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Lee SH, Lee KM, Lee SW. Influences of Process Temperature on a Phase of Ga 2 O 3 Thin Films Grown by Atomic Layer Deposition on Sapphire. B KOREAN CHEM SOC 2020. [DOI: 10.1002/bkcs.12135] [Citation(s) in RCA: 3] [Impact Index Per Article: 0.6] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 01/12/2023]
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