jeon
- School of Mechanical Engineering, Sungkyunkwan University (SKKU), Suwon-si, Gyeonggi-do 16419, Republic of Korea
| | - Seunghwan Lee
- School of Mechanical Engineering, Sungkyunkwan University (SKKU), Suwon-si, Gyeonggi-do 16419, Republic of Korea
| | - Ziyang Wang
- School of Mechanical Engineering, Sungkyunkwan University (SKKU), Suwon-si, Gyeonggi-do 16419, Republic of Korea
| | - Hyelim Shin
- Department of Semiconductor Convergence Engineering, Suwon-si, Gyeonggi-do 16419, Republic of Korea
| | - Gil-Woo Lee
- School of Mechanical Engineering, Sungkyunkwan University (SKKU), Suwon-si, Gyeonggi-do 16419, Republic of Korea
- Department of Physics, Konkuk University, Seoul 05029, Republic of Korea
| | - Yeon-Ji Kim
- School of Mechanical Engineering, Sungkyunkwan University (SKKU), Suwon-si, Gyeonggi-do 16419, Republic of Korea
- Department of Physics, Konkuk University, Seoul 05029, Republic of Korea
| | - Do-Hyun Lee
- School of Mechanical Engineering, Sungkyunkwan University (SKKU), Suwon-si, Gyeonggi-do 16419, Republic of Korea
- Department of Physics, Konkuk University, Seoul 05029, Republic of Korea
| | - Min-Jae Kim
- SKKU Advanced Institute of Nanotechnology (SAINT), Sungkyunkwan University, Suwon-si, Gyeonggi-do 16419, Republic of Korea
- Department of Nano Science and Technology, Sungkyunkwan University, Suwon-si, Gyeonggi-do 16419, Republic of Korea
| | - Eungchul Kim
- AVP Process Development Team, Samsung Electronics, Chungcheongnam-do, Cheonan-si 31086, South Korea
| | - Hyunho Seok
- SKKU Advanced Institute of Nanotechnology (SAINT), Sungkyunkwan University, Suwon-si, Gyeonggi-do 16419, Republic of Korea
- Department of Nano Science and Technology, Sungkyunkwan University, Suwon-si, Gyeonggi-do 16419, Republic of Korea
| | - Jinill Cho
- School of Mechanical Engineering, Sungkyunkwan University (SKKU), Suwon-si, Gyeonggi-do 16419, Republic of Korea
| | - Boseok Kang
- SKKU Advanced Institute of Nanotechnology (SAINT), Sungkyunkwan University, Suwon-si, Gyeonggi-do 16419, Republic of Korea
- Department of Nano Science and Technology, Sungkyunkwan University, Suwon-si, Gyeonggi-do 16419, Republic of Korea
- Department of Nano Engineering, Sungkyunkwan University, Suwon-si, Gyeonggi-do 16419, Republic of Korea
| | - You-Shin No
- Department of Physics, Konkuk University, Seoul 05029, Republic of Korea
| | - Won-Jun Jang
- Center for Quantum Nanoscience, Institute for Basic Science (IBS), Seoul 03760, Republic of Korea
- Department of Physics, Ewha Womans University, Seoul 03760, Republic of Korea
| | - Taesung Kim
- School of Mechanical Engineering, Sungkyunkwan University (SKKU), Suwon-si, Gyeonggi-do 16419, Republic of Korea
- SKKU Advanced Institute of Nanotechnology (SAINT), Sungkyunkwan University, Suwon-si, Gyeonggi-do 16419, Republic of Korea
- Department of Nano Science and Technology, Sungkyunkwan University, Suwon-si, Gyeonggi-do 16419, Republic of Korea
- Department of Semiconductor Convergence Engineering, Suwon-si, Gyeonggi-do 16419, Republic of Korea
- Department of Nano Engineering, Sungkyunkwan University, Suwon-si, Gyeonggi-do 16419, Republic of Korea
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Ren J, Das M, Osthues H, Nyenhuis M, Schulze Lammers B, Kolodzeiski E, Mönig H, Amirjalayer S, Fuchs H, Doltsinis NL, Glorius F. The Electron-Rich and Nucleophilic N-Heterocyclic Imines on Metal Surfaces: Binding Modes and Interfacial Charge Transfer. J Am Chem Soc 2024; 146:7288-7294. [PMID: 38456796 DOI: 10.1021/jacs.3c11738] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 03/09/2024]
Abstract
The strongly electron-donating N-heterocyclic imines (NHIs) have been employed as excellent surface anchors for the thermodynamic stabilization of electron-deficient species due to their enhanced nucleophilicity. However, the binding mode and interfacial property of these new ligands are still unclear, representing a bottleneck for advanced applications in surface functionalization and catalysis. Here, NHIs with different side groups have been rationally designed, synthesized, and analyzed on various metal surfaces (Cu, Ag). Our results reveal different binding modes depending on the molecular structure and metal surface. The molecular design enables us to achieve a flat-lying or upright configuration and even a transition between these two binding modes depending on the coverage and time. Importantly, the two binding modes exhibit different degrees of interfacial charge transfer between the molecule and the surface. This study provides essential microscopic insight into the NHI adsorption geometry and interfacial charge transfer for the optimization of heterogeneous catalysts in coordination chemistry.
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Affiliation(s)
- Jindong Ren
- CAS Key Laboratory of Nanophotonic Materials and Devices, CAS Key Laboratory of Standardization and Measurement for Nanotechnology, National Center for Nanoscience and Technology, Beijing 100190, P.R. China
- University of Chinese Academy of Sciences, Beijing 100190, P.R. China
| | - Mowpriya Das
- Organisch-Chemisches Institut, Universität Münster, Corrensstraße 40, 48149 Münster, Germany
| | - Helena Osthues
- Institute for Solid State Theory and Center for Multiscale Theory and Computation, Universität Münster, Wilhelm-Klemm-Straße 10, 48149 Münster, Germany
| | - Marvin Nyenhuis
- Institute for Solid State Theory and Center for Multiscale Theory and Computation, Universität Münster, Wilhelm-Klemm-Straße 10, 48149 Münster, Germany
| | - Bertram Schulze Lammers
- Physikalisches Institut, Universität Münster, Wilhelm-Klemm-Straße 10, 48149 Münster, Germany
- Center for Nanotechnology, Heisenbergstraße 11, 48149 Münster, Germany
| | - Elena Kolodzeiski
- Physikalisches Institut, Universität Münster, Wilhelm-Klemm-Straße 10, 48149 Münster, Germany
- Center for Nanotechnology, Heisenbergstraße 11, 48149 Münster, Germany
| | - Harry Mönig
- Physikalisches Institut, Universität Münster, Wilhelm-Klemm-Straße 10, 48149 Münster, Germany
- Center for Nanotechnology, Heisenbergstraße 11, 48149 Münster, Germany
| | - Saeed Amirjalayer
- Institute for Solid State Theory and Center for Multiscale Theory and Computation, Universität Münster, Wilhelm-Klemm-Straße 10, 48149 Münster, Germany
| | - Harald Fuchs
- Physikalisches Institut, Universität Münster, Wilhelm-Klemm-Straße 10, 48149 Münster, Germany
- Center for Nanotechnology, Heisenbergstraße 11, 48149 Münster, Germany
| | - Nikos L Doltsinis
- Institute for Solid State Theory and Center for Multiscale Theory and Computation, Universität Münster, Wilhelm-Klemm-Straße 10, 48149 Münster, Germany
| | - Frank Glorius
- Organisch-Chemisches Institut, Universität Münster, Corrensstraße 40, 48149 Münster, Germany
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3
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Lee DS, Singh I, Veinot AJ, Aloisio MD, Lomax JT, Ragogna PJ, Crudden CM. Mesoionic carbene-based self-assembled monolayers on gold. Chem Sci 2024; 15:2480-2485. [PMID: 38362421 PMCID: PMC10866350 DOI: 10.1039/d3sc04720b] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Grants] [Track Full Text] [Download PDF] [Figures] [Journal Information] [Subscribe] [Scholar Register] [Received: 09/06/2023] [Accepted: 12/10/2023] [Indexed: 02/17/2024] Open
Abstract
N-Heterocyclic carbenes (NHC) have been widely studied as ligands for surface chemistry, and have shown advantages compared to existing ligands (e.g. thiols). Herein, we introduce mesoionic carbenes (MICs) as a new type of surface ligand. MICs exhibit higher σ-donor ability compared to typical NHCs, yet they have received little attention in the area of surface chemistry. The synthesis of MICs derived from imidazo[1,2-a]pyridine was established and fully characterized by spectroscopic methods. The self-assembly of these MICs on gold was analyzed by X-ray photoelectron spectroscopy (XPS). Additionally, XPS was used to compare bonding ability in MICs compared to the typical NHCs. These results show that MIC overlayers on gold are robust, resistant to replacement by NHCs, and may be superior to NHCs for applications that require even greater levels of robustness.
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Affiliation(s)
- Dianne S Lee
- Department of Chemistry, Queen's University 90 Bader Lane Kingston Ontario K7L 3N6 Canada
- Carbon to Metal Coating Institute, C2MCI, Queen's University 90 Bader Lane Kingston Ontario K7L 4V1 Canada
| | - Ishwar Singh
- Department of Chemistry, Queen's University 90 Bader Lane Kingston Ontario K7L 3N6 Canada
- Carbon to Metal Coating Institute, C2MCI, Queen's University 90 Bader Lane Kingston Ontario K7L 4V1 Canada
| | - Alex J Veinot
- Carbon to Metal Coating Institute, C2MCI, Queen's University 90 Bader Lane Kingston Ontario K7L 4V1 Canada
- Department of Chemistry, Western University London Ontario N6A 3K7 Canada
- Surface Science Western 999 Collip Cir London Ontario N6G 0J3 Canada
| | - Mark D Aloisio
- Department of Chemistry, Queen's University 90 Bader Lane Kingston Ontario K7L 3N6 Canada
- Carbon to Metal Coating Institute, C2MCI, Queen's University 90 Bader Lane Kingston Ontario K7L 4V1 Canada
| | - Justin T Lomax
- Carbon to Metal Coating Institute, C2MCI, Queen's University 90 Bader Lane Kingston Ontario K7L 4V1 Canada
- Department of Chemistry, Western University London Ontario N6A 3K7 Canada
- Surface Science Western 999 Collip Cir London Ontario N6G 0J3 Canada
| | - Paul J Ragogna
- Carbon to Metal Coating Institute, C2MCI, Queen's University 90 Bader Lane Kingston Ontario K7L 4V1 Canada
- Department of Chemistry, Western University London Ontario N6A 3K7 Canada
| | - Cathleen M Crudden
- Department of Chemistry, Queen's University 90 Bader Lane Kingston Ontario K7L 3N6 Canada
- Carbon to Metal Coating Institute, C2MCI, Queen's University 90 Bader Lane Kingston Ontario K7L 4V1 Canada
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Zhang T, Khomane SB, Singh I, Crudden CM, McBreen PH. N-heterocyclic carbene adsorption states on Pt(111) and Ru(0001). Phys Chem Chem Phys 2024; 26:4083-4090. [PMID: 38226886 DOI: 10.1039/d3cp03539e] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 01/17/2024]
Abstract
N-heterocyclic carbene ligands (NHCs) are increasingly used to tune the properties of metal surfaces. The generally greater chemical and thermal robustness of NHCs on gold, as compared to thiolate surface ligands, underscores their potential for a range of applications. While much is now known about the adsorption geometry, overlayer structure, dynamics, and stability of NHCs on coinage elements, especially gold and copper, much less is known about their interaction with the surfaces of Pt-group metals, despite the importance of such metals in catalysis and electrochemistry. In this study, reflection absorption infrared spectroscopy (RAIRS) is used to probe the structure of benzimidazolylidene NHC ligands on Pt(111) and Ru(0001). The experiments exploit the intense absorption peaks of a CF3 substituent on the phenyl ring of the NHC backbone to provide unprecedented insight into adsorption geometry and chemical stability. The results also permit comparison with literature data for NHC ligands on Au(111) and to DFT predictions for NHCs on Pt(111) and Ru(0001), thereby greatly extending the known surface chemistry of NHCs and providing much needed molecular information for the design of metal-organic hybrid materials involving strongly reactive metals.
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Affiliation(s)
- Tianchi Zhang
- Département de chimie et CCVC, Université Laval, Québec (Que), Canada, G1K OA6.
| | - Sonali B Khomane
- Département de chimie et CCVC, Université Laval, Québec (Que), Canada, G1K OA6.
| | - Ishwar Singh
- Department of Chemistry, Queen's University, 90 Bader Lane, Kingston, Ontario, Canada, K7L 3N6.
| | - Cathleen M Crudden
- Department of Chemistry, Queen's University, 90 Bader Lane, Kingston, Ontario, Canada, K7L 3N6.
| | - Peter H McBreen
- Département de chimie et CCVC, Université Laval, Québec (Que), Canada, G1K OA6.
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Knecht P, Meier D, Reichert J, Duncan DA, Schwarz M, Küchle JT, Lee T, Deimel PS, Feulner P, Allegretti F, Auwärter W, Médard G, Seitsonen AP, Barth JV, Papageorgiou AC. N-Heterocyclic Carbenes: Molecular Porters of Surface Mounted Ru-Porphyrins. Angew Chem Int Ed Engl 2022; 61:e202211877. [PMID: 36200438 PMCID: PMC10092334 DOI: 10.1002/anie.202211877] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Received: 08/11/2022] [Indexed: 11/30/2022]
Abstract
Ru-porphyrins act as convenient pedestals for the assembly of N-heterocyclic carbenes (NHCs) on solid surfaces. Upon deposition of a simple NHC ligand on a close packed Ru-porphyrin monolayer, an extraordinary phenomenon can be observed: Ru-porphyrin molecules are transferred from the silver surface to the next molecular layer. We have investigated the structural features and dynamics of this portering process and analysed the associated binding strengths and work function changes. A rearrangement of the molecular layer is induced by the NHC uptake: the NHC selective binding to the Ru causes the ejection of whole porphyrin molecules from the molecular layer on silver to the layer on top. This reorganisation can be reversed by thermally induced desorption of the NHC ligand. We anticipate that the understanding of such mass transport processes will have crucial implications for the functionalisation of surfaces with carbenes.
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Affiliation(s)
- Peter Knecht
- Physics Department E20Technical University of MunichJames Franck Straße 185748GarchingGermany
| | - Dennis Meier
- Physics Department E20Technical University of MunichJames Franck Straße 185748GarchingGermany
| | - Joachim Reichert
- Physics Department E20Technical University of MunichJames Franck Straße 185748GarchingGermany
| | - David A. Duncan
- Diamond Light SourceHarwell Science and Innovation CampusDidcotOX11 0QXUK
| | - Martin Schwarz
- Physics Department E20Technical University of MunichJames Franck Straße 185748GarchingGermany
| | - Johannes T. Küchle
- Physics Department E20Technical University of MunichJames Franck Straße 185748GarchingGermany
| | - Tien‐Lin Lee
- Diamond Light SourceHarwell Science and Innovation CampusDidcotOX11 0QXUK
| | - Peter S. Deimel
- Physics Department E20Technical University of MunichJames Franck Straße 185748GarchingGermany
| | - Peter Feulner
- Physics Department E20Technical University of MunichJames Franck Straße 185748GarchingGermany
| | - Francesco Allegretti
- Physics Department E20Technical University of MunichJames Franck Straße 185748GarchingGermany
| | - Willi Auwärter
- Physics Department E20Technical University of MunichJames Franck Straße 185748GarchingGermany
| | - Guillaume Médard
- Chair of Proteomics and BioanalyticsTechnical University of MunichEmil Erlenmeyer Forum 585354FreisingGermany
| | - Ari Paavo Seitsonen
- Département de ChimieÉcole Normale Supérieure24 rue Lhomond75005ParisFrance
- Université de recherche Paris-Sciences-et-LettresSorbonne UniversitéCentre National de la Recherche Scientifique75005ParisFrance
| | - Johannes V. Barth
- Physics Department E20Technical University of MunichJames Franck Straße 185748GarchingGermany
| | - Anthoula C. Papageorgiou
- Physics Department E20Technical University of MunichJames Franck Straße 185748GarchingGermany
- Department of ChemistryLaboratory of Physical ChemistryNational and Kapodistrian University of AthensPanepistimiopolis157 71AthensGreece
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Schiwek CH, Jandl C, Bach T. All- cis Saturated 2,5-Diketopiperazines by a Diastereoselective Rhodium-Catalyzed Arene Hydrogenation. ACS Catal 2022. [DOI: 10.1021/acscatal.2c00400] [Citation(s) in RCA: 1] [Impact Index Per Article: 0.5] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 12/27/2022]
Affiliation(s)
- Christian H. Schiwek
- Technical University Munich, School of Natural Sciences, Department of Chemistry and Catalysis Research Center, Lichtenbergstrasse 4, 85747 Garching, Germany
| | - Christian Jandl
- Technical University Munich, School of Natural Sciences, Department of Chemistry and Catalysis Research Center, Lichtenbergstrasse 4, 85747 Garching, Germany
| | - Thorsten Bach
- Technical University Munich, School of Natural Sciences, Department of Chemistry and Catalysis Research Center, Lichtenbergstrasse 4, 85747 Garching, Germany
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