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Gaur R, Mishra L, Siddiqi MA, Atakan B. Ruthenium complexes as precursors for chemical vapor-deposition (CVD). RSC Adv 2014. [DOI: 10.1039/c4ra04701j] [Citation(s) in RCA: 18] [Impact Index Per Article: 1.8] [Reference Citation Analysis] [Abstract] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/21/2022] Open
Abstract
The progress in precursor chemistry for the chemical vapor deposition of ruthenium containing thin films is reviewed.
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Affiliation(s)
- Ruchi Gaur
- Department of Chemistry
- Faculty of Science
- Banaras Hindu University
- Varanasi-221005, India
| | - Lallan Mishra
- Department of Chemistry
- Faculty of Science
- Banaras Hindu University
- Varanasi-221005, India
| | - M. Aslam Siddiqi
- Thermodynamics
- IVG
- Faculty of Engineering, and CeNIDE
- University of Duisburg Essen
- 47057 Duisburg, Germany
| | - Burak Atakan
- Thermodynamics
- IVG
- Faculty of Engineering, and CeNIDE
- University of Duisburg Essen
- 47057 Duisburg, Germany
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Tao X, Shen KC, Wang YL, Shen YZ. Lewis-Base Stabilized N-Silver(I) Succinimide Complexes: Synthesis, Crystal Structures and Their Use as CVD-Precursors. Z Anorg Allg Chem 2011. [DOI: 10.1002/zaac.201100072] [Citation(s) in RCA: 9] [Impact Index Per Article: 0.7] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/06/2022]
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3
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Tuchscherer A, Shen Y, Jakob A, Mothes R, Al-Anber M, Walfort B, Rüffer T, Frühauf S, Ecke R, Schulz SE, Gessner T, Lang H. Lewis-base copper(I) formates: Synthesis, reaction chemistry, structural characterization and their use as spin-coating precursors for copper deposition. Inorganica Chim Acta 2011. [DOI: 10.1016/j.ica.2010.05.048] [Citation(s) in RCA: 13] [Impact Index Per Article: 1.0] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 10/19/2022]
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Jakob A, Rüffer T, Ecorchard P, Walfort B, Körbitz K, Frühauf S, Schulz S, Gessner T, Lang H. Phosphane Copper(I) Dicarboxylates: Synthesis and Their Potential Use as Precursors for the Spin-coating Process in the Deposition of Copper. Z Anorg Allg Chem 2010. [DOI: 10.1002/zaac.201000082] [Citation(s) in RCA: 17] [Impact Index Per Article: 1.2] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/06/2022]
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Jakob A, Rüffer T, Schmidt H, Djiele P, Körbitz K, Ecorchard P, Haase T, Kohse-Höinghaus K, Frühauf S, Wächtler T, Schulz S, Gessner T, Lang H. Disilver(I) Coordination Complexes: Synthesis, Reaction Chemistry, and Their Potential Use in CVD and Spin-Coating Processes for Silver Deposition. Eur J Inorg Chem 2010. [DOI: 10.1002/ejic.201000159] [Citation(s) in RCA: 17] [Impact Index Per Article: 1.2] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/06/2022]
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6
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Investigation of the solution behavior of tri-n-butylphosphine copper(I) and silver(I) acetates using 31P{1H} NMR spectroscopy. Inorganica Chim Acta 2010. [DOI: 10.1016/j.ica.2009.12.027] [Citation(s) in RCA: 19] [Impact Index Per Article: 1.4] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/19/2022]
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Mothes R, Rüffer T, Shen Y, Jakob A, Walfort B, Petzold H, Schulz SE, Ecke R, Gessner T, Lang H. Phosphite copper(i) trifluoroacetates [((RO)3P)mCuO2CCF3] (m = 1, 2, 3): synthesis, solid state structures and their potential use as CVD precursors. Dalton Trans 2010; 39:11235-47. [DOI: 10.1039/c0dt00347f] [Citation(s) in RCA: 16] [Impact Index Per Article: 1.1] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/21/2022]
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McCain MN, Schneider S, Salata MR, Marks TJ. Tris(phosphino)borato Silver(I) Complexes as Precursors for Metallic Silver Aerosol-Assisted Chemical Vapor Deposition. Inorg Chem 2008; 47:2534-42. [DOI: 10.1021/ic701852x] [Citation(s) in RCA: 29] [Impact Index Per Article: 1.8] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/30/2022]
Affiliation(s)
- Matthew N. McCain
- Department of Chemistry and the Materials Research
Center, Northwestern University, 2145, Sheridan Road, Evanston, Illinois
60208-3113
| | - Sven Schneider
- Department of Chemistry and the Materials Research
Center, Northwestern University, 2145, Sheridan Road, Evanston, Illinois
60208-3113
| | - Michael R. Salata
- Department of Chemistry and the Materials Research
Center, Northwestern University, 2145, Sheridan Road, Evanston, Illinois
60208-3113
| | - Tobin J. Marks
- Department of Chemistry and the Materials Research
Center, Northwestern University, 2145, Sheridan Road, Evanston, Illinois
60208-3113
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Lang H, Shen Y, Rüffer T, Walfort B. Phosphane copper(I) formate complexes stabilized by formic acid and acetic acid through H⋯O⋯H bridges. Inorganica Chim Acta 2008. [DOI: 10.1016/j.ica.2007.06.028] [Citation(s) in RCA: 15] [Impact Index Per Article: 0.9] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/24/2022]
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Lysenkov D, Engstler J, Dangwal A, Popp A, Müller G, Schneider JJ, Janardhanan VM, Deutschmann O, Strauch P, Ebert V, Wolfrum J. Nonaligned carbon nanotubes anchored on porous alumina: formation, process modeling, gas-phase analysis, and field-emission properties. SMALL (WEINHEIM AN DER BERGSTRASSE, GERMANY) 2007; 3:974-85. [PMID: 17514768 DOI: 10.1002/smll.200600595] [Citation(s) in RCA: 2] [Impact Index Per Article: 0.1] [Reference Citation Analysis] [Abstract] [MESH Headings] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 05/15/2023]
Abstract
We have developed a chemical vapor deposition (CVD) process for the catalytic growth of carbon nanotubes (CNTs), anchored in a comose-type structure on top of porous alumina substrates. The mass-flow conditions of precursor and carrier gases and temperature distributions in the CVD reactor were studied by transient computational fluid dynamic simulation. Molecular-beam quadrupole mass spectroscopy (MB-QMS) has been used to analyze the gas phase during ferrocene CVD under reaction conditions (1073 K) in the boundary layer near the substrate. Field-emission (FE) properties of the nonaligned CNTs were measured for various coverages and pore diameters of the alumina. Samples with more dense CNT populations provided emitter-number densities up to 48,000 cm(-2) at an electric field of 6 V microm(-1). Samples with fewer but well-anchored CNTs in 22-nm pores yielded the highest current densities. Up to 83 mA cm(-2) at 7 V microm(-1) in dc mode and more than 200 mA cm(-2) at 11 V microm(-1) in pulsed diode operation have been achieved from a cathode size of 24 mm2.
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Affiliation(s)
- Dmitry Lysenkov
- Bergische Universität Wuppertal, Fachbereich C Abt. Physik, 42097 Wuppertal, Germany
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Jakob A, Schmidt H, Djiele P, Shen Y, Lang H. Phosphane/phosphite silver(I) carboxylates as CVD precursors. Mikrochim Acta 2006. [DOI: 10.1007/s00604-006-0592-z] [Citation(s) in RCA: 14] [Impact Index Per Article: 0.8] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 10/24/2022]
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Schmidt H, Jakob A, Haase T, Kohse-Höinghaus K, Schulz SE, Wächtler T, Gessner T, Lang H. nBu3P-Silber(I)-β-Diketonate: Synthese, Gasphasenuntersuchungen und Verwendung als CVD-Precursoren. Z Anorg Allg Chem 2005. [DOI: 10.1002/zaac.200500143] [Citation(s) in RCA: 13] [Impact Index Per Article: 0.7] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/08/2022]
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Vehlow K, Köhler K, Blechert S, Dechert S, Meyer F. Trialkoxysilyl-Functionalized Silver(I) Carboxylates: New Building Blocks for the Synthesis of Immobilizable and Immobilized Homogeneous Catalysts. Eur J Inorg Chem 2005. [DOI: 10.1002/ejic.200500082] [Citation(s) in RCA: 18] [Impact Index Per Article: 0.9] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/10/2022]
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Haase T, Kohse-Höinghaus K, Bahlawane N, Djiele P, Jakob A, Lang H. CVD with Tri-nbutylphosphine Silver(I) Complexes: Mass Spectrometric Investigations and Depositions. ACTA ACUST UNITED AC 2005. [DOI: 10.1002/cvde.200406339] [Citation(s) in RCA: 24] [Impact Index Per Article: 1.3] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/11/2022]
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Chi Y, Lay E, Chou TY, Song YH, Carty AJ. Deposition of Silver Thin Films Using the Pyrazolate Complex [Ag(3,5-(CF3)2C3HN2)]3. ACTA ACUST UNITED AC 2005. [DOI: 10.1002/cvde.200406351] [Citation(s) in RCA: 34] [Impact Index Per Article: 1.8] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/05/2022]
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Piszczek P, Sz?yk E, Chaberski M, Taeschner C, Leonhardt A, Ba?a W, Bartkiewicz K. Characterization of Silver Trimethylacetate Complexes with Tertiary Phosphines as CVD Precursors of Thin Silver Films. ACTA ACUST UNITED AC 2005. [DOI: 10.1002/cvde.200406323] [Citation(s) in RCA: 30] [Impact Index Per Article: 1.6] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/11/2022]
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