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Patel DI, Major GH, Jacobsen C, Shah D, Strohmeier BR, Shollenberger D, Bell DS, Argyle MD, Linford MR. Flow-Through Atmospheric Pressure-Atomic Layer Deposition Reactor for Thin-Film Deposition in Capillary Columns. Anal Chem 2022; 94:7483-7491. [PMID: 35579626 DOI: 10.1021/acs.analchem.1c05029] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/30/2022]
Abstract
We demonstrate the development of a new atmospheric pressure-atomic layer deposition(AP-ALD) system to coat the inner walls of capillary columns for gas chromatography (GC). Unlike traditional ALD, this reactor operates at near-atmospheric pressure and addresses the challenges of depositing thin films inside capillaries, which include long pump down times, deposition in high-aspect-ratio materials, and temperature control. We show ALD of alumina in 5 and 12 m capillaries (0.53 mm ID) via sequential half reactions of trimethylaluminum and water. Our system yields pinhole-free, uniform thin films. It includes small witness chambers for witness silicon shards before and after the capillary. An engineering flow/transport analysis of the device is provided. Our ALD alumina thin films are characterized by spectroscopic ellipsometry (SE), X-ray photoelectron spectroscopy, transmission electron microscopy (TEM), and energy-dispersive X-ray spectroscopy. Alumina film growth achieved is 1.4-1.5 Å/cycle, which is consistent with previously reported results. Film thickness measurements by SE on witness shards of silicon and by TEM at both ends of the capillary are in good agreement. A capillary column coated with alumina is used to separate different gases by GC, although the retention times of gases are essentially the same as with an untreated fused silica capillary. This successful deposition of ALD alumina in long capillaries opens the door for other possible ALD coatings, including hybrid organic-inorganic coatings, using the 450+ ALD precursors available today.
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Affiliation(s)
- Dhananjay I Patel
- Department of Chemistry & Biochemistry, Brigham Young University, Provo, Utah 84602, United States
| | - George H Major
- Department of Chemistry & Biochemistry, Brigham Young University, Provo, Utah 84602, United States
| | - Collin Jacobsen
- Department of Chemistry & Biochemistry, Brigham Young University, Provo, Utah 84602, United States
| | - Dhruv Shah
- Department of Chemistry & Biochemistry, Brigham Young University, Provo, Utah 84602, United States
| | - Brian R Strohmeier
- Label and Graphic Materials, Avery Dennison Corporation, North America, 8080 Norton Parkway, Mentor, Ohio 44060, United States
| | - Daniel Shollenberger
- Restek Corporation, 110 Benner Circle, Bellefonte, Pennsylvania 16823, United States
| | - David S Bell
- Restek Corporation, 110 Benner Circle, Bellefonte, Pennsylvania 16823, United States
| | - Morris D Argyle
- Department of Chemical Engineering, Brigham Young University, Provo, Utah 84602, United States
| | - Matthew R Linford
- Department of Chemistry & Biochemistry, Brigham Young University, Provo, Utah 84602, United States
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Zajickova Z, Špánik I. Applications of monolithic columns in gas chromatography and supercritical fluid chromatography. J Sep Sci 2019; 42:999-1011. [DOI: 10.1002/jssc.201801071] [Citation(s) in RCA: 5] [Impact Index Per Article: 1.0] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Received: 10/15/2018] [Revised: 12/10/2018] [Accepted: 12/13/2018] [Indexed: 11/10/2022]
Affiliation(s)
- Zuzana Zajickova
- Department of Physical Sciences; Barry University; Miami Shores FL USA
| | - Ivan Špánik
- Institute of Analytical Chemistry; Faculty of Chemical and Food Technology; Slovak University of Technology; Bratislava Slovakia
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Yusuf K, Badjah-Hadj-Ahmed AY, Aqel A, Aouak T, ALOthman ZA. Zeolitic imidazolate framework-methacrylate composite monolith characterization by inverse gas chromatography. J Chromatogr A 2016; 1443:233-40. [DOI: 10.1016/j.chroma.2016.03.025] [Citation(s) in RCA: 11] [Impact Index Per Article: 1.4] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Received: 01/27/2016] [Revised: 03/02/2016] [Accepted: 03/10/2016] [Indexed: 10/22/2022]
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Korolev AA, Shiryaeva VE, Popova TP, Kanat’eva AY, Kurganov AA. Influence of porogen nature on the kinetic and potential efficiencies of divinylbenzene-based monolithic sorbents in gas chromatography. RUSSIAN JOURNAL OF PHYSICAL CHEMISTRY A 2014. [DOI: 10.1134/s0036024415020144] [Citation(s) in RCA: 1] [Impact Index Per Article: 0.1] [Reference Citation Analysis] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 11/23/2022]
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Kinetic efficiency of polar monolithic capillary columns in high-pressure gas chromatography. J Chromatogr A 2013; 1315:162-6. [DOI: 10.1016/j.chroma.2013.09.051] [Citation(s) in RCA: 8] [Impact Index Per Article: 0.7] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Received: 07/11/2013] [Revised: 09/12/2013] [Accepted: 09/14/2013] [Indexed: 11/19/2022]
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Kanat’eva AY, Korolev AA, Dianov ME, Kurganov AA. Efficiency of monolithic capillary columns in high-pressure gas chromatography. RUSSIAN JOURNAL OF PHYSICAL CHEMISTRY A 2013. [DOI: 10.1134/s0036024413110113] [Citation(s) in RCA: 3] [Impact Index Per Article: 0.3] [Reference Citation Analysis] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 11/23/2022]
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Monolithic column in gas chromatography. Anal Chim Acta 2013; 775:25-40. [DOI: 10.1016/j.aca.2013.02.039] [Citation(s) in RCA: 39] [Impact Index Per Article: 3.5] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Received: 12/03/2012] [Revised: 02/17/2013] [Accepted: 02/24/2013] [Indexed: 11/20/2022]
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Chen Y, Wang Q, Zhang Z, Tang J. Determination of the Solubility Parameter of Ionic Liquid 1-Hexyl-3-methylimidazolium Hexafluorophosphate by Inverse Gas Chromatography. Ind Eng Chem Res 2012. [DOI: 10.1021/ie301924y] [Citation(s) in RCA: 13] [Impact Index Per Article: 1.1] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/29/2022]
Affiliation(s)
- Yali Chen
- Center for Physical and Chemical
Analysis, Xinjiang University, Urumqi 830046,
People's Republic
of China
| | - Qiang Wang
- Center for Physical and Chemical
Analysis, Xinjiang University, Urumqi 830046,
People's Republic
of China
| | - Zhengfang Zhang
- Center for Physical and Chemical
Analysis, Xinjiang University, Urumqi 830046,
People's Republic
of China
| | - Jun Tang
- Center for Physical and Chemical
Analysis, Xinjiang University, Urumqi 830046,
People's Republic
of China
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Nischang I, Teasdale I, Brüggemann O. Porous polymer monoliths for small molecule separations: advancements and limitations. Anal Bioanal Chem 2010; 400:2289-304. [DOI: 10.1007/s00216-010-4579-6] [Citation(s) in RCA: 96] [Impact Index Per Article: 6.9] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Received: 10/15/2010] [Accepted: 12/02/2010] [Indexed: 12/19/2022]
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