Azopolymer-Based Nanoimprint Lithography: Recent Developments in Methodology and Applications

UV-assisted nanoimprint lithography: the impact of the loading effect in silicon on nanoscale patterns of metalens

This work studies the impact of the silicon (Si) loading effect induced by deep reactive ion etching (DRIE) of silicon master molds on the UV-nanoimprint lithography (NIL) patterning of nanofeatures. The silicon molds were patterned with metasurface features with widths varying from 270 to 60 nm. This effect was studied by focus ion beam scanning electron microscopy (FIB-SEM) and atomic force microscopy (AFM). The Si loading etching effect is characterized by the variation of pattern feature depth concerning feature sizes because smaller features tend to etch more slowly than larger ones due to etchants being more difficult to pass through the smaller hole and byproducts being harder to diffuse out too. Thus, the NIL results obtained from the Si master mold contain different pattern geometries concerning pattern quality and residual photoresist layer thickness. The obtained results are pivotal for NIL for fabricating devices with various geometrical nanostructures as the research field moves towards commercial applications.

Photoresponsive Spiropyran and DEGMA-Based Copolymers with Photo-Switchable Glass Transition Temperatures

Herein, novel photoresponsive spiropyran (SP)-based P(DEGMA-co-SpMA) copolymers with variable percentages of SP fractions are synthesized. The SP group present in these polymers exhibited the abilities of reversible photoisomerism. Their photoresponsive, structural, and thermal properties have been investigated and compared using various characterization techniques. These light-responsive copolymers are found to exhibit photoswitchable glass transition temperature (Tg ), high thermal stability (Td > 250°C), instant photochromism as well as fluorescence upon exposure to UV light. It is demonstrated that the Tg of these synthesized polymers increased when irradiated with UV light (λ = 365 nm), as a consequence of the photoisomerization of incorporated SP groups into their merocyanine form. This increase in Tg is attributed to an increase in polarity and a decrease in the overall entropy of the polymeric system when it switches from the ring-closed SP form (less-ordered state) to the ring-opened merocyanine form (more-ordered state). Therefore, such polymers with a unique feature of phototunable glass transition temperatures provide the possibility to be integrated into functional materials for various photoresponsive applications.

Surface Morphing of Azopolymers toward Advanced Anticounterfeiting Enabled by a Two-Step Method: Light Writing and Then Reading in Liquid

Surface morphing of organic materials is necessary for advances in semiconductor processing, optical gratings, anticounterfeiting etc., but it is still challenging, especially for its fundamental explanation and further applications like advanced anticounterfeiting. Here, we report one strategy to acquire surface deformation of the liquid-crystalline azopolymer film using a two-step method: selective photoisomerization of azopolymers and then solvent development. In the first step, surface tension of the polymer film can be patterned by the selective photoisomerization of azopolymers, and then in the second step, the flowing solvent drags the underlying polymer to transport, leading to the formation of surface deformation. Interestingly, the direction of mass transport is opposite to the traditional Marangoni flow, and the principle of solvents' choice is the matching of surface tensions between the azopolymer and the solvent. The two-step method shows characteristics of efficient surface morphing, which could be applied in advanced anticounterfeiting by the way of photomask-assistant information writing or microscale direct writing, and then reading in a specific liquid environment. This paves a new way for understanding the mechanism of mass transport toward numerous unprecedented applications using various photoresponsive materials.

The Impact of the Azo-Chromophore Sort on the Features of the Supramolecular Azopolyimide Films Desired to Be Used as Substrates for Flexible Electronics

High-performance supramolecular polyimide systems were synthesized via a simple and innovative approach using two types of azo-chromophores, leading to concomitant special properties: high thermostability, the ability to be processed in the form of films with high flexibility, adequate morphological features, and good structuring capacity via phase mask ultraviolet (UV) laser irradiation, induced by the presence of the azo groups (-N=N-). The dimension and the anisotropy degree of the micro/nano patterns obtained on the surface of the flexible films (determined by atomic force microscopy) depend on the azo-dye type used in the supramolecular azopolyimide synthesis, which were higher when the azo-chromophore containing a -cyano group (-C≡N) was used. The molecular dynamics method, an excellent tool for an in-depth examination of the intermolecular interactions, was used to explain the morphological aspects. Energetic, dynamic and structural parameters were calculated for the two systems containing azo-chromophores, as well as for the pristine polymer system. It was highlighted that the van der Waals forces make a major contribution to the intermolecular interactions. The results from the combination of the dynamic analysis and the concentration profile explain the better mobility of the polyimide chains with a maximum content of azo groups in the cis configuration compared to the other systems. Taking all these data into account, the surfaces of the films can be tuned as required for the proposed applications, namely as substrates for flexible electronis.

Mechanically mutable polymer enabled by light

Human skin is a remarkable example of a biological material that displays unique mechanical characters of both soft elasticity and stretchability. However, mimicking these features has been absent in photoresponsive soft matters. Here, we present one synthetic ABA-type triblock copolymer consisting of polystyrene as end blocks and one photoresponsive azopolymer as the middle block, which is stiffness at room temperature and shows a phototunable transition to soft elastics athermally. We have synthesized an elastics we term "photoinduced soft elastomer," where the photo-evocable soft midblock of azopolymer and the glassy polystyrene domains act as elastic matrix and physical cross-linking junctions, respectively. On the basis of the photoswitchable transformation between stiffness and elasticity at room temperature, we demonstrated precise control over nanopatterns on nonplanar substrates especially adaptable in the human skin and fabrication of packaged perovskite solar cells, enabling the simple, human-friendly, and controllable approach to be promising for mechanically adaptable soft photonic and electronic packaging applications.

Ag metal interconnect wires formed by pseudoplastic nanoparticles fluid imprinting lithography with microwave assistant sintering

Nanoimprint technology has the advantages of low cost, high precision, high fidelity and high yield. The metal nanoparticle fluid is non-Newtonian fluid, which is used as the imprint transfer medium to realize high fidelity of pattern because of its shear thinning effect. In order to functionalize the metal nanoparticles microstructure, the subsequent sintering step is required to form a metal interconnect wire. Metal interconnect wire with fewer grain boundaries and fewer holes have excellent mechanical and electronic properties. In this paper, the pseudoplastic metal nanoparticle fluid was formed by Ag nanoparticle and precursor solution, and then the thermal diffusion process was completed by microwave sintering after interconnects were embossed. The influence of microwave and thermal atmosphere on the microstructure and performance of Ag Interconnect wires was analyzed and discussed, and the Ag Interconnect wires performance was determined under the influence of time and temperature parameters. In our experiments, the interconnects after microwave sintering can achieve 39% of the conductivity of bulk silver. The microwave sintering module might be integrated as the heat treatment module of the metal micro/nano pattern directly imprint lithography.

Molecular Solar Thermal Systems towards Phase Change and Visible Light Photon Energy Storage

Molecular solar thermal (MOST) systems have attracted tremendous attention for solar energy conversion and storage, which can generate high-energy metastable isomers upon capturing photon energy, and release the stored energy as heat on demand during back conversion. However, the pristine molecular photoswitches are limited by low storage energy density and UV light photon energy storage. Recently, numerous pioneering works have been focused on the development of MOST systems towards phase change (PC) and visible light photon energy storage to increase their properties. On the one hand, the strategy of simultaneously capturing isomerization enthalpy and PC energy between solid and liquid can not only offer high latent heat, but also promote the development of sustainable energy systems. On the other hand, the efficient photon energy storage in the visible light range opens a tremendously fascinating avenue to fabricate MOST systems powered under natural sunlight. Here, the recent advances of MOST systems towards PC and visible light photon energy storage are systematically summarized, the most promising advantages and current challenges are analyzed, and emerging strategies and future research directions are proposed.

Direct Color Observation of Light-Driven Molecular Conformation-Induced Stress

Although usually complex to handle, nanomechanical sensors are exceptional, label-free tools for monitoring molecular conformational changes, which makes them of paramount importance in understanding biomolecular interactions. Herein, a simple and inexpensive mechanical imaging approach based on low-stiffness cantilevers with structural coloration (mechanochromic cantilevers (MMC)) is demonstrated, able to monitor and quantify molecular conformational changes with similar sensitivity to the classical optical beam detection method of cantilever-based sensors (≈4.6 × 10^-3  N m^-1 ). This high sensitivity is achieved by using a white light and an RGB camera working in the reflection configuration. The sensor performance is demonstrated by monitoring the UV-light induced reversible conformational changes of azobenzene molecules coating. The trans-cis isomerization of the azobenzene molecules induces a deflection of the cantilevers modifying their diffracted color, which returns to the initial state by cis-trans relaxation. Interestingly, the mechanical imaging enables a simultaneous 2D mapping of the response thus enhancing the spatial resolution of the measurements. A tight correlation is found between the color output and the cantilever's deflection and curvature angle (sensitivities of 5 × 10^-3  Hue µm^-1 and 1.5 × 10^-1  Hue (°)^-1 ). These findings highlight the suitability of low-stiffness MMC as an enabling technology for monitoring molecular changes with unprecedented simplicity, high-throughput capability, and functionalities.

Directional mass transfer of azo molecular glass microsphere induced by polarized light in aqueous immersion media

Photoinduced mass transfer of azo polymer and azo molecular glass has been intensively investigated under various light irradiation conditions simply using air as the ambient environment. In this work, in order to understand the effects of the surrounding medium on the light-induced process, azo molecular glass microspheres adhered on a substrate were immersed in water and different aqueous solutions, and their mass transfer behavior was investigated by irradiation with linearly polarized light. The microspheres in the aqueous media showed significant deformation through directional mass transfer upon light irradiation and transformed into a series of shape-anisotropic particles as revealed by microscopic observations. Compared with their counterparts upon light irradiation in air, the particles immersed in the aqueous media exhibited larger elongation parallel to the substrate and higher shape anisotropy. Optical simulation showed that this was caused by the alteration of the direction of the electric vibration of the refracted light at the medium–microsphere interface, which controlled the mass transfer behavior. On the other hand, the viscosity of the aqueous media showed no effect on the mass transfer process induced by the irradiation. The photo-thermal effect on the mass transfer behavior was ruled out as the thermal dissipation through a liquid is much more efficient than that through air. On the basis of this, this methodology was also successfully employed in the photo-fabrication of anisotropic submicron-sized periodic structures in aqueous medium. These observations can supply deep understanding of this fascinating process induced by polarized light and extend the scope of its applications.

Directional mass transfer of azo molecular glass microspheres is comprehensively investigated upon polarized light irradiation in various aqueous immersion media, and the key factors to influence mass transfer and shape deformation are elucidated.