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1
Chanbasha AR, Wee ATS. Surface transient effects in ultralow-energy Cs+ sputtering of Si. SURF INTERFACE ANAL 2007. [DOI: 10.1002/sia.2541] [Citation(s) in RCA: 4] [Impact Index Per Article: 0.2] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/08/2022]
2
Depth resolution studies in SiGe delta-doped multilayers using ultralow-energy Cs[sup +] secondary ion mass spectrometry. ACTA ACUST UNITED AC 2007. [DOI: 10.1116/1.2429671] [Citation(s) in RCA: 7] [Impact Index Per Article: 0.4] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/17/2022]
3
Depth resolution studies in SiGe delta-doped multilayers using ultralow-energy O[sub 2]+] secondary-ion-mass spectrometry. ACTA ACUST UNITED AC 2006. [DOI: 10.1116/1.2167986] [Citation(s) in RCA: 5] [Impact Index Per Article: 0.3] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/17/2022]
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