Boichot R, Coudurier N, Mercier F, Claudel A, Baccar N, Milet A, Blanquet E, Pons M. CFD modeling of the high-temperature HVPE growth of aluminum nitride layers on c-plane sapphire: from theoretical chemistry to process evaluation.
Theor Chem Acc 2013. [DOI:
10.1007/s00214-013-1419-8]
[Citation(s) in RCA: 12] [Impact Index Per Article: 1.1] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/29/2022]