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Yeo J, Woo J, Choi S, Kwon K, Lee JK, Kim M. Comprehensive studies of continuous flow reversible addition–fragmentation chain transfer copolymerization and its application for photoimaging materials. Polym Chem 2022. [DOI: 10.1039/d2py00542e] [Citation(s) in RCA: 1] [Impact Index Per Article: 0.5] [Reference Citation Analysis] [Abstract] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 12/25/2022]
Abstract
Thorough studies of RAFT copolymerization in a continuous flow to gain deeper insights into kinetics, reactivity, and applicability were conducted with monomers and solvents utilizable for chemically amplified resist systems.
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Affiliation(s)
- Jiyeong Yeo
- Department of Chemistry and Chemical Engineering, Inha University, Incheon 22212, Republic of Korea
| | - Jihoon Woo
- Program in Environment and Polymer Engineering, Inha University, Incheon 22212, Republic of Korea
| | - Seungyeon Choi
- Department of Chemistry and Chemical Engineering, Inha University, Incheon 22212, Republic of Korea
| | - Kiyoung Kwon
- Program in Environment and Polymer Engineering, Inha University, Incheon 22212, Republic of Korea
| | - Jin-Kyun Lee
- Program in Environment and Polymer Engineering, Inha University, Incheon 22212, Republic of Korea
- Department of Polymer Science and Engineering, Inha University, Incheon 22212, Republic of Korea
| | - Myungwoong Kim
- Department of Chemistry and Chemical Engineering, Inha University, Incheon 22212, Republic of Korea
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Marić M, Seok J, Métafiot A, Wylie K. Nitroxide-mediated polymerization of adamantyl-functional methacrylates for 193 nm photoresists. CAN J CHEM ENG 2016. [DOI: 10.1002/cjce.22726] [Citation(s) in RCA: 4] [Impact Index Per Article: 0.5] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/09/2022]
Affiliation(s)
- Milan Marić
- Department of Chemical Engineering, McGill Institute of Advanced Materials (MIAM), Centre for Self-Assembled Chemical Structures (CSACS); McGill University, 3610 University Street; Montreal QC H3A 0C5 Canada
| | - Juliana Seok
- Department of Chemical Engineering, McGill Institute of Advanced Materials (MIAM), Centre for Self-Assembled Chemical Structures (CSACS); McGill University, 3610 University Street; Montreal QC H3A 0C5 Canada
| | - Adrien Métafiot
- Department of Chemical Engineering, McGill Institute of Advanced Materials (MIAM), Centre for Self-Assembled Chemical Structures (CSACS); McGill University, 3610 University Street; Montreal QC H3A 0C5 Canada
| | - Kevin Wylie
- Department of Chemical Engineering, McGill Institute of Advanced Materials (MIAM), Centre for Self-Assembled Chemical Structures (CSACS); McGill University, 3610 University Street; Montreal QC H3A 0C5 Canada
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