Modification and Resonance Tuning of Optical Microcavities by Atomic Layer Deposition

Nature-inspired functional porous materials for low-concentration biomarker detection

Nanostructuration is a promising tool for enhancing the performance of sensors based on electrochemical transduction. Nanostructured materials allow for increasing the surface area of the electrode and improving the limit of detection (LOD). In this regard, inverse opals possess ideal features to be used as substrates for developing sensors, thanks to their homogeneous, interconnected pore structure and the possibility to functionalize their surface. However, overcoming the insulating nature of conventional silica inverse opals fabricated via sol-gel processes is a key challenge for their application as electrode materials. In this work, colloidal assembly, atomic layer deposition and selective surface functionalization are combined to design conductive inverse opals as an electrode material for novel glucose sensing platforms. An insulating inverse opal scaffold is coated with uniform layers of conducting aluminum zinc oxide and platinum, and subsequently functionalized with glucose oxidase embedded in a polypyrrole layer. The final device can sense glucose at concentrations in the nanomolar range and is not affected by the presence of common interferents gluconolactone and pyruvate. This method may also be applied to different conductive materials and enzymes to generate a new class of highly efficient biosensors.

Collective Coupling of 3D Confined Optical Modes in Monolithic Twin Microtube Cavities Formed by Nanomembrane Origami

We report the monolithic fabrication of twin microtube cavities by a nanomembrane origami method for achieving collective coupling of 3D confined optical modes. Owing to the well-aligned twin geometries, two sets of 3D confined optical modes in twin microtubes are spectrally and spatially matched, by which both the fundamental and higher-order axial modes are respectively coupled with each other. Multiple groups of the coupling modes provide multiple effective channels for energy exchange between coupled microcavities illustrated by the measured spatial optical field distributions. The spectral anticrossing and changing-over features of each group of coupled modes are revealed in experiments and calculations, indicating the occurrence of strong coupling. In addition, the simulated 3D mode profiles of twin microcavities confirm the collective strong coupling behavior, which shows good agreement with experiments. The collective coupling of 3D confined resonant modes promises broad applications in multichannel optical signal processing, nanophotonics, and 3D non-Hermitian systems.

Rolled-up SiO x /SiN x microtubes with an enhanced quality factor for sensitive solvent sensing

The microtubes made through rolling-up of strain-engineered nanomembranes have received growing research attention after their first invention due to the technology's high flexibility, integrability, and versatility. These rolled-up microtubes have been used for a variety of device applications including sensors, batteries and transistors, among others. This paper reports the development of highly sensitive whispering-gallery mode (WGM) chemical sensors based on rolled-up microtube optical microcavities (RUM-OCs). For the first time, such microcavities were batch fabricated through rolling-up of plasma-enhanced chemical vapor deposition (PECVD)-synthesized SiO _x /SiN _x bilayer nanomembranes, which have better optical properties than the conventional electron-beam-deposited SiO/SiO₂ bilayers. Benefiting from the high refractive index (RI) of PECVD-deposited SiN _x , our RUM-OC shows an enhanced quality factor of 880 that is much higher than that (50) of a SiO/SiO₂ RUM-OC with the same dimensions. The developed RUM-OC is used for sensitive WGM solvent sensing, and demonstrate a limit of detection of 10^-4 refractive index unit (RIU), which is 10 times lower than that (10^-3 RIU) of a SiO/SiO₂ RUM-OC.

Integrative optofluidic microcavity with tubular channels and coupled waveguides via two-photon polymerization

Miniaturization of functional devices and systems demands new design and fabrication approaches for lab-on-a-chip application and optical integrative systems. By using a direct laser writing (DLW) technique based on two-photon polymerization (TPP), a highly integrative optofluidic refractometer is fabricated and demonstrated based on tubular optical microcavities coupled with waveguides. Such tubular devices can support high quality factor (Q-factor) up to 3600 via fiber taper coupling. Microtubes with various diameters and wall thicknesses are constructed with optimized writing direction and conditions. Under a liquid-in-tube sensing configuration, a maximal sensitivity of 390 nm per refractive index unit (RIU) is achieved with subwavelength wall thickness (0.5 μm), which offers a detection limit of the devices in the order of 10^-5 RIU. Such tubular microcavities with coupled waveguides underneath present excellent optofluidic sensing performance, which proves that TPP technology can integrate more functions or devices on a chip in one-step formation.

Observation of higher order radial modes in atomic layer deposition reinforced rolled-up microtube ring resonators

We present a detailed investigation of the resonator properties of high-quality rolled-up SiO2 optical microtubes reinforced by atomic layer deposition. The evolution of the resonant modes with increasing film thickness and the transition to a multimode regime, including higher order radial modes, is discussed. Measurements and simulations show that the higher order modes exhibit high optical quality and an increased extension of the evanescent field from the resonator into the surrounding matrix, making them a promising solution for future on-chip sensor applications with increased sensitivity.