Structural Changes of Hierarchically Nanoporous Organosilica/Silica Hybrid Materials by Pseudomorphic Transformation

Wafer-Scale Fabrication of Hierarchically Porous Silicon and Silica by Active Nanoparticle-Assisted Chemical Etching and Pseudomorphic Thermal Oxidation

Many biological materials exhibit a multiscale porosity with small, mostly nanoscale pores as well as large, macroscopic capillaries to simultaneously achieve optimized mass transport capabilities and lightweight structures with large inner surfaces. Realizing such a hierarchical porosity in artificial materials necessitates often sophisticated and expensive top-down processing that limits scalability. Here, an approach that combines self-organized porosity based on metal-assisted chemical etching (MACE) with photolithographically induced macroporosity for the synthesis of single-crystalline silicon with a bimodal pore-size distribution is presented, i.e., hexagonally arranged cylindrical macropores with 1 µm diameter separated by walls that are traversed by pores 60 nm across. The MACE process is mainly guided by a metal-catalyzed reduction-oxidation reaction, where silver nanoparticles (AgNPs) serve as the catalyst. In this process, the AgNPs act as self-propelled particles that are constantly removing silicon along their trajectories. High-resolution X-ray imaging and electron tomography reveal a resulting large open porosity and inner surface for potential applications in high-performance energy storage, harvesting and conversion or for on-chip sensorics and actuorics. Finally, the hierarchically porous silicon membranes can be transformed structure-conserving by thermal oxidation into hierarchically porous amorphous silica, a material that could be of particular interest for opto-fluidic and (bio-)photonic applications due to its multiscale artificial vascularization.

Structural Changes of Hierarchically Nanoporous Organosilica/Silica Hybrid Materials by Pseudomorphic Transformation

Herein, it is reported how pseudomorphic transformation of divinylbenzene (DVB)-bridged organosilica@controlled pore glasses (CPG) offers the possibility to generate hierarchically porous organosilica/silica hybrid materials. CPG is utilized to provide granular shape/size and macroporosity and the macropores of the CPG is impregnated with organosilica phase, forming hybrid system. By subsequent pseudomorphic transformation, an ordered mesopore phase is generated while maintaining the granular shape and macroporosity of the CPG. Surface areas and mesopore sizes in the hierarchical structure are tunable by the choice of the surfactant and transformation time. Two-dimensional magic angle spinning (MAS) NMR spectroscopy demonstrated that micellar-templating affects both organosilica and silica phases and pseudomorphic transformation induces phase transition. A double-layer structure of separate organosilica and silica layers is established for the impregnated material, while a single monophase consisting of randomly distributed T and Q silicon species at the molecular level is identified for the pseudomorphic transformed materials.