Performance of SEM scintillation detector evaluated by modulation transfer function and detective quantum efficiency function

Comparison of photon transport efficiency in simple scintillation electron detector configurations for scanning electron microscope

The purpose of this paper is to find some general rules for the design of robust scintillation electron detectors for a scanning electron microscope (SEM) that possesses an efficient light-guiding (LG) system. The paper offers some general instructions on how to avoid the improper design of highly inefficient LG configurations of the detectors. Attention was paid to the relevant optical properties of the scintillator, light guide, and other components used in the LG part of the scintillation detector. Utilizing the optical properties of the detector components, 3D Monte Carlo (MC) simulations of photon transport efficiency in the simple scintillation detector configurations were performed using the computer application called SCIUNI to assess shapes and dimensions of the LG part of the detector. The results of the simulation of both base-guided signal (BGS) configurations for SE detection and edge-guided signal (EGS) configurations for BSE detection are presented. It is demonstrated that the BGS configuration with a matted disc scintillator exit side connected to the cylindrical light guide without optical cement is almost always a sufficiently efficient system with a mean LG efficiency of about 20%. It is simulated that poorly designed EGS strip configurations have an extremely low mean LG efficiency of only 0.01%, which can significantly reduce detector performance. On the other hand, no simple nonoptimized EGS configuration with a light guide widening to a circular or square profile, with a polished cemented scintillator and with an indispensable hole in it has a mean LG efficiency lower than 6.5%.

Overview of S(T)EM electron detectors with garnet scintillators: Some potentials and limits

The paper is focused on a complete configuration and design of a scintillation electron detector in scanning electron and/or scanning transmission electron microscopes (S(T)EM) with garnet scintillators. All processes related to the scintillator and light guide were analyzed. In more detail, excitation electron trajectories and absorbed energy distributions, efficiencies and kinetics of scintillators, as well as the influence of their anti-charging coatings and their substrates, assigned optical properties, and light guide efficiencies of different configurations were presented and discussed. The results indicate problems with low-energy detection below 1 keV when the scandium conductive coating with a thickness of only 3 nm must be used to allow electron penetration without significant losses. It was shown that the short rise and decay time and low afterglow of LuGdGaAG:Ce liquid-phase epitaxy garnet film scintillators guarantee a strong modulation transfer function of the entire imaging system resulting in a contrast transfer ability up to 0.6 lp/pixel. Small film scintillator thicknesses were found to be an advantage due to the low signal self-absorption. The optical absorption coefficients, refractive indices, and the mirror optical reflectance of materials involved in the light transport to the photomultiplier tube photocathode were investigated. The computer-optimized design SCIUNI application was used to configure the optimized light guide system. It was shown that nonoptimized edge-guided systems possess very poor light guiding efficiency as low as 1%, while even very complex optimized ones can achieve more than 20%.

Prospective scintillation electron detectors for S(T)EM based on garnet film scintillators

The performance of a scintillation electron detector for a scanning electron microscope and/or a scanning transmission electron microscope (S(T)EM) based on new epitaxial garnet film scintillators was explored. The LuGAGG:Ce and LuGAGG:Ce,Mg film scintillators with chemical formula (Ce_0.01 Lu_0.27 Gd_0.74 )_3-w Mg_w (Ga_2.48 Al_2.46 )O₁₂ were prepared and their cathodoluminescence (CL) and optical properties were studied and compared with the properties of current standard bulk single crystal YAG:Ce and YAP:Ce scintillators. More specifically, CL decay characteristics, CL emission spectra, CL intensities, optical absorption coefficients, and the refractive indices of the mentioned scintillators were measured. Furthermore, electron interaction volumes with absorbed energy distributions, photomultiplier (PMT) photocathode matchings, modulation transfer functions (MTF), and the photon transport efficiencies of scintillation detectors with the mentioned scintillators were calculated. A CL decay time for the LuGAGG:Ce,Mg film scintillator as low as 28 ns with an afterglow of only 0.02% at 1 μs after the e-beam excitation was observed. As determined from calculated MTFs, the scintillation detectors with the new film scintillators lose contrast transfer ability above 0.6 lp/pixel, while the currently commonly used YAG:Ce single crystal scintillators already do so above 0.1 lp/pixel. It was also calculated that the new studied film scintillators have an 8% higher photon transfer efficiency, even for a simple disk shape compared with the standard bulk single crystal YAG:Ce scintillator. The studied LuGAGG:Ce,Mg epitaxial garnet film scintillators were evaluated as prospective fast scintillators for electron detectors, not only in S(T)EM but also in other e-beam devices.

GAGG:ce single crystalline films: New perspective scintillators for electron detection in SEM

Single crystal scintillators are frequently used for electron detection in scanning electron microscopy (SEM). We report gadolinium aluminum gallium garnet (GAGG:Ce) single crystalline films as a new perspective scintillators for the SEM. For the first time, the epitaxial garnet films were used in a practical application: the GAGG:Ce scintillator was incorporated into a SEM scintillation electron detector and it showed improved image quality. In order to prove the GAGG:Ce quality accurately, the scintillation properties were examined using electron beam excitation and compared with frequently used scintillators in the SEM. The results demonstrate excellent emission efficiency of the GAGG:Ce single crystalline films together with their very fast scintillation decay useful for demanding SEM applications.