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For: Cho W, An KS, Chung TM, Kim C, So BS, You YH, Hwang JH, Jung D, Kim Y. ALD of Hafnium Dioxide Thin Films Using the New Alkoxide Precursor Hafnium 3-Methyl-3-pentoxide, Hf(mp)4. ACTA ACUST UNITED AC 2006. [DOI: 10.1002/cvde.200506458] [Citation(s) in RCA: 13] [Impact Index Per Article: 0.7] [Reference Citation Analysis] [What about the content of this article? (0)] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/08/2022]
Number Cited by Other Article(s)
1
Atomic Layer Deposition of Groups 4 and 5 Transition Metal Oxide Thin Films: Focus on Heteroleptic Precursors. ACTA ACUST UNITED AC 2014. [DOI: 10.1002/cvde.201400055] [Citation(s) in RCA: 27] [Impact Index Per Article: 2.7] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 12/17/2022]
2
Yoo SH, Choi H, Kim HS, Park BK, Lee SS, An KS, Lee YK, Chung TM, Kim CG. Synthesis and Characterization of Nickel(II) Aminoalkoxides: Application to Molecular Precursors for MOCVD of Ni Thin Films. Eur J Inorg Chem 2011. [DOI: 10.1002/ejic.201001132] [Citation(s) in RCA: 17] [Impact Index Per Article: 1.3] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/05/2022]
3
Dezelah CL, Niinistö J, Kukli K, Munnik F, Lu J, Ritala M, Leskelä M, Niinistö L. The Atomic Layer Deposition of HfO2and ZrO2using Advanced Metallocene Precursors and H2O as the Oxygen Source. ACTA ACUST UNITED AC 2008. [DOI: 10.1002/cvde.200806716] [Citation(s) in RCA: 45] [Impact Index Per Article: 2.8] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/10/2022]
4
MacMillan SN, Ludford KT, Tanski JM. Synthesis and optical activity analysis of chiral titanium(IV) sec-butoxide and its group IV analogues. ACTA ACUST UNITED AC 2008. [DOI: 10.1016/j.tetasy.2008.02.008] [Citation(s) in RCA: 8] [Impact Index Per Article: 0.5] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/17/2022]
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