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For: Bodas DS, Patil SJ, Mandale AB, Gangal SA. RF sputter deposition of poly(tetrafluoroethylene) films as masking materials for silicon micromachining. J Appl Polym Sci 2003. [DOI: 10.1002/app.13191] [Citation(s) in RCA: 2] [Impact Index Per Article: 0.1] [Reference Citation Analysis] [What about the content of this article? (0)] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/10/2022]

For:	Bodas DS, Patil SJ, Mandale AB, Gangal SA. RF sputter deposition of poly(tetrafluoroethylene) films as masking materials for silicon micromachining. J Appl Polym Sci 2003. [DOI: 10.1002/app.13191] [Citation(s) in RCA: 2] [Impact Index Per Article: 0.1] [Reference Citation Analysis] [What about the content of this article? (0)] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/10/2022]

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(The first 100,000 artilces are displayed in RCA.)