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Garg R, Gonuguntla S, Sk S, Iqbal MS, Dada AO, Pal U, Ahmadipour M. Sputtering thin films: Materials, applications, challenges and future directions. Adv Colloid Interface Sci 2024; 330:103203. [PMID: 38820883 DOI: 10.1016/j.cis.2024.103203] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Received: 11/13/2023] [Revised: 05/11/2024] [Accepted: 05/20/2024] [Indexed: 06/02/2024]
Abstract
Sputtering is an effective technique for producing ultrathin films with diverse applications. The review begins by providing an in-depth overview of the background, introducing the early development of sputtering and its principles. Consequently, progress in advancements made in recent decades highlights the renaissance of sputtering as a powerful technology for creating thin films with varied compositions, structures, and properties. For the first time, we have discussed a thorough overview of several sputtered thin film materials based on metal and metal oxide, metal nitride, alloys, carbon, and ceramic-based thin film along with their properties and their applicability in various fields. We further delve into the applications of sputter-coated thin films, specifically emphasizing their relevance in environmental sustainability, energy and electronics, and biomedical fields. We critically examine the recent advancements in developing sputter-coated catalysts for eliminating water pollutants andhydrogen generation. Additionally, the review sheds light on advantages, shortcomings, and future directions for developing sputter-coated thin films utilized in biodegradable metals and alloys with enhanced corrosion resistance and biocompatibility. This review is a comprehensive integration of recent literature, covering diverse sputtering thin film applications. We delve deeply into various material types and emphasize critical analysis of recent advancements, particularly in environmental, energy, and biomedical fields. By offering insights into both advancements and limitations, the review provides a nuanced understanding essential for practical utilization.
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Affiliation(s)
- Renuka Garg
- Department of Chemical and Biological Engineering, American University of Sharjah, Sharjah, PO Box 26666, United Arab Emirates
| | - Spandana Gonuguntla
- Department of Energy & Environmental Engineering, CSIR-Indian Institute of Chemical Technology, Hyderabad 500007, India; Academy of Scientific and Innovative Research (AcSIR), Ghaziabad 201002, India
| | - Saddam Sk
- Department of Energy & Environmental Engineering, CSIR-Indian Institute of Chemical Technology, Hyderabad 500007, India; Academy of Scientific and Innovative Research (AcSIR), Ghaziabad 201002, India
| | - Muhammad Saqlain Iqbal
- Department of Chemistry, COMSATS University Islamabad, Lahore campus, 54000 Lahore, Pakistan
| | - Adewumi Oluwasogo Dada
- Department of Energy & Environmental Engineering, CSIR-Indian Institute of Chemical Technology, Hyderabad 500007, India; Industrial Chemistry Programme, Nanotechnology Laboratory, Department of Physical Sciences, Landmark University, P.M.B.1001, Omu-Aran, Kwara, Nigeria
| | - Ujjwal Pal
- Department of Energy & Environmental Engineering, CSIR-Indian Institute of Chemical Technology, Hyderabad 500007, India; Academy of Scientific and Innovative Research (AcSIR), Ghaziabad 201002, India.
| | - Mohsen Ahmadipour
- Institute of Power Engineering, Universiti Tenaga Nasional, Serdang, Malaysia.
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Hoque MJ, Li L, Ma J, Cha H, Sett S, Yan X, Rabbi KF, Ho JY, Khodakarami S, Suwala J, Yang W, Mohammadmoradi O, Ince GO, Miljkovic N. Ultra-resilient multi-layer fluorinated diamond like carbon hydrophobic surfaces. Nat Commun 2023; 14:4902. [PMID: 37580321 PMCID: PMC10425355 DOI: 10.1038/s41467-023-40229-6] [Citation(s) in RCA: 3] [Impact Index Per Article: 3.0] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Received: 10/28/2022] [Accepted: 07/11/2023] [Indexed: 08/16/2023] Open
Abstract
Seventy percent of global electricity is generated by steam-cycle power plants. A hydrophobic condenser surface within these plants could boost overall cycle efficiency by 2%. In 2022, this enhancement equates to an additional electrical power generation of 1000 TWh annually, or 83% of the global solar electricity production. Furthermore, this efficiency increase reduces CO2 emissions by 460 million tons /year with a decreased use of 2 trillion gallons of cooling water per year. However, the main challenge with hydrophobic surfaces is their poor durability. Here, we show that solid microscale-thick fluorinated diamond-like carbon (F-DLC) possesses mechanical and thermal properties that ensure durability in moist, abrasive, and thermally harsh conditions. The F-DLC coating achieves this without relying on atmospheric interactions, infused lubricants, self-healing strategies, or sacrificial surface designs. Through tailored substrate adhesion and multilayer deposition, we develop a pinhole-free F-DLC coating with low surface energy and comparable Young's modulus to metals. In a three-year steam condensation experiment, the F-DLC coating maintains hydrophobicity, resulting in sustained and improved dropwise condensation on multiple metallic substrates. Our findings provide a promising solution to hydrophobic material fragility and can enhance the sustainability of renewable and non-renewable energy sources.
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Affiliation(s)
- Muhammad Jahidul Hoque
- Department of Mechanical Science and Engineering, University of Illinois, Urbana, IL, USA
| | - Longnan Li
- Department of Mechanical Science and Engineering, University of Illinois, Urbana, IL, USA
- GPL Photonics Laboratory, State Key Laboratory of Luminescence and Applications, Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun, Jilin, 130033, P. R. China
| | - Jingcheng Ma
- Department of Mechanical Science and Engineering, University of Illinois, Urbana, IL, USA
| | - Hyeongyun Cha
- Department of Mechanical Science and Engineering, University of Illinois, Urbana, IL, USA
- Massachusetts Institute of Technology, 77 Massachusetts Avenue, Cambridge, MA, USA
| | - Soumyadip Sett
- Department of Mechanical Science and Engineering, University of Illinois, Urbana, IL, USA
| | - Xiao Yan
- Department of Mechanical Science and Engineering, University of Illinois, Urbana, IL, USA
| | - Kazi Fazle Rabbi
- Department of Mechanical Science and Engineering, University of Illinois, Urbana, IL, USA
| | - Jin Yao Ho
- Department of Mechanical Science and Engineering, University of Illinois, Urbana, IL, USA
| | - Siavash Khodakarami
- Department of Mechanical Science and Engineering, University of Illinois, Urbana, IL, USA
| | | | - Wentao Yang
- Department of Mechanical Science and Engineering, University of Illinois, Urbana, IL, USA
| | - Omid Mohammadmoradi
- Department of Materials Science and Nanoengineering, Sabanci University, Istanbul, Turkey
| | - Gozde Ozaydin Ince
- Department of Materials Science and Nanoengineering, Sabanci University, Istanbul, Turkey
- Sabanci University Nanotechnology Research and Application Center, Istanbul, Turkey
| | - Nenad Miljkovic
- Department of Mechanical Science and Engineering, University of Illinois, Urbana, IL, USA.
- Materials Research Laboratory, University of Illinois, Urbana, IL, USA.
- Department of Electrical and Computer Engineering, University of Illinois, Urbana, IL, USA.
- International Institute for Carbon Neutral Energy Research (WPI-I2CNER), Kyushu University, 744 Motooka, Nishi-ku, Fukuoka, 819-0395, Japan.
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Rao X, Yang J, Chen Z, Yuan Y, Chen Q, Feng X, Qin L, Zhang Y. Tuning C-C sp2/sp3 ratio of DLC films in FCVA system for biomedical application. Bioact Mater 2020; 5:192-200. [PMID: 32110741 PMCID: PMC7033527 DOI: 10.1016/j.bioactmat.2020.02.009] [Citation(s) in RCA: 25] [Impact Index Per Article: 6.3] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Download PDF] [Figures] [Journal Information] [Subscribe] [Scholar Register] [Received: 12/06/2019] [Revised: 02/09/2020] [Accepted: 02/11/2020] [Indexed: 12/27/2022] Open
Abstract
Diamond like carbon (DLC) films with different C-C sp2/sp3 ratios were prepared by tuning the N2 flow rate in a filtered cathodic vacuum arc (FCVA) system. The increase of N2 flow rate facilitated the increase of C-C sp2/sp3 ratio (1.09-2.66), the growth of particle size (0.78-1.58 nm) and the improvement of surface roughness. The SBF immersion results, as well as WCAs (77.57°~71.71°), hemolysis rate (0.14-1.00%) and cytotoxicity level (0) demonstrated that the as-fabricated DLC film was promising for biomedical application. As a result of surface charge effect, the apatite layers formed in the SBF increased with the increase of C-C sp2/sp3 ratio until 1.74 and then showed a tiny decrease during 1.74-2.66. A raise of hemolysis and cytotoxicity was observed when sp2/sp3 ratio was increased. Moreover, a decrease of friction coefficient of Si surface induced by increasing sp2/sp3 ratio was respectively evidenced in ambient air and SBF lubrication environments.
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Affiliation(s)
- Xi Rao
- Key Laboratory of Luminescent and Real-Time Analytical Chemistry (Southwest University), Ministry of Education, School of Materials and Energy, Southwest University, Chongqing, 400715, PR China.,Chongqing Key Laboratory of Soft-Matter Material Chemistry and Function Manufacturing, Southwest University, Chongqing, 400715, PR China
| | - Jihan Yang
- Key Laboratory of Luminescent and Real-Time Analytical Chemistry (Southwest University), Ministry of Education, School of Materials and Energy, Southwest University, Chongqing, 400715, PR China.,Chongqing Key Laboratory of Soft-Matter Material Chemistry and Function Manufacturing, Southwest University, Chongqing, 400715, PR China
| | - Zilin Chen
- Key Laboratory of Luminescent and Real-Time Analytical Chemistry (Southwest University), Ministry of Education, School of Materials and Energy, Southwest University, Chongqing, 400715, PR China.,Chongqing Key Laboratory of Soft-Matter Material Chemistry and Function Manufacturing, Southwest University, Chongqing, 400715, PR China
| | - Yidie Yuan
- Key Laboratory of Luminescent and Real-Time Analytical Chemistry (Southwest University), Ministry of Education, School of Materials and Energy, Southwest University, Chongqing, 400715, PR China.,Chongqing Key Laboratory of Soft-Matter Material Chemistry and Function Manufacturing, Southwest University, Chongqing, 400715, PR China
| | - Qiubing Chen
- Key Laboratory of Luminescent and Real-Time Analytical Chemistry (Southwest University), Ministry of Education, School of Materials and Energy, Southwest University, Chongqing, 400715, PR China.,Chongqing Key Laboratory of Soft-Matter Material Chemistry and Function Manufacturing, Southwest University, Chongqing, 400715, PR China
| | - Xue Feng
- Department of Clinical Laboratory, University-Town Hospital of Chongqing Medical University, Chongqing, 401331, PR China
| | - Lizhao Qin
- Key Laboratory of Luminescent and Real-Time Analytical Chemistry (Southwest University), Ministry of Education, School of Materials and Energy, Southwest University, Chongqing, 400715, PR China
| | - Yongping Zhang
- Key Laboratory of Luminescent and Real-Time Analytical Chemistry (Southwest University), Ministry of Education, School of Materials and Energy, Southwest University, Chongqing, 400715, PR China.,Chongqing Key Laboratory of Soft-Matter Material Chemistry and Function Manufacturing, Southwest University, Chongqing, 400715, PR China
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A Comparative Study in the Tribological Behavior of DLC Coatings Deposited by HiPIMS Technology with Positive Pulses. METALS 2020. [DOI: 10.3390/met10020174] [Citation(s) in RCA: 8] [Impact Index Per Article: 2.0] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 11/17/2022]
Abstract
During the last few decades, diamond-like carbon (DLC) coatings were widely used for tribological applications, being an effective tool for improving the performance and the useful life of different machining tools. Despite its excellent properties, among which stand out a high hardness, a very low friction coefficient, and even an excellent wear resistance, one of the main drawbacks which limits its corresponding industrial applicability is the resultant adhesion in comparison with other commercially available deposition techniques. In this work, it is reported the tribological results of a scratch test, wear resistance, and nanoindentation of ta-C and WC:C DLC coatings deposited by means of a novel high-power impulse magnetron sputtering (HiPIMS) technology with “positive pulses”. The coatings were deposited on 1.2379 tool steel which is of a high interest due to its great and wide industrial applicability. Finally, experimental results showed a considerable improvement in the tribological properties such as wear resistance and adhesion of both types of DLC coatings. In addition, it was also observed that the role of doping with W enables a significant enhancement on the adhesion for extremely high critical loads in the scratch tests.
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Lee JA, Lin CR, Pan PC, Liu CW, Sun AYT. Dramatically enhanced mechanical properties of diamond-like carbon films on polymer substrate for flexible display devices via argon plasma pretreatment. Chem Phys 2020. [DOI: 10.1016/j.chemphys.2019.110551] [Citation(s) in RCA: 5] [Impact Index Per Article: 1.3] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/25/2022]
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Chen C, Ruan S, Bai X, Lin C, Xie C, Lee IS. Patterned iridium oxide film as neural electrode interface: Biocompatibility and improved neurite outgrowth with electrical stimulation. MATERIALS SCIENCE & ENGINEERING. C, MATERIALS FOR BIOLOGICAL APPLICATIONS 2019; 103:109865. [PMID: 31349419 DOI: 10.1016/j.msec.2019.109865] [Citation(s) in RCA: 17] [Impact Index Per Article: 3.4] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Received: 01/24/2019] [Revised: 06/01/2019] [Accepted: 06/03/2019] [Indexed: 01/19/2023]
Abstract
Iridium (Ir) thin film was deposited on patterned titanium substrate by direct-current (DC) magnetron sputtering, and then activated in sulfuric acid (H2SO4) through repetitive potential sweeps to form iridium oxide (IrOx) as neural electrode interface. The resultant IrOx film showed a porous and open morphology with aligned microstructure, exhibited superior electrochemical performance and excellent stability. The IrOx film supported neural stem cells (NSCs) attachment, proliferation and improved processes without causing toxicity. The patterned IrOx films offered a unique system to investigate the synergistic effects of topographical cue and electrical stimulation on neurite outgrowth. Electrical stimulation, when applied through patterned IrOx films, was found to further increase the neurite extension of neuron-like cells and significantly reorient the neurite alignment towards to the direction of stimulation. These results indicate that IrOx film, as electrode-tissue interface is highly stable and biocompatible with excellent electrochemical properties.
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Affiliation(s)
- Cen Chen
- College of Life Sciences and Medicine, Zhejiang Sci-Tech University, Hangzhou 310018, PR China; School of Pharmaceutical Sciences, Wenzhou Medical University, Wenzhou 325035, PR China; Institute of Natural Sciences, Yonsei University, Seoul 03722, Republic of Korea
| | - Shichao Ruan
- College of Life Sciences and Medicine, Zhejiang Sci-Tech University, Hangzhou 310018, PR China
| | - Xue Bai
- College of Life Sciences and Medicine, Zhejiang Sci-Tech University, Hangzhou 310018, PR China
| | - Chenming Lin
- College of Life Sciences and Medicine, Zhejiang Sci-Tech University, Hangzhou 310018, PR China
| | - Chungang Xie
- College of Life Sciences and Medicine, Zhejiang Sci-Tech University, Hangzhou 310018, PR China
| | - In-Seop Lee
- Institute of Natural Sciences, Yonsei University, Seoul 03722, Republic of Korea.
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Kumar M, Piao JX, Jin SB, Lee JH, Tajima S, Hori M, Han JG. Low temperature plasma processing for cell growth inspired carbon thin films fabrication. Arch Biochem Biophys 2016; 605:41-8. [DOI: 10.1016/j.abb.2016.03.026] [Citation(s) in RCA: 22] [Impact Index Per Article: 2.8] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Received: 12/31/2015] [Revised: 03/22/2016] [Accepted: 03/25/2016] [Indexed: 12/17/2022]
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